10/21/2011	8:43:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2011	8:43:53 AM	Recipe started at 8:43 AM
10/21/2011	8:43:53 AM	Helium valve closed
10/21/2011	8:43:53 AM	H2 valve closed
10/21/2011	8:43:53 AM	BCl3 valve closed
10/21/2011	8:43:53 AM	PH3 valve closed
10/21/2011	8:43:53 AM	SiCl4 pre valve closed
10/21/2011	8:43:53 AM	SiCl4 post valve closed
10/21/2011	8:43:53 AM	Main Vac valve closed
10/21/2011	8:43:53 AM	Bypass valve closed
10/21/2011	8:43:53 AM	Bubbler valve closed
10/21/2011	8:43:53 AM	Helium MFC set to  0.000000
10/21/2011	8:43:53 AM	H2 MFC set to  0.000000
10/21/2011	8:43:53 AM	BCl3 MFC set to  0.000000
10/21/2011	8:43:53 AM	PHl3 MFC set to  0.000000
10/21/2011	8:43:53 AM	SiCl4 MFC set to  0.000000
10/21/2011	8:43:53 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:43:53 AM	Tube furnace set to 0
10/21/2011	8:43:56 AM	H2 valve closed
10/21/2011	8:43:56 AM	BCl3 valve closed
10/21/2011	8:43:56 AM	PH3 valve closed
10/21/2011	8:43:56 AM	SiCl4 pre valve closed
10/21/2011	8:43:56 AM	SiCl4 post valve closed
10/21/2011	8:43:56 AM	Main Vac valve closed
10/21/2011	8:43:56 AM	Bypass valve closed
10/21/2011	8:43:56 AM	Bubbler valve closed
10/21/2011	8:43:56 AM	Helium valve opened
10/21/2011	8:43:56 AM	Helium MFC set to  500.000000
10/21/2011	8:43:56 AM	H2 MFC set to  0.000000
10/21/2011	8:43:56 AM	BCl3 MFC set to  0.000000
10/21/2011	8:43:56 AM	PHl3 MFC set to  0.000000
10/21/2011	8:43:56 AM	SiCl4 MFC set to  0.000000
10/21/2011	8:43:56 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:43:57 AM	Tube furnace set to 0
10/21/2011	8:45:03 AM	Helium valve closed
10/21/2011	8:45:03 AM	H2 valve closed
10/21/2011	8:45:03 AM	BCl3 valve closed
10/21/2011	8:45:03 AM	PH3 valve closed
10/21/2011	8:45:03 AM	SiCl4 pre valve closed
10/21/2011	8:45:03 AM	SiCl4 post valve closed
10/21/2011	8:45:03 AM	Main Vac valve closed
10/21/2011	8:45:03 AM	Bypass valve closed
10/21/2011	8:45:03 AM	Bubbler valve closed
10/21/2011	8:45:03 AM	Helium MFC set to  0.000000
10/21/2011	8:45:03 AM	H2 MFC set to  0.000000
10/21/2011	8:45:03 AM	BCl3 MFC set to  0.000000
10/21/2011	8:45:03 AM	PHl3 MFC set to  0.000000
10/21/2011	8:45:03 AM	SiCl4 MFC set to  0.000000
10/21/2011	8:45:03 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:45:03 AM	Tube furnace set to 0
10/21/2011	8:45:04 AM	Run finished at 8:45 AM
10/21/2011	8:45:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2011	8:58:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	8:58:08 AM	Recipe started at 8:58 AM
10/21/2011	8:58:09 AM	Helium valve closed
10/21/2011	8:58:09 AM	H2 valve closed
10/21/2011	8:58:09 AM	BCl3 valve closed
10/21/2011	8:58:09 AM	PH3 valve closed
10/21/2011	8:58:09 AM	SiCl4 pre valve closed
10/21/2011	8:58:09 AM	SiCl4 post valve closed
10/21/2011	8:58:09 AM	Main Vac valve closed
10/21/2011	8:58:09 AM	Bubbler valve closed
10/21/2011	8:58:09 AM	Bypass valve opened
10/21/2011	8:58:09 AM	Helium MFC set to  0.000000
10/21/2011	8:58:09 AM	H2 MFC set to  0.000000
10/21/2011	8:58:09 AM	BCl3 MFC set to  0.000000
10/21/2011	8:58:09 AM	PHl3 MFC set to  0.000000
10/21/2011	8:58:09 AM	SiCl4 MFC set to  0.000000
10/21/2011	8:58:09 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:58:09 AM	Tube furnace set to 0
10/21/2011	8:58:37 AM	Run aborted at 8:58 AM
10/21/2011	8:58:37 AM	Helium valve closed
10/21/2011	8:58:37 AM	H2 valve closed
10/21/2011	8:58:37 AM	BCl3 valve closed
10/21/2011	8:58:37 AM	PH3 valve closed
10/21/2011	8:58:37 AM	SiCl4 pre valve closed
10/21/2011	8:58:37 AM	SiCl4 post valve closed
10/21/2011	8:58:37 AM	Bypass valve closed
10/21/2011	8:58:37 AM	Main Vac valve closed
10/21/2011	8:58:37 AM	Bubbler valve closed
10/21/2011	8:58:37 AM	Helium MFC set to  0.000000
10/21/2011	8:58:37 AM	H2 MFC set to  0.000000
10/21/2011	8:58:37 AM	BCl3 MFC set to  0.000000
10/21/2011	8:58:37 AM	PHl3 MFC set to  0.000000
10/21/2011	8:58:37 AM	SiCl4 MFC set to  0.000000
10/21/2011	8:58:38 AM	Tube furnace set to 0
10/21/2011	8:58:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	8:58:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	8:58:58 AM	Recipe started at 8:58 AM
10/21/2011	8:58:58 AM	Helium valve closed
10/21/2011	8:58:58 AM	H2 valve closed
10/21/2011	8:58:58 AM	BCl3 valve closed
10/21/2011	8:58:58 AM	PH3 valve closed
10/21/2011	8:58:58 AM	SiCl4 pre valve closed
10/21/2011	8:58:58 AM	SiCl4 post valve closed
10/21/2011	8:58:58 AM	Main Vac valve closed
10/21/2011	8:58:58 AM	Bubbler valve closed
10/21/2011	8:58:58 AM	Bypass valve opened
10/21/2011	8:58:58 AM	Helium MFC set to  0.000000
10/21/2011	8:58:58 AM	H2 MFC set to  0.000000
10/21/2011	8:58:58 AM	BCl3 MFC set to  0.000000
10/21/2011	8:58:58 AM	PHl3 MFC set to  0.000000
10/21/2011	8:58:58 AM	SiCl4 MFC set to  0.000000
10/21/2011	8:58:58 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:58:58 AM	Tube furnace set to 0
10/21/2011	8:59:26 AM	Run aborted at 8:59 AM
10/21/2011	8:59:26 AM	Helium valve closed
10/21/2011	8:59:26 AM	H2 valve closed
10/21/2011	8:59:26 AM	BCl3 valve closed
10/21/2011	8:59:26 AM	PH3 valve closed
10/21/2011	8:59:26 AM	SiCl4 pre valve closed
10/21/2011	8:59:26 AM	SiCl4 post valve closed
10/21/2011	8:59:26 AM	Bypass valve closed
10/21/2011	8:59:26 AM	Main Vac valve closed
10/21/2011	8:59:26 AM	Bubbler valve closed
10/21/2011	8:59:26 AM	Helium MFC set to  0.000000
10/21/2011	8:59:26 AM	H2 MFC set to  0.000000
10/21/2011	8:59:26 AM	BCl3 MFC set to  0.000000
10/21/2011	8:59:26 AM	PHl3 MFC set to  0.000000
10/21/2011	8:59:26 AM	SiCl4 MFC set to  0.000000
10/21/2011	8:59:26 AM	Tube furnace set to 0
10/21/2011	8:59:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	8:59:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	8:59:53 AM	Recipe started at 8:59 AM
10/21/2011	8:59:53 AM	Helium valve closed
10/21/2011	8:59:53 AM	H2 valve closed
10/21/2011	8:59:53 AM	BCl3 valve closed
10/21/2011	8:59:53 AM	PH3 valve closed
10/21/2011	8:59:53 AM	SiCl4 pre valve closed
10/21/2011	8:59:53 AM	SiCl4 post valve closed
10/21/2011	8:59:53 AM	Main Vac valve closed
10/21/2011	8:59:53 AM	Bubbler valve closed
10/21/2011	8:59:53 AM	Bypass valve opened
10/21/2011	8:59:53 AM	Helium MFC set to  0.000000
10/21/2011	8:59:53 AM	H2 MFC set to  0.000000
10/21/2011	8:59:53 AM	BCl3 MFC set to  0.000000
10/21/2011	8:59:53 AM	PHl3 MFC set to  0.000000
10/21/2011	8:59:53 AM	SiCl4 MFC set to  0.000000
10/21/2011	8:59:53 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:59:53 AM	Tube furnace set to 0
10/21/2011	9:00:20 AM	Run aborted at 9:00 AM
10/21/2011	9:00:20 AM	Helium valve closed
10/21/2011	9:00:20 AM	H2 valve closed
10/21/2011	9:00:20 AM	BCl3 valve closed
10/21/2011	9:00:20 AM	PH3 valve closed
10/21/2011	9:00:20 AM	SiCl4 pre valve closed
10/21/2011	9:00:20 AM	SiCl4 post valve closed
10/21/2011	9:00:20 AM	Bypass valve closed
10/21/2011	9:00:20 AM	Main Vac valve closed
10/21/2011	9:00:20 AM	Bubbler valve closed
10/21/2011	9:00:20 AM	Helium MFC set to  0.000000
10/21/2011	9:00:20 AM	H2 MFC set to  0.000000
10/21/2011	9:00:20 AM	BCl3 MFC set to  0.000000
10/21/2011	9:00:20 AM	PHl3 MFC set to  0.000000
10/21/2011	9:00:20 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:00:21 AM	Tube furnace set to 0
10/21/2011	9:00:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	9:03:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	9:03:36 AM	Recipe started at 9:03 AM
10/21/2011	9:03:36 AM	Helium valve closed
10/21/2011	9:03:36 AM	H2 valve closed
10/21/2011	9:03:36 AM	BCl3 valve closed
10/21/2011	9:03:36 AM	PH3 valve closed
10/21/2011	9:03:36 AM	SiCl4 pre valve closed
10/21/2011	9:03:36 AM	SiCl4 post valve closed
10/21/2011	9:03:36 AM	Main Vac valve closed
10/21/2011	9:03:36 AM	Bubbler valve closed
10/21/2011	9:03:36 AM	Bypass valve opened
10/21/2011	9:03:36 AM	Helium MFC set to  0.000000
10/21/2011	9:03:36 AM	H2 MFC set to  0.000000
10/21/2011	9:03:36 AM	BCl3 MFC set to  0.000000
10/21/2011	9:03:36 AM	PHl3 MFC set to  0.000000
10/21/2011	9:03:36 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:03:36 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:03:36 AM	Tube furnace set to 0
10/21/2011	9:04:46 AM	Run aborted at 9:04 AM
10/21/2011	9:04:46 AM	Helium valve closed
10/21/2011	9:04:46 AM	H2 valve closed
10/21/2011	9:04:46 AM	BCl3 valve closed
10/21/2011	9:04:46 AM	PH3 valve closed
10/21/2011	9:04:46 AM	SiCl4 pre valve closed
10/21/2011	9:04:46 AM	SiCl4 post valve closed
10/21/2011	9:04:46 AM	Bypass valve closed
10/21/2011	9:04:46 AM	Main Vac valve closed
10/21/2011	9:04:46 AM	Bubbler valve closed
10/21/2011	9:04:46 AM	Helium MFC set to  0.000000
10/21/2011	9:04:46 AM	H2 MFC set to  0.000000
10/21/2011	9:04:46 AM	BCl3 MFC set to  0.000000
10/21/2011	9:04:46 AM	PHl3 MFC set to  0.000000
10/21/2011	9:04:46 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:04:46 AM	Tube furnace set to 0
10/21/2011	9:04:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	9:04:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	9:05:00 AM	Recipe started at 9:04 AM
10/21/2011	9:05:00 AM	Helium valve closed
10/21/2011	9:05:00 AM	H2 valve closed
10/21/2011	9:05:00 AM	BCl3 valve closed
10/21/2011	9:05:00 AM	PH3 valve closed
10/21/2011	9:05:00 AM	SiCl4 pre valve closed
10/21/2011	9:05:00 AM	SiCl4 post valve closed
10/21/2011	9:05:00 AM	Main Vac valve closed
10/21/2011	9:05:00 AM	Bubbler valve closed
10/21/2011	9:05:00 AM	Bypass valve opened
10/21/2011	9:05:00 AM	Helium MFC set to  0.000000
10/21/2011	9:05:00 AM	H2 MFC set to  0.000000
10/21/2011	9:05:00 AM	BCl3 MFC set to  0.000000
10/21/2011	9:05:00 AM	PHl3 MFC set to  0.000000
10/21/2011	9:05:00 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:05:00 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:05:00 AM	Tube furnace set to 0
10/21/2011	9:05:33 AM	Run aborted at 9:05 AM
10/21/2011	9:05:33 AM	Helium valve closed
10/21/2011	9:05:33 AM	H2 valve closed
10/21/2011	9:05:33 AM	BCl3 valve closed
10/21/2011	9:05:33 AM	PH3 valve closed
10/21/2011	9:05:33 AM	SiCl4 pre valve closed
10/21/2011	9:05:33 AM	SiCl4 post valve closed
10/21/2011	9:05:33 AM	Bypass valve closed
10/21/2011	9:05:33 AM	Main Vac valve closed
10/21/2011	9:05:33 AM	Bubbler valve closed
10/21/2011	9:05:33 AM	Helium MFC set to  0.000000
10/21/2011	9:05:33 AM	H2 MFC set to  0.000000
10/21/2011	9:05:33 AM	BCl3 MFC set to  0.000000
10/21/2011	9:05:33 AM	PHl3 MFC set to  0.000000
10/21/2011	9:05:33 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:05:34 AM	Tube furnace set to 0
10/21/2011	9:05:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	9:08:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	9:08:26 AM	Recipe started at 9:08 AM
10/21/2011	9:08:26 AM	Helium valve closed
10/21/2011	9:08:26 AM	H2 valve closed
10/21/2011	9:08:26 AM	BCl3 valve closed
10/21/2011	9:08:26 AM	PH3 valve closed
10/21/2011	9:08:26 AM	SiCl4 pre valve closed
10/21/2011	9:08:26 AM	SiCl4 post valve closed
10/21/2011	9:08:26 AM	Main Vac valve closed
10/21/2011	9:08:26 AM	Bubbler valve closed
10/21/2011	9:08:26 AM	Bypass valve opened
10/21/2011	9:08:26 AM	Helium MFC set to  0.000000
10/21/2011	9:08:26 AM	H2 MFC set to  0.000000
10/21/2011	9:08:26 AM	BCl3 MFC set to  0.000000
10/21/2011	9:08:26 AM	PHl3 MFC set to  0.000000
10/21/2011	9:08:26 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:08:26 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:08:26 AM	Tube furnace set to 0
10/21/2011	9:09:42 AM	Helium valve closed
10/21/2011	9:09:42 AM	H2 valve closed
10/21/2011	9:09:42 AM	BCl3 valve closed
10/21/2011	9:09:42 AM	PH3 valve closed
10/21/2011	9:09:42 AM	SiCl4 pre valve closed
10/21/2011	9:09:42 AM	SiCl4 post valve closed
10/21/2011	9:09:42 AM	Main Vac valve closed
10/21/2011	9:09:42 AM	Bubbler valve closed
10/21/2011	9:09:42 AM	Bypass valve opened
10/21/2011	9:09:42 AM	Helium MFC set to  0.000000
10/21/2011	9:09:42 AM	H2 MFC set to  0.000000
10/21/2011	9:09:42 AM	BCl3 MFC set to  0.000000
10/21/2011	9:09:42 AM	PHl3 MFC set to  0.000000
10/21/2011	9:09:42 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:09:42 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:09:42 AM	Tube furnace set to 0
10/21/2011	9:10:42 AM	Helium valve closed
10/21/2011	9:10:42 AM	H2 valve closed
10/21/2011	9:10:42 AM	BCl3 valve closed
10/21/2011	9:10:42 AM	PH3 valve closed
10/21/2011	9:10:42 AM	SiCl4 pre valve closed
10/21/2011	9:10:42 AM	SiCl4 post valve closed
10/21/2011	9:10:42 AM	Bypass valve closed
10/21/2011	9:10:42 AM	Bubbler valve closed
10/21/2011	9:10:42 AM	Main Vac valve opened
10/21/2011	9:10:42 AM	Helium MFC set to  0.000000
10/21/2011	9:10:42 AM	H2 MFC set to  0.000000
10/21/2011	9:10:42 AM	BCl3 MFC set to  0.000000
10/21/2011	9:10:42 AM	PHl3 MFC set to  0.000000
10/21/2011	9:10:42 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:10:42 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:10:42 AM	Tube furnace set to 0
10/21/2011	9:10:43 AM	Run finished at 9:10 AM
10/21/2011	9:10:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	9:11:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2011	9:12:00 AM	Recipe started at 9:11 AM
10/21/2011	9:12:00 AM	Helium valve closed
10/21/2011	9:12:00 AM	H2 valve closed
10/21/2011	9:12:00 AM	BCl3 valve closed
10/21/2011	9:12:00 AM	PH3 valve closed
10/21/2011	9:12:00 AM	SiCl4 pre valve closed
10/21/2011	9:12:00 AM	SiCl4 post valve closed
10/21/2011	9:12:00 AM	Main Vac valve closed
10/21/2011	9:12:00 AM	Bypass valve closed
10/21/2011	9:12:00 AM	Bubbler valve closed
10/21/2011	9:12:00 AM	Helium MFC set to  0.000000
10/21/2011	9:12:00 AM	H2 MFC set to  0.000000
10/21/2011	9:12:00 AM	BCl3 MFC set to  0.000000
10/21/2011	9:12:00 AM	PHl3 MFC set to  0.000000
10/21/2011	9:12:00 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:12:00 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:12:00 AM	Tube furnace set to 0
10/21/2011	9:12:03 AM	H2 valve closed
10/21/2011	9:12:03 AM	BCl3 valve closed
10/21/2011	9:12:03 AM	PH3 valve closed
10/21/2011	9:12:03 AM	SiCl4 pre valve closed
10/21/2011	9:12:03 AM	SiCl4 post valve closed
10/21/2011	9:12:03 AM	Main Vac valve closed
10/21/2011	9:12:03 AM	Bypass valve closed
10/21/2011	9:12:03 AM	Bubbler valve closed
10/21/2011	9:12:03 AM	Helium valve opened
10/21/2011	9:12:03 AM	Helium MFC set to  500.000000
10/21/2011	9:12:03 AM	H2 MFC set to  0.000000
10/21/2011	9:12:03 AM	BCl3 MFC set to  0.000000
10/21/2011	9:12:03 AM	PHl3 MFC set to  0.000000
10/21/2011	9:12:03 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:12:03 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:12:03 AM	Tube furnace set to 0
10/21/2011	9:12:30 AM	Helium valve closed
10/21/2011	9:12:30 AM	H2 valve closed
10/21/2011	9:12:30 AM	BCl3 valve closed
10/21/2011	9:12:30 AM	PH3 valve closed
10/21/2011	9:12:30 AM	SiCl4 pre valve closed
10/21/2011	9:12:30 AM	SiCl4 post valve closed
10/21/2011	9:12:30 AM	Main Vac valve closed
10/21/2011	9:12:30 AM	Bypass valve closed
10/21/2011	9:12:30 AM	Bubbler valve closed
10/21/2011	9:12:30 AM	Helium MFC set to  0.000000
10/21/2011	9:12:30 AM	H2 MFC set to  0.000000
10/21/2011	9:12:30 AM	BCl3 MFC set to  0.000000
10/21/2011	9:12:30 AM	PHl3 MFC set to  0.000000
10/21/2011	9:12:30 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:12:30 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:12:30 AM	Tube furnace set to 0
10/21/2011	9:12:31 AM	Run finished at 9:12 AM
10/21/2011	9:12:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2011	9:15:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	9:15:47 AM	Recipe started at 9:15 AM
10/21/2011	9:15:47 AM	Helium valve closed
10/21/2011	9:15:47 AM	H2 valve closed
10/21/2011	9:15:47 AM	BCl3 valve closed
10/21/2011	9:15:47 AM	PH3 valve closed
10/21/2011	9:15:47 AM	SiCl4 pre valve closed
10/21/2011	9:15:47 AM	SiCl4 post valve closed
10/21/2011	9:15:47 AM	Main Vac valve closed
10/21/2011	9:15:47 AM	Bubbler valve closed
10/21/2011	9:15:47 AM	Bypass valve opened
10/21/2011	9:15:47 AM	Helium MFC set to  0.000000
10/21/2011	9:15:48 AM	H2 MFC set to  0.000000
10/21/2011	9:15:48 AM	BCl3 MFC set to  0.000000
10/21/2011	9:15:48 AM	PHl3 MFC set to  0.000000
10/21/2011	9:15:48 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:15:48 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:15:48 AM	Tube furnace set to 0
10/21/2011	9:16:57 AM	Helium valve closed
10/21/2011	9:16:57 AM	H2 valve closed
10/21/2011	9:16:57 AM	BCl3 valve closed
10/21/2011	9:16:57 AM	PH3 valve closed
10/21/2011	9:16:57 AM	SiCl4 pre valve closed
10/21/2011	9:16:57 AM	SiCl4 post valve closed
10/21/2011	9:16:57 AM	Main Vac valve closed
10/21/2011	9:16:57 AM	Bubbler valve closed
10/21/2011	9:16:57 AM	Bypass valve opened
10/21/2011	9:16:57 AM	Helium MFC set to  0.000000
10/21/2011	9:16:57 AM	H2 MFC set to  0.000000
10/21/2011	9:16:57 AM	BCl3 MFC set to  0.000000
10/21/2011	9:16:57 AM	PHl3 MFC set to  0.000000
10/21/2011	9:16:57 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:16:57 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:16:57 AM	Tube furnace set to 0
10/21/2011	9:17:57 AM	Helium valve closed
10/21/2011	9:17:57 AM	H2 valve closed
10/21/2011	9:17:57 AM	BCl3 valve closed
10/21/2011	9:17:57 AM	PH3 valve closed
10/21/2011	9:17:57 AM	SiCl4 pre valve closed
10/21/2011	9:17:57 AM	SiCl4 post valve closed
10/21/2011	9:17:57 AM	Bypass valve closed
10/21/2011	9:17:57 AM	Bubbler valve closed
10/21/2011	9:17:57 AM	Main Vac valve opened
10/21/2011	9:17:57 AM	Helium MFC set to  0.000000
10/21/2011	9:17:57 AM	H2 MFC set to  0.000000
10/21/2011	9:17:57 AM	BCl3 MFC set to  0.000000
10/21/2011	9:17:57 AM	PHl3 MFC set to  0.000000
10/21/2011	9:17:57 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:17:57 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:17:58 AM	Tube furnace set to 0
10/21/2011	9:17:59 AM	Run finished at 9:17 AM
10/21/2011	9:17:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	9:18:54 AM	Tube furnace set to 120
10/21/2011	9:32:02 AM	Recipe started at 9:31 AM
10/21/2011	9:32:02 AM	Helium valve closed
10/21/2011	9:32:02 AM	H2 valve closed
10/21/2011	9:32:02 AM	BCl3 valve closed
10/21/2011	9:32:02 AM	PH3 valve closed
10/21/2011	9:32:02 AM	SiCl4 pre valve closed
10/21/2011	9:32:02 AM	SiCl4 post valve closed
10/21/2011	9:32:02 AM	Bypass valve closed
10/21/2011	9:32:02 AM	Bubbler valve closed
10/21/2011	9:32:02 AM	Main Vac valve opened
10/21/2011	9:32:02 AM	Helium MFC set to  0.000000
10/21/2011	9:32:02 AM	H2 MFC set to  0.000000
10/21/2011	9:32:02 AM	BCl3 MFC set to  0.000000
10/21/2011	9:32:02 AM	PHl3 MFC set to  0.000000
10/21/2011	9:32:02 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:32:02 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:32:02 AM	Tube furnace set to 150
10/21/2011	9:32:32 AM	H2 valve closed
10/21/2011	9:32:32 AM	BCl3 valve closed
10/21/2011	9:32:32 AM	PH3 valve closed
10/21/2011	9:32:32 AM	SiCl4 pre valve closed
10/21/2011	9:32:32 AM	SiCl4 post valve closed
10/21/2011	9:32:32 AM	Bypass valve closed
10/21/2011	9:32:32 AM	Bubbler valve closed
10/21/2011	9:32:32 AM	Helium valve opened
10/21/2011	9:32:32 AM	Main Vac valve opened
10/21/2011	9:32:32 AM	Helium MFC set to  20.000000
10/21/2011	9:32:32 AM	H2 MFC set to  0.000000
10/21/2011	9:32:32 AM	BCl3 MFC set to  0.000000
10/21/2011	9:32:32 AM	PHl3 MFC set to  0.000000
10/21/2011	9:32:32 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:32:32 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:32:32 AM	Tube furnace set to 150
10/21/2011	9:33:02 AM	Helium valve closed
10/21/2011	9:33:02 AM	H2 valve closed
10/21/2011	9:33:02 AM	BCl3 valve closed
10/21/2011	9:33:02 AM	PH3 valve closed
10/21/2011	9:33:02 AM	SiCl4 pre valve closed
10/21/2011	9:33:02 AM	SiCl4 post valve closed
10/21/2011	9:33:02 AM	Bypass valve closed
10/21/2011	9:33:02 AM	Bubbler valve closed
10/21/2011	9:33:02 AM	Main Vac valve opened
10/21/2011	9:33:02 AM	Helium MFC set to  0.000000
10/21/2011	9:33:02 AM	H2 MFC set to  0.000000
10/21/2011	9:33:02 AM	BCl3 MFC set to  0.000000
10/21/2011	9:33:02 AM	PHl3 MFC set to  0.000000
10/21/2011	9:33:02 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:33:02 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:33:02 AM	Tube furnace set to 150
10/21/2011	9:33:32 AM	H2 valve closed
10/21/2011	9:33:32 AM	BCl3 valve closed
10/21/2011	9:33:32 AM	PH3 valve closed
10/21/2011	9:33:32 AM	SiCl4 pre valve closed
10/21/2011	9:33:32 AM	SiCl4 post valve closed
10/21/2011	9:33:32 AM	Bypass valve closed
10/21/2011	9:33:32 AM	Bubbler valve closed
10/21/2011	9:33:32 AM	Helium valve opened
10/21/2011	9:33:32 AM	Main Vac valve opened
10/21/2011	9:33:32 AM	Helium MFC set to  20.000000
10/21/2011	9:33:32 AM	H2 MFC set to  0.000000
10/21/2011	9:33:32 AM	BCl3 MFC set to  0.000000
10/21/2011	9:33:32 AM	PHl3 MFC set to  0.000000
10/21/2011	9:33:32 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:33:32 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:33:32 AM	Tube furnace set to 150
10/21/2011	9:34:03 AM	Helium valve closed
10/21/2011	9:34:03 AM	H2 valve closed
10/21/2011	9:34:03 AM	BCl3 valve closed
10/21/2011	9:34:03 AM	PH3 valve closed
10/21/2011	9:34:03 AM	SiCl4 pre valve closed
10/21/2011	9:34:03 AM	SiCl4 post valve closed
10/21/2011	9:34:03 AM	Bypass valve closed
10/21/2011	9:34:03 AM	Bubbler valve closed
10/21/2011	9:34:03 AM	Main Vac valve opened
10/21/2011	9:34:03 AM	Helium MFC set to  0.000000
10/21/2011	9:34:03 AM	H2 MFC set to  0.000000
10/21/2011	9:34:03 AM	BCl3 MFC set to  0.000000
10/21/2011	9:34:03 AM	PHl3 MFC set to  0.000000
10/21/2011	9:34:03 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:34:03 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:34:03 AM	Tube furnace set to 150
10/21/2011	9:34:33 AM	H2 valve closed
10/21/2011	9:34:33 AM	BCl3 valve closed
10/21/2011	9:34:33 AM	PH3 valve closed
10/21/2011	9:34:33 AM	SiCl4 pre valve closed
10/21/2011	9:34:33 AM	SiCl4 post valve closed
10/21/2011	9:34:33 AM	Bypass valve closed
10/21/2011	9:34:33 AM	Bubbler valve closed
10/21/2011	9:34:33 AM	Helium valve opened
10/21/2011	9:34:33 AM	Main Vac valve opened
10/21/2011	9:34:33 AM	Helium MFC set to  20.000000
10/21/2011	9:34:33 AM	H2 MFC set to  0.000000
10/21/2011	9:34:33 AM	BCl3 MFC set to  0.000000
10/21/2011	9:34:33 AM	PHl3 MFC set to  0.000000
10/21/2011	9:34:33 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:34:33 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:34:33 AM	Tube furnace set to 150
10/21/2011	9:35:03 AM	Helium valve closed
10/21/2011	9:35:03 AM	H2 valve closed
10/21/2011	9:35:03 AM	BCl3 valve closed
10/21/2011	9:35:03 AM	PH3 valve closed
10/21/2011	9:35:03 AM	SiCl4 pre valve closed
10/21/2011	9:35:03 AM	SiCl4 post valve closed
10/21/2011	9:35:03 AM	Bypass valve closed
10/21/2011	9:35:03 AM	Bubbler valve closed
10/21/2011	9:35:03 AM	Main Vac valve opened
10/21/2011	9:35:03 AM	Helium MFC set to  0.000000
10/21/2011	9:35:03 AM	H2 MFC set to  0.000000
10/21/2011	9:35:03 AM	BCl3 MFC set to  0.000000
10/21/2011	9:35:03 AM	PHl3 MFC set to  0.000000
10/21/2011	9:35:03 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:35:03 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:35:03 AM	Tube furnace set to 150
10/21/2011	9:35:33 AM	H2 valve closed
10/21/2011	9:35:33 AM	BCl3 valve closed
10/21/2011	9:35:33 AM	PH3 valve closed
10/21/2011	9:35:33 AM	SiCl4 pre valve closed
10/21/2011	9:35:33 AM	SiCl4 post valve closed
10/21/2011	9:35:33 AM	Bypass valve closed
10/21/2011	9:35:33 AM	Bubbler valve closed
10/21/2011	9:35:33 AM	Helium valve opened
10/21/2011	9:35:33 AM	Main Vac valve opened
10/21/2011	9:35:33 AM	Helium MFC set to  20.000000
10/21/2011	9:35:33 AM	H2 MFC set to  0.000000
10/21/2011	9:35:33 AM	BCl3 MFC set to  0.000000
10/21/2011	9:35:33 AM	PHl3 MFC set to  0.000000
10/21/2011	9:35:33 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:35:33 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:35:33 AM	Tube furnace set to 150
10/21/2011	9:36:03 AM	Helium valve closed
10/21/2011	9:36:03 AM	H2 valve closed
10/21/2011	9:36:03 AM	BCl3 valve closed
10/21/2011	9:36:03 AM	PH3 valve closed
10/21/2011	9:36:03 AM	SiCl4 pre valve closed
10/21/2011	9:36:03 AM	SiCl4 post valve closed
10/21/2011	9:36:03 AM	Bypass valve closed
10/21/2011	9:36:03 AM	Bubbler valve closed
10/21/2011	9:36:03 AM	Main Vac valve opened
10/21/2011	9:36:03 AM	Helium MFC set to  0.000000
10/21/2011	9:36:03 AM	H2 MFC set to  0.000000
10/21/2011	9:36:03 AM	BCl3 MFC set to  0.000000
10/21/2011	9:36:03 AM	PHl3 MFC set to  0.000000
10/21/2011	9:36:03 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:36:03 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:36:04 AM	Tube furnace set to 150
10/21/2011	9:36:34 AM	H2 valve closed
10/21/2011	9:36:34 AM	BCl3 valve closed
10/21/2011	9:36:34 AM	PH3 valve closed
10/21/2011	9:36:34 AM	SiCl4 pre valve closed
10/21/2011	9:36:34 AM	SiCl4 post valve closed
10/21/2011	9:36:34 AM	Bypass valve closed
10/21/2011	9:36:34 AM	Bubbler valve closed
10/21/2011	9:36:34 AM	Helium valve opened
10/21/2011	9:36:34 AM	Main Vac valve opened
10/21/2011	9:36:34 AM	Helium MFC set to  20.000000
10/21/2011	9:36:34 AM	H2 MFC set to  0.000000
10/21/2011	9:36:34 AM	BCl3 MFC set to  0.000000
10/21/2011	9:36:34 AM	PHl3 MFC set to  0.000000
10/21/2011	9:36:34 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:36:34 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:36:34 AM	Tube furnace set to 150
10/21/2011	9:37:04 AM	Helium valve closed
10/21/2011	9:37:04 AM	H2 valve closed
10/21/2011	9:37:04 AM	BCl3 valve closed
10/21/2011	9:37:04 AM	PH3 valve closed
10/21/2011	9:37:04 AM	SiCl4 pre valve closed
10/21/2011	9:37:04 AM	SiCl4 post valve closed
10/21/2011	9:37:04 AM	Bypass valve closed
10/21/2011	9:37:04 AM	Bubbler valve closed
10/21/2011	9:37:04 AM	Main Vac valve opened
10/21/2011	9:37:04 AM	Helium MFC set to  0.000000
10/21/2011	9:37:04 AM	H2 MFC set to  0.000000
10/21/2011	9:37:04 AM	BCl3 MFC set to  0.000000
10/21/2011	9:37:04 AM	PHl3 MFC set to  0.000000
10/21/2011	9:37:04 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:37:04 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:37:04 AM	Tube furnace set to 150
10/21/2011	9:37:34 AM	H2 valve closed
10/21/2011	9:37:34 AM	BCl3 valve closed
10/21/2011	9:37:34 AM	PH3 valve closed
10/21/2011	9:37:34 AM	SiCl4 pre valve closed
10/21/2011	9:37:34 AM	SiCl4 post valve closed
10/21/2011	9:37:34 AM	Bypass valve closed
10/21/2011	9:37:34 AM	Bubbler valve closed
10/21/2011	9:37:34 AM	Helium valve opened
10/21/2011	9:37:34 AM	Main Vac valve opened
10/21/2011	9:37:34 AM	Helium MFC set to  20.000000
10/21/2011	9:37:34 AM	H2 MFC set to  0.000000
10/21/2011	9:37:34 AM	BCl3 MFC set to  0.000000
10/21/2011	9:37:34 AM	PHl3 MFC set to  0.000000
10/21/2011	9:37:34 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:37:34 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:37:34 AM	Tube furnace set to 150
10/21/2011	9:38:04 AM	Helium valve closed
10/21/2011	9:38:04 AM	H2 valve closed
10/21/2011	9:38:04 AM	BCl3 valve closed
10/21/2011	9:38:04 AM	PH3 valve closed
10/21/2011	9:38:04 AM	SiCl4 pre valve closed
10/21/2011	9:38:04 AM	SiCl4 post valve closed
10/21/2011	9:38:04 AM	Bypass valve closed
10/21/2011	9:38:04 AM	Bubbler valve closed
10/21/2011	9:38:04 AM	Main Vac valve opened
10/21/2011	9:38:04 AM	Helium MFC set to  0.000000
10/21/2011	9:38:04 AM	H2 MFC set to  0.000000
10/21/2011	9:38:04 AM	BCl3 MFC set to  0.000000
10/21/2011	9:38:04 AM	PHl3 MFC set to  0.000000
10/21/2011	9:38:04 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:38:04 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:38:04 AM	Tube furnace set to 150
10/21/2011	9:38:34 AM	H2 valve closed
10/21/2011	9:38:34 AM	BCl3 valve closed
10/21/2011	9:38:34 AM	PH3 valve closed
10/21/2011	9:38:34 AM	SiCl4 pre valve closed
10/21/2011	9:38:34 AM	SiCl4 post valve closed
10/21/2011	9:38:34 AM	Bypass valve closed
10/21/2011	9:38:34 AM	Bubbler valve closed
10/21/2011	9:38:34 AM	Helium valve opened
10/21/2011	9:38:34 AM	Main Vac valve opened
10/21/2011	9:38:34 AM	Helium MFC set to  20.000000
10/21/2011	9:38:34 AM	H2 MFC set to  0.000000
10/21/2011	9:38:34 AM	BCl3 MFC set to  0.000000
10/21/2011	9:38:34 AM	PHl3 MFC set to  0.000000
10/21/2011	9:38:34 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:38:34 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:38:35 AM	Tube furnace set to 150
10/21/2011	9:39:05 AM	Helium valve closed
10/21/2011	9:39:05 AM	H2 valve closed
10/21/2011	9:39:05 AM	BCl3 valve closed
10/21/2011	9:39:05 AM	PH3 valve closed
10/21/2011	9:39:05 AM	SiCl4 pre valve closed
10/21/2011	9:39:05 AM	SiCl4 post valve closed
10/21/2011	9:39:05 AM	Bypass valve closed
10/21/2011	9:39:05 AM	Bubbler valve closed
10/21/2011	9:39:05 AM	Main Vac valve opened
10/21/2011	9:39:05 AM	Helium MFC set to  0.000000
10/21/2011	9:39:05 AM	H2 MFC set to  0.000000
10/21/2011	9:39:05 AM	BCl3 MFC set to  0.000000
10/21/2011	9:39:05 AM	PHl3 MFC set to  0.000000
10/21/2011	9:39:05 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:39:05 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:39:05 AM	Tube furnace set to 150
10/21/2011	9:39:35 AM	H2 valve closed
10/21/2011	9:39:35 AM	BCl3 valve closed
10/21/2011	9:39:35 AM	PH3 valve closed
10/21/2011	9:39:35 AM	SiCl4 pre valve closed
10/21/2011	9:39:35 AM	SiCl4 post valve closed
10/21/2011	9:39:35 AM	Bypass valve closed
10/21/2011	9:39:35 AM	Bubbler valve closed
10/21/2011	9:39:35 AM	Helium valve opened
10/21/2011	9:39:35 AM	Main Vac valve opened
10/21/2011	9:39:35 AM	Helium MFC set to  20.000000
10/21/2011	9:39:35 AM	H2 MFC set to  0.000000
10/21/2011	9:39:35 AM	BCl3 MFC set to  0.000000
10/21/2011	9:39:35 AM	PHl3 MFC set to  0.000000
10/21/2011	9:39:35 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:39:35 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:39:35 AM	Tube furnace set to 150
10/21/2011	9:40:05 AM	Helium valve closed
10/21/2011	9:40:05 AM	H2 valve closed
10/21/2011	9:40:05 AM	BCl3 valve closed
10/21/2011	9:40:05 AM	PH3 valve closed
10/21/2011	9:40:05 AM	SiCl4 pre valve closed
10/21/2011	9:40:05 AM	SiCl4 post valve closed
10/21/2011	9:40:05 AM	Bypass valve closed
10/21/2011	9:40:05 AM	Bubbler valve closed
10/21/2011	9:40:05 AM	Main Vac valve opened
10/21/2011	9:40:05 AM	Helium MFC set to  0.000000
10/21/2011	9:40:05 AM	H2 MFC set to  0.000000
10/21/2011	9:40:05 AM	BCl3 MFC set to  0.000000
10/21/2011	9:40:05 AM	PHl3 MFC set to  0.000000
10/21/2011	9:40:05 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:40:05 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:40:05 AM	Tube furnace set to 150
10/21/2011	9:40:35 AM	H2 valve closed
10/21/2011	9:40:35 AM	BCl3 valve closed
10/21/2011	9:40:35 AM	PH3 valve closed
10/21/2011	9:40:35 AM	SiCl4 pre valve closed
10/21/2011	9:40:35 AM	SiCl4 post valve closed
10/21/2011	9:40:35 AM	Bypass valve closed
10/21/2011	9:40:35 AM	Bubbler valve closed
10/21/2011	9:40:35 AM	Helium valve opened
10/21/2011	9:40:35 AM	Main Vac valve opened
10/21/2011	9:40:35 AM	Helium MFC set to  20.000000
10/21/2011	9:40:35 AM	H2 MFC set to  0.000000
10/21/2011	9:40:35 AM	BCl3 MFC set to  0.000000
10/21/2011	9:40:35 AM	PHl3 MFC set to  0.000000
10/21/2011	9:40:35 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:40:35 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:40:36 AM	Tube furnace set to 150
10/21/2011	9:41:06 AM	Helium valve closed
10/21/2011	9:41:06 AM	H2 valve closed
10/21/2011	9:41:06 AM	BCl3 valve closed
10/21/2011	9:41:06 AM	PH3 valve closed
10/21/2011	9:41:06 AM	SiCl4 pre valve closed
10/21/2011	9:41:06 AM	SiCl4 post valve closed
10/21/2011	9:41:06 AM	Bypass valve closed
10/21/2011	9:41:06 AM	Bubbler valve closed
10/21/2011	9:41:06 AM	Main Vac valve opened
10/21/2011	9:41:06 AM	Helium MFC set to  0.000000
10/21/2011	9:41:06 AM	H2 MFC set to  0.000000
10/21/2011	9:41:06 AM	BCl3 MFC set to  0.000000
10/21/2011	9:41:06 AM	PHl3 MFC set to  0.000000
10/21/2011	9:41:06 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:41:06 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:41:06 AM	Tube furnace set to 150
10/21/2011	9:41:36 AM	H2 valve closed
10/21/2011	9:41:36 AM	BCl3 valve closed
10/21/2011	9:41:36 AM	PH3 valve closed
10/21/2011	9:41:36 AM	SiCl4 pre valve closed
10/21/2011	9:41:36 AM	SiCl4 post valve closed
10/21/2011	9:41:36 AM	Bypass valve closed
10/21/2011	9:41:36 AM	Bubbler valve closed
10/21/2011	9:41:36 AM	Helium valve opened
10/21/2011	9:41:36 AM	Main Vac valve opened
10/21/2011	9:41:36 AM	Helium MFC set to  20.000000
10/21/2011	9:41:36 AM	H2 MFC set to  0.000000
10/21/2011	9:41:36 AM	BCl3 MFC set to  0.000000
10/21/2011	9:41:36 AM	PHl3 MFC set to  0.000000
10/21/2011	9:41:36 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:41:36 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:41:36 AM	Tube furnace set to 150
10/21/2011	9:42:06 AM	Helium valve closed
10/21/2011	9:42:06 AM	H2 valve closed
10/21/2011	9:42:06 AM	BCl3 valve closed
10/21/2011	9:42:06 AM	PH3 valve closed
10/21/2011	9:42:06 AM	SiCl4 pre valve closed
10/21/2011	9:42:06 AM	SiCl4 post valve closed
10/21/2011	9:42:06 AM	Bypass valve closed
10/21/2011	9:42:06 AM	Bubbler valve closed
10/21/2011	9:42:06 AM	Main Vac valve opened
10/21/2011	9:42:06 AM	Helium MFC set to  0.000000
10/21/2011	9:42:06 AM	H2 MFC set to  0.000000
10/21/2011	9:42:06 AM	BCl3 MFC set to  0.000000
10/21/2011	9:42:06 AM	PHl3 MFC set to  0.000000
10/21/2011	9:42:06 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:42:06 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:42:06 AM	Tube furnace set to 150
10/21/2011	9:42:07 AM	Run finished at 9:42 AM
10/21/2011	9:43:16 AM	Recipe started at 9:43 AM
10/21/2011	9:43:16 AM	Helium valve closed
10/21/2011	9:43:16 AM	H2 valve closed
10/21/2011	9:43:16 AM	BCl3 valve closed
10/21/2011	9:43:16 AM	PH3 valve closed
10/21/2011	9:43:16 AM	SiCl4 pre valve closed
10/21/2011	9:43:16 AM	SiCl4 post valve closed
10/21/2011	9:43:16 AM	Bypass valve closed
10/21/2011	9:43:16 AM	Bubbler valve closed
10/21/2011	9:43:16 AM	Main Vac valve opened
10/21/2011	9:43:16 AM	Helium MFC set to  0.000000
10/21/2011	9:43:16 AM	H2 MFC set to  0.000000
10/21/2011	9:43:16 AM	BCl3 MFC set to  0.000000
10/21/2011	9:43:16 AM	PHl3 MFC set to  0.000000
10/21/2011	9:43:16 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:43:16 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:43:16 AM	Tube furnace set to 150
10/21/2011	9:43:46 AM	H2 valve closed
10/21/2011	9:43:46 AM	BCl3 valve closed
10/21/2011	9:43:46 AM	PH3 valve closed
10/21/2011	9:43:46 AM	SiCl4 pre valve closed
10/21/2011	9:43:46 AM	SiCl4 post valve closed
10/21/2011	9:43:46 AM	Bypass valve closed
10/21/2011	9:43:46 AM	Bubbler valve closed
10/21/2011	9:43:46 AM	Helium valve opened
10/21/2011	9:43:46 AM	Main Vac valve opened
10/21/2011	9:43:46 AM	Helium MFC set to  20.000000
10/21/2011	9:43:46 AM	H2 MFC set to  0.000000
10/21/2011	9:43:46 AM	BCl3 MFC set to  0.000000
10/21/2011	9:43:46 AM	PHl3 MFC set to  0.000000
10/21/2011	9:43:46 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:43:46 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:43:46 AM	Tube furnace set to 150
10/21/2011	9:44:16 AM	Helium valve closed
10/21/2011	9:44:16 AM	H2 valve closed
10/21/2011	9:44:16 AM	BCl3 valve closed
10/21/2011	9:44:16 AM	PH3 valve closed
10/21/2011	9:44:16 AM	SiCl4 pre valve closed
10/21/2011	9:44:16 AM	SiCl4 post valve closed
10/21/2011	9:44:16 AM	Bypass valve closed
10/21/2011	9:44:16 AM	Bubbler valve closed
10/21/2011	9:44:16 AM	Main Vac valve opened
10/21/2011	9:44:17 AM	Helium MFC set to  0.000000
10/21/2011	9:44:17 AM	H2 MFC set to  0.000000
10/21/2011	9:44:17 AM	BCl3 MFC set to  0.000000
10/21/2011	9:44:17 AM	PHl3 MFC set to  0.000000
10/21/2011	9:44:17 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:44:17 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:44:17 AM	Tube furnace set to 150
10/21/2011	9:44:47 AM	H2 valve closed
10/21/2011	9:44:47 AM	BCl3 valve closed
10/21/2011	9:44:47 AM	PH3 valve closed
10/21/2011	9:44:47 AM	SiCl4 pre valve closed
10/21/2011	9:44:47 AM	SiCl4 post valve closed
10/21/2011	9:44:47 AM	Bypass valve closed
10/21/2011	9:44:47 AM	Bubbler valve closed
10/21/2011	9:44:47 AM	Helium valve opened
10/21/2011	9:44:47 AM	Main Vac valve opened
10/21/2011	9:44:47 AM	Helium MFC set to  20.000000
10/21/2011	9:44:47 AM	H2 MFC set to  0.000000
10/21/2011	9:44:47 AM	BCl3 MFC set to  0.000000
10/21/2011	9:44:47 AM	PHl3 MFC set to  0.000000
10/21/2011	9:44:47 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:44:47 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:44:47 AM	Tube furnace set to 150
10/21/2011	9:45:17 AM	Helium valve closed
10/21/2011	9:45:17 AM	H2 valve closed
10/21/2011	9:45:17 AM	BCl3 valve closed
10/21/2011	9:45:17 AM	PH3 valve closed
10/21/2011	9:45:17 AM	SiCl4 pre valve closed
10/21/2011	9:45:17 AM	SiCl4 post valve closed
10/21/2011	9:45:17 AM	Bypass valve closed
10/21/2011	9:45:17 AM	Bubbler valve closed
10/21/2011	9:45:17 AM	Main Vac valve opened
10/21/2011	9:45:17 AM	Helium MFC set to  0.000000
10/21/2011	9:45:17 AM	H2 MFC set to  0.000000
10/21/2011	9:45:17 AM	BCl3 MFC set to  0.000000
10/21/2011	9:45:17 AM	PHl3 MFC set to  0.000000
10/21/2011	9:45:17 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:45:17 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:45:17 AM	Tube furnace set to 150
10/21/2011	9:45:47 AM	H2 valve closed
10/21/2011	9:45:47 AM	BCl3 valve closed
10/21/2011	9:45:47 AM	PH3 valve closed
10/21/2011	9:45:47 AM	SiCl4 pre valve closed
10/21/2011	9:45:47 AM	SiCl4 post valve closed
10/21/2011	9:45:47 AM	Bypass valve closed
10/21/2011	9:45:47 AM	Bubbler valve closed
10/21/2011	9:45:47 AM	Helium valve opened
10/21/2011	9:45:47 AM	Main Vac valve opened
10/21/2011	9:45:47 AM	Helium MFC set to  20.000000
10/21/2011	9:45:47 AM	H2 MFC set to  0.000000
10/21/2011	9:45:47 AM	BCl3 MFC set to  0.000000
10/21/2011	9:45:47 AM	PHl3 MFC set to  0.000000
10/21/2011	9:45:47 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:45:47 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:45:47 AM	Tube furnace set to 150
10/21/2011	9:46:17 AM	Helium valve closed
10/21/2011	9:46:17 AM	H2 valve closed
10/21/2011	9:46:17 AM	BCl3 valve closed
10/21/2011	9:46:17 AM	PH3 valve closed
10/21/2011	9:46:17 AM	SiCl4 pre valve closed
10/21/2011	9:46:17 AM	SiCl4 post valve closed
10/21/2011	9:46:17 AM	Bypass valve closed
10/21/2011	9:46:17 AM	Bubbler valve closed
10/21/2011	9:46:17 AM	Main Vac valve opened
10/21/2011	9:46:17 AM	Helium MFC set to  0.000000
10/21/2011	9:46:17 AM	H2 MFC set to  0.000000
10/21/2011	9:46:17 AM	BCl3 MFC set to  0.000000
10/21/2011	9:46:17 AM	PHl3 MFC set to  0.000000
10/21/2011	9:46:17 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:46:17 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:46:17 AM	Tube furnace set to 150
10/21/2011	9:46:47 AM	H2 valve closed
10/21/2011	9:46:47 AM	BCl3 valve closed
10/21/2011	9:46:47 AM	PH3 valve closed
10/21/2011	9:46:47 AM	SiCl4 pre valve closed
10/21/2011	9:46:47 AM	SiCl4 post valve closed
10/21/2011	9:46:47 AM	Bypass valve closed
10/21/2011	9:46:47 AM	Bubbler valve closed
10/21/2011	9:46:47 AM	Helium valve opened
10/21/2011	9:46:47 AM	Main Vac valve opened
10/21/2011	9:46:47 AM	Helium MFC set to  20.000000
10/21/2011	9:46:47 AM	H2 MFC set to  0.000000
10/21/2011	9:46:47 AM	BCl3 MFC set to  0.000000
10/21/2011	9:46:47 AM	PHl3 MFC set to  0.000000
10/21/2011	9:46:47 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:46:47 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:46:48 AM	Tube furnace set to 150
10/21/2011	9:47:18 AM	Helium valve closed
10/21/2011	9:47:18 AM	H2 valve closed
10/21/2011	9:47:18 AM	BCl3 valve closed
10/21/2011	9:47:18 AM	PH3 valve closed
10/21/2011	9:47:18 AM	SiCl4 pre valve closed
10/21/2011	9:47:18 AM	SiCl4 post valve closed
10/21/2011	9:47:18 AM	Bypass valve closed
10/21/2011	9:47:18 AM	Bubbler valve closed
10/21/2011	9:47:18 AM	Main Vac valve opened
10/21/2011	9:47:18 AM	Helium MFC set to  0.000000
10/21/2011	9:47:18 AM	H2 MFC set to  0.000000
10/21/2011	9:47:18 AM	BCl3 MFC set to  0.000000
10/21/2011	9:47:18 AM	PHl3 MFC set to  0.000000
10/21/2011	9:47:18 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:47:18 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:47:18 AM	Tube furnace set to 150
10/21/2011	9:47:48 AM	H2 valve closed
10/21/2011	9:47:48 AM	BCl3 valve closed
10/21/2011	9:47:48 AM	PH3 valve closed
10/21/2011	9:47:48 AM	SiCl4 pre valve closed
10/21/2011	9:47:48 AM	SiCl4 post valve closed
10/21/2011	9:47:48 AM	Bypass valve closed
10/21/2011	9:47:48 AM	Bubbler valve closed
10/21/2011	9:47:48 AM	Helium valve opened
10/21/2011	9:47:48 AM	Main Vac valve opened
10/21/2011	9:47:48 AM	Helium MFC set to  20.000000
10/21/2011	9:47:48 AM	H2 MFC set to  0.000000
10/21/2011	9:47:48 AM	BCl3 MFC set to  0.000000
10/21/2011	9:47:48 AM	PHl3 MFC set to  0.000000
10/21/2011	9:47:48 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:47:48 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:47:48 AM	Tube furnace set to 150
10/21/2011	9:48:18 AM	Helium valve closed
10/21/2011	9:48:18 AM	H2 valve closed
10/21/2011	9:48:18 AM	BCl3 valve closed
10/21/2011	9:48:18 AM	PH3 valve closed
10/21/2011	9:48:18 AM	SiCl4 pre valve closed
10/21/2011	9:48:18 AM	SiCl4 post valve closed
10/21/2011	9:48:18 AM	Bypass valve closed
10/21/2011	9:48:18 AM	Bubbler valve closed
10/21/2011	9:48:18 AM	Main Vac valve opened
10/21/2011	9:48:18 AM	Helium MFC set to  0.000000
10/21/2011	9:48:18 AM	H2 MFC set to  0.000000
10/21/2011	9:48:18 AM	BCl3 MFC set to  0.000000
10/21/2011	9:48:18 AM	PHl3 MFC set to  0.000000
10/21/2011	9:48:18 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:48:18 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:48:18 AM	Tube furnace set to 150
10/21/2011	9:48:48 AM	H2 valve closed
10/21/2011	9:48:48 AM	BCl3 valve closed
10/21/2011	9:48:48 AM	PH3 valve closed
10/21/2011	9:48:48 AM	SiCl4 pre valve closed
10/21/2011	9:48:48 AM	SiCl4 post valve closed
10/21/2011	9:48:48 AM	Bypass valve closed
10/21/2011	9:48:48 AM	Bubbler valve closed
10/21/2011	9:48:48 AM	Helium valve opened
10/21/2011	9:48:48 AM	Main Vac valve opened
10/21/2011	9:48:48 AM	Helium MFC set to  20.000000
10/21/2011	9:48:48 AM	H2 MFC set to  0.000000
10/21/2011	9:48:48 AM	BCl3 MFC set to  0.000000
10/21/2011	9:48:48 AM	PHl3 MFC set to  0.000000
10/21/2011	9:48:48 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:48:48 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:48:48 AM	Tube furnace set to 150
10/21/2011	9:49:18 AM	Helium valve closed
10/21/2011	9:49:18 AM	H2 valve closed
10/21/2011	9:49:18 AM	BCl3 valve closed
10/21/2011	9:49:18 AM	PH3 valve closed
10/21/2011	9:49:18 AM	SiCl4 pre valve closed
10/21/2011	9:49:18 AM	SiCl4 post valve closed
10/21/2011	9:49:18 AM	Bypass valve closed
10/21/2011	9:49:18 AM	Bubbler valve closed
10/21/2011	9:49:18 AM	Main Vac valve opened
10/21/2011	9:49:18 AM	Helium MFC set to  0.000000
10/21/2011	9:49:18 AM	H2 MFC set to  0.000000
10/21/2011	9:49:18 AM	BCl3 MFC set to  0.000000
10/21/2011	9:49:18 AM	PHl3 MFC set to  0.000000
10/21/2011	9:49:18 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:49:18 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:49:19 AM	Tube furnace set to 150
10/21/2011	9:49:49 AM	H2 valve closed
10/21/2011	9:49:49 AM	BCl3 valve closed
10/21/2011	9:49:49 AM	PH3 valve closed
10/21/2011	9:49:49 AM	SiCl4 pre valve closed
10/21/2011	9:49:49 AM	SiCl4 post valve closed
10/21/2011	9:49:49 AM	Bypass valve closed
10/21/2011	9:49:49 AM	Bubbler valve closed
10/21/2011	9:49:49 AM	Helium valve opened
10/21/2011	9:49:49 AM	Main Vac valve opened
10/21/2011	9:49:49 AM	Helium MFC set to  20.000000
10/21/2011	9:49:49 AM	H2 MFC set to  0.000000
10/21/2011	9:49:49 AM	BCl3 MFC set to  0.000000
10/21/2011	9:49:49 AM	PHl3 MFC set to  0.000000
10/21/2011	9:49:49 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:49:49 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:49:49 AM	Tube furnace set to 150
10/21/2011	9:50:19 AM	Helium valve closed
10/21/2011	9:50:19 AM	H2 valve closed
10/21/2011	9:50:19 AM	BCl3 valve closed
10/21/2011	9:50:19 AM	PH3 valve closed
10/21/2011	9:50:19 AM	SiCl4 pre valve closed
10/21/2011	9:50:19 AM	SiCl4 post valve closed
10/21/2011	9:50:19 AM	Bypass valve closed
10/21/2011	9:50:19 AM	Bubbler valve closed
10/21/2011	9:50:19 AM	Main Vac valve opened
10/21/2011	9:50:19 AM	Helium MFC set to  0.000000
10/21/2011	9:50:19 AM	H2 MFC set to  0.000000
10/21/2011	9:50:19 AM	BCl3 MFC set to  0.000000
10/21/2011	9:50:19 AM	PHl3 MFC set to  0.000000
10/21/2011	9:50:19 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:50:19 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:50:19 AM	Tube furnace set to 150
10/21/2011	9:50:49 AM	H2 valve closed
10/21/2011	9:50:49 AM	BCl3 valve closed
10/21/2011	9:50:49 AM	PH3 valve closed
10/21/2011	9:50:49 AM	SiCl4 pre valve closed
10/21/2011	9:50:49 AM	SiCl4 post valve closed
10/21/2011	9:50:49 AM	Bypass valve closed
10/21/2011	9:50:49 AM	Bubbler valve closed
10/21/2011	9:50:49 AM	Helium valve opened
10/21/2011	9:50:49 AM	Main Vac valve opened
10/21/2011	9:50:49 AM	Helium MFC set to  20.000000
10/21/2011	9:50:49 AM	H2 MFC set to  0.000000
10/21/2011	9:50:49 AM	BCl3 MFC set to  0.000000
10/21/2011	9:50:49 AM	PHl3 MFC set to  0.000000
10/21/2011	9:50:49 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:50:49 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:50:49 AM	Tube furnace set to 150
10/21/2011	9:51:19 AM	Helium valve closed
10/21/2011	9:51:19 AM	H2 valve closed
10/21/2011	9:51:19 AM	BCl3 valve closed
10/21/2011	9:51:19 AM	PH3 valve closed
10/21/2011	9:51:19 AM	SiCl4 pre valve closed
10/21/2011	9:51:19 AM	SiCl4 post valve closed
10/21/2011	9:51:19 AM	Bypass valve closed
10/21/2011	9:51:19 AM	Bubbler valve closed
10/21/2011	9:51:19 AM	Main Vac valve opened
10/21/2011	9:51:19 AM	Helium MFC set to  0.000000
10/21/2011	9:51:19 AM	H2 MFC set to  0.000000
10/21/2011	9:51:19 AM	BCl3 MFC set to  0.000000
10/21/2011	9:51:19 AM	PHl3 MFC set to  0.000000
10/21/2011	9:51:19 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:51:19 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:51:19 AM	Tube furnace set to 150
10/21/2011	9:51:49 AM	H2 valve closed
10/21/2011	9:51:49 AM	BCl3 valve closed
10/21/2011	9:51:49 AM	PH3 valve closed
10/21/2011	9:51:49 AM	SiCl4 pre valve closed
10/21/2011	9:51:49 AM	SiCl4 post valve closed
10/21/2011	9:51:49 AM	Bypass valve closed
10/21/2011	9:51:50 AM	Bubbler valve closed
10/21/2011	9:51:50 AM	Helium valve opened
10/21/2011	9:51:50 AM	Main Vac valve opened
10/21/2011	9:51:50 AM	Helium MFC set to  20.000000
10/21/2011	9:51:50 AM	H2 MFC set to  0.000000
10/21/2011	9:51:50 AM	BCl3 MFC set to  0.000000
10/21/2011	9:51:50 AM	PHl3 MFC set to  0.000000
10/21/2011	9:51:50 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:51:50 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:51:50 AM	Tube furnace set to 150
10/21/2011	9:52:20 AM	Helium valve closed
10/21/2011	9:52:20 AM	H2 valve closed
10/21/2011	9:52:20 AM	BCl3 valve closed
10/21/2011	9:52:20 AM	PH3 valve closed
10/21/2011	9:52:20 AM	SiCl4 pre valve closed
10/21/2011	9:52:20 AM	SiCl4 post valve closed
10/21/2011	9:52:20 AM	Bypass valve closed
10/21/2011	9:52:20 AM	Bubbler valve closed
10/21/2011	9:52:20 AM	Main Vac valve opened
10/21/2011	9:52:20 AM	Helium MFC set to  0.000000
10/21/2011	9:52:20 AM	H2 MFC set to  0.000000
10/21/2011	9:52:20 AM	BCl3 MFC set to  0.000000
10/21/2011	9:52:20 AM	PHl3 MFC set to  0.000000
10/21/2011	9:52:20 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:52:20 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:52:20 AM	Tube furnace set to 150
10/21/2011	9:52:50 AM	H2 valve closed
10/21/2011	9:52:50 AM	BCl3 valve closed
10/21/2011	9:52:50 AM	PH3 valve closed
10/21/2011	9:52:50 AM	SiCl4 pre valve closed
10/21/2011	9:52:50 AM	SiCl4 post valve closed
10/21/2011	9:52:50 AM	Bypass valve closed
10/21/2011	9:52:50 AM	Bubbler valve closed
10/21/2011	9:52:50 AM	Helium valve opened
10/21/2011	9:52:50 AM	Main Vac valve opened
10/21/2011	9:52:50 AM	Helium MFC set to  20.000000
10/21/2011	9:52:50 AM	H2 MFC set to  0.000000
10/21/2011	9:52:50 AM	BCl3 MFC set to  0.000000
10/21/2011	9:52:50 AM	PHl3 MFC set to  0.000000
10/21/2011	9:52:50 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:52:50 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:52:50 AM	Tube furnace set to 150
10/21/2011	9:53:20 AM	Helium valve closed
10/21/2011	9:53:20 AM	H2 valve closed
10/21/2011	9:53:20 AM	BCl3 valve closed
10/21/2011	9:53:20 AM	PH3 valve closed
10/21/2011	9:53:20 AM	SiCl4 pre valve closed
10/21/2011	9:53:20 AM	SiCl4 post valve closed
10/21/2011	9:53:20 AM	Bypass valve closed
10/21/2011	9:53:20 AM	Bubbler valve closed
10/21/2011	9:53:20 AM	Main Vac valve opened
10/21/2011	9:53:20 AM	Helium MFC set to  0.000000
10/21/2011	9:53:20 AM	H2 MFC set to  0.000000
10/21/2011	9:53:20 AM	BCl3 MFC set to  0.000000
10/21/2011	9:53:20 AM	PHl3 MFC set to  0.000000
10/21/2011	9:53:20 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:53:20 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:53:20 AM	Tube furnace set to 150
10/21/2011	9:53:21 AM	Run finished at 9:53 AM
10/21/2011	9:55:59 AM	Recipe started at 9:55 AM
10/21/2011	9:55:59 AM	Helium valve closed
10/21/2011	9:55:59 AM	H2 valve closed
10/21/2011	9:55:59 AM	BCl3 valve closed
10/21/2011	9:55:59 AM	PH3 valve closed
10/21/2011	9:55:59 AM	SiCl4 pre valve closed
10/21/2011	9:55:59 AM	SiCl4 post valve closed
10/21/2011	9:55:59 AM	Bypass valve closed
10/21/2011	9:55:59 AM	Bubbler valve closed
10/21/2011	9:55:59 AM	Main Vac valve opened
10/21/2011	9:55:59 AM	Helium MFC set to  0.000000
10/21/2011	9:55:59 AM	H2 MFC set to  0.000000
10/21/2011	9:55:59 AM	BCl3 MFC set to  0.000000
10/21/2011	9:55:59 AM	PHl3 MFC set to  0.000000
10/21/2011	9:55:59 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:55:59 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:56:00 AM	Tube furnace set to 150
10/21/2011	9:56:08 AM	H2 valve closed
10/21/2011	9:56:08 AM	BCl3 valve closed
10/21/2011	9:56:08 AM	PH3 valve closed
10/21/2011	9:56:08 AM	SiCl4 pre valve closed
10/21/2011	9:56:08 AM	SiCl4 post valve closed
10/21/2011	9:56:08 AM	Bypass valve closed
10/21/2011	9:56:08 AM	Bubbler valve closed
10/21/2011	9:56:08 AM	Helium valve opened
10/21/2011	9:56:08 AM	Main Vac valve opened
10/21/2011	9:56:08 AM	Helium MFC set to  20.000000
10/21/2011	9:56:08 AM	H2 MFC set to  0.000000
10/21/2011	9:56:08 AM	BCl3 MFC set to  0.000000
10/21/2011	9:56:08 AM	PHl3 MFC set to  0.000000
10/21/2011	9:56:08 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:56:08 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:56:08 AM	Tube furnace set to 150
10/21/2011	9:56:38 AM	Helium valve closed
10/21/2011	9:56:38 AM	H2 valve closed
10/21/2011	9:56:38 AM	BCl3 valve closed
10/21/2011	9:56:38 AM	PH3 valve closed
10/21/2011	9:56:38 AM	SiCl4 pre valve closed
10/21/2011	9:56:38 AM	SiCl4 post valve closed
10/21/2011	9:56:38 AM	Bypass valve closed
10/21/2011	9:56:38 AM	Bubbler valve closed
10/21/2011	9:56:38 AM	Main Vac valve opened
10/21/2011	9:56:38 AM	Helium MFC set to  0.000000
10/21/2011	9:56:38 AM	H2 MFC set to  0.000000
10/21/2011	9:56:38 AM	BCl3 MFC set to  0.000000
10/21/2011	9:56:38 AM	PHl3 MFC set to  0.000000
10/21/2011	9:56:38 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:56:38 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:56:38 AM	Tube furnace set to 150
10/21/2011	9:57:08 AM	H2 valve closed
10/21/2011	9:57:08 AM	BCl3 valve closed
10/21/2011	9:57:08 AM	PH3 valve closed
10/21/2011	9:57:08 AM	SiCl4 pre valve closed
10/21/2011	9:57:08 AM	SiCl4 post valve closed
10/21/2011	9:57:08 AM	Bypass valve closed
10/21/2011	9:57:08 AM	Bubbler valve closed
10/21/2011	9:57:08 AM	Helium valve opened
10/21/2011	9:57:08 AM	Main Vac valve opened
10/21/2011	9:57:08 AM	Helium MFC set to  20.000000
10/21/2011	9:57:08 AM	H2 MFC set to  0.000000
10/21/2011	9:57:08 AM	BCl3 MFC set to  0.000000
10/21/2011	9:57:08 AM	PHl3 MFC set to  0.000000
10/21/2011	9:57:08 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:57:08 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:57:08 AM	Tube furnace set to 150
10/21/2011	9:57:38 AM	Helium valve closed
10/21/2011	9:57:38 AM	H2 valve closed
10/21/2011	9:57:38 AM	BCl3 valve closed
10/21/2011	9:57:38 AM	PH3 valve closed
10/21/2011	9:57:38 AM	SiCl4 pre valve closed
10/21/2011	9:57:38 AM	SiCl4 post valve closed
10/21/2011	9:57:38 AM	Bypass valve closed
10/21/2011	9:57:38 AM	Bubbler valve closed
10/21/2011	9:57:38 AM	Main Vac valve opened
10/21/2011	9:57:38 AM	Helium MFC set to  0.000000
10/21/2011	9:57:38 AM	H2 MFC set to  0.000000
10/21/2011	9:57:38 AM	BCl3 MFC set to  0.000000
10/21/2011	9:57:38 AM	PHl3 MFC set to  0.000000
10/21/2011	9:57:38 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:57:38 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:57:38 AM	Tube furnace set to 150
10/21/2011	9:58:08 AM	H2 valve closed
10/21/2011	9:58:08 AM	BCl3 valve closed
10/21/2011	9:58:08 AM	PH3 valve closed
10/21/2011	9:58:08 AM	SiCl4 pre valve closed
10/21/2011	9:58:08 AM	SiCl4 post valve closed
10/21/2011	9:58:08 AM	Bypass valve closed
10/21/2011	9:58:08 AM	Bubbler valve closed
10/21/2011	9:58:08 AM	Helium valve opened
10/21/2011	9:58:08 AM	Main Vac valve opened
10/21/2011	9:58:08 AM	Helium MFC set to  20.000000
10/21/2011	9:58:08 AM	H2 MFC set to  0.000000
10/21/2011	9:58:08 AM	BCl3 MFC set to  0.000000
10/21/2011	9:58:08 AM	PHl3 MFC set to  0.000000
10/21/2011	9:58:08 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:58:08 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:58:09 AM	Tube furnace set to 150
10/21/2011	9:58:39 AM	Helium valve closed
10/21/2011	9:58:39 AM	H2 valve closed
10/21/2011	9:58:39 AM	BCl3 valve closed
10/21/2011	9:58:39 AM	PH3 valve closed
10/21/2011	9:58:39 AM	SiCl4 pre valve closed
10/21/2011	9:58:39 AM	SiCl4 post valve closed
10/21/2011	9:58:39 AM	Bypass valve closed
10/21/2011	9:58:39 AM	Bubbler valve closed
10/21/2011	9:58:39 AM	Main Vac valve opened
10/21/2011	9:58:39 AM	Helium MFC set to  0.000000
10/21/2011	9:58:39 AM	H2 MFC set to  0.000000
10/21/2011	9:58:39 AM	BCl3 MFC set to  0.000000
10/21/2011	9:58:39 AM	PHl3 MFC set to  0.000000
10/21/2011	9:58:39 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:58:39 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:58:39 AM	Tube furnace set to 150
10/21/2011	9:59:09 AM	H2 valve closed
10/21/2011	9:59:09 AM	BCl3 valve closed
10/21/2011	9:59:09 AM	PH3 valve closed
10/21/2011	9:59:09 AM	SiCl4 pre valve closed
10/21/2011	9:59:09 AM	SiCl4 post valve closed
10/21/2011	9:59:09 AM	Bypass valve closed
10/21/2011	9:59:09 AM	Bubbler valve closed
10/21/2011	9:59:09 AM	Helium valve opened
10/21/2011	9:59:09 AM	Main Vac valve opened
10/21/2011	9:59:09 AM	Helium MFC set to  20.000000
10/21/2011	9:59:09 AM	H2 MFC set to  0.000000
10/21/2011	9:59:09 AM	BCl3 MFC set to  0.000000
10/21/2011	9:59:09 AM	PHl3 MFC set to  0.000000
10/21/2011	9:59:09 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:59:09 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:59:09 AM	Tube furnace set to 150
10/21/2011	9:59:39 AM	Helium valve closed
10/21/2011	9:59:39 AM	H2 valve closed
10/21/2011	9:59:39 AM	BCl3 valve closed
10/21/2011	9:59:39 AM	PH3 valve closed
10/21/2011	9:59:39 AM	SiCl4 pre valve closed
10/21/2011	9:59:39 AM	SiCl4 post valve closed
10/21/2011	9:59:39 AM	Bypass valve closed
10/21/2011	9:59:39 AM	Bubbler valve closed
10/21/2011	9:59:39 AM	Main Vac valve opened
10/21/2011	9:59:39 AM	Helium MFC set to  0.000000
10/21/2011	9:59:39 AM	H2 MFC set to  0.000000
10/21/2011	9:59:39 AM	BCl3 MFC set to  0.000000
10/21/2011	9:59:39 AM	PHl3 MFC set to  0.000000
10/21/2011	9:59:39 AM	SiCl4 MFC set to  0.000000
10/21/2011	9:59:39 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:59:39 AM	Tube furnace set to 150
10/21/2011	10:00:09 AM	H2 valve closed
10/21/2011	10:00:09 AM	BCl3 valve closed
10/21/2011	10:00:09 AM	PH3 valve closed
10/21/2011	10:00:09 AM	SiCl4 pre valve closed
10/21/2011	10:00:09 AM	SiCl4 post valve closed
10/21/2011	10:00:09 AM	Bypass valve closed
10/21/2011	10:00:09 AM	Bubbler valve closed
10/21/2011	10:00:09 AM	Helium valve opened
10/21/2011	10:00:09 AM	Main Vac valve opened
10/21/2011	10:00:09 AM	Helium MFC set to  20.000000
10/21/2011	10:00:09 AM	H2 MFC set to  0.000000
10/21/2011	10:00:09 AM	BCl3 MFC set to  0.000000
10/21/2011	10:00:09 AM	PHl3 MFC set to  0.000000
10/21/2011	10:00:09 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:00:09 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:00:09 AM	Tube furnace set to 150
10/21/2011	10:00:40 AM	Helium valve closed
10/21/2011	10:00:40 AM	H2 valve closed
10/21/2011	10:00:40 AM	BCl3 valve closed
10/21/2011	10:00:40 AM	PH3 valve closed
10/21/2011	10:00:40 AM	SiCl4 pre valve closed
10/21/2011	10:00:40 AM	SiCl4 post valve closed
10/21/2011	10:00:40 AM	Bypass valve closed
10/21/2011	10:00:40 AM	Bubbler valve closed
10/21/2011	10:00:40 AM	Main Vac valve opened
10/21/2011	10:00:40 AM	Helium MFC set to  0.000000
10/21/2011	10:00:40 AM	H2 MFC set to  0.000000
10/21/2011	10:00:40 AM	BCl3 MFC set to  0.000000
10/21/2011	10:00:40 AM	PHl3 MFC set to  0.000000
10/21/2011	10:00:40 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:00:40 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:00:40 AM	Tube furnace set to 150
10/21/2011	10:01:10 AM	H2 valve closed
10/21/2011	10:01:10 AM	BCl3 valve closed
10/21/2011	10:01:10 AM	PH3 valve closed
10/21/2011	10:01:10 AM	SiCl4 pre valve closed
10/21/2011	10:01:10 AM	SiCl4 post valve closed
10/21/2011	10:01:10 AM	Bypass valve closed
10/21/2011	10:01:10 AM	Bubbler valve closed
10/21/2011	10:01:10 AM	Helium valve opened
10/21/2011	10:01:10 AM	Main Vac valve opened
10/21/2011	10:01:10 AM	Helium MFC set to  20.000000
10/21/2011	10:01:10 AM	H2 MFC set to  0.000000
10/21/2011	10:01:10 AM	BCl3 MFC set to  0.000000
10/21/2011	10:01:10 AM	PHl3 MFC set to  0.000000
10/21/2011	10:01:10 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:01:10 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:01:10 AM	Tube furnace set to 150
10/21/2011	10:01:40 AM	Helium valve closed
10/21/2011	10:01:40 AM	H2 valve closed
10/21/2011	10:01:40 AM	BCl3 valve closed
10/21/2011	10:01:40 AM	PH3 valve closed
10/21/2011	10:01:40 AM	SiCl4 pre valve closed
10/21/2011	10:01:40 AM	SiCl4 post valve closed
10/21/2011	10:01:40 AM	Bypass valve closed
10/21/2011	10:01:40 AM	Bubbler valve closed
10/21/2011	10:01:40 AM	Main Vac valve opened
10/21/2011	10:01:40 AM	Helium MFC set to  0.000000
10/21/2011	10:01:40 AM	H2 MFC set to  0.000000
10/21/2011	10:01:40 AM	BCl3 MFC set to  0.000000
10/21/2011	10:01:40 AM	PHl3 MFC set to  0.000000
10/21/2011	10:01:40 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:01:40 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:01:40 AM	Tube furnace set to 150
10/21/2011	10:02:10 AM	H2 valve closed
10/21/2011	10:02:10 AM	BCl3 valve closed
10/21/2011	10:02:10 AM	PH3 valve closed
10/21/2011	10:02:10 AM	SiCl4 pre valve closed
10/21/2011	10:02:10 AM	SiCl4 post valve closed
10/21/2011	10:02:10 AM	Bypass valve closed
10/21/2011	10:02:10 AM	Bubbler valve closed
10/21/2011	10:02:10 AM	Helium valve opened
10/21/2011	10:02:10 AM	Main Vac valve opened
10/21/2011	10:02:10 AM	Helium MFC set to  20.000000
10/21/2011	10:02:10 AM	H2 MFC set to  0.000000
10/21/2011	10:02:10 AM	BCl3 MFC set to  0.000000
10/21/2011	10:02:10 AM	PHl3 MFC set to  0.000000
10/21/2011	10:02:10 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:02:10 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:02:10 AM	Tube furnace set to 150
10/21/2011	10:02:40 AM	Helium valve closed
10/21/2011	10:02:40 AM	H2 valve closed
10/21/2011	10:02:40 AM	BCl3 valve closed
10/21/2011	10:02:40 AM	PH3 valve closed
10/21/2011	10:02:40 AM	SiCl4 pre valve closed
10/21/2011	10:02:40 AM	SiCl4 post valve closed
10/21/2011	10:02:40 AM	Bypass valve closed
10/21/2011	10:02:40 AM	Bubbler valve closed
10/21/2011	10:02:40 AM	Main Vac valve opened
10/21/2011	10:02:40 AM	Helium MFC set to  0.000000
10/21/2011	10:02:40 AM	H2 MFC set to  0.000000
10/21/2011	10:02:40 AM	BCl3 MFC set to  0.000000
10/21/2011	10:02:40 AM	PHl3 MFC set to  0.000000
10/21/2011	10:02:40 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:02:40 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:02:41 AM	Tube furnace set to 150
10/21/2011	10:03:11 AM	H2 valve closed
10/21/2011	10:03:11 AM	BCl3 valve closed
10/21/2011	10:03:11 AM	PH3 valve closed
10/21/2011	10:03:11 AM	SiCl4 pre valve closed
10/21/2011	10:03:11 AM	SiCl4 post valve closed
10/21/2011	10:03:11 AM	Bypass valve closed
10/21/2011	10:03:11 AM	Bubbler valve closed
10/21/2011	10:03:11 AM	Helium valve opened
10/21/2011	10:03:11 AM	Main Vac valve opened
10/21/2011	10:03:11 AM	Helium MFC set to  20.000000
10/21/2011	10:03:11 AM	H2 MFC set to  0.000000
10/21/2011	10:03:11 AM	BCl3 MFC set to  0.000000
10/21/2011	10:03:11 AM	PHl3 MFC set to  0.000000
10/21/2011	10:03:11 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:03:11 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:03:11 AM	Tube furnace set to 150
10/21/2011	10:03:41 AM	Helium valve closed
10/21/2011	10:03:41 AM	H2 valve closed
10/21/2011	10:03:41 AM	BCl3 valve closed
10/21/2011	10:03:41 AM	PH3 valve closed
10/21/2011	10:03:41 AM	SiCl4 pre valve closed
10/21/2011	10:03:41 AM	SiCl4 post valve closed
10/21/2011	10:03:41 AM	Bypass valve closed
10/21/2011	10:03:41 AM	Bubbler valve closed
10/21/2011	10:03:41 AM	Main Vac valve opened
10/21/2011	10:03:41 AM	Helium MFC set to  0.000000
10/21/2011	10:03:41 AM	H2 MFC set to  0.000000
10/21/2011	10:03:41 AM	BCl3 MFC set to  0.000000
10/21/2011	10:03:41 AM	PHl3 MFC set to  0.000000
10/21/2011	10:03:41 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:03:41 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:03:41 AM	Tube furnace set to 150
10/21/2011	10:04:11 AM	H2 valve closed
10/21/2011	10:04:11 AM	BCl3 valve closed
10/21/2011	10:04:11 AM	PH3 valve closed
10/21/2011	10:04:11 AM	SiCl4 pre valve closed
10/21/2011	10:04:11 AM	SiCl4 post valve closed
10/21/2011	10:04:11 AM	Bypass valve closed
10/21/2011	10:04:11 AM	Bubbler valve closed
10/21/2011	10:04:11 AM	Helium valve opened
10/21/2011	10:04:11 AM	Main Vac valve opened
10/21/2011	10:04:11 AM	Helium MFC set to  20.000000
10/21/2011	10:04:11 AM	H2 MFC set to  0.000000
10/21/2011	10:04:11 AM	BCl3 MFC set to  0.000000
10/21/2011	10:04:11 AM	PHl3 MFC set to  0.000000
10/21/2011	10:04:11 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:04:11 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:04:11 AM	Tube furnace set to 150
10/21/2011	10:04:41 AM	Helium valve closed
10/21/2011	10:04:41 AM	H2 valve closed
10/21/2011	10:04:41 AM	BCl3 valve closed
10/21/2011	10:04:41 AM	PH3 valve closed
10/21/2011	10:04:41 AM	SiCl4 pre valve closed
10/21/2011	10:04:41 AM	SiCl4 post valve closed
10/21/2011	10:04:41 AM	Bypass valve closed
10/21/2011	10:04:41 AM	Bubbler valve closed
10/21/2011	10:04:41 AM	Main Vac valve opened
10/21/2011	10:04:41 AM	Helium MFC set to  0.000000
10/21/2011	10:04:41 AM	H2 MFC set to  0.000000
10/21/2011	10:04:41 AM	BCl3 MFC set to  0.000000
10/21/2011	10:04:41 AM	PHl3 MFC set to  0.000000
10/21/2011	10:04:41 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:04:41 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:04:41 AM	Tube furnace set to 150
10/21/2011	10:05:11 AM	H2 valve closed
10/21/2011	10:05:11 AM	BCl3 valve closed
10/21/2011	10:05:11 AM	PH3 valve closed
10/21/2011	10:05:11 AM	SiCl4 pre valve closed
10/21/2011	10:05:11 AM	SiCl4 post valve closed
10/21/2011	10:05:11 AM	Bypass valve closed
10/21/2011	10:05:11 AM	Bubbler valve closed
10/21/2011	10:05:11 AM	Helium valve opened
10/21/2011	10:05:11 AM	Main Vac valve opened
10/21/2011	10:05:11 AM	Helium MFC set to  20.000000
10/21/2011	10:05:11 AM	H2 MFC set to  0.000000
10/21/2011	10:05:11 AM	BCl3 MFC set to  0.000000
10/21/2011	10:05:11 AM	PHl3 MFC set to  0.000000
10/21/2011	10:05:11 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:05:11 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:05:12 AM	Tube furnace set to 150
10/21/2011	10:05:42 AM	Helium valve closed
10/21/2011	10:05:42 AM	H2 valve closed
10/21/2011	10:05:42 AM	BCl3 valve closed
10/21/2011	10:05:42 AM	PH3 valve closed
10/21/2011	10:05:42 AM	SiCl4 pre valve closed
10/21/2011	10:05:42 AM	SiCl4 post valve closed
10/21/2011	10:05:42 AM	Bypass valve closed
10/21/2011	10:05:42 AM	Bubbler valve closed
10/21/2011	10:05:42 AM	Main Vac valve opened
10/21/2011	10:05:42 AM	Helium MFC set to  0.000000
10/21/2011	10:05:42 AM	H2 MFC set to  0.000000
10/21/2011	10:05:42 AM	BCl3 MFC set to  0.000000
10/21/2011	10:05:42 AM	PHl3 MFC set to  0.000000
10/21/2011	10:05:42 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:05:42 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:05:42 AM	Tube furnace set to 150
10/21/2011	10:05:43 AM	Run finished at 10:05 AM
10/21/2011	10:08:03 AM	Main Vac valve closed
10/21/2011	10:08:14 AM	Main Vac valve opened
10/21/2011	10:09:15 AM	Recipe started at 10:09 AM
10/21/2011	10:09:15 AM	Helium valve closed
10/21/2011	10:09:15 AM	H2 valve closed
10/21/2011	10:09:15 AM	BCl3 valve closed
10/21/2011	10:09:15 AM	PH3 valve closed
10/21/2011	10:09:15 AM	SiCl4 pre valve closed
10/21/2011	10:09:15 AM	SiCl4 post valve closed
10/21/2011	10:09:15 AM	Bypass valve closed
10/21/2011	10:09:15 AM	Bubbler valve closed
10/21/2011	10:09:15 AM	Main Vac valve opened
10/21/2011	10:09:15 AM	Helium MFC set to  0.000000
10/21/2011	10:09:15 AM	H2 MFC set to  0.000000
10/21/2011	10:09:15 AM	BCl3 MFC set to  0.000000
10/21/2011	10:09:15 AM	PHl3 MFC set to  0.000000
10/21/2011	10:09:15 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:09:15 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:09:15 AM	Tube furnace set to 150
10/21/2011	10:09:20 AM	H2 valve closed
10/21/2011	10:09:20 AM	BCl3 valve closed
10/21/2011	10:09:20 AM	PH3 valve closed
10/21/2011	10:09:20 AM	SiCl4 pre valve closed
10/21/2011	10:09:20 AM	SiCl4 post valve closed
10/21/2011	10:09:20 AM	Bypass valve closed
10/21/2011	10:09:20 AM	Bubbler valve closed
10/21/2011	10:09:20 AM	Helium valve opened
10/21/2011	10:09:20 AM	Main Vac valve opened
10/21/2011	10:09:20 AM	Helium MFC set to  20.000000
10/21/2011	10:09:20 AM	H2 MFC set to  0.000000
10/21/2011	10:09:20 AM	BCl3 MFC set to  0.000000
10/21/2011	10:09:20 AM	PHl3 MFC set to  0.000000
10/21/2011	10:09:20 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:09:20 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:09:20 AM	Tube furnace set to 150
10/21/2011	10:09:50 AM	Helium valve closed
10/21/2011	10:09:50 AM	H2 valve closed
10/21/2011	10:09:50 AM	BCl3 valve closed
10/21/2011	10:09:50 AM	PH3 valve closed
10/21/2011	10:09:50 AM	SiCl4 pre valve closed
10/21/2011	10:09:50 AM	SiCl4 post valve closed
10/21/2011	10:09:50 AM	Bypass valve closed
10/21/2011	10:09:50 AM	Bubbler valve closed
10/21/2011	10:09:50 AM	Main Vac valve opened
10/21/2011	10:09:50 AM	Helium MFC set to  0.000000
10/21/2011	10:09:50 AM	H2 MFC set to  0.000000
10/21/2011	10:09:50 AM	BCl3 MFC set to  0.000000
10/21/2011	10:09:50 AM	PHl3 MFC set to  0.000000
10/21/2011	10:09:50 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:09:50 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:09:50 AM	Tube furnace set to 150
10/21/2011	10:10:20 AM	H2 valve closed
10/21/2011	10:10:20 AM	BCl3 valve closed
10/21/2011	10:10:20 AM	PH3 valve closed
10/21/2011	10:10:20 AM	SiCl4 pre valve closed
10/21/2011	10:10:20 AM	SiCl4 post valve closed
10/21/2011	10:10:20 AM	Bypass valve closed
10/21/2011	10:10:20 AM	Bubbler valve closed
10/21/2011	10:10:20 AM	Helium valve opened
10/21/2011	10:10:20 AM	Main Vac valve opened
10/21/2011	10:10:20 AM	Helium MFC set to  20.000000
10/21/2011	10:10:20 AM	H2 MFC set to  0.000000
10/21/2011	10:10:20 AM	BCl3 MFC set to  0.000000
10/21/2011	10:10:20 AM	PHl3 MFC set to  0.000000
10/21/2011	10:10:20 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:10:20 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:10:21 AM	Tube furnace set to 150
10/21/2011	10:10:51 AM	Helium valve closed
10/21/2011	10:10:51 AM	H2 valve closed
10/21/2011	10:10:51 AM	BCl3 valve closed
10/21/2011	10:10:51 AM	PH3 valve closed
10/21/2011	10:10:51 AM	SiCl4 pre valve closed
10/21/2011	10:10:51 AM	SiCl4 post valve closed
10/21/2011	10:10:51 AM	Bypass valve closed
10/21/2011	10:10:51 AM	Bubbler valve closed
10/21/2011	10:10:51 AM	Main Vac valve opened
10/21/2011	10:10:51 AM	Helium MFC set to  0.000000
10/21/2011	10:10:51 AM	H2 MFC set to  0.000000
10/21/2011	10:10:51 AM	BCl3 MFC set to  0.000000
10/21/2011	10:10:51 AM	PHl3 MFC set to  0.000000
10/21/2011	10:10:51 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:10:51 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:10:51 AM	Tube furnace set to 150
10/21/2011	10:11:21 AM	H2 valve closed
10/21/2011	10:11:21 AM	BCl3 valve closed
10/21/2011	10:11:21 AM	PH3 valve closed
10/21/2011	10:11:21 AM	SiCl4 pre valve closed
10/21/2011	10:11:21 AM	SiCl4 post valve closed
10/21/2011	10:11:21 AM	Bypass valve closed
10/21/2011	10:11:21 AM	Bubbler valve closed
10/21/2011	10:11:21 AM	Helium valve opened
10/21/2011	10:11:21 AM	Main Vac valve opened
10/21/2011	10:11:21 AM	Helium MFC set to  20.000000
10/21/2011	10:11:21 AM	H2 MFC set to  0.000000
10/21/2011	10:11:21 AM	BCl3 MFC set to  0.000000
10/21/2011	10:11:21 AM	PHl3 MFC set to  0.000000
10/21/2011	10:11:21 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:11:21 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:11:21 AM	Tube furnace set to 150
10/21/2011	10:11:51 AM	Helium valve closed
10/21/2011	10:11:51 AM	H2 valve closed
10/21/2011	10:11:51 AM	BCl3 valve closed
10/21/2011	10:11:51 AM	PH3 valve closed
10/21/2011	10:11:51 AM	SiCl4 pre valve closed
10/21/2011	10:11:51 AM	SiCl4 post valve closed
10/21/2011	10:11:51 AM	Bypass valve closed
10/21/2011	10:11:51 AM	Bubbler valve closed
10/21/2011	10:11:51 AM	Main Vac valve opened
10/21/2011	10:11:51 AM	Helium MFC set to  0.000000
10/21/2011	10:11:51 AM	H2 MFC set to  0.000000
10/21/2011	10:11:51 AM	BCl3 MFC set to  0.000000
10/21/2011	10:11:51 AM	PHl3 MFC set to  0.000000
10/21/2011	10:11:51 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:11:51 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:11:51 AM	Tube furnace set to 150
10/21/2011	10:12:21 AM	H2 valve closed
10/21/2011	10:12:21 AM	BCl3 valve closed
10/21/2011	10:12:21 AM	PH3 valve closed
10/21/2011	10:12:21 AM	SiCl4 pre valve closed
10/21/2011	10:12:21 AM	SiCl4 post valve closed
10/21/2011	10:12:21 AM	Bypass valve closed
10/21/2011	10:12:21 AM	Bubbler valve closed
10/21/2011	10:12:21 AM	Helium valve opened
10/21/2011	10:12:21 AM	Main Vac valve opened
10/21/2011	10:12:21 AM	Helium MFC set to  20.000000
10/21/2011	10:12:21 AM	H2 MFC set to  0.000000
10/21/2011	10:12:21 AM	BCl3 MFC set to  0.000000
10/21/2011	10:12:21 AM	PHl3 MFC set to  0.000000
10/21/2011	10:12:21 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:12:21 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:12:21 AM	Tube furnace set to 150
10/21/2011	10:12:51 AM	Helium valve closed
10/21/2011	10:12:51 AM	H2 valve closed
10/21/2011	10:12:51 AM	BCl3 valve closed
10/21/2011	10:12:51 AM	PH3 valve closed
10/21/2011	10:12:51 AM	SiCl4 pre valve closed
10/21/2011	10:12:51 AM	SiCl4 post valve closed
10/21/2011	10:12:51 AM	Bypass valve closed
10/21/2011	10:12:51 AM	Bubbler valve closed
10/21/2011	10:12:51 AM	Main Vac valve opened
10/21/2011	10:12:51 AM	Helium MFC set to  0.000000
10/21/2011	10:12:51 AM	H2 MFC set to  0.000000
10/21/2011	10:12:51 AM	BCl3 MFC set to  0.000000
10/21/2011	10:12:51 AM	PHl3 MFC set to  0.000000
10/21/2011	10:12:51 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:12:51 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:12:52 AM	Tube furnace set to 150
10/21/2011	10:13:22 AM	H2 valve closed
10/21/2011	10:13:22 AM	BCl3 valve closed
10/21/2011	10:13:22 AM	PH3 valve closed
10/21/2011	10:13:22 AM	SiCl4 pre valve closed
10/21/2011	10:13:22 AM	SiCl4 post valve closed
10/21/2011	10:13:22 AM	Bypass valve closed
10/21/2011	10:13:22 AM	Bubbler valve closed
10/21/2011	10:13:22 AM	Helium valve opened
10/21/2011	10:13:22 AM	Main Vac valve opened
10/21/2011	10:13:22 AM	Helium MFC set to  20.000000
10/21/2011	10:13:22 AM	H2 MFC set to  0.000000
10/21/2011	10:13:22 AM	BCl3 MFC set to  0.000000
10/21/2011	10:13:22 AM	PHl3 MFC set to  0.000000
10/21/2011	10:13:22 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:13:22 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:13:22 AM	Tube furnace set to 150
10/21/2011	10:13:52 AM	Helium valve closed
10/21/2011	10:13:52 AM	H2 valve closed
10/21/2011	10:13:52 AM	BCl3 valve closed
10/21/2011	10:13:52 AM	PH3 valve closed
10/21/2011	10:13:52 AM	SiCl4 pre valve closed
10/21/2011	10:13:52 AM	SiCl4 post valve closed
10/21/2011	10:13:52 AM	Bypass valve closed
10/21/2011	10:13:52 AM	Bubbler valve closed
10/21/2011	10:13:52 AM	Main Vac valve opened
10/21/2011	10:13:52 AM	Helium MFC set to  0.000000
10/21/2011	10:13:52 AM	H2 MFC set to  0.000000
10/21/2011	10:13:52 AM	BCl3 MFC set to  0.000000
10/21/2011	10:13:52 AM	PHl3 MFC set to  0.000000
10/21/2011	10:13:52 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:13:52 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:13:52 AM	Tube furnace set to 150
10/21/2011	10:14:22 AM	H2 valve closed
10/21/2011	10:14:22 AM	BCl3 valve closed
10/21/2011	10:14:22 AM	PH3 valve closed
10/21/2011	10:14:22 AM	SiCl4 pre valve closed
10/21/2011	10:14:22 AM	SiCl4 post valve closed
10/21/2011	10:14:22 AM	Bypass valve closed
10/21/2011	10:14:22 AM	Bubbler valve closed
10/21/2011	10:14:22 AM	Helium valve opened
10/21/2011	10:14:22 AM	Main Vac valve opened
10/21/2011	10:14:22 AM	Helium MFC set to  20.000000
10/21/2011	10:14:22 AM	H2 MFC set to  0.000000
10/21/2011	10:14:22 AM	BCl3 MFC set to  0.000000
10/21/2011	10:14:22 AM	PHl3 MFC set to  0.000000
10/21/2011	10:14:22 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:14:22 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:14:22 AM	Tube furnace set to 150
10/21/2011	10:14:52 AM	Helium valve closed
10/21/2011	10:14:52 AM	H2 valve closed
10/21/2011	10:14:52 AM	BCl3 valve closed
10/21/2011	10:14:52 AM	PH3 valve closed
10/21/2011	10:14:52 AM	SiCl4 pre valve closed
10/21/2011	10:14:52 AM	SiCl4 post valve closed
10/21/2011	10:14:52 AM	Bypass valve closed
10/21/2011	10:14:52 AM	Bubbler valve closed
10/21/2011	10:14:52 AM	Main Vac valve opened
10/21/2011	10:14:52 AM	Helium MFC set to  0.000000
10/21/2011	10:14:52 AM	H2 MFC set to  0.000000
10/21/2011	10:14:52 AM	BCl3 MFC set to  0.000000
10/21/2011	10:14:52 AM	PHl3 MFC set to  0.000000
10/21/2011	10:14:52 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:14:52 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:14:52 AM	Tube furnace set to 150
10/21/2011	10:15:22 AM	H2 valve closed
10/21/2011	10:15:22 AM	BCl3 valve closed
10/21/2011	10:15:22 AM	PH3 valve closed
10/21/2011	10:15:22 AM	SiCl4 pre valve closed
10/21/2011	10:15:22 AM	SiCl4 post valve closed
10/21/2011	10:15:22 AM	Bypass valve closed
10/21/2011	10:15:22 AM	Bubbler valve closed
10/21/2011	10:15:22 AM	Helium valve opened
10/21/2011	10:15:22 AM	Main Vac valve opened
10/21/2011	10:15:22 AM	Helium MFC set to  20.000000
10/21/2011	10:15:22 AM	H2 MFC set to  0.000000
10/21/2011	10:15:22 AM	BCl3 MFC set to  0.000000
10/21/2011	10:15:22 AM	PHl3 MFC set to  0.000000
10/21/2011	10:15:22 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:15:22 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:15:23 AM	Tube furnace set to 150
10/21/2011	10:15:53 AM	Helium valve closed
10/21/2011	10:15:53 AM	H2 valve closed
10/21/2011	10:15:53 AM	BCl3 valve closed
10/21/2011	10:15:53 AM	PH3 valve closed
10/21/2011	10:15:53 AM	SiCl4 pre valve closed
10/21/2011	10:15:53 AM	SiCl4 post valve closed
10/21/2011	10:15:53 AM	Bypass valve closed
10/21/2011	10:15:53 AM	Bubbler valve closed
10/21/2011	10:15:53 AM	Main Vac valve opened
10/21/2011	10:15:53 AM	Helium MFC set to  0.000000
10/21/2011	10:15:53 AM	H2 MFC set to  0.000000
10/21/2011	10:15:53 AM	BCl3 MFC set to  0.000000
10/21/2011	10:15:53 AM	PHl3 MFC set to  0.000000
10/21/2011	10:15:53 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:15:53 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:15:53 AM	Tube furnace set to 150
10/21/2011	10:16:23 AM	H2 valve closed
10/21/2011	10:16:23 AM	BCl3 valve closed
10/21/2011	10:16:23 AM	PH3 valve closed
10/21/2011	10:16:23 AM	SiCl4 pre valve closed
10/21/2011	10:16:23 AM	SiCl4 post valve closed
10/21/2011	10:16:23 AM	Bypass valve closed
10/21/2011	10:16:23 AM	Bubbler valve closed
10/21/2011	10:16:23 AM	Helium valve opened
10/21/2011	10:16:23 AM	Main Vac valve opened
10/21/2011	10:16:23 AM	Helium MFC set to  20.000000
10/21/2011	10:16:23 AM	H2 MFC set to  0.000000
10/21/2011	10:16:23 AM	BCl3 MFC set to  0.000000
10/21/2011	10:16:23 AM	PHl3 MFC set to  0.000000
10/21/2011	10:16:23 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:16:23 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:16:23 AM	Tube furnace set to 150
10/21/2011	10:16:53 AM	Helium valve closed
10/21/2011	10:16:53 AM	H2 valve closed
10/21/2011	10:16:53 AM	BCl3 valve closed
10/21/2011	10:16:53 AM	PH3 valve closed
10/21/2011	10:16:53 AM	SiCl4 pre valve closed
10/21/2011	10:16:53 AM	SiCl4 post valve closed
10/21/2011	10:16:53 AM	Bypass valve closed
10/21/2011	10:16:53 AM	Bubbler valve closed
10/21/2011	10:16:53 AM	Main Vac valve opened
10/21/2011	10:16:53 AM	Helium MFC set to  0.000000
10/21/2011	10:16:53 AM	H2 MFC set to  0.000000
10/21/2011	10:16:53 AM	BCl3 MFC set to  0.000000
10/21/2011	10:16:53 AM	PHl3 MFC set to  0.000000
10/21/2011	10:16:53 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:16:53 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:16:53 AM	Tube furnace set to 150
10/21/2011	10:17:23 AM	H2 valve closed
10/21/2011	10:17:23 AM	BCl3 valve closed
10/21/2011	10:17:23 AM	PH3 valve closed
10/21/2011	10:17:23 AM	SiCl4 pre valve closed
10/21/2011	10:17:23 AM	SiCl4 post valve closed
10/21/2011	10:17:23 AM	Bypass valve closed
10/21/2011	10:17:23 AM	Bubbler valve closed
10/21/2011	10:17:23 AM	Helium valve opened
10/21/2011	10:17:23 AM	Main Vac valve opened
10/21/2011	10:17:23 AM	Helium MFC set to  20.000000
10/21/2011	10:17:23 AM	H2 MFC set to  0.000000
10/21/2011	10:17:23 AM	BCl3 MFC set to  0.000000
10/21/2011	10:17:23 AM	PHl3 MFC set to  0.000000
10/21/2011	10:17:23 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:17:23 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:17:23 AM	Tube furnace set to 150
10/21/2011	10:17:53 AM	Helium valve closed
10/21/2011	10:17:53 AM	H2 valve closed
10/21/2011	10:17:53 AM	BCl3 valve closed
10/21/2011	10:17:53 AM	PH3 valve closed
10/21/2011	10:17:53 AM	SiCl4 pre valve closed
10/21/2011	10:17:53 AM	SiCl4 post valve closed
10/21/2011	10:17:53 AM	Bypass valve closed
10/21/2011	10:17:53 AM	Bubbler valve closed
10/21/2011	10:17:53 AM	Main Vac valve opened
10/21/2011	10:17:53 AM	Helium MFC set to  0.000000
10/21/2011	10:17:53 AM	H2 MFC set to  0.000000
10/21/2011	10:17:53 AM	BCl3 MFC set to  0.000000
10/21/2011	10:17:53 AM	PHl3 MFC set to  0.000000
10/21/2011	10:17:53 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:17:53 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:17:53 AM	Tube furnace set to 150
10/21/2011	10:18:24 AM	H2 valve closed
10/21/2011	10:18:24 AM	BCl3 valve closed
10/21/2011	10:18:24 AM	PH3 valve closed
10/21/2011	10:18:24 AM	SiCl4 pre valve closed
10/21/2011	10:18:24 AM	SiCl4 post valve closed
10/21/2011	10:18:24 AM	Bypass valve closed
10/21/2011	10:18:24 AM	Bubbler valve closed
10/21/2011	10:18:24 AM	Helium valve opened
10/21/2011	10:18:24 AM	Main Vac valve opened
10/21/2011	10:18:24 AM	Helium MFC set to  20.000000
10/21/2011	10:18:24 AM	H2 MFC set to  0.000000
10/21/2011	10:18:24 AM	BCl3 MFC set to  0.000000
10/21/2011	10:18:24 AM	PHl3 MFC set to  0.000000
10/21/2011	10:18:24 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:18:24 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:18:24 AM	Tube furnace set to 150
10/21/2011	10:18:54 AM	Helium valve closed
10/21/2011	10:18:54 AM	H2 valve closed
10/21/2011	10:18:54 AM	BCl3 valve closed
10/21/2011	10:18:54 AM	PH3 valve closed
10/21/2011	10:18:54 AM	SiCl4 pre valve closed
10/21/2011	10:18:54 AM	SiCl4 post valve closed
10/21/2011	10:18:54 AM	Bypass valve closed
10/21/2011	10:18:54 AM	Bubbler valve closed
10/21/2011	10:18:54 AM	Main Vac valve opened
10/21/2011	10:18:54 AM	Helium MFC set to  0.000000
10/21/2011	10:18:54 AM	H2 MFC set to  0.000000
10/21/2011	10:18:54 AM	BCl3 MFC set to  0.000000
10/21/2011	10:18:54 AM	PHl3 MFC set to  0.000000
10/21/2011	10:18:54 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:18:54 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:18:54 AM	Tube furnace set to 150
10/21/2011	10:18:55 AM	Run finished at 10:18 AM
10/21/2011	10:23:35 AM	Main Vac valve closed
10/21/2011	10:23:44 AM	Main Vac valve opened
10/21/2011	10:24:09 AM	Recipe started at 10:24 AM
10/21/2011	10:24:09 AM	Helium valve closed
10/21/2011	10:24:09 AM	H2 valve closed
10/21/2011	10:24:09 AM	BCl3 valve closed
10/21/2011	10:24:09 AM	PH3 valve closed
10/21/2011	10:24:09 AM	SiCl4 pre valve closed
10/21/2011	10:24:09 AM	SiCl4 post valve closed
10/21/2011	10:24:09 AM	Bypass valve closed
10/21/2011	10:24:09 AM	Bubbler valve closed
10/21/2011	10:24:09 AM	Main Vac valve opened
10/21/2011	10:24:09 AM	Helium MFC set to  0.000000
10/21/2011	10:24:09 AM	H2 MFC set to  0.000000
10/21/2011	10:24:09 AM	BCl3 MFC set to  0.000000
10/21/2011	10:24:09 AM	PHl3 MFC set to  0.000000
10/21/2011	10:24:09 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:24:09 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:24:10 AM	Tube furnace set to 150
10/21/2011	10:24:10 AM	H2 valve closed
10/21/2011	10:24:10 AM	BCl3 valve closed
10/21/2011	10:24:10 AM	PH3 valve closed
10/21/2011	10:24:10 AM	SiCl4 pre valve closed
10/21/2011	10:24:10 AM	SiCl4 post valve closed
10/21/2011	10:24:10 AM	Bypass valve closed
10/21/2011	10:24:10 AM	Bubbler valve closed
10/21/2011	10:24:10 AM	Helium valve opened
10/21/2011	10:24:10 AM	Main Vac valve opened
10/21/2011	10:24:10 AM	Helium MFC set to  20.000000
10/21/2011	10:24:10 AM	H2 MFC set to  0.000000
10/21/2011	10:24:10 AM	BCl3 MFC set to  0.000000
10/21/2011	10:24:10 AM	PHl3 MFC set to  0.000000
10/21/2011	10:24:10 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:24:10 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:24:10 AM	Tube furnace set to 150
10/21/2011	10:24:40 AM	Helium valve closed
10/21/2011	10:24:40 AM	H2 valve closed
10/21/2011	10:24:40 AM	BCl3 valve closed
10/21/2011	10:24:40 AM	PH3 valve closed
10/21/2011	10:24:40 AM	SiCl4 pre valve closed
10/21/2011	10:24:40 AM	SiCl4 post valve closed
10/21/2011	10:24:40 AM	Bypass valve closed
10/21/2011	10:24:40 AM	Bubbler valve closed
10/21/2011	10:24:40 AM	Main Vac valve opened
10/21/2011	10:24:40 AM	Helium MFC set to  0.000000
10/21/2011	10:24:40 AM	H2 MFC set to  0.000000
10/21/2011	10:24:40 AM	BCl3 MFC set to  0.000000
10/21/2011	10:24:40 AM	PHl3 MFC set to  0.000000
10/21/2011	10:24:40 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:24:40 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:24:40 AM	Tube furnace set to 150
10/21/2011	10:25:10 AM	H2 valve closed
10/21/2011	10:25:10 AM	BCl3 valve closed
10/21/2011	10:25:10 AM	PH3 valve closed
10/21/2011	10:25:10 AM	SiCl4 pre valve closed
10/21/2011	10:25:10 AM	SiCl4 post valve closed
10/21/2011	10:25:10 AM	Bypass valve closed
10/21/2011	10:25:10 AM	Bubbler valve closed
10/21/2011	10:25:10 AM	Helium valve opened
10/21/2011	10:25:10 AM	Main Vac valve opened
10/21/2011	10:25:10 AM	Helium MFC set to  20.000000
10/21/2011	10:25:10 AM	H2 MFC set to  0.000000
10/21/2011	10:25:10 AM	BCl3 MFC set to  0.000000
10/21/2011	10:25:10 AM	PHl3 MFC set to  0.000000
10/21/2011	10:25:10 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:25:10 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:25:10 AM	Tube furnace set to 150
10/21/2011	10:25:40 AM	Helium valve closed
10/21/2011	10:25:40 AM	H2 valve closed
10/21/2011	10:25:40 AM	BCl3 valve closed
10/21/2011	10:25:40 AM	PH3 valve closed
10/21/2011	10:25:40 AM	SiCl4 pre valve closed
10/21/2011	10:25:40 AM	SiCl4 post valve closed
10/21/2011	10:25:40 AM	Bypass valve closed
10/21/2011	10:25:40 AM	Bubbler valve closed
10/21/2011	10:25:40 AM	Main Vac valve opened
10/21/2011	10:25:40 AM	Helium MFC set to  0.000000
10/21/2011	10:25:40 AM	H2 MFC set to  0.000000
10/21/2011	10:25:40 AM	BCl3 MFC set to  0.000000
10/21/2011	10:25:40 AM	PHl3 MFC set to  0.000000
10/21/2011	10:25:40 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:25:40 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:25:41 AM	Tube furnace set to 150
10/21/2011	10:26:11 AM	H2 valve closed
10/21/2011	10:26:11 AM	BCl3 valve closed
10/21/2011	10:26:11 AM	PH3 valve closed
10/21/2011	10:26:11 AM	SiCl4 pre valve closed
10/21/2011	10:26:11 AM	SiCl4 post valve closed
10/21/2011	10:26:11 AM	Bypass valve closed
10/21/2011	10:26:11 AM	Bubbler valve closed
10/21/2011	10:26:11 AM	Helium valve opened
10/21/2011	10:26:11 AM	Main Vac valve opened
10/21/2011	10:26:11 AM	Helium MFC set to  20.000000
10/21/2011	10:26:11 AM	H2 MFC set to  0.000000
10/21/2011	10:26:11 AM	BCl3 MFC set to  0.000000
10/21/2011	10:26:11 AM	PHl3 MFC set to  0.000000
10/21/2011	10:26:11 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:26:11 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:26:11 AM	Tube furnace set to 150
10/21/2011	10:26:41 AM	Helium valve closed
10/21/2011	10:26:41 AM	H2 valve closed
10/21/2011	10:26:41 AM	BCl3 valve closed
10/21/2011	10:26:41 AM	PH3 valve closed
10/21/2011	10:26:41 AM	SiCl4 pre valve closed
10/21/2011	10:26:41 AM	SiCl4 post valve closed
10/21/2011	10:26:41 AM	Bypass valve closed
10/21/2011	10:26:41 AM	Bubbler valve closed
10/21/2011	10:26:41 AM	Main Vac valve opened
10/21/2011	10:26:41 AM	Helium MFC set to  0.000000
10/21/2011	10:26:41 AM	H2 MFC set to  0.000000
10/21/2011	10:26:41 AM	BCl3 MFC set to  0.000000
10/21/2011	10:26:41 AM	PHl3 MFC set to  0.000000
10/21/2011	10:26:41 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:26:41 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:26:41 AM	Tube furnace set to 150
10/21/2011	10:27:11 AM	H2 valve closed
10/21/2011	10:27:11 AM	BCl3 valve closed
10/21/2011	10:27:11 AM	PH3 valve closed
10/21/2011	10:27:11 AM	SiCl4 pre valve closed
10/21/2011	10:27:11 AM	SiCl4 post valve closed
10/21/2011	10:27:11 AM	Bypass valve closed
10/21/2011	10:27:11 AM	Bubbler valve closed
10/21/2011	10:27:11 AM	Helium valve opened
10/21/2011	10:27:11 AM	Main Vac valve opened
10/21/2011	10:27:11 AM	Helium MFC set to  20.000000
10/21/2011	10:27:11 AM	H2 MFC set to  0.000000
10/21/2011	10:27:11 AM	BCl3 MFC set to  0.000000
10/21/2011	10:27:11 AM	PHl3 MFC set to  0.000000
10/21/2011	10:27:11 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:27:11 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:27:11 AM	Tube furnace set to 150
10/21/2011	10:27:41 AM	Helium valve closed
10/21/2011	10:27:41 AM	H2 valve closed
10/21/2011	10:27:41 AM	BCl3 valve closed
10/21/2011	10:27:41 AM	PH3 valve closed
10/21/2011	10:27:41 AM	SiCl4 pre valve closed
10/21/2011	10:27:41 AM	SiCl4 post valve closed
10/21/2011	10:27:41 AM	Bypass valve closed
10/21/2011	10:27:41 AM	Bubbler valve closed
10/21/2011	10:27:41 AM	Main Vac valve opened
10/21/2011	10:27:41 AM	Helium MFC set to  0.000000
10/21/2011	10:27:41 AM	H2 MFC set to  0.000000
10/21/2011	10:27:41 AM	BCl3 MFC set to  0.000000
10/21/2011	10:27:41 AM	PHl3 MFC set to  0.000000
10/21/2011	10:27:41 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:27:41 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:27:41 AM	Tube furnace set to 150
10/21/2011	10:28:11 AM	H2 valve closed
10/21/2011	10:28:11 AM	BCl3 valve closed
10/21/2011	10:28:11 AM	PH3 valve closed
10/21/2011	10:28:11 AM	SiCl4 pre valve closed
10/21/2011	10:28:11 AM	SiCl4 post valve closed
10/21/2011	10:28:11 AM	Bypass valve closed
10/21/2011	10:28:11 AM	Bubbler valve closed
10/21/2011	10:28:11 AM	Helium valve opened
10/21/2011	10:28:12 AM	Main Vac valve opened
10/21/2011	10:28:12 AM	Helium MFC set to  20.000000
10/21/2011	10:28:12 AM	H2 MFC set to  0.000000
10/21/2011	10:28:12 AM	BCl3 MFC set to  0.000000
10/21/2011	10:28:12 AM	PHl3 MFC set to  0.000000
10/21/2011	10:28:12 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:28:12 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:28:12 AM	Tube furnace set to 150
10/21/2011	10:28:42 AM	Helium valve closed
10/21/2011	10:28:42 AM	H2 valve closed
10/21/2011	10:28:42 AM	BCl3 valve closed
10/21/2011	10:28:42 AM	PH3 valve closed
10/21/2011	10:28:42 AM	SiCl4 pre valve closed
10/21/2011	10:28:42 AM	SiCl4 post valve closed
10/21/2011	10:28:42 AM	Bypass valve closed
10/21/2011	10:28:42 AM	Bubbler valve closed
10/21/2011	10:28:42 AM	Main Vac valve opened
10/21/2011	10:28:42 AM	Helium MFC set to  0.000000
10/21/2011	10:28:42 AM	H2 MFC set to  0.000000
10/21/2011	10:28:42 AM	BCl3 MFC set to  0.000000
10/21/2011	10:28:42 AM	PHl3 MFC set to  0.000000
10/21/2011	10:28:42 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:28:42 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:28:42 AM	Tube furnace set to 150
10/21/2011	10:29:12 AM	H2 valve closed
10/21/2011	10:29:12 AM	BCl3 valve closed
10/21/2011	10:29:12 AM	PH3 valve closed
10/21/2011	10:29:12 AM	SiCl4 pre valve closed
10/21/2011	10:29:12 AM	SiCl4 post valve closed
10/21/2011	10:29:12 AM	Bypass valve closed
10/21/2011	10:29:12 AM	Bubbler valve closed
10/21/2011	10:29:12 AM	Helium valve opened
10/21/2011	10:29:12 AM	Main Vac valve opened
10/21/2011	10:29:12 AM	Helium MFC set to  20.000000
10/21/2011	10:29:12 AM	H2 MFC set to  0.000000
10/21/2011	10:29:12 AM	BCl3 MFC set to  0.000000
10/21/2011	10:29:12 AM	PHl3 MFC set to  0.000000
10/21/2011	10:29:12 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:29:12 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:29:12 AM	Tube furnace set to 150
10/21/2011	10:29:42 AM	Helium valve closed
10/21/2011	10:29:42 AM	H2 valve closed
10/21/2011	10:29:42 AM	BCl3 valve closed
10/21/2011	10:29:42 AM	PH3 valve closed
10/21/2011	10:29:42 AM	SiCl4 pre valve closed
10/21/2011	10:29:42 AM	SiCl4 post valve closed
10/21/2011	10:29:42 AM	Bypass valve closed
10/21/2011	10:29:42 AM	Bubbler valve closed
10/21/2011	10:29:42 AM	Main Vac valve opened
10/21/2011	10:29:42 AM	Helium MFC set to  0.000000
10/21/2011	10:29:42 AM	H2 MFC set to  0.000000
10/21/2011	10:29:42 AM	BCl3 MFC set to  0.000000
10/21/2011	10:29:42 AM	PHl3 MFC set to  0.000000
10/21/2011	10:29:42 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:29:42 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:29:42 AM	Tube furnace set to 150
10/21/2011	10:30:12 AM	H2 valve closed
10/21/2011	10:30:12 AM	BCl3 valve closed
10/21/2011	10:30:12 AM	PH3 valve closed
10/21/2011	10:30:12 AM	SiCl4 pre valve closed
10/21/2011	10:30:12 AM	SiCl4 post valve closed
10/21/2011	10:30:12 AM	Bypass valve closed
10/21/2011	10:30:12 AM	Bubbler valve closed
10/21/2011	10:30:12 AM	Helium valve opened
10/21/2011	10:30:12 AM	Main Vac valve opened
10/21/2011	10:30:12 AM	Helium MFC set to  20.000000
10/21/2011	10:30:12 AM	H2 MFC set to  0.000000
10/21/2011	10:30:12 AM	BCl3 MFC set to  0.000000
10/21/2011	10:30:12 AM	PHl3 MFC set to  0.000000
10/21/2011	10:30:12 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:30:12 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:30:13 AM	Tube furnace set to 150
10/21/2011	10:30:43 AM	Helium valve closed
10/21/2011	10:30:43 AM	H2 valve closed
10/21/2011	10:30:43 AM	BCl3 valve closed
10/21/2011	10:30:43 AM	PH3 valve closed
10/21/2011	10:30:43 AM	SiCl4 pre valve closed
10/21/2011	10:30:43 AM	SiCl4 post valve closed
10/21/2011	10:30:43 AM	Bypass valve closed
10/21/2011	10:30:43 AM	Bubbler valve closed
10/21/2011	10:30:43 AM	Main Vac valve opened
10/21/2011	10:30:43 AM	Helium MFC set to  0.000000
10/21/2011	10:30:43 AM	H2 MFC set to  0.000000
10/21/2011	10:30:43 AM	BCl3 MFC set to  0.000000
10/21/2011	10:30:43 AM	PHl3 MFC set to  0.000000
10/21/2011	10:30:43 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:30:43 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:30:43 AM	Tube furnace set to 150
10/21/2011	10:31:13 AM	H2 valve closed
10/21/2011	10:31:13 AM	BCl3 valve closed
10/21/2011	10:31:13 AM	PH3 valve closed
10/21/2011	10:31:13 AM	SiCl4 pre valve closed
10/21/2011	10:31:13 AM	SiCl4 post valve closed
10/21/2011	10:31:13 AM	Bypass valve closed
10/21/2011	10:31:13 AM	Bubbler valve closed
10/21/2011	10:31:13 AM	Helium valve opened
10/21/2011	10:31:13 AM	Main Vac valve opened
10/21/2011	10:31:13 AM	Helium MFC set to  20.000000
10/21/2011	10:31:13 AM	H2 MFC set to  0.000000
10/21/2011	10:31:13 AM	BCl3 MFC set to  0.000000
10/21/2011	10:31:13 AM	PHl3 MFC set to  0.000000
10/21/2011	10:31:13 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:31:13 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:31:13 AM	Tube furnace set to 150
10/21/2011	10:31:43 AM	Helium valve closed
10/21/2011	10:31:43 AM	H2 valve closed
10/21/2011	10:31:43 AM	BCl3 valve closed
10/21/2011	10:31:43 AM	PH3 valve closed
10/21/2011	10:31:43 AM	SiCl4 pre valve closed
10/21/2011	10:31:43 AM	SiCl4 post valve closed
10/21/2011	10:31:43 AM	Bypass valve closed
10/21/2011	10:31:43 AM	Bubbler valve closed
10/21/2011	10:31:43 AM	Main Vac valve opened
10/21/2011	10:31:43 AM	Helium MFC set to  0.000000
10/21/2011	10:31:43 AM	H2 MFC set to  0.000000
10/21/2011	10:31:43 AM	BCl3 MFC set to  0.000000
10/21/2011	10:31:43 AM	PHl3 MFC set to  0.000000
10/21/2011	10:31:43 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:31:43 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:31:43 AM	Tube furnace set to 150
10/21/2011	10:32:13 AM	H2 valve closed
10/21/2011	10:32:13 AM	BCl3 valve closed
10/21/2011	10:32:13 AM	PH3 valve closed
10/21/2011	10:32:13 AM	SiCl4 pre valve closed
10/21/2011	10:32:13 AM	SiCl4 post valve closed
10/21/2011	10:32:13 AM	Bypass valve closed
10/21/2011	10:32:13 AM	Bubbler valve closed
10/21/2011	10:32:13 AM	Helium valve opened
10/21/2011	10:32:13 AM	Main Vac valve opened
10/21/2011	10:32:13 AM	Helium MFC set to  20.000000
10/21/2011	10:32:13 AM	H2 MFC set to  0.000000
10/21/2011	10:32:13 AM	BCl3 MFC set to  0.000000
10/21/2011	10:32:13 AM	PHl3 MFC set to  0.000000
10/21/2011	10:32:13 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:32:13 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:32:13 AM	Tube furnace set to 150
10/21/2011	10:32:43 AM	Helium valve closed
10/21/2011	10:32:43 AM	H2 valve closed
10/21/2011	10:32:43 AM	BCl3 valve closed
10/21/2011	10:32:43 AM	PH3 valve closed
10/21/2011	10:32:43 AM	SiCl4 pre valve closed
10/21/2011	10:32:43 AM	SiCl4 post valve closed
10/21/2011	10:32:43 AM	Bypass valve closed
10/21/2011	10:32:43 AM	Bubbler valve closed
10/21/2011	10:32:43 AM	Main Vac valve opened
10/21/2011	10:32:43 AM	Helium MFC set to  0.000000
10/21/2011	10:32:43 AM	H2 MFC set to  0.000000
10/21/2011	10:32:43 AM	BCl3 MFC set to  0.000000
10/21/2011	10:32:43 AM	PHl3 MFC set to  0.000000
10/21/2011	10:32:43 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:32:43 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:32:44 AM	Tube furnace set to 150
10/21/2011	10:33:14 AM	H2 valve closed
10/21/2011	10:33:14 AM	BCl3 valve closed
10/21/2011	10:33:14 AM	PH3 valve closed
10/21/2011	10:33:14 AM	SiCl4 pre valve closed
10/21/2011	10:33:14 AM	SiCl4 post valve closed
10/21/2011	10:33:14 AM	Bypass valve closed
10/21/2011	10:33:14 AM	Bubbler valve closed
10/21/2011	10:33:14 AM	Helium valve opened
10/21/2011	10:33:14 AM	Main Vac valve opened
10/21/2011	10:33:14 AM	Helium MFC set to  20.000000
10/21/2011	10:33:14 AM	H2 MFC set to  0.000000
10/21/2011	10:33:14 AM	BCl3 MFC set to  0.000000
10/21/2011	10:33:14 AM	PHl3 MFC set to  0.000000
10/21/2011	10:33:14 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:33:14 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:33:14 AM	Tube furnace set to 150
10/21/2011	10:33:44 AM	Helium valve closed
10/21/2011	10:33:44 AM	H2 valve closed
10/21/2011	10:33:44 AM	BCl3 valve closed
10/21/2011	10:33:44 AM	PH3 valve closed
10/21/2011	10:33:44 AM	SiCl4 pre valve closed
10/21/2011	10:33:44 AM	SiCl4 post valve closed
10/21/2011	10:33:44 AM	Bypass valve closed
10/21/2011	10:33:44 AM	Bubbler valve closed
10/21/2011	10:33:44 AM	Main Vac valve opened
10/21/2011	10:33:44 AM	Helium MFC set to  0.000000
10/21/2011	10:33:44 AM	H2 MFC set to  0.000000
10/21/2011	10:33:44 AM	BCl3 MFC set to  0.000000
10/21/2011	10:33:44 AM	PHl3 MFC set to  0.000000
10/21/2011	10:33:44 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:33:44 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:33:44 AM	Tube furnace set to 150
10/21/2011	10:33:45 AM	Run finished at 10:33 AM
10/21/2011	10:37:13 AM	Recipe started at 10:37 AM
10/21/2011	10:37:13 AM	Helium valve closed
10/21/2011	10:37:13 AM	H2 valve closed
10/21/2011	10:37:13 AM	BCl3 valve closed
10/21/2011	10:37:13 AM	PH3 valve closed
10/21/2011	10:37:13 AM	SiCl4 pre valve closed
10/21/2011	10:37:13 AM	SiCl4 post valve closed
10/21/2011	10:37:13 AM	Main Vac valve closed
10/21/2011	10:37:13 AM	Bypass valve closed
10/21/2011	10:37:13 AM	Bubbler valve closed
10/21/2011	10:37:13 AM	Helium MFC set to  0.000000
10/21/2011	10:37:13 AM	H2 MFC set to  0.000000
10/21/2011	10:37:13 AM	BCl3 MFC set to  0.000000
10/21/2011	10:37:13 AM	PHl3 MFC set to  0.000000
10/21/2011	10:37:13 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:37:13 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:37:13 AM	Tube furnace set to 0
10/21/2011	10:37:16 AM	Helium valve closed
10/21/2011	10:37:16 AM	BCl3 valve closed
10/21/2011	10:37:16 AM	PH3 valve closed
10/21/2011	10:37:16 AM	SiCl4 pre valve closed
10/21/2011	10:37:16 AM	SiCl4 post valve closed
10/21/2011	10:37:16 AM	Main Vac valve closed
10/21/2011	10:37:16 AM	Bypass valve closed
10/21/2011	10:37:16 AM	Bubbler valve closed
10/21/2011	10:37:16 AM	H2 valve opened
10/21/2011	10:37:16 AM	Helium MFC set to  0.000000
10/21/2011	10:37:16 AM	H2 MFC set to  500.000000
10/21/2011	10:37:16 AM	BCl3 MFC set to  0.000000
10/21/2011	10:37:16 AM	PHl3 MFC set to  0.000000
10/21/2011	10:37:16 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:37:16 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:37:16 AM	Tube furnace set to 0
10/21/2011	10:38:20 AM	Helium valve closed
10/21/2011	10:38:20 AM	BCl3 valve closed
10/21/2011	10:38:20 AM	PH3 valve closed
10/21/2011	10:38:20 AM	SiCl4 pre valve closed
10/21/2011	10:38:20 AM	SiCl4 post valve closed
10/21/2011	10:38:20 AM	Main Vac valve closed
10/21/2011	10:38:20 AM	Bypass valve closed
10/21/2011	10:38:20 AM	H2 valve opened
10/21/2011	10:38:20 AM	Bubbler valve opened
10/21/2011	10:38:20 AM	Helium MFC set to  0.000000
10/21/2011	10:38:20 AM	H2 MFC set to  500.000000
10/21/2011	10:38:20 AM	BCl3 MFC set to  0.000000
10/21/2011	10:38:20 AM	PHl3 MFC set to  0.000000
10/21/2011	10:38:20 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:38:20 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:38:20 AM	Tube furnace set to 0
10/21/2011	10:38:21 AM	Helium valve closed
10/21/2011	10:38:21 AM	BCl3 valve closed
10/21/2011	10:38:21 AM	PH3 valve closed
10/21/2011	10:38:21 AM	SiCl4 pre valve closed
10/21/2011	10:38:21 AM	SiCl4 post valve closed
10/21/2011	10:38:21 AM	Main Vac valve closed
10/21/2011	10:38:21 AM	Bypass valve closed
10/21/2011	10:38:21 AM	H2 valve opened
10/21/2011	10:38:21 AM	Bubbler valve opened
10/21/2011	10:38:21 AM	Helium MFC set to  0.000000
10/21/2011	10:38:21 AM	H2 MFC set to  500.000000
10/21/2011	10:38:21 AM	BCl3 MFC set to  0.000000
10/21/2011	10:38:21 AM	PHl3 MFC set to  0.000000
10/21/2011	10:38:21 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:38:21 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:38:21 AM	Tube furnace set to 1025
10/21/2011	10:39:51 AM	Run aborted at 10:39 AM
10/21/2011	10:39:51 AM	Helium valve closed
10/21/2011	10:39:51 AM	H2 valve closed
10/21/2011	10:39:51 AM	BCl3 valve closed
10/21/2011	10:39:51 AM	PH3 valve closed
10/21/2011	10:39:51 AM	SiCl4 pre valve closed
10/21/2011	10:39:51 AM	SiCl4 post valve closed
10/21/2011	10:39:51 AM	Bypass valve closed
10/21/2011	10:39:51 AM	Main Vac valve closed
10/21/2011	10:39:51 AM	Bubbler valve closed
10/21/2011	10:39:51 AM	Helium MFC set to  0.000000
10/21/2011	10:39:51 AM	H2 MFC set to  0.000000
10/21/2011	10:39:51 AM	BCl3 MFC set to  0.000000
10/21/2011	10:39:51 AM	PHl3 MFC set to  0.000000
10/21/2011	10:39:51 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:39:51 AM	Tube furnace set to 0
10/21/2011	10:40:20 AM	Recipe started at 10:40 AM
10/21/2011	10:40:20 AM	Helium valve closed
10/21/2011	10:40:20 AM	H2 valve closed
10/21/2011	10:40:20 AM	BCl3 valve closed
10/21/2011	10:40:20 AM	PH3 valve closed
10/21/2011	10:40:20 AM	SiCl4 pre valve closed
10/21/2011	10:40:20 AM	SiCl4 post valve closed
10/21/2011	10:40:20 AM	Main Vac valve closed
10/21/2011	10:40:20 AM	Bypass valve closed
10/21/2011	10:40:20 AM	Bubbler valve closed
10/21/2011	10:40:20 AM	Helium MFC set to  0.000000
10/21/2011	10:40:20 AM	H2 MFC set to  0.000000
10/21/2011	10:40:20 AM	BCl3 MFC set to  0.000000
10/21/2011	10:40:20 AM	PHl3 MFC set to  0.000000
10/21/2011	10:40:20 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:40:20 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:40:20 AM	Tube furnace set to 0
10/21/2011	10:40:23 AM	Helium valve closed
10/21/2011	10:40:23 AM	BCl3 valve closed
10/21/2011	10:40:23 AM	PH3 valve closed
10/21/2011	10:40:23 AM	SiCl4 pre valve closed
10/21/2011	10:40:23 AM	SiCl4 post valve closed
10/21/2011	10:40:23 AM	Main Vac valve closed
10/21/2011	10:40:23 AM	Bypass valve closed
10/21/2011	10:40:23 AM	Bubbler valve closed
10/21/2011	10:40:23 AM	H2 valve opened
10/21/2011	10:40:23 AM	Helium MFC set to  0.000000
10/21/2011	10:40:23 AM	H2 MFC set to  500.000000
10/21/2011	10:40:23 AM	BCl3 MFC set to  0.000000
10/21/2011	10:40:23 AM	PHl3 MFC set to  0.000000
10/21/2011	10:40:23 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:40:23 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:40:23 AM	Tube furnace set to 0
10/21/2011	10:40:23 AM	Helium valve closed
10/21/2011	10:40:23 AM	BCl3 valve closed
10/21/2011	10:40:23 AM	PH3 valve closed
10/21/2011	10:40:23 AM	SiCl4 pre valve closed
10/21/2011	10:40:23 AM	SiCl4 post valve closed
10/21/2011	10:40:23 AM	Main Vac valve closed
10/21/2011	10:40:23 AM	Bypass valve closed
10/21/2011	10:40:23 AM	H2 valve opened
10/21/2011	10:40:23 AM	Bubbler valve opened
10/21/2011	10:40:23 AM	Helium MFC set to  0.000000
10/21/2011	10:40:23 AM	H2 MFC set to  500.000000
10/21/2011	10:40:23 AM	BCl3 MFC set to  0.000000
10/21/2011	10:40:23 AM	PHl3 MFC set to  0.000000
10/21/2011	10:40:23 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:40:23 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:40:24 AM	Tube furnace set to 0
10/21/2011	10:40:25 AM	Helium valve closed
10/21/2011	10:40:25 AM	BCl3 valve closed
10/21/2011	10:40:25 AM	PH3 valve closed
10/21/2011	10:40:25 AM	SiCl4 pre valve closed
10/21/2011	10:40:25 AM	SiCl4 post valve closed
10/21/2011	10:40:25 AM	Main Vac valve closed
10/21/2011	10:40:25 AM	Bypass valve closed
10/21/2011	10:40:25 AM	H2 valve opened
10/21/2011	10:40:25 AM	Bubbler valve opened
10/21/2011	10:40:25 AM	Helium MFC set to  0.000000
10/21/2011	10:40:25 AM	H2 MFC set to  500.000000
10/21/2011	10:40:25 AM	BCl3 MFC set to  0.000000
10/21/2011	10:40:25 AM	PHl3 MFC set to  0.000000
10/21/2011	10:40:25 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:40:25 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:40:25 AM	Tube furnace set to 1025
10/21/2011	10:40:36 AM	Run aborted at 10:40 AM
10/21/2011	10:40:36 AM	Helium valve closed
10/21/2011	10:40:36 AM	H2 valve closed
10/21/2011	10:40:36 AM	BCl3 valve closed
10/21/2011	10:40:36 AM	PH3 valve closed
10/21/2011	10:40:36 AM	SiCl4 pre valve closed
10/21/2011	10:40:36 AM	SiCl4 post valve closed
10/21/2011	10:40:36 AM	Bypass valve closed
10/21/2011	10:40:36 AM	Main Vac valve closed
10/21/2011	10:40:36 AM	Bubbler valve closed
10/21/2011	10:40:36 AM	Helium MFC set to  0.000000
10/21/2011	10:40:36 AM	H2 MFC set to  0.000000
10/21/2011	10:40:36 AM	BCl3 MFC set to  0.000000
10/21/2011	10:40:36 AM	PHl3 MFC set to  0.000000
10/21/2011	10:40:36 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:40:36 AM	Tube furnace set to 0
10/21/2011	10:40:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	10:40:39 AM	Recipe started at 10:40 AM
10/21/2011	10:40:39 AM	Helium valve closed
10/21/2011	10:40:39 AM	H2 valve closed
10/21/2011	10:40:39 AM	BCl3 valve closed
10/21/2011	10:40:39 AM	PH3 valve closed
10/21/2011	10:40:39 AM	SiCl4 pre valve closed
10/21/2011	10:40:39 AM	SiCl4 post valve closed
10/21/2011	10:40:39 AM	Main Vac valve closed
10/21/2011	10:40:39 AM	Bubbler valve closed
10/21/2011	10:40:39 AM	Bypass valve opened
10/21/2011	10:40:39 AM	Helium MFC set to  0.000000
10/21/2011	10:40:39 AM	H2 MFC set to  0.000000
10/21/2011	10:40:39 AM	BCl3 MFC set to  0.000000
10/21/2011	10:40:39 AM	PHl3 MFC set to  0.000000
10/21/2011	10:40:39 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:40:39 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:40:39 AM	Tube furnace set to 0
10/21/2011	10:41:11 AM	Helium valve closed
10/21/2011	10:41:11 AM	H2 valve closed
10/21/2011	10:41:11 AM	BCl3 valve closed
10/21/2011	10:41:11 AM	PH3 valve closed
10/21/2011	10:41:11 AM	SiCl4 pre valve closed
10/21/2011	10:41:11 AM	SiCl4 post valve closed
10/21/2011	10:41:11 AM	Main Vac valve closed
10/21/2011	10:41:11 AM	Bubbler valve closed
10/21/2011	10:41:11 AM	Bypass valve opened
10/21/2011	10:41:11 AM	Helium MFC set to  0.000000
10/21/2011	10:41:11 AM	H2 MFC set to  0.000000
10/21/2011	10:41:11 AM	BCl3 MFC set to  0.000000
10/21/2011	10:41:11 AM	PHl3 MFC set to  0.000000
10/21/2011	10:41:11 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:41:11 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:41:11 AM	Tube furnace set to 0
10/21/2011	10:42:11 AM	Helium valve closed
10/21/2011	10:42:11 AM	H2 valve closed
10/21/2011	10:42:11 AM	BCl3 valve closed
10/21/2011	10:42:11 AM	PH3 valve closed
10/21/2011	10:42:11 AM	SiCl4 pre valve closed
10/21/2011	10:42:11 AM	SiCl4 post valve closed
10/21/2011	10:42:11 AM	Bypass valve closed
10/21/2011	10:42:11 AM	Bubbler valve closed
10/21/2011	10:42:11 AM	Main Vac valve opened
10/21/2011	10:42:11 AM	Helium MFC set to  0.000000
10/21/2011	10:42:11 AM	H2 MFC set to  0.000000
10/21/2011	10:42:11 AM	BCl3 MFC set to  0.000000
10/21/2011	10:42:11 AM	PHl3 MFC set to  0.000000
10/21/2011	10:42:11 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:42:11 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:42:11 AM	Tube furnace set to 0
10/21/2011	10:42:12 AM	Run finished at 10:42 AM
10/21/2011	10:42:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	10:43:41 AM	Recipe started at 10:43 AM
10/21/2011	10:43:41 AM	Helium valve closed
10/21/2011	10:43:41 AM	H2 valve closed
10/21/2011	10:43:41 AM	BCl3 valve closed
10/21/2011	10:43:41 AM	PH3 valve closed
10/21/2011	10:43:41 AM	SiCl4 pre valve closed
10/21/2011	10:43:41 AM	SiCl4 post valve closed
10/21/2011	10:43:41 AM	Main Vac valve closed
10/21/2011	10:43:41 AM	Bypass valve closed
10/21/2011	10:43:41 AM	Bubbler valve closed
10/21/2011	10:43:41 AM	Helium MFC set to  0.000000
10/21/2011	10:43:41 AM	H2 MFC set to  0.000000
10/21/2011	10:43:41 AM	BCl3 MFC set to  0.000000
10/21/2011	10:43:41 AM	PHl3 MFC set to  0.000000
10/21/2011	10:43:41 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:43:41 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:43:41 AM	Tube furnace set to 0
10/21/2011	10:43:44 AM	Helium valve closed
10/21/2011	10:43:44 AM	BCl3 valve closed
10/21/2011	10:43:44 AM	PH3 valve closed
10/21/2011	10:43:44 AM	SiCl4 pre valve closed
10/21/2011	10:43:44 AM	SiCl4 post valve closed
10/21/2011	10:43:44 AM	Main Vac valve closed
10/21/2011	10:43:44 AM	Bypass valve closed
10/21/2011	10:43:44 AM	Bubbler valve closed
10/21/2011	10:43:44 AM	H2 valve opened
10/21/2011	10:43:44 AM	Helium MFC set to  0.000000
10/21/2011	10:43:44 AM	H2 MFC set to  500.000000
10/21/2011	10:43:44 AM	BCl3 MFC set to  0.000000
10/21/2011	10:43:44 AM	PHl3 MFC set to  0.000000
10/21/2011	10:43:44 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:43:44 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:43:45 AM	Tube furnace set to 0
10/21/2011	10:44:46 AM	Helium valve closed
10/21/2011	10:44:46 AM	BCl3 valve closed
10/21/2011	10:44:46 AM	PH3 valve closed
10/21/2011	10:44:46 AM	SiCl4 pre valve closed
10/21/2011	10:44:46 AM	SiCl4 post valve closed
10/21/2011	10:44:46 AM	Main Vac valve closed
10/21/2011	10:44:46 AM	Bypass valve closed
10/21/2011	10:44:46 AM	H2 valve opened
10/21/2011	10:44:46 AM	Bubbler valve opened
10/21/2011	10:44:46 AM	Helium MFC set to  0.000000
10/21/2011	10:44:46 AM	H2 MFC set to  500.000000
10/21/2011	10:44:46 AM	BCl3 MFC set to  0.000000
10/21/2011	10:44:46 AM	PHl3 MFC set to  0.000000
10/21/2011	10:44:46 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:44:46 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:44:46 AM	Tube furnace set to 0
10/21/2011	10:44:47 AM	Helium valve closed
10/21/2011	10:44:47 AM	BCl3 valve closed
10/21/2011	10:44:47 AM	PH3 valve closed
10/21/2011	10:44:48 AM	SiCl4 pre valve closed
10/21/2011	10:44:48 AM	SiCl4 post valve closed
10/21/2011	10:44:48 AM	Main Vac valve closed
10/21/2011	10:44:48 AM	Bypass valve closed
10/21/2011	10:44:48 AM	H2 valve opened
10/21/2011	10:44:48 AM	Bubbler valve opened
10/21/2011	10:44:48 AM	Helium MFC set to  0.000000
10/21/2011	10:44:48 AM	H2 MFC set to  500.000000
10/21/2011	10:44:48 AM	BCl3 MFC set to  0.000000
10/21/2011	10:44:48 AM	PHl3 MFC set to  0.000000
10/21/2011	10:44:48 AM	SiCl4 MFC set to  0.000000
10/21/2011	10:44:48 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:44:48 AM	Tube furnace set to 1025
10/21/2011	11:04:48 AM	Helium valve closed
10/21/2011	11:04:48 AM	PH3 valve closed
10/21/2011	11:04:48 AM	Main Vac valve closed
10/21/2011	11:04:48 AM	Bypass valve closed
10/21/2011	11:04:48 AM	H2 valve opened
10/21/2011	11:04:48 AM	BCl3 valve opened
10/21/2011	11:04:48 AM	SiCl4 pre valve opened
10/21/2011	11:04:48 AM	SiCl4 post valve opened
10/21/2011	11:04:48 AM	Bubbler valve opened
10/21/2011	11:04:48 AM	Helium MFC set to  0.000000
10/21/2011	11:04:48 AM	H2 MFC set to  500.000000
10/21/2011	11:04:48 AM	BCl3 MFC set to  2.300000
10/21/2011	11:04:48 AM	PHl3 MFC set to  0.000000
10/21/2011	11:04:48 AM	SiCl4 MFC set to  50.000000
10/21/2011	11:04:48 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:04:48 AM	Tube furnace set to 1025
10/21/2011	11:14:48 AM	Helium valve closed
10/21/2011	11:14:48 AM	BCl3 valve closed
10/21/2011	11:14:48 AM	PH3 valve closed
10/21/2011	11:14:48 AM	SiCl4 pre valve closed
10/21/2011	11:14:48 AM	SiCl4 post valve closed
10/21/2011	11:14:48 AM	Main Vac valve closed
10/21/2011	11:14:48 AM	Bypass valve closed
10/21/2011	11:14:48 AM	H2 valve opened
10/21/2011	11:14:48 AM	Bubbler valve opened
10/21/2011	11:14:48 AM	Helium MFC set to  0.000000
10/21/2011	11:14:48 AM	H2 MFC set to  500.000000
10/21/2011	11:14:48 AM	BCl3 MFC set to  0.000000
10/21/2011	11:14:48 AM	PHl3 MFC set to  0.000000
10/21/2011	11:14:48 AM	SiCl4 MFC set to  0.000000
10/21/2011	11:14:48 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:14:48 AM	Tube furnace set to 750
10/21/2011	11:24:48 AM	H2 valve closed
10/21/2011	11:24:48 AM	BCl3 valve closed
10/21/2011	11:24:48 AM	PH3 valve closed
10/21/2011	11:24:48 AM	SiCl4 pre valve closed
10/21/2011	11:24:48 AM	SiCl4 post valve closed
10/21/2011	11:24:48 AM	Main Vac valve closed
10/21/2011	11:24:48 AM	Bypass valve closed
10/21/2011	11:24:48 AM	Helium valve opened
10/21/2011	11:24:48 AM	Bubbler valve opened
10/21/2011	11:24:48 AM	Helium MFC set to  500.000000
10/21/2011	11:24:48 AM	H2 MFC set to  0.000000
10/21/2011	11:24:48 AM	BCl3 MFC set to  0.000000
10/21/2011	11:24:48 AM	PHl3 MFC set to  0.000000
10/21/2011	11:24:48 AM	SiCl4 MFC set to  0.000000
10/21/2011	11:24:48 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:24:48 AM	Tube furnace set to 0
10/21/2011	11:34:43 AM	Helium valve closed
10/21/2011	11:34:43 AM	H2 valve closed
10/21/2011	11:34:43 AM	BCl3 valve closed
10/21/2011	11:34:43 AM	PH3 valve closed
10/21/2011	11:34:43 AM	SiCl4 pre valve closed
10/21/2011	11:34:43 AM	SiCl4 post valve closed
10/21/2011	11:34:43 AM	Main Vac valve closed
10/21/2011	11:34:43 AM	Bypass valve closed
10/21/2011	11:34:43 AM	Bubbler valve closed
10/21/2011	11:34:43 AM	Helium MFC set to  0.000000
10/21/2011	11:34:43 AM	H2 MFC set to  0.000000
10/21/2011	11:34:43 AM	BCl3 MFC set to  0.000000
10/21/2011	11:34:43 AM	PHl3 MFC set to  0.000000
10/21/2011	11:34:43 AM	SiCl4 MFC set to  0.000000
10/21/2011	11:34:43 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:34:43 AM	Tube furnace set to 0
10/21/2011	11:34:44 AM	Run finished at 11:34 AM
10/21/2011	11:47:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	11:47:50 AM	Recipe started at 11:47 AM
10/21/2011	11:47:50 AM	Helium valve closed
10/21/2011	11:47:50 AM	H2 valve closed
10/21/2011	11:47:50 AM	BCl3 valve closed
10/21/2011	11:47:50 AM	PH3 valve closed
10/21/2011	11:47:50 AM	SiCl4 pre valve closed
10/21/2011	11:47:50 AM	SiCl4 post valve closed
10/21/2011	11:47:50 AM	Main Vac valve closed
10/21/2011	11:47:50 AM	Bubbler valve closed
10/21/2011	11:47:50 AM	Bypass valve opened
10/21/2011	11:47:50 AM	Helium MFC set to  0.000000
10/21/2011	11:47:50 AM	H2 MFC set to  0.000000
10/21/2011	11:47:50 AM	BCl3 MFC set to  0.000000
10/21/2011	11:47:50 AM	PHl3 MFC set to  0.000000
10/21/2011	11:47:50 AM	SiCl4 MFC set to  0.000000
10/21/2011	11:47:50 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:47:50 AM	Tube furnace set to 0
10/21/2011	11:48:58 AM	Helium valve closed
10/21/2011	11:48:58 AM	H2 valve closed
10/21/2011	11:48:58 AM	BCl3 valve closed
10/21/2011	11:48:58 AM	PH3 valve closed
10/21/2011	11:48:58 AM	SiCl4 pre valve closed
10/21/2011	11:48:58 AM	SiCl4 post valve closed
10/21/2011	11:48:58 AM	Main Vac valve closed
10/21/2011	11:48:58 AM	Bubbler valve closed
10/21/2011	11:48:58 AM	Bypass valve opened
10/21/2011	11:48:58 AM	Helium MFC set to  0.000000
10/21/2011	11:48:58 AM	H2 MFC set to  0.000000
10/21/2011	11:48:58 AM	BCl3 MFC set to  0.000000
10/21/2011	11:48:58 AM	PHl3 MFC set to  0.000000
10/21/2011	11:48:58 AM	SiCl4 MFC set to  0.000000
10/21/2011	11:48:58 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:48:58 AM	Tube furnace set to 0
10/21/2011	11:49:58 AM	Helium valve closed
10/21/2011	11:49:58 AM	H2 valve closed
10/21/2011	11:49:58 AM	BCl3 valve closed
10/21/2011	11:49:58 AM	PH3 valve closed
10/21/2011	11:49:58 AM	SiCl4 pre valve closed
10/21/2011	11:49:58 AM	SiCl4 post valve closed
10/21/2011	11:49:58 AM	Bypass valve closed
10/21/2011	11:49:58 AM	Bubbler valve closed
10/21/2011	11:49:58 AM	Main Vac valve opened
10/21/2011	11:49:58 AM	Helium MFC set to  0.000000
10/21/2011	11:49:58 AM	H2 MFC set to  0.000000
10/21/2011	11:49:58 AM	BCl3 MFC set to  0.000000
10/21/2011	11:49:58 AM	PHl3 MFC set to  0.000000
10/21/2011	11:49:58 AM	SiCl4 MFC set to  0.000000
10/21/2011	11:49:58 AM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:49:58 AM	Tube furnace set to 0
10/21/2011	11:49:59 AM	Run finished at 11:49 AM
10/21/2011	11:49:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	12:04:46 PM	Recipe started at 12:04 PM
10/21/2011	12:04:46 PM	Helium valve closed
10/21/2011	12:04:46 PM	H2 valve closed
10/21/2011	12:04:46 PM	BCl3 valve closed
10/21/2011	12:04:46 PM	PH3 valve closed
10/21/2011	12:04:46 PM	SiCl4 pre valve closed
10/21/2011	12:04:46 PM	SiCl4 post valve closed
10/21/2011	12:04:46 PM	Bypass valve closed
10/21/2011	12:04:46 PM	Bubbler valve closed
10/21/2011	12:04:46 PM	Main Vac valve opened
10/21/2011	12:04:46 PM	Helium MFC set to  0.000000
10/21/2011	12:04:46 PM	H2 MFC set to  0.000000
10/21/2011	12:04:46 PM	BCl3 MFC set to  0.000000
10/21/2011	12:04:46 PM	PHl3 MFC set to  0.000000
10/21/2011	12:04:46 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:04:46 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:04:46 PM	Tube furnace set to 150
10/21/2011	12:04:51 PM	H2 valve closed
10/21/2011	12:04:51 PM	BCl3 valve closed
10/21/2011	12:04:51 PM	PH3 valve closed
10/21/2011	12:04:51 PM	SiCl4 pre valve closed
10/21/2011	12:04:51 PM	SiCl4 post valve closed
10/21/2011	12:04:51 PM	Bypass valve closed
10/21/2011	12:04:51 PM	Bubbler valve closed
10/21/2011	12:04:51 PM	Helium valve opened
10/21/2011	12:04:51 PM	Main Vac valve opened
10/21/2011	12:04:51 PM	Helium MFC set to  20.000000
10/21/2011	12:04:51 PM	H2 MFC set to  0.000000
10/21/2011	12:04:51 PM	BCl3 MFC set to  0.000000
10/21/2011	12:04:51 PM	PHl3 MFC set to  0.000000
10/21/2011	12:04:51 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:04:51 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:04:51 PM	Tube furnace set to 150
10/21/2011	12:05:21 PM	Helium valve closed
10/21/2011	12:05:21 PM	H2 valve closed
10/21/2011	12:05:21 PM	BCl3 valve closed
10/21/2011	12:05:21 PM	PH3 valve closed
10/21/2011	12:05:21 PM	SiCl4 pre valve closed
10/21/2011	12:05:21 PM	SiCl4 post valve closed
10/21/2011	12:05:21 PM	Bypass valve closed
10/21/2011	12:05:21 PM	Bubbler valve closed
10/21/2011	12:05:21 PM	Main Vac valve opened
10/21/2011	12:05:21 PM	Helium MFC set to  0.000000
10/21/2011	12:05:21 PM	H2 MFC set to  0.000000
10/21/2011	12:05:21 PM	BCl3 MFC set to  0.000000
10/21/2011	12:05:21 PM	PHl3 MFC set to  0.000000
10/21/2011	12:05:21 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:05:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:05:21 PM	Tube furnace set to 150
10/21/2011	12:05:51 PM	H2 valve closed
10/21/2011	12:05:51 PM	BCl3 valve closed
10/21/2011	12:05:51 PM	PH3 valve closed
10/21/2011	12:05:51 PM	SiCl4 pre valve closed
10/21/2011	12:05:51 PM	SiCl4 post valve closed
10/21/2011	12:05:51 PM	Bypass valve closed
10/21/2011	12:05:51 PM	Bubbler valve closed
10/21/2011	12:05:51 PM	Helium valve opened
10/21/2011	12:05:51 PM	Main Vac valve opened
10/21/2011	12:05:51 PM	Helium MFC set to  20.000000
10/21/2011	12:05:51 PM	H2 MFC set to  0.000000
10/21/2011	12:05:51 PM	BCl3 MFC set to  0.000000
10/21/2011	12:05:51 PM	PHl3 MFC set to  0.000000
10/21/2011	12:05:51 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:05:51 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:05:51 PM	Tube furnace set to 150
10/21/2011	12:06:21 PM	Helium valve closed
10/21/2011	12:06:21 PM	H2 valve closed
10/21/2011	12:06:21 PM	BCl3 valve closed
10/21/2011	12:06:21 PM	PH3 valve closed
10/21/2011	12:06:21 PM	SiCl4 pre valve closed
10/21/2011	12:06:21 PM	SiCl4 post valve closed
10/21/2011	12:06:21 PM	Bypass valve closed
10/21/2011	12:06:21 PM	Bubbler valve closed
10/21/2011	12:06:21 PM	Main Vac valve opened
10/21/2011	12:06:21 PM	Helium MFC set to  0.000000
10/21/2011	12:06:21 PM	H2 MFC set to  0.000000
10/21/2011	12:06:21 PM	BCl3 MFC set to  0.000000
10/21/2011	12:06:21 PM	PHl3 MFC set to  0.000000
10/21/2011	12:06:21 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:06:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:06:22 PM	Tube furnace set to 150
10/21/2011	12:06:52 PM	H2 valve closed
10/21/2011	12:06:52 PM	BCl3 valve closed
10/21/2011	12:06:52 PM	PH3 valve closed
10/21/2011	12:06:52 PM	SiCl4 pre valve closed
10/21/2011	12:06:52 PM	SiCl4 post valve closed
10/21/2011	12:06:52 PM	Bypass valve closed
10/21/2011	12:06:52 PM	Bubbler valve closed
10/21/2011	12:06:52 PM	Helium valve opened
10/21/2011	12:06:52 PM	Main Vac valve opened
10/21/2011	12:06:52 PM	Helium MFC set to  20.000000
10/21/2011	12:06:52 PM	H2 MFC set to  0.000000
10/21/2011	12:06:52 PM	BCl3 MFC set to  0.000000
10/21/2011	12:06:52 PM	PHl3 MFC set to  0.000000
10/21/2011	12:06:52 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:06:52 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:06:52 PM	Tube furnace set to 150
10/21/2011	12:07:22 PM	Helium valve closed
10/21/2011	12:07:22 PM	H2 valve closed
10/21/2011	12:07:22 PM	BCl3 valve closed
10/21/2011	12:07:22 PM	PH3 valve closed
10/21/2011	12:07:22 PM	SiCl4 pre valve closed
10/21/2011	12:07:22 PM	SiCl4 post valve closed
10/21/2011	12:07:22 PM	Bypass valve closed
10/21/2011	12:07:22 PM	Bubbler valve closed
10/21/2011	12:07:22 PM	Main Vac valve opened
10/21/2011	12:07:22 PM	Helium MFC set to  0.000000
10/21/2011	12:07:22 PM	H2 MFC set to  0.000000
10/21/2011	12:07:22 PM	BCl3 MFC set to  0.000000
10/21/2011	12:07:22 PM	PHl3 MFC set to  0.000000
10/21/2011	12:07:22 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:07:22 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:07:22 PM	Tube furnace set to 150
10/21/2011	12:07:52 PM	H2 valve closed
10/21/2011	12:07:52 PM	BCl3 valve closed
10/21/2011	12:07:52 PM	PH3 valve closed
10/21/2011	12:07:52 PM	SiCl4 pre valve closed
10/21/2011	12:07:52 PM	SiCl4 post valve closed
10/21/2011	12:07:52 PM	Bypass valve closed
10/21/2011	12:07:52 PM	Bubbler valve closed
10/21/2011	12:07:52 PM	Helium valve opened
10/21/2011	12:07:52 PM	Main Vac valve opened
10/21/2011	12:07:52 PM	Helium MFC set to  20.000000
10/21/2011	12:07:52 PM	H2 MFC set to  0.000000
10/21/2011	12:07:52 PM	BCl3 MFC set to  0.000000
10/21/2011	12:07:52 PM	PHl3 MFC set to  0.000000
10/21/2011	12:07:52 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:07:52 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:07:52 PM	Tube furnace set to 150
10/21/2011	12:08:22 PM	Helium valve closed
10/21/2011	12:08:22 PM	H2 valve closed
10/21/2011	12:08:22 PM	BCl3 valve closed
10/21/2011	12:08:22 PM	PH3 valve closed
10/21/2011	12:08:22 PM	SiCl4 pre valve closed
10/21/2011	12:08:22 PM	SiCl4 post valve closed
10/21/2011	12:08:22 PM	Bypass valve closed
10/21/2011	12:08:22 PM	Bubbler valve closed
10/21/2011	12:08:22 PM	Main Vac valve opened
10/21/2011	12:08:22 PM	Helium MFC set to  0.000000
10/21/2011	12:08:22 PM	H2 MFC set to  0.000000
10/21/2011	12:08:22 PM	BCl3 MFC set to  0.000000
10/21/2011	12:08:22 PM	PHl3 MFC set to  0.000000
10/21/2011	12:08:22 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:08:22 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:08:22 PM	Tube furnace set to 150
10/21/2011	12:08:52 PM	H2 valve closed
10/21/2011	12:08:52 PM	BCl3 valve closed
10/21/2011	12:08:52 PM	PH3 valve closed
10/21/2011	12:08:52 PM	SiCl4 pre valve closed
10/21/2011	12:08:52 PM	SiCl4 post valve closed
10/21/2011	12:08:52 PM	Bypass valve closed
10/21/2011	12:08:52 PM	Bubbler valve closed
10/21/2011	12:08:52 PM	Helium valve opened
10/21/2011	12:08:52 PM	Main Vac valve opened
10/21/2011	12:08:52 PM	Helium MFC set to  20.000000
10/21/2011	12:08:52 PM	H2 MFC set to  0.000000
10/21/2011	12:08:52 PM	BCl3 MFC set to  0.000000
10/21/2011	12:08:52 PM	PHl3 MFC set to  0.000000
10/21/2011	12:08:52 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:08:52 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:08:53 PM	Tube furnace set to 150
10/21/2011	12:09:23 PM	Helium valve closed
10/21/2011	12:09:23 PM	H2 valve closed
10/21/2011	12:09:23 PM	BCl3 valve closed
10/21/2011	12:09:23 PM	PH3 valve closed
10/21/2011	12:09:23 PM	SiCl4 pre valve closed
10/21/2011	12:09:23 PM	SiCl4 post valve closed
10/21/2011	12:09:23 PM	Bypass valve closed
10/21/2011	12:09:23 PM	Bubbler valve closed
10/21/2011	12:09:23 PM	Main Vac valve opened
10/21/2011	12:09:23 PM	Helium MFC set to  0.000000
10/21/2011	12:09:23 PM	H2 MFC set to  0.000000
10/21/2011	12:09:23 PM	BCl3 MFC set to  0.000000
10/21/2011	12:09:23 PM	PHl3 MFC set to  0.000000
10/21/2011	12:09:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:09:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:09:23 PM	Tube furnace set to 150
10/21/2011	12:09:53 PM	H2 valve closed
10/21/2011	12:09:53 PM	BCl3 valve closed
10/21/2011	12:09:53 PM	PH3 valve closed
10/21/2011	12:09:53 PM	SiCl4 pre valve closed
10/21/2011	12:09:53 PM	SiCl4 post valve closed
10/21/2011	12:09:53 PM	Bypass valve closed
10/21/2011	12:09:53 PM	Bubbler valve closed
10/21/2011	12:09:53 PM	Helium valve opened
10/21/2011	12:09:53 PM	Main Vac valve opened
10/21/2011	12:09:53 PM	Helium MFC set to  20.000000
10/21/2011	12:09:53 PM	H2 MFC set to  0.000000
10/21/2011	12:09:53 PM	BCl3 MFC set to  0.000000
10/21/2011	12:09:53 PM	PHl3 MFC set to  0.000000
10/21/2011	12:09:53 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:09:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:09:53 PM	Tube furnace set to 150
10/21/2011	12:10:23 PM	Helium valve closed
10/21/2011	12:10:23 PM	H2 valve closed
10/21/2011	12:10:23 PM	BCl3 valve closed
10/21/2011	12:10:23 PM	PH3 valve closed
10/21/2011	12:10:23 PM	SiCl4 pre valve closed
10/21/2011	12:10:23 PM	SiCl4 post valve closed
10/21/2011	12:10:23 PM	Bypass valve closed
10/21/2011	12:10:23 PM	Bubbler valve closed
10/21/2011	12:10:23 PM	Main Vac valve opened
10/21/2011	12:10:23 PM	Helium MFC set to  0.000000
10/21/2011	12:10:23 PM	H2 MFC set to  0.000000
10/21/2011	12:10:23 PM	BCl3 MFC set to  0.000000
10/21/2011	12:10:23 PM	PHl3 MFC set to  0.000000
10/21/2011	12:10:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:10:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:10:23 PM	Tube furnace set to 150
10/21/2011	12:10:53 PM	H2 valve closed
10/21/2011	12:10:53 PM	BCl3 valve closed
10/21/2011	12:10:53 PM	PH3 valve closed
10/21/2011	12:10:53 PM	SiCl4 pre valve closed
10/21/2011	12:10:53 PM	SiCl4 post valve closed
10/21/2011	12:10:53 PM	Bypass valve closed
10/21/2011	12:10:53 PM	Bubbler valve closed
10/21/2011	12:10:53 PM	Helium valve opened
10/21/2011	12:10:53 PM	Main Vac valve opened
10/21/2011	12:10:53 PM	Helium MFC set to  20.000000
10/21/2011	12:10:53 PM	H2 MFC set to  0.000000
10/21/2011	12:10:53 PM	BCl3 MFC set to  0.000000
10/21/2011	12:10:53 PM	PHl3 MFC set to  0.000000
10/21/2011	12:10:53 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:10:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:10:53 PM	Tube furnace set to 150
10/21/2011	12:11:23 PM	Helium valve closed
10/21/2011	12:11:23 PM	H2 valve closed
10/21/2011	12:11:23 PM	BCl3 valve closed
10/21/2011	12:11:23 PM	PH3 valve closed
10/21/2011	12:11:23 PM	SiCl4 pre valve closed
10/21/2011	12:11:23 PM	SiCl4 post valve closed
10/21/2011	12:11:23 PM	Bypass valve closed
10/21/2011	12:11:23 PM	Bubbler valve closed
10/21/2011	12:11:23 PM	Main Vac valve opened
10/21/2011	12:11:23 PM	Helium MFC set to  0.000000
10/21/2011	12:11:23 PM	H2 MFC set to  0.000000
10/21/2011	12:11:23 PM	BCl3 MFC set to  0.000000
10/21/2011	12:11:23 PM	PHl3 MFC set to  0.000000
10/21/2011	12:11:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:11:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:11:24 PM	Tube furnace set to 150
10/21/2011	12:11:54 PM	H2 valve closed
10/21/2011	12:11:54 PM	BCl3 valve closed
10/21/2011	12:11:54 PM	PH3 valve closed
10/21/2011	12:11:54 PM	SiCl4 pre valve closed
10/21/2011	12:11:54 PM	SiCl4 post valve closed
10/21/2011	12:11:54 PM	Bypass valve closed
10/21/2011	12:11:54 PM	Bubbler valve closed
10/21/2011	12:11:54 PM	Helium valve opened
10/21/2011	12:11:54 PM	Main Vac valve opened
10/21/2011	12:11:54 PM	Helium MFC set to  20.000000
10/21/2011	12:11:54 PM	H2 MFC set to  0.000000
10/21/2011	12:11:54 PM	BCl3 MFC set to  0.000000
10/21/2011	12:11:54 PM	PHl3 MFC set to  0.000000
10/21/2011	12:11:54 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:11:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:11:54 PM	Tube furnace set to 150
10/21/2011	12:12:24 PM	Helium valve closed
10/21/2011	12:12:24 PM	H2 valve closed
10/21/2011	12:12:24 PM	BCl3 valve closed
10/21/2011	12:12:24 PM	PH3 valve closed
10/21/2011	12:12:24 PM	SiCl4 pre valve closed
10/21/2011	12:12:24 PM	SiCl4 post valve closed
10/21/2011	12:12:24 PM	Bypass valve closed
10/21/2011	12:12:24 PM	Bubbler valve closed
10/21/2011	12:12:24 PM	Main Vac valve opened
10/21/2011	12:12:24 PM	Helium MFC set to  0.000000
10/21/2011	12:12:24 PM	H2 MFC set to  0.000000
10/21/2011	12:12:24 PM	BCl3 MFC set to  0.000000
10/21/2011	12:12:24 PM	PHl3 MFC set to  0.000000
10/21/2011	12:12:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:12:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:12:24 PM	Tube furnace set to 150
10/21/2011	12:12:54 PM	H2 valve closed
10/21/2011	12:12:54 PM	BCl3 valve closed
10/21/2011	12:12:54 PM	PH3 valve closed
10/21/2011	12:12:54 PM	SiCl4 pre valve closed
10/21/2011	12:12:54 PM	SiCl4 post valve closed
10/21/2011	12:12:54 PM	Bypass valve closed
10/21/2011	12:12:54 PM	Bubbler valve closed
10/21/2011	12:12:54 PM	Helium valve opened
10/21/2011	12:12:54 PM	Main Vac valve opened
10/21/2011	12:12:54 PM	Helium MFC set to  20.000000
10/21/2011	12:12:54 PM	H2 MFC set to  0.000000
10/21/2011	12:12:54 PM	BCl3 MFC set to  0.000000
10/21/2011	12:12:54 PM	PHl3 MFC set to  0.000000
10/21/2011	12:12:54 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:12:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:12:54 PM	Tube furnace set to 150
10/21/2011	12:13:24 PM	Helium valve closed
10/21/2011	12:13:24 PM	H2 valve closed
10/21/2011	12:13:24 PM	BCl3 valve closed
10/21/2011	12:13:24 PM	PH3 valve closed
10/21/2011	12:13:24 PM	SiCl4 pre valve closed
10/21/2011	12:13:24 PM	SiCl4 post valve closed
10/21/2011	12:13:24 PM	Bypass valve closed
10/21/2011	12:13:24 PM	Bubbler valve closed
10/21/2011	12:13:24 PM	Main Vac valve opened
10/21/2011	12:13:24 PM	Helium MFC set to  0.000000
10/21/2011	12:13:24 PM	H2 MFC set to  0.000000
10/21/2011	12:13:24 PM	BCl3 MFC set to  0.000000
10/21/2011	12:13:24 PM	PHl3 MFC set to  0.000000
10/21/2011	12:13:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:13:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:13:24 PM	Tube furnace set to 150
10/21/2011	12:13:54 PM	H2 valve closed
10/21/2011	12:13:54 PM	BCl3 valve closed
10/21/2011	12:13:54 PM	PH3 valve closed
10/21/2011	12:13:54 PM	SiCl4 pre valve closed
10/21/2011	12:13:54 PM	SiCl4 post valve closed
10/21/2011	12:13:54 PM	Bypass valve closed
10/21/2011	12:13:54 PM	Bubbler valve closed
10/21/2011	12:13:54 PM	Helium valve opened
10/21/2011	12:13:54 PM	Main Vac valve opened
10/21/2011	12:13:54 PM	Helium MFC set to  20.000000
10/21/2011	12:13:54 PM	H2 MFC set to  0.000000
10/21/2011	12:13:54 PM	BCl3 MFC set to  0.000000
10/21/2011	12:13:54 PM	PHl3 MFC set to  0.000000
10/21/2011	12:13:54 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:13:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:13:55 PM	Tube furnace set to 150
10/21/2011	12:14:25 PM	Helium valve closed
10/21/2011	12:14:25 PM	H2 valve closed
10/21/2011	12:14:25 PM	BCl3 valve closed
10/21/2011	12:14:25 PM	PH3 valve closed
10/21/2011	12:14:25 PM	SiCl4 pre valve closed
10/21/2011	12:14:25 PM	SiCl4 post valve closed
10/21/2011	12:14:25 PM	Bypass valve closed
10/21/2011	12:14:25 PM	Bubbler valve closed
10/21/2011	12:14:25 PM	Main Vac valve opened
10/21/2011	12:14:25 PM	Helium MFC set to  0.000000
10/21/2011	12:14:25 PM	H2 MFC set to  0.000000
10/21/2011	12:14:25 PM	BCl3 MFC set to  0.000000
10/21/2011	12:14:25 PM	PHl3 MFC set to  0.000000
10/21/2011	12:14:25 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:14:25 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:14:25 PM	Tube furnace set to 150
10/21/2011	12:14:26 PM	Run finished at 12:14 PM
10/21/2011	12:15:22 PM	Recipe started at 12:15 PM
10/21/2011	12:15:22 PM	Helium valve closed
10/21/2011	12:15:22 PM	H2 valve closed
10/21/2011	12:15:22 PM	BCl3 valve closed
10/21/2011	12:15:22 PM	PH3 valve closed
10/21/2011	12:15:22 PM	SiCl4 pre valve closed
10/21/2011	12:15:22 PM	SiCl4 post valve closed
10/21/2011	12:15:22 PM	Bypass valve closed
10/21/2011	12:15:22 PM	Bubbler valve closed
10/21/2011	12:15:22 PM	Main Vac valve opened
10/21/2011	12:15:22 PM	Helium MFC set to  0.000000
10/21/2011	12:15:22 PM	H2 MFC set to  0.000000
10/21/2011	12:15:22 PM	BCl3 MFC set to  0.000000
10/21/2011	12:15:22 PM	PHl3 MFC set to  0.000000
10/21/2011	12:15:22 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:15:22 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:15:22 PM	Tube furnace set to 150
10/21/2011	12:15:52 PM	H2 valve closed
10/21/2011	12:15:52 PM	BCl3 valve closed
10/21/2011	12:15:52 PM	PH3 valve closed
10/21/2011	12:15:52 PM	SiCl4 pre valve closed
10/21/2011	12:15:52 PM	SiCl4 post valve closed
10/21/2011	12:15:52 PM	Bypass valve closed
10/21/2011	12:15:52 PM	Bubbler valve closed
10/21/2011	12:15:52 PM	Helium valve opened
10/21/2011	12:15:52 PM	Main Vac valve opened
10/21/2011	12:15:52 PM	Helium MFC set to  20.000000
10/21/2011	12:15:52 PM	H2 MFC set to  0.000000
10/21/2011	12:15:52 PM	BCl3 MFC set to  0.000000
10/21/2011	12:15:52 PM	PHl3 MFC set to  0.000000
10/21/2011	12:15:52 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:15:52 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:15:52 PM	Tube furnace set to 150
10/21/2011	12:16:22 PM	Helium valve closed
10/21/2011	12:16:22 PM	H2 valve closed
10/21/2011	12:16:22 PM	BCl3 valve closed
10/21/2011	12:16:22 PM	PH3 valve closed
10/21/2011	12:16:22 PM	SiCl4 pre valve closed
10/21/2011	12:16:22 PM	SiCl4 post valve closed
10/21/2011	12:16:22 PM	Bypass valve closed
10/21/2011	12:16:22 PM	Bubbler valve closed
10/21/2011	12:16:22 PM	Main Vac valve opened
10/21/2011	12:16:22 PM	Helium MFC set to  0.000000
10/21/2011	12:16:22 PM	H2 MFC set to  0.000000
10/21/2011	12:16:22 PM	BCl3 MFC set to  0.000000
10/21/2011	12:16:22 PM	PHl3 MFC set to  0.000000
10/21/2011	12:16:22 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:16:22 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:16:23 PM	Tube furnace set to 150
10/21/2011	12:16:53 PM	H2 valve closed
10/21/2011	12:16:53 PM	BCl3 valve closed
10/21/2011	12:16:53 PM	PH3 valve closed
10/21/2011	12:16:53 PM	SiCl4 pre valve closed
10/21/2011	12:16:53 PM	SiCl4 post valve closed
10/21/2011	12:16:53 PM	Bypass valve closed
10/21/2011	12:16:53 PM	Bubbler valve closed
10/21/2011	12:16:53 PM	Helium valve opened
10/21/2011	12:16:53 PM	Main Vac valve opened
10/21/2011	12:16:53 PM	Helium MFC set to  20.000000
10/21/2011	12:16:53 PM	H2 MFC set to  0.000000
10/21/2011	12:16:53 PM	BCl3 MFC set to  0.000000
10/21/2011	12:16:53 PM	PHl3 MFC set to  0.000000
10/21/2011	12:16:53 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:16:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:16:53 PM	Tube furnace set to 150
10/21/2011	12:17:23 PM	Helium valve closed
10/21/2011	12:17:23 PM	H2 valve closed
10/21/2011	12:17:23 PM	BCl3 valve closed
10/21/2011	12:17:23 PM	PH3 valve closed
10/21/2011	12:17:23 PM	SiCl4 pre valve closed
10/21/2011	12:17:23 PM	SiCl4 post valve closed
10/21/2011	12:17:23 PM	Bypass valve closed
10/21/2011	12:17:23 PM	Bubbler valve closed
10/21/2011	12:17:23 PM	Main Vac valve opened
10/21/2011	12:17:23 PM	Helium MFC set to  0.000000
10/21/2011	12:17:23 PM	H2 MFC set to  0.000000
10/21/2011	12:17:23 PM	BCl3 MFC set to  0.000000
10/21/2011	12:17:23 PM	PHl3 MFC set to  0.000000
10/21/2011	12:17:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:17:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:17:23 PM	Tube furnace set to 150
10/21/2011	12:17:53 PM	H2 valve closed
10/21/2011	12:17:53 PM	BCl3 valve closed
10/21/2011	12:17:53 PM	PH3 valve closed
10/21/2011	12:17:53 PM	SiCl4 pre valve closed
10/21/2011	12:17:53 PM	SiCl4 post valve closed
10/21/2011	12:17:53 PM	Bypass valve closed
10/21/2011	12:17:53 PM	Bubbler valve closed
10/21/2011	12:17:53 PM	Helium valve opened
10/21/2011	12:17:53 PM	Main Vac valve opened
10/21/2011	12:17:53 PM	Helium MFC set to  20.000000
10/21/2011	12:17:53 PM	H2 MFC set to  0.000000
10/21/2011	12:17:53 PM	BCl3 MFC set to  0.000000
10/21/2011	12:17:53 PM	PHl3 MFC set to  0.000000
10/21/2011	12:17:53 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:17:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:17:53 PM	Tube furnace set to 150
10/21/2011	12:18:23 PM	Helium valve closed
10/21/2011	12:18:23 PM	H2 valve closed
10/21/2011	12:18:23 PM	BCl3 valve closed
10/21/2011	12:18:23 PM	PH3 valve closed
10/21/2011	12:18:23 PM	SiCl4 pre valve closed
10/21/2011	12:18:23 PM	SiCl4 post valve closed
10/21/2011	12:18:23 PM	Bypass valve closed
10/21/2011	12:18:23 PM	Bubbler valve closed
10/21/2011	12:18:23 PM	Main Vac valve opened
10/21/2011	12:18:23 PM	Helium MFC set to  0.000000
10/21/2011	12:18:23 PM	H2 MFC set to  0.000000
10/21/2011	12:18:23 PM	BCl3 MFC set to  0.000000
10/21/2011	12:18:23 PM	PHl3 MFC set to  0.000000
10/21/2011	12:18:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:18:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:18:23 PM	Tube furnace set to 150
10/21/2011	12:18:53 PM	H2 valve closed
10/21/2011	12:18:53 PM	BCl3 valve closed
10/21/2011	12:18:53 PM	PH3 valve closed
10/21/2011	12:18:53 PM	SiCl4 pre valve closed
10/21/2011	12:18:53 PM	SiCl4 post valve closed
10/21/2011	12:18:53 PM	Bypass valve closed
10/21/2011	12:18:53 PM	Bubbler valve closed
10/21/2011	12:18:53 PM	Helium valve opened
10/21/2011	12:18:53 PM	Main Vac valve opened
10/21/2011	12:18:53 PM	Helium MFC set to  20.000000
10/21/2011	12:18:53 PM	H2 MFC set to  0.000000
10/21/2011	12:18:53 PM	BCl3 MFC set to  0.000000
10/21/2011	12:18:53 PM	PHl3 MFC set to  0.000000
10/21/2011	12:18:53 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:18:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:18:54 PM	Tube furnace set to 150
10/21/2011	12:19:24 PM	Helium valve closed
10/21/2011	12:19:24 PM	H2 valve closed
10/21/2011	12:19:24 PM	BCl3 valve closed
10/21/2011	12:19:24 PM	PH3 valve closed
10/21/2011	12:19:24 PM	SiCl4 pre valve closed
10/21/2011	12:19:24 PM	SiCl4 post valve closed
10/21/2011	12:19:24 PM	Bypass valve closed
10/21/2011	12:19:24 PM	Bubbler valve closed
10/21/2011	12:19:24 PM	Main Vac valve opened
10/21/2011	12:19:24 PM	Helium MFC set to  0.000000
10/21/2011	12:19:24 PM	H2 MFC set to  0.000000
10/21/2011	12:19:24 PM	BCl3 MFC set to  0.000000
10/21/2011	12:19:24 PM	PHl3 MFC set to  0.000000
10/21/2011	12:19:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:19:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:19:24 PM	Tube furnace set to 150
10/21/2011	12:19:54 PM	H2 valve closed
10/21/2011	12:19:54 PM	BCl3 valve closed
10/21/2011	12:19:54 PM	PH3 valve closed
10/21/2011	12:19:54 PM	SiCl4 pre valve closed
10/21/2011	12:19:54 PM	SiCl4 post valve closed
10/21/2011	12:19:54 PM	Bypass valve closed
10/21/2011	12:19:54 PM	Bubbler valve closed
10/21/2011	12:19:54 PM	Helium valve opened
10/21/2011	12:19:54 PM	Main Vac valve opened
10/21/2011	12:19:54 PM	Helium MFC set to  20.000000
10/21/2011	12:19:54 PM	H2 MFC set to  0.000000
10/21/2011	12:19:54 PM	BCl3 MFC set to  0.000000
10/21/2011	12:19:54 PM	PHl3 MFC set to  0.000000
10/21/2011	12:19:54 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:19:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:19:54 PM	Tube furnace set to 150
10/21/2011	12:20:24 PM	Helium valve closed
10/21/2011	12:20:24 PM	H2 valve closed
10/21/2011	12:20:24 PM	BCl3 valve closed
10/21/2011	12:20:24 PM	PH3 valve closed
10/21/2011	12:20:24 PM	SiCl4 pre valve closed
10/21/2011	12:20:24 PM	SiCl4 post valve closed
10/21/2011	12:20:24 PM	Bypass valve closed
10/21/2011	12:20:24 PM	Bubbler valve closed
10/21/2011	12:20:24 PM	Main Vac valve opened
10/21/2011	12:20:24 PM	Helium MFC set to  0.000000
10/21/2011	12:20:24 PM	H2 MFC set to  0.000000
10/21/2011	12:20:24 PM	BCl3 MFC set to  0.000000
10/21/2011	12:20:24 PM	PHl3 MFC set to  0.000000
10/21/2011	12:20:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:20:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:20:24 PM	Tube furnace set to 150
10/21/2011	12:20:54 PM	H2 valve closed
10/21/2011	12:20:54 PM	BCl3 valve closed
10/21/2011	12:20:54 PM	PH3 valve closed
10/21/2011	12:20:54 PM	SiCl4 pre valve closed
10/21/2011	12:20:54 PM	SiCl4 post valve closed
10/21/2011	12:20:54 PM	Bypass valve closed
10/21/2011	12:20:54 PM	Bubbler valve closed
10/21/2011	12:20:54 PM	Helium valve opened
10/21/2011	12:20:54 PM	Main Vac valve opened
10/21/2011	12:20:54 PM	Helium MFC set to  20.000000
10/21/2011	12:20:54 PM	H2 MFC set to  0.000000
10/21/2011	12:20:54 PM	BCl3 MFC set to  0.000000
10/21/2011	12:20:54 PM	PHl3 MFC set to  0.000000
10/21/2011	12:20:54 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:20:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:20:54 PM	Tube furnace set to 150
10/21/2011	12:21:24 PM	Helium valve closed
10/21/2011	12:21:24 PM	H2 valve closed
10/21/2011	12:21:24 PM	BCl3 valve closed
10/21/2011	12:21:24 PM	PH3 valve closed
10/21/2011	12:21:24 PM	SiCl4 pre valve closed
10/21/2011	12:21:24 PM	SiCl4 post valve closed
10/21/2011	12:21:24 PM	Bypass valve closed
10/21/2011	12:21:24 PM	Bubbler valve closed
10/21/2011	12:21:24 PM	Main Vac valve opened
10/21/2011	12:21:24 PM	Helium MFC set to  0.000000
10/21/2011	12:21:24 PM	H2 MFC set to  0.000000
10/21/2011	12:21:24 PM	BCl3 MFC set to  0.000000
10/21/2011	12:21:24 PM	PHl3 MFC set to  0.000000
10/21/2011	12:21:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:21:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:21:25 PM	Tube furnace set to 150
10/21/2011	12:21:55 PM	H2 valve closed
10/21/2011	12:21:55 PM	BCl3 valve closed
10/21/2011	12:21:55 PM	PH3 valve closed
10/21/2011	12:21:55 PM	SiCl4 pre valve closed
10/21/2011	12:21:55 PM	SiCl4 post valve closed
10/21/2011	12:21:55 PM	Bypass valve closed
10/21/2011	12:21:55 PM	Bubbler valve closed
10/21/2011	12:21:55 PM	Helium valve opened
10/21/2011	12:21:55 PM	Main Vac valve opened
10/21/2011	12:21:55 PM	Helium MFC set to  20.000000
10/21/2011	12:21:55 PM	H2 MFC set to  0.000000
10/21/2011	12:21:55 PM	BCl3 MFC set to  0.000000
10/21/2011	12:21:55 PM	PHl3 MFC set to  0.000000
10/21/2011	12:21:55 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:21:55 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:21:55 PM	Tube furnace set to 150
10/21/2011	12:22:25 PM	Helium valve closed
10/21/2011	12:22:25 PM	H2 valve closed
10/21/2011	12:22:25 PM	BCl3 valve closed
10/21/2011	12:22:25 PM	PH3 valve closed
10/21/2011	12:22:25 PM	SiCl4 pre valve closed
10/21/2011	12:22:25 PM	SiCl4 post valve closed
10/21/2011	12:22:25 PM	Bypass valve closed
10/21/2011	12:22:25 PM	Bubbler valve closed
10/21/2011	12:22:25 PM	Main Vac valve opened
10/21/2011	12:22:25 PM	Helium MFC set to  0.000000
10/21/2011	12:22:25 PM	H2 MFC set to  0.000000
10/21/2011	12:22:25 PM	BCl3 MFC set to  0.000000
10/21/2011	12:22:25 PM	PHl3 MFC set to  0.000000
10/21/2011	12:22:25 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:22:25 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:22:25 PM	Tube furnace set to 150
10/21/2011	12:22:55 PM	H2 valve closed
10/21/2011	12:22:55 PM	BCl3 valve closed
10/21/2011	12:22:55 PM	PH3 valve closed
10/21/2011	12:22:55 PM	SiCl4 pre valve closed
10/21/2011	12:22:55 PM	SiCl4 post valve closed
10/21/2011	12:22:55 PM	Bypass valve closed
10/21/2011	12:22:55 PM	Bubbler valve closed
10/21/2011	12:22:55 PM	Helium valve opened
10/21/2011	12:22:55 PM	Main Vac valve opened
10/21/2011	12:22:55 PM	Helium MFC set to  20.000000
10/21/2011	12:22:55 PM	H2 MFC set to  0.000000
10/21/2011	12:22:55 PM	BCl3 MFC set to  0.000000
10/21/2011	12:22:55 PM	PHl3 MFC set to  0.000000
10/21/2011	12:22:55 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:22:55 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:22:55 PM	Tube furnace set to 150
10/21/2011	12:23:25 PM	Helium valve closed
10/21/2011	12:23:25 PM	H2 valve closed
10/21/2011	12:23:25 PM	BCl3 valve closed
10/21/2011	12:23:25 PM	PH3 valve closed
10/21/2011	12:23:25 PM	SiCl4 pre valve closed
10/21/2011	12:23:25 PM	SiCl4 post valve closed
10/21/2011	12:23:25 PM	Bypass valve closed
10/21/2011	12:23:25 PM	Bubbler valve closed
10/21/2011	12:23:25 PM	Main Vac valve opened
10/21/2011	12:23:25 PM	Helium MFC set to  0.000000
10/21/2011	12:23:25 PM	H2 MFC set to  0.000000
10/21/2011	12:23:25 PM	BCl3 MFC set to  0.000000
10/21/2011	12:23:25 PM	PHl3 MFC set to  0.000000
10/21/2011	12:23:25 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:23:25 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:23:25 PM	Tube furnace set to 150
10/21/2011	12:23:55 PM	H2 valve closed
10/21/2011	12:23:55 PM	BCl3 valve closed
10/21/2011	12:23:55 PM	PH3 valve closed
10/21/2011	12:23:55 PM	SiCl4 pre valve closed
10/21/2011	12:23:55 PM	SiCl4 post valve closed
10/21/2011	12:23:55 PM	Bypass valve closed
10/21/2011	12:23:55 PM	Bubbler valve closed
10/21/2011	12:23:55 PM	Helium valve opened
10/21/2011	12:23:55 PM	Main Vac valve opened
10/21/2011	12:23:55 PM	Helium MFC set to  20.000000
10/21/2011	12:23:55 PM	H2 MFC set to  0.000000
10/21/2011	12:23:55 PM	BCl3 MFC set to  0.000000
10/21/2011	12:23:55 PM	PHl3 MFC set to  0.000000
10/21/2011	12:23:55 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:23:55 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:23:55 PM	Tube furnace set to 150
10/21/2011	12:24:26 PM	Helium valve closed
10/21/2011	12:24:26 PM	H2 valve closed
10/21/2011	12:24:26 PM	BCl3 valve closed
10/21/2011	12:24:26 PM	PH3 valve closed
10/21/2011	12:24:26 PM	SiCl4 pre valve closed
10/21/2011	12:24:26 PM	SiCl4 post valve closed
10/21/2011	12:24:26 PM	Bypass valve closed
10/21/2011	12:24:26 PM	Bubbler valve closed
10/21/2011	12:24:26 PM	Main Vac valve opened
10/21/2011	12:24:26 PM	Helium MFC set to  0.000000
10/21/2011	12:24:26 PM	H2 MFC set to  0.000000
10/21/2011	12:24:26 PM	BCl3 MFC set to  0.000000
10/21/2011	12:24:26 PM	PHl3 MFC set to  0.000000
10/21/2011	12:24:26 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:24:26 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:24:26 PM	Tube furnace set to 150
10/21/2011	12:24:56 PM	H2 valve closed
10/21/2011	12:24:56 PM	BCl3 valve closed
10/21/2011	12:24:56 PM	PH3 valve closed
10/21/2011	12:24:56 PM	SiCl4 pre valve closed
10/21/2011	12:24:56 PM	SiCl4 post valve closed
10/21/2011	12:24:56 PM	Bypass valve closed
10/21/2011	12:24:56 PM	Bubbler valve closed
10/21/2011	12:24:56 PM	Helium valve opened
10/21/2011	12:24:56 PM	Main Vac valve opened
10/21/2011	12:24:56 PM	Helium MFC set to  20.000000
10/21/2011	12:24:56 PM	H2 MFC set to  0.000000
10/21/2011	12:24:56 PM	BCl3 MFC set to  0.000000
10/21/2011	12:24:56 PM	PHl3 MFC set to  0.000000
10/21/2011	12:24:56 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:24:56 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:24:56 PM	Tube furnace set to 150
10/21/2011	12:25:26 PM	Helium valve closed
10/21/2011	12:25:26 PM	H2 valve closed
10/21/2011	12:25:26 PM	BCl3 valve closed
10/21/2011	12:25:26 PM	PH3 valve closed
10/21/2011	12:25:26 PM	SiCl4 pre valve closed
10/21/2011	12:25:26 PM	SiCl4 post valve closed
10/21/2011	12:25:26 PM	Bypass valve closed
10/21/2011	12:25:26 PM	Bubbler valve closed
10/21/2011	12:25:26 PM	Main Vac valve opened
10/21/2011	12:25:26 PM	Helium MFC set to  0.000000
10/21/2011	12:25:26 PM	H2 MFC set to  0.000000
10/21/2011	12:25:26 PM	BCl3 MFC set to  0.000000
10/21/2011	12:25:26 PM	PHl3 MFC set to  0.000000
10/21/2011	12:25:26 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:25:26 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:25:26 PM	Tube furnace set to 150
10/21/2011	12:25:27 PM	Run finished at 12:25 PM
10/21/2011	12:26:25 PM	Recipe started at 12:26 PM
10/21/2011	12:26:25 PM	Helium valve closed
10/21/2011	12:26:25 PM	H2 valve closed
10/21/2011	12:26:25 PM	BCl3 valve closed
10/21/2011	12:26:25 PM	PH3 valve closed
10/21/2011	12:26:25 PM	SiCl4 pre valve closed
10/21/2011	12:26:25 PM	SiCl4 post valve closed
10/21/2011	12:26:25 PM	Bypass valve closed
10/21/2011	12:26:25 PM	Bubbler valve closed
10/21/2011	12:26:25 PM	Main Vac valve opened
10/21/2011	12:26:25 PM	Helium MFC set to  0.000000
10/21/2011	12:26:25 PM	H2 MFC set to  0.000000
10/21/2011	12:26:25 PM	BCl3 MFC set to  0.000000
10/21/2011	12:26:25 PM	PHl3 MFC set to  0.000000
10/21/2011	12:26:25 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:26:25 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:26:25 PM	Tube furnace set to 150
10/21/2011	12:26:28 PM	H2 valve closed
10/21/2011	12:26:28 PM	BCl3 valve closed
10/21/2011	12:26:28 PM	PH3 valve closed
10/21/2011	12:26:28 PM	SiCl4 pre valve closed
10/21/2011	12:26:28 PM	SiCl4 post valve closed
10/21/2011	12:26:28 PM	Bypass valve closed
10/21/2011	12:26:28 PM	Bubbler valve closed
10/21/2011	12:26:28 PM	Helium valve opened
10/21/2011	12:26:28 PM	Main Vac valve opened
10/21/2011	12:26:28 PM	Helium MFC set to  20.000000
10/21/2011	12:26:28 PM	H2 MFC set to  0.000000
10/21/2011	12:26:28 PM	BCl3 MFC set to  0.000000
10/21/2011	12:26:28 PM	PHl3 MFC set to  0.000000
10/21/2011	12:26:28 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:26:28 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:26:28 PM	Tube furnace set to 150
10/21/2011	12:26:58 PM	Helium valve closed
10/21/2011	12:26:58 PM	H2 valve closed
10/21/2011	12:26:58 PM	BCl3 valve closed
10/21/2011	12:26:58 PM	PH3 valve closed
10/21/2011	12:26:58 PM	SiCl4 pre valve closed
10/21/2011	12:26:58 PM	SiCl4 post valve closed
10/21/2011	12:26:58 PM	Bypass valve closed
10/21/2011	12:26:58 PM	Bubbler valve closed
10/21/2011	12:26:58 PM	Main Vac valve opened
10/21/2011	12:26:58 PM	Helium MFC set to  0.000000
10/21/2011	12:26:58 PM	H2 MFC set to  0.000000
10/21/2011	12:26:58 PM	BCl3 MFC set to  0.000000
10/21/2011	12:26:58 PM	PHl3 MFC set to  0.000000
10/21/2011	12:26:58 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:26:58 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:26:58 PM	Tube furnace set to 150
10/21/2011	12:27:28 PM	H2 valve closed
10/21/2011	12:27:28 PM	BCl3 valve closed
10/21/2011	12:27:28 PM	PH3 valve closed
10/21/2011	12:27:28 PM	SiCl4 pre valve closed
10/21/2011	12:27:28 PM	SiCl4 post valve closed
10/21/2011	12:27:28 PM	Bypass valve closed
10/21/2011	12:27:28 PM	Bubbler valve closed
10/21/2011	12:27:28 PM	Helium valve opened
10/21/2011	12:27:28 PM	Main Vac valve opened
10/21/2011	12:27:28 PM	Helium MFC set to  20.000000
10/21/2011	12:27:28 PM	H2 MFC set to  0.000000
10/21/2011	12:27:28 PM	BCl3 MFC set to  0.000000
10/21/2011	12:27:28 PM	PHl3 MFC set to  0.000000
10/21/2011	12:27:28 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:27:28 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:27:28 PM	Tube furnace set to 150
10/21/2011	12:27:58 PM	Helium valve closed
10/21/2011	12:27:58 PM	H2 valve closed
10/21/2011	12:27:58 PM	BCl3 valve closed
10/21/2011	12:27:58 PM	PH3 valve closed
10/21/2011	12:27:58 PM	SiCl4 pre valve closed
10/21/2011	12:27:58 PM	SiCl4 post valve closed
10/21/2011	12:27:58 PM	Bypass valve closed
10/21/2011	12:27:58 PM	Bubbler valve closed
10/21/2011	12:27:58 PM	Main Vac valve opened
10/21/2011	12:27:58 PM	Helium MFC set to  0.000000
10/21/2011	12:27:58 PM	H2 MFC set to  0.000000
10/21/2011	12:27:58 PM	BCl3 MFC set to  0.000000
10/21/2011	12:27:58 PM	PHl3 MFC set to  0.000000
10/21/2011	12:27:58 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:27:58 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:27:58 PM	Tube furnace set to 150
10/21/2011	12:28:28 PM	H2 valve closed
10/21/2011	12:28:28 PM	BCl3 valve closed
10/21/2011	12:28:28 PM	PH3 valve closed
10/21/2011	12:28:28 PM	SiCl4 pre valve closed
10/21/2011	12:28:28 PM	SiCl4 post valve closed
10/21/2011	12:28:28 PM	Bypass valve closed
10/21/2011	12:28:28 PM	Bubbler valve closed
10/21/2011	12:28:28 PM	Helium valve opened
10/21/2011	12:28:28 PM	Main Vac valve opened
10/21/2011	12:28:28 PM	Helium MFC set to  20.000000
10/21/2011	12:28:28 PM	H2 MFC set to  0.000000
10/21/2011	12:28:28 PM	BCl3 MFC set to  0.000000
10/21/2011	12:28:28 PM	PHl3 MFC set to  0.000000
10/21/2011	12:28:28 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:28:28 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:28:29 PM	Tube furnace set to 150
10/21/2011	12:28:59 PM	Helium valve closed
10/21/2011	12:28:59 PM	H2 valve closed
10/21/2011	12:28:59 PM	BCl3 valve closed
10/21/2011	12:28:59 PM	PH3 valve closed
10/21/2011	12:28:59 PM	SiCl4 pre valve closed
10/21/2011	12:28:59 PM	SiCl4 post valve closed
10/21/2011	12:28:59 PM	Bypass valve closed
10/21/2011	12:28:59 PM	Bubbler valve closed
10/21/2011	12:28:59 PM	Main Vac valve opened
10/21/2011	12:28:59 PM	Helium MFC set to  0.000000
10/21/2011	12:28:59 PM	H2 MFC set to  0.000000
10/21/2011	12:28:59 PM	BCl3 MFC set to  0.000000
10/21/2011	12:28:59 PM	PHl3 MFC set to  0.000000
10/21/2011	12:28:59 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:28:59 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:28:59 PM	Tube furnace set to 150
10/21/2011	12:29:29 PM	H2 valve closed
10/21/2011	12:29:29 PM	BCl3 valve closed
10/21/2011	12:29:29 PM	PH3 valve closed
10/21/2011	12:29:29 PM	SiCl4 pre valve closed
10/21/2011	12:29:29 PM	SiCl4 post valve closed
10/21/2011	12:29:29 PM	Bypass valve closed
10/21/2011	12:29:29 PM	Bubbler valve closed
10/21/2011	12:29:29 PM	Helium valve opened
10/21/2011	12:29:29 PM	Main Vac valve opened
10/21/2011	12:29:29 PM	Helium MFC set to  20.000000
10/21/2011	12:29:29 PM	H2 MFC set to  0.000000
10/21/2011	12:29:29 PM	BCl3 MFC set to  0.000000
10/21/2011	12:29:29 PM	PHl3 MFC set to  0.000000
10/21/2011	12:29:29 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:29:29 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:29:29 PM	Tube furnace set to 150
10/21/2011	12:29:59 PM	Helium valve closed
10/21/2011	12:29:59 PM	H2 valve closed
10/21/2011	12:29:59 PM	BCl3 valve closed
10/21/2011	12:29:59 PM	PH3 valve closed
10/21/2011	12:29:59 PM	SiCl4 pre valve closed
10/21/2011	12:29:59 PM	SiCl4 post valve closed
10/21/2011	12:29:59 PM	Bypass valve closed
10/21/2011	12:29:59 PM	Bubbler valve closed
10/21/2011	12:29:59 PM	Main Vac valve opened
10/21/2011	12:29:59 PM	Helium MFC set to  0.000000
10/21/2011	12:29:59 PM	H2 MFC set to  0.000000
10/21/2011	12:29:59 PM	BCl3 MFC set to  0.000000
10/21/2011	12:29:59 PM	PHl3 MFC set to  0.000000
10/21/2011	12:29:59 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:29:59 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:29:59 PM	Tube furnace set to 150
10/21/2011	12:30:29 PM	H2 valve closed
10/21/2011	12:30:29 PM	BCl3 valve closed
10/21/2011	12:30:29 PM	PH3 valve closed
10/21/2011	12:30:29 PM	SiCl4 pre valve closed
10/21/2011	12:30:29 PM	SiCl4 post valve closed
10/21/2011	12:30:29 PM	Bypass valve closed
10/21/2011	12:30:29 PM	Bubbler valve closed
10/21/2011	12:30:29 PM	Helium valve opened
10/21/2011	12:30:29 PM	Main Vac valve opened
10/21/2011	12:30:29 PM	Helium MFC set to  20.000000
10/21/2011	12:30:29 PM	H2 MFC set to  0.000000
10/21/2011	12:30:29 PM	BCl3 MFC set to  0.000000
10/21/2011	12:30:29 PM	PHl3 MFC set to  0.000000
10/21/2011	12:30:29 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:30:29 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:30:29 PM	Tube furnace set to 150
10/21/2011	12:30:59 PM	Helium valve closed
10/21/2011	12:30:59 PM	H2 valve closed
10/21/2011	12:30:59 PM	BCl3 valve closed
10/21/2011	12:30:59 PM	PH3 valve closed
10/21/2011	12:30:59 PM	SiCl4 pre valve closed
10/21/2011	12:30:59 PM	SiCl4 post valve closed
10/21/2011	12:30:59 PM	Bypass valve closed
10/21/2011	12:30:59 PM	Bubbler valve closed
10/21/2011	12:30:59 PM	Main Vac valve opened
10/21/2011	12:30:59 PM	Helium MFC set to  0.000000
10/21/2011	12:30:59 PM	H2 MFC set to  0.000000
10/21/2011	12:30:59 PM	BCl3 MFC set to  0.000000
10/21/2011	12:30:59 PM	PHl3 MFC set to  0.000000
10/21/2011	12:30:59 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:30:59 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:31:00 PM	Tube furnace set to 150
10/21/2011	12:31:30 PM	H2 valve closed
10/21/2011	12:31:30 PM	BCl3 valve closed
10/21/2011	12:31:30 PM	PH3 valve closed
10/21/2011	12:31:30 PM	SiCl4 pre valve closed
10/21/2011	12:31:30 PM	SiCl4 post valve closed
10/21/2011	12:31:30 PM	Bypass valve closed
10/21/2011	12:31:30 PM	Bubbler valve closed
10/21/2011	12:31:30 PM	Helium valve opened
10/21/2011	12:31:30 PM	Main Vac valve opened
10/21/2011	12:31:30 PM	Helium MFC set to  20.000000
10/21/2011	12:31:30 PM	H2 MFC set to  0.000000
10/21/2011	12:31:30 PM	BCl3 MFC set to  0.000000
10/21/2011	12:31:30 PM	PHl3 MFC set to  0.000000
10/21/2011	12:31:30 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:31:30 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:31:30 PM	Tube furnace set to 150
10/21/2011	12:32:00 PM	Helium valve closed
10/21/2011	12:32:00 PM	H2 valve closed
10/21/2011	12:32:00 PM	BCl3 valve closed
10/21/2011	12:32:00 PM	PH3 valve closed
10/21/2011	12:32:00 PM	SiCl4 pre valve closed
10/21/2011	12:32:00 PM	SiCl4 post valve closed
10/21/2011	12:32:00 PM	Bypass valve closed
10/21/2011	12:32:00 PM	Bubbler valve closed
10/21/2011	12:32:00 PM	Main Vac valve opened
10/21/2011	12:32:00 PM	Helium MFC set to  0.000000
10/21/2011	12:32:00 PM	H2 MFC set to  0.000000
10/21/2011	12:32:00 PM	BCl3 MFC set to  0.000000
10/21/2011	12:32:00 PM	PHl3 MFC set to  0.000000
10/21/2011	12:32:00 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:32:00 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:32:00 PM	Tube furnace set to 150
10/21/2011	12:32:30 PM	H2 valve closed
10/21/2011	12:32:30 PM	BCl3 valve closed
10/21/2011	12:32:30 PM	PH3 valve closed
10/21/2011	12:32:30 PM	SiCl4 pre valve closed
10/21/2011	12:32:30 PM	SiCl4 post valve closed
10/21/2011	12:32:30 PM	Bypass valve closed
10/21/2011	12:32:30 PM	Bubbler valve closed
10/21/2011	12:32:30 PM	Helium valve opened
10/21/2011	12:32:30 PM	Main Vac valve opened
10/21/2011	12:32:30 PM	Helium MFC set to  20.000000
10/21/2011	12:32:30 PM	H2 MFC set to  0.000000
10/21/2011	12:32:30 PM	BCl3 MFC set to  0.000000
10/21/2011	12:32:30 PM	PHl3 MFC set to  0.000000
10/21/2011	12:32:30 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:32:30 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:32:30 PM	Tube furnace set to 150
10/21/2011	12:33:00 PM	Helium valve closed
10/21/2011	12:33:00 PM	H2 valve closed
10/21/2011	12:33:00 PM	BCl3 valve closed
10/21/2011	12:33:00 PM	PH3 valve closed
10/21/2011	12:33:00 PM	SiCl4 pre valve closed
10/21/2011	12:33:00 PM	SiCl4 post valve closed
10/21/2011	12:33:00 PM	Bypass valve closed
10/21/2011	12:33:00 PM	Bubbler valve closed
10/21/2011	12:33:00 PM	Main Vac valve opened
10/21/2011	12:33:00 PM	Helium MFC set to  0.000000
10/21/2011	12:33:00 PM	H2 MFC set to  0.000000
10/21/2011	12:33:00 PM	BCl3 MFC set to  0.000000
10/21/2011	12:33:00 PM	PHl3 MFC set to  0.000000
10/21/2011	12:33:00 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:33:00 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:33:00 PM	Tube furnace set to 150
10/21/2011	12:33:30 PM	H2 valve closed
10/21/2011	12:33:30 PM	BCl3 valve closed
10/21/2011	12:33:30 PM	PH3 valve closed
10/21/2011	12:33:30 PM	SiCl4 pre valve closed
10/21/2011	12:33:30 PM	SiCl4 post valve closed
10/21/2011	12:33:30 PM	Bypass valve closed
10/21/2011	12:33:30 PM	Bubbler valve closed
10/21/2011	12:33:30 PM	Helium valve opened
10/21/2011	12:33:30 PM	Main Vac valve opened
10/21/2011	12:33:30 PM	Helium MFC set to  20.000000
10/21/2011	12:33:30 PM	H2 MFC set to  0.000000
10/21/2011	12:33:30 PM	BCl3 MFC set to  0.000000
10/21/2011	12:33:30 PM	PHl3 MFC set to  0.000000
10/21/2011	12:33:30 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:33:30 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:33:31 PM	Tube furnace set to 150
10/21/2011	12:34:01 PM	Helium valve closed
10/21/2011	12:34:01 PM	H2 valve closed
10/21/2011	12:34:01 PM	BCl3 valve closed
10/21/2011	12:34:01 PM	PH3 valve closed
10/21/2011	12:34:01 PM	SiCl4 pre valve closed
10/21/2011	12:34:01 PM	SiCl4 post valve closed
10/21/2011	12:34:01 PM	Bypass valve closed
10/21/2011	12:34:01 PM	Bubbler valve closed
10/21/2011	12:34:01 PM	Main Vac valve opened
10/21/2011	12:34:01 PM	Helium MFC set to  0.000000
10/21/2011	12:34:01 PM	H2 MFC set to  0.000000
10/21/2011	12:34:01 PM	BCl3 MFC set to  0.000000
10/21/2011	12:34:01 PM	PHl3 MFC set to  0.000000
10/21/2011	12:34:01 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:34:01 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:34:01 PM	Tube furnace set to 150
10/21/2011	12:34:31 PM	H2 valve closed
10/21/2011	12:34:31 PM	BCl3 valve closed
10/21/2011	12:34:31 PM	PH3 valve closed
10/21/2011	12:34:31 PM	SiCl4 pre valve closed
10/21/2011	12:34:31 PM	SiCl4 post valve closed
10/21/2011	12:34:31 PM	Bypass valve closed
10/21/2011	12:34:31 PM	Bubbler valve closed
10/21/2011	12:34:31 PM	Helium valve opened
10/21/2011	12:34:31 PM	Main Vac valve opened
10/21/2011	12:34:31 PM	Helium MFC set to  20.000000
10/21/2011	12:34:31 PM	H2 MFC set to  0.000000
10/21/2011	12:34:31 PM	BCl3 MFC set to  0.000000
10/21/2011	12:34:31 PM	PHl3 MFC set to  0.000000
10/21/2011	12:34:31 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:34:31 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:34:31 PM	Tube furnace set to 150
10/21/2011	12:35:01 PM	Helium valve closed
10/21/2011	12:35:01 PM	H2 valve closed
10/21/2011	12:35:01 PM	BCl3 valve closed
10/21/2011	12:35:01 PM	PH3 valve closed
10/21/2011	12:35:01 PM	SiCl4 pre valve closed
10/21/2011	12:35:01 PM	SiCl4 post valve closed
10/21/2011	12:35:01 PM	Bypass valve closed
10/21/2011	12:35:01 PM	Bubbler valve closed
10/21/2011	12:35:01 PM	Main Vac valve opened
10/21/2011	12:35:01 PM	Helium MFC set to  0.000000
10/21/2011	12:35:01 PM	H2 MFC set to  0.000000
10/21/2011	12:35:01 PM	BCl3 MFC set to  0.000000
10/21/2011	12:35:01 PM	PHl3 MFC set to  0.000000
10/21/2011	12:35:01 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:35:01 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:35:01 PM	Tube furnace set to 150
10/21/2011	12:35:31 PM	H2 valve closed
10/21/2011	12:35:31 PM	BCl3 valve closed
10/21/2011	12:35:31 PM	PH3 valve closed
10/21/2011	12:35:31 PM	SiCl4 pre valve closed
10/21/2011	12:35:31 PM	SiCl4 post valve closed
10/21/2011	12:35:31 PM	Bypass valve closed
10/21/2011	12:35:31 PM	Bubbler valve closed
10/21/2011	12:35:31 PM	Helium valve opened
10/21/2011	12:35:31 PM	Main Vac valve opened
10/21/2011	12:35:31 PM	Helium MFC set to  20.000000
10/21/2011	12:35:31 PM	H2 MFC set to  0.000000
10/21/2011	12:35:31 PM	BCl3 MFC set to  0.000000
10/21/2011	12:35:31 PM	PHl3 MFC set to  0.000000
10/21/2011	12:35:31 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:35:31 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:35:31 PM	Tube furnace set to 150
10/21/2011	12:36:01 PM	Helium valve closed
10/21/2011	12:36:01 PM	H2 valve closed
10/21/2011	12:36:01 PM	BCl3 valve closed
10/21/2011	12:36:01 PM	PH3 valve closed
10/21/2011	12:36:01 PM	SiCl4 pre valve closed
10/21/2011	12:36:01 PM	SiCl4 post valve closed
10/21/2011	12:36:01 PM	Bypass valve closed
10/21/2011	12:36:01 PM	Bubbler valve closed
10/21/2011	12:36:01 PM	Main Vac valve opened
10/21/2011	12:36:01 PM	Helium MFC set to  0.000000
10/21/2011	12:36:01 PM	H2 MFC set to  0.000000
10/21/2011	12:36:01 PM	BCl3 MFC set to  0.000000
10/21/2011	12:36:01 PM	PHl3 MFC set to  0.000000
10/21/2011	12:36:01 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:36:01 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:36:02 PM	Tube furnace set to 150
10/21/2011	12:36:03 PM	Run finished at 12:36 PM
10/21/2011	12:36:56 PM	Main Vac valve closed
10/21/2011	12:37:09 PM	Main Vac valve opened
10/21/2011	12:37:50 PM	Recipe started at 12:37 PM
10/21/2011	12:37:50 PM	Helium valve closed
10/21/2011	12:37:50 PM	H2 valve closed
10/21/2011	12:37:50 PM	BCl3 valve closed
10/21/2011	12:37:50 PM	PH3 valve closed
10/21/2011	12:37:50 PM	SiCl4 pre valve closed
10/21/2011	12:37:50 PM	SiCl4 post valve closed
10/21/2011	12:37:50 PM	Main Vac valve closed
10/21/2011	12:37:50 PM	Bypass valve closed
10/21/2011	12:37:50 PM	Bubbler valve closed
10/21/2011	12:37:50 PM	Helium MFC set to  0.000000
10/21/2011	12:37:50 PM	H2 MFC set to  0.000000
10/21/2011	12:37:50 PM	BCl3 MFC set to  0.000000
10/21/2011	12:37:50 PM	PHl3 MFC set to  0.000000
10/21/2011	12:37:50 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:37:50 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:37:51 PM	Tube furnace set to 0
10/21/2011	12:37:54 PM	Helium valve closed
10/21/2011	12:37:54 PM	BCl3 valve closed
10/21/2011	12:37:54 PM	PH3 valve closed
10/21/2011	12:37:54 PM	SiCl4 pre valve closed
10/21/2011	12:37:54 PM	SiCl4 post valve closed
10/21/2011	12:37:54 PM	Main Vac valve closed
10/21/2011	12:37:54 PM	Bypass valve closed
10/21/2011	12:37:54 PM	Bubbler valve closed
10/21/2011	12:37:54 PM	H2 valve opened
10/21/2011	12:37:54 PM	Helium MFC set to  0.000000
10/21/2011	12:37:54 PM	H2 MFC set to  500.000000
10/21/2011	12:37:54 PM	BCl3 MFC set to  0.000000
10/21/2011	12:37:54 PM	PHl3 MFC set to  0.000000
10/21/2011	12:37:54 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:37:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:37:54 PM	Tube furnace set to 0
10/21/2011	12:38:58 PM	Helium valve closed
10/21/2011	12:38:58 PM	BCl3 valve closed
10/21/2011	12:38:58 PM	PH3 valve closed
10/21/2011	12:38:58 PM	SiCl4 pre valve closed
10/21/2011	12:38:58 PM	SiCl4 post valve closed
10/21/2011	12:38:58 PM	Main Vac valve closed
10/21/2011	12:38:58 PM	Bypass valve closed
10/21/2011	12:38:58 PM	H2 valve opened
10/21/2011	12:38:58 PM	Bubbler valve opened
10/21/2011	12:38:58 PM	Helium MFC set to  0.000000
10/21/2011	12:38:58 PM	H2 MFC set to  500.000000
10/21/2011	12:38:58 PM	BCl3 MFC set to  0.000000
10/21/2011	12:38:58 PM	PHl3 MFC set to  0.000000
10/21/2011	12:38:58 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:38:58 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:38:58 PM	Tube furnace set to 0
10/21/2011	12:38:59 PM	Helium valve closed
10/21/2011	12:38:59 PM	BCl3 valve closed
10/21/2011	12:38:59 PM	PH3 valve closed
10/21/2011	12:38:59 PM	SiCl4 pre valve closed
10/21/2011	12:38:59 PM	SiCl4 post valve closed
10/21/2011	12:38:59 PM	Main Vac valve closed
10/21/2011	12:38:59 PM	Bypass valve closed
10/21/2011	12:38:59 PM	H2 valve opened
10/21/2011	12:38:59 PM	Bubbler valve opened
10/21/2011	12:38:59 PM	Helium MFC set to  0.000000
10/21/2011	12:38:59 PM	H2 MFC set to  500.000000
10/21/2011	12:38:59 PM	BCl3 MFC set to  0.000000
10/21/2011	12:38:59 PM	PHl3 MFC set to  0.000000
10/21/2011	12:38:59 PM	SiCl4 MFC set to  0.000000
10/21/2011	12:38:59 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	12:38:59 PM	Tube furnace set to 1025
10/21/2011	1:03:59 PM	Helium valve closed
10/21/2011	1:03:59 PM	PH3 valve closed
10/21/2011	1:03:59 PM	Main Vac valve closed
10/21/2011	1:03:59 PM	Bypass valve closed
10/21/2011	1:03:59 PM	H2 valve opened
10/21/2011	1:03:59 PM	BCl3 valve opened
10/21/2011	1:03:59 PM	SiCl4 pre valve opened
10/21/2011	1:03:59 PM	SiCl4 post valve opened
10/21/2011	1:03:59 PM	Bubbler valve opened
10/21/2011	1:03:59 PM	Helium MFC set to  0.000000
10/21/2011	1:03:59 PM	H2 MFC set to  500.000000
10/21/2011	1:03:59 PM	BCl3 MFC set to  2.300000
10/21/2011	1:03:59 PM	PHl3 MFC set to  0.000000
10/21/2011	1:03:59 PM	SiCl4 MFC set to  50.000000
10/21/2011	1:03:59 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	1:03:59 PM	Tube furnace set to 1025
10/21/2011	1:13:59 PM	Helium valve closed
10/21/2011	1:13:59 PM	BCl3 valve closed
10/21/2011	1:13:59 PM	PH3 valve closed
10/21/2011	1:13:59 PM	SiCl4 pre valve closed
10/21/2011	1:13:59 PM	SiCl4 post valve closed
10/21/2011	1:13:59 PM	Main Vac valve closed
10/21/2011	1:13:59 PM	Bypass valve closed
10/21/2011	1:13:59 PM	H2 valve opened
10/21/2011	1:13:59 PM	Bubbler valve opened
10/21/2011	1:13:59 PM	Helium MFC set to  0.000000
10/21/2011	1:13:59 PM	H2 MFC set to  500.000000
10/21/2011	1:13:59 PM	BCl3 MFC set to  0.000000
10/21/2011	1:13:59 PM	PHl3 MFC set to  0.000000
10/21/2011	1:13:59 PM	SiCl4 MFC set to  0.000000
10/21/2011	1:13:59 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	1:13:59 PM	Tube furnace set to 750
10/21/2011	1:23:59 PM	H2 valve closed
10/21/2011	1:23:59 PM	BCl3 valve closed
10/21/2011	1:23:59 PM	PH3 valve closed
10/21/2011	1:23:59 PM	SiCl4 pre valve closed
10/21/2011	1:23:59 PM	SiCl4 post valve closed
10/21/2011	1:23:59 PM	Main Vac valve closed
10/21/2011	1:23:59 PM	Bypass valve closed
10/21/2011	1:23:59 PM	Helium valve opened
10/21/2011	1:23:59 PM	Bubbler valve opened
10/21/2011	1:23:59 PM	Helium MFC set to  500.000000
10/21/2011	1:23:59 PM	H2 MFC set to  0.000000
10/21/2011	1:23:59 PM	BCl3 MFC set to  0.000000
10/21/2011	1:23:59 PM	PHl3 MFC set to  0.000000
10/21/2011	1:23:59 PM	SiCl4 MFC set to  0.000000
10/21/2011	1:23:59 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	1:23:59 PM	Tube furnace set to 0
10/21/2011	1:43:59 PM	Helium valve closed
10/21/2011	1:43:59 PM	H2 valve closed
10/21/2011	1:43:59 PM	BCl3 valve closed
10/21/2011	1:43:59 PM	PH3 valve closed
10/21/2011	1:43:59 PM	SiCl4 pre valve closed
10/21/2011	1:43:59 PM	SiCl4 post valve closed
10/21/2011	1:43:59 PM	Main Vac valve closed
10/21/2011	1:43:59 PM	Bypass valve closed
10/21/2011	1:43:59 PM	Bubbler valve closed
10/21/2011	1:43:59 PM	Helium MFC set to  0.000000
10/21/2011	1:43:59 PM	H2 MFC set to  0.000000
10/21/2011	1:43:59 PM	BCl3 MFC set to  0.000000
10/21/2011	1:43:59 PM	PHl3 MFC set to  0.000000
10/21/2011	1:43:59 PM	SiCl4 MFC set to  0.000000
10/21/2011	1:43:59 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	1:44:00 PM	Tube furnace set to 0
10/21/2011	1:44:01 PM	Run finished at 1:44 PM
10/21/2011	1:58:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2011	1:58:56 PM	Recipe started at 1:58 PM
10/21/2011	1:58:56 PM	Helium valve closed
10/21/2011	1:58:56 PM	H2 valve closed
10/21/2011	1:58:56 PM	BCl3 valve closed
10/21/2011	1:58:56 PM	PH3 valve closed
10/21/2011	1:58:56 PM	SiCl4 pre valve closed
10/21/2011	1:58:56 PM	SiCl4 post valve closed
10/21/2011	1:58:56 PM	Main Vac valve closed
10/21/2011	1:58:56 PM	Bypass valve closed
10/21/2011	1:58:56 PM	Bubbler valve closed
10/21/2011	1:58:56 PM	Helium MFC set to  0.000000
10/21/2011	1:58:56 PM	H2 MFC set to  0.000000
10/21/2011	1:58:56 PM	BCl3 MFC set to  0.000000
10/21/2011	1:58:56 PM	PHl3 MFC set to  0.000000
10/21/2011	1:58:56 PM	SiCl4 MFC set to  0.000000
10/21/2011	1:58:56 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	1:58:56 PM	Tube furnace set to 0
10/21/2011	1:58:59 PM	H2 valve closed
10/21/2011	1:58:59 PM	BCl3 valve closed
10/21/2011	1:58:59 PM	PH3 valve closed
10/21/2011	1:58:59 PM	SiCl4 pre valve closed
10/21/2011	1:58:59 PM	SiCl4 post valve closed
10/21/2011	1:58:59 PM	Main Vac valve closed
10/21/2011	1:58:59 PM	Bypass valve closed
10/21/2011	1:58:59 PM	Bubbler valve closed
10/21/2011	1:58:59 PM	Helium valve opened
10/21/2011	1:58:59 PM	Helium MFC set to  500.000000
10/21/2011	1:58:59 PM	H2 MFC set to  0.000000
10/21/2011	1:58:59 PM	BCl3 MFC set to  0.000000
10/21/2011	1:58:59 PM	PHl3 MFC set to  0.000000
10/21/2011	1:58:59 PM	SiCl4 MFC set to  0.000000
10/21/2011	1:58:59 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	1:58:59 PM	Tube furnace set to 0
10/21/2011	1:59:00 PM	Helium valve closed
10/21/2011	1:59:00 PM	H2 valve closed
10/21/2011	1:59:00 PM	BCl3 valve closed
10/21/2011	1:59:00 PM	PH3 valve closed
10/21/2011	1:59:00 PM	SiCl4 pre valve closed
10/21/2011	1:59:00 PM	SiCl4 post valve closed
10/21/2011	1:59:00 PM	Main Vac valve closed
10/21/2011	1:59:00 PM	Bypass valve closed
10/21/2011	1:59:00 PM	Bubbler valve closed
10/21/2011	1:59:00 PM	Helium MFC set to  0.000000
10/21/2011	1:59:00 PM	H2 MFC set to  0.000000
10/21/2011	1:59:00 PM	BCl3 MFC set to  0.000000
10/21/2011	1:59:00 PM	PHl3 MFC set to  0.000000
10/21/2011	1:59:00 PM	SiCl4 MFC set to  0.000000
10/21/2011	1:59:00 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	1:59:00 PM	Tube furnace set to 0
10/21/2011	1:59:01 PM	Run finished at 1:59 PM
10/21/2011	1:59:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2011	2:07:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	2:07:31 PM	Recipe started at 2:07 PM
10/21/2011	2:07:31 PM	Helium valve closed
10/21/2011	2:07:31 PM	H2 valve closed
10/21/2011	2:07:31 PM	BCl3 valve closed
10/21/2011	2:07:31 PM	PH3 valve closed
10/21/2011	2:07:31 PM	SiCl4 pre valve closed
10/21/2011	2:07:31 PM	SiCl4 post valve closed
10/21/2011	2:07:31 PM	Main Vac valve closed
10/21/2011	2:07:31 PM	Bubbler valve closed
10/21/2011	2:07:31 PM	Bypass valve opened
10/21/2011	2:07:31 PM	Helium MFC set to  0.000000
10/21/2011	2:07:31 PM	H2 MFC set to  0.000000
10/21/2011	2:07:31 PM	BCl3 MFC set to  0.000000
10/21/2011	2:07:31 PM	PHl3 MFC set to  0.000000
10/21/2011	2:07:31 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:07:31 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:07:32 PM	Tube furnace set to 0
10/21/2011	2:08:38 PM	Helium valve closed
10/21/2011	2:08:38 PM	H2 valve closed
10/21/2011	2:08:38 PM	BCl3 valve closed
10/21/2011	2:08:38 PM	PH3 valve closed
10/21/2011	2:08:38 PM	SiCl4 pre valve closed
10/21/2011	2:08:38 PM	SiCl4 post valve closed
10/21/2011	2:08:38 PM	Main Vac valve closed
10/21/2011	2:08:38 PM	Bubbler valve closed
10/21/2011	2:08:38 PM	Bypass valve opened
10/21/2011	2:08:38 PM	Helium MFC set to  0.000000
10/21/2011	2:08:38 PM	H2 MFC set to  0.000000
10/21/2011	2:08:38 PM	BCl3 MFC set to  0.000000
10/21/2011	2:08:38 PM	PHl3 MFC set to  0.000000
10/21/2011	2:08:38 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:08:38 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:08:38 PM	Tube furnace set to 0
10/21/2011	2:09:38 PM	Helium valve closed
10/21/2011	2:09:38 PM	H2 valve closed
10/21/2011	2:09:38 PM	BCl3 valve closed
10/21/2011	2:09:38 PM	PH3 valve closed
10/21/2011	2:09:38 PM	SiCl4 pre valve closed
10/21/2011	2:09:38 PM	SiCl4 post valve closed
10/21/2011	2:09:38 PM	Bypass valve closed
10/21/2011	2:09:38 PM	Bubbler valve closed
10/21/2011	2:09:38 PM	Main Vac valve opened
10/21/2011	2:09:38 PM	Helium MFC set to  0.000000
10/21/2011	2:09:38 PM	H2 MFC set to  0.000000
10/21/2011	2:09:38 PM	BCl3 MFC set to  0.000000
10/21/2011	2:09:38 PM	PHl3 MFC set to  0.000000
10/21/2011	2:09:38 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:09:38 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:09:38 PM	Tube furnace set to 0
10/21/2011	2:09:39 PM	Run finished at 2:09 PM
10/21/2011	2:09:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	2:14:20 PM	Recipe started at 2:14 PM
10/21/2011	2:14:20 PM	Helium valve closed
10/21/2011	2:14:20 PM	H2 valve closed
10/21/2011	2:14:20 PM	BCl3 valve closed
10/21/2011	2:14:20 PM	PH3 valve closed
10/21/2011	2:14:20 PM	SiCl4 pre valve closed
10/21/2011	2:14:20 PM	SiCl4 post valve closed
10/21/2011	2:14:20 PM	Bypass valve closed
10/21/2011	2:14:20 PM	Bubbler valve closed
10/21/2011	2:14:20 PM	Main Vac valve opened
10/21/2011	2:14:20 PM	Helium MFC set to  0.000000
10/21/2011	2:14:20 PM	H2 MFC set to  0.000000
10/21/2011	2:14:20 PM	BCl3 MFC set to  0.000000
10/21/2011	2:14:20 PM	PHl3 MFC set to  0.000000
10/21/2011	2:14:20 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:14:20 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:14:20 PM	Tube furnace set to 150
10/21/2011	2:14:50 PM	H2 valve closed
10/21/2011	2:14:50 PM	BCl3 valve closed
10/21/2011	2:14:50 PM	PH3 valve closed
10/21/2011	2:14:50 PM	SiCl4 pre valve closed
10/21/2011	2:14:50 PM	SiCl4 post valve closed
10/21/2011	2:14:50 PM	Bypass valve closed
10/21/2011	2:14:50 PM	Bubbler valve closed
10/21/2011	2:14:50 PM	Helium valve opened
10/21/2011	2:14:50 PM	Main Vac valve opened
10/21/2011	2:14:50 PM	Helium MFC set to  20.000000
10/21/2011	2:14:50 PM	H2 MFC set to  0.000000
10/21/2011	2:14:50 PM	BCl3 MFC set to  0.000000
10/21/2011	2:14:50 PM	PHl3 MFC set to  0.000000
10/21/2011	2:14:50 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:14:50 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:14:51 PM	Tube furnace set to 150
10/21/2011	2:15:21 PM	Helium valve closed
10/21/2011	2:15:21 PM	H2 valve closed
10/21/2011	2:15:21 PM	BCl3 valve closed
10/21/2011	2:15:21 PM	PH3 valve closed
10/21/2011	2:15:21 PM	SiCl4 pre valve closed
10/21/2011	2:15:21 PM	SiCl4 post valve closed
10/21/2011	2:15:21 PM	Bypass valve closed
10/21/2011	2:15:21 PM	Bubbler valve closed
10/21/2011	2:15:21 PM	Main Vac valve opened
10/21/2011	2:15:21 PM	Helium MFC set to  0.000000
10/21/2011	2:15:21 PM	H2 MFC set to  0.000000
10/21/2011	2:15:21 PM	BCl3 MFC set to  0.000000
10/21/2011	2:15:21 PM	PHl3 MFC set to  0.000000
10/21/2011	2:15:21 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:15:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:15:21 PM	Tube furnace set to 150
10/21/2011	2:15:51 PM	H2 valve closed
10/21/2011	2:15:51 PM	BCl3 valve closed
10/21/2011	2:15:51 PM	PH3 valve closed
10/21/2011	2:15:51 PM	SiCl4 pre valve closed
10/21/2011	2:15:51 PM	SiCl4 post valve closed
10/21/2011	2:15:51 PM	Bypass valve closed
10/21/2011	2:15:51 PM	Bubbler valve closed
10/21/2011	2:15:51 PM	Helium valve opened
10/21/2011	2:15:51 PM	Main Vac valve opened
10/21/2011	2:15:51 PM	Helium MFC set to  20.000000
10/21/2011	2:15:51 PM	H2 MFC set to  0.000000
10/21/2011	2:15:51 PM	BCl3 MFC set to  0.000000
10/21/2011	2:15:51 PM	PHl3 MFC set to  0.000000
10/21/2011	2:15:51 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:15:51 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:15:51 PM	Tube furnace set to 150
10/21/2011	2:16:21 PM	Helium valve closed
10/21/2011	2:16:21 PM	H2 valve closed
10/21/2011	2:16:21 PM	BCl3 valve closed
10/21/2011	2:16:21 PM	PH3 valve closed
10/21/2011	2:16:21 PM	SiCl4 pre valve closed
10/21/2011	2:16:21 PM	SiCl4 post valve closed
10/21/2011	2:16:21 PM	Bypass valve closed
10/21/2011	2:16:21 PM	Bubbler valve closed
10/21/2011	2:16:21 PM	Main Vac valve opened
10/21/2011	2:16:21 PM	Helium MFC set to  0.000000
10/21/2011	2:16:21 PM	H2 MFC set to  0.000000
10/21/2011	2:16:21 PM	BCl3 MFC set to  0.000000
10/21/2011	2:16:21 PM	PHl3 MFC set to  0.000000
10/21/2011	2:16:21 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:16:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:16:21 PM	Tube furnace set to 150
10/21/2011	2:16:51 PM	H2 valve closed
10/21/2011	2:16:51 PM	BCl3 valve closed
10/21/2011	2:16:51 PM	PH3 valve closed
10/21/2011	2:16:51 PM	SiCl4 pre valve closed
10/21/2011	2:16:51 PM	SiCl4 post valve closed
10/21/2011	2:16:51 PM	Bypass valve closed
10/21/2011	2:16:51 PM	Bubbler valve closed
10/21/2011	2:16:51 PM	Helium valve opened
10/21/2011	2:16:51 PM	Main Vac valve opened
10/21/2011	2:16:51 PM	Helium MFC set to  20.000000
10/21/2011	2:16:51 PM	H2 MFC set to  0.000000
10/21/2011	2:16:51 PM	BCl3 MFC set to  0.000000
10/21/2011	2:16:51 PM	PHl3 MFC set to  0.000000
10/21/2011	2:16:51 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:16:51 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:16:51 PM	Tube furnace set to 150
10/21/2011	2:17:21 PM	Helium valve closed
10/21/2011	2:17:21 PM	H2 valve closed
10/21/2011	2:17:21 PM	BCl3 valve closed
10/21/2011	2:17:21 PM	PH3 valve closed
10/21/2011	2:17:21 PM	SiCl4 pre valve closed
10/21/2011	2:17:21 PM	SiCl4 post valve closed
10/21/2011	2:17:21 PM	Bypass valve closed
10/21/2011	2:17:21 PM	Bubbler valve closed
10/21/2011	2:17:21 PM	Main Vac valve opened
10/21/2011	2:17:21 PM	Helium MFC set to  0.000000
10/21/2011	2:17:21 PM	H2 MFC set to  0.000000
10/21/2011	2:17:21 PM	BCl3 MFC set to  0.000000
10/21/2011	2:17:21 PM	PHl3 MFC set to  0.000000
10/21/2011	2:17:21 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:17:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:17:22 PM	Tube furnace set to 150
10/21/2011	2:17:52 PM	H2 valve closed
10/21/2011	2:17:52 PM	BCl3 valve closed
10/21/2011	2:17:52 PM	PH3 valve closed
10/21/2011	2:17:52 PM	SiCl4 pre valve closed
10/21/2011	2:17:52 PM	SiCl4 post valve closed
10/21/2011	2:17:52 PM	Bypass valve closed
10/21/2011	2:17:52 PM	Bubbler valve closed
10/21/2011	2:17:52 PM	Helium valve opened
10/21/2011	2:17:52 PM	Main Vac valve opened
10/21/2011	2:17:52 PM	Helium MFC set to  20.000000
10/21/2011	2:17:52 PM	H2 MFC set to  0.000000
10/21/2011	2:17:52 PM	BCl3 MFC set to  0.000000
10/21/2011	2:17:52 PM	PHl3 MFC set to  0.000000
10/21/2011	2:17:52 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:17:52 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:17:52 PM	Tube furnace set to 150
10/21/2011	2:18:22 PM	Helium valve closed
10/21/2011	2:18:22 PM	H2 valve closed
10/21/2011	2:18:22 PM	BCl3 valve closed
10/21/2011	2:18:22 PM	PH3 valve closed
10/21/2011	2:18:22 PM	SiCl4 pre valve closed
10/21/2011	2:18:22 PM	SiCl4 post valve closed
10/21/2011	2:18:22 PM	Bypass valve closed
10/21/2011	2:18:22 PM	Bubbler valve closed
10/21/2011	2:18:22 PM	Main Vac valve opened
10/21/2011	2:18:22 PM	Helium MFC set to  0.000000
10/21/2011	2:18:22 PM	H2 MFC set to  0.000000
10/21/2011	2:18:22 PM	BCl3 MFC set to  0.000000
10/21/2011	2:18:22 PM	PHl3 MFC set to  0.000000
10/21/2011	2:18:22 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:18:22 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:18:22 PM	Tube furnace set to 150
10/21/2011	2:18:52 PM	H2 valve closed
10/21/2011	2:18:52 PM	BCl3 valve closed
10/21/2011	2:18:52 PM	PH3 valve closed
10/21/2011	2:18:52 PM	SiCl4 pre valve closed
10/21/2011	2:18:52 PM	SiCl4 post valve closed
10/21/2011	2:18:52 PM	Bypass valve closed
10/21/2011	2:18:52 PM	Bubbler valve closed
10/21/2011	2:18:52 PM	Helium valve opened
10/21/2011	2:18:52 PM	Main Vac valve opened
10/21/2011	2:18:52 PM	Helium MFC set to  20.000000
10/21/2011	2:18:52 PM	H2 MFC set to  0.000000
10/21/2011	2:18:52 PM	BCl3 MFC set to  0.000000
10/21/2011	2:18:52 PM	PHl3 MFC set to  0.000000
10/21/2011	2:18:52 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:18:52 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:18:52 PM	Tube furnace set to 150
10/21/2011	2:19:22 PM	Helium valve closed
10/21/2011	2:19:22 PM	H2 valve closed
10/21/2011	2:19:22 PM	BCl3 valve closed
10/21/2011	2:19:22 PM	PH3 valve closed
10/21/2011	2:19:22 PM	SiCl4 pre valve closed
10/21/2011	2:19:22 PM	SiCl4 post valve closed
10/21/2011	2:19:22 PM	Bypass valve closed
10/21/2011	2:19:22 PM	Bubbler valve closed
10/21/2011	2:19:22 PM	Main Vac valve opened
10/21/2011	2:19:22 PM	Helium MFC set to  0.000000
10/21/2011	2:19:22 PM	H2 MFC set to  0.000000
10/21/2011	2:19:22 PM	BCl3 MFC set to  0.000000
10/21/2011	2:19:22 PM	PHl3 MFC set to  0.000000
10/21/2011	2:19:22 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:19:22 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:19:22 PM	Tube furnace set to 150
10/21/2011	2:19:52 PM	H2 valve closed
10/21/2011	2:19:52 PM	BCl3 valve closed
10/21/2011	2:19:52 PM	PH3 valve closed
10/21/2011	2:19:52 PM	SiCl4 pre valve closed
10/21/2011	2:19:52 PM	SiCl4 post valve closed
10/21/2011	2:19:52 PM	Bypass valve closed
10/21/2011	2:19:52 PM	Bubbler valve closed
10/21/2011	2:19:52 PM	Helium valve opened
10/21/2011	2:19:52 PM	Main Vac valve opened
10/21/2011	2:19:52 PM	Helium MFC set to  20.000000
10/21/2011	2:19:52 PM	H2 MFC set to  0.000000
10/21/2011	2:19:52 PM	BCl3 MFC set to  0.000000
10/21/2011	2:19:52 PM	PHl3 MFC set to  0.000000
10/21/2011	2:19:52 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:19:52 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:19:53 PM	Tube furnace set to 150
10/21/2011	2:20:23 PM	Helium valve closed
10/21/2011	2:20:23 PM	H2 valve closed
10/21/2011	2:20:23 PM	BCl3 valve closed
10/21/2011	2:20:23 PM	PH3 valve closed
10/21/2011	2:20:23 PM	SiCl4 pre valve closed
10/21/2011	2:20:23 PM	SiCl4 post valve closed
10/21/2011	2:20:23 PM	Bypass valve closed
10/21/2011	2:20:23 PM	Bubbler valve closed
10/21/2011	2:20:23 PM	Main Vac valve opened
10/21/2011	2:20:23 PM	Helium MFC set to  0.000000
10/21/2011	2:20:23 PM	H2 MFC set to  0.000000
10/21/2011	2:20:23 PM	BCl3 MFC set to  0.000000
10/21/2011	2:20:23 PM	PHl3 MFC set to  0.000000
10/21/2011	2:20:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:20:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:20:23 PM	Tube furnace set to 150
10/21/2011	2:20:53 PM	H2 valve closed
10/21/2011	2:20:53 PM	BCl3 valve closed
10/21/2011	2:20:53 PM	PH3 valve closed
10/21/2011	2:20:53 PM	SiCl4 pre valve closed
10/21/2011	2:20:53 PM	SiCl4 post valve closed
10/21/2011	2:20:53 PM	Bypass valve closed
10/21/2011	2:20:53 PM	Bubbler valve closed
10/21/2011	2:20:53 PM	Helium valve opened
10/21/2011	2:20:53 PM	Main Vac valve opened
10/21/2011	2:20:53 PM	Helium MFC set to  20.000000
10/21/2011	2:20:53 PM	H2 MFC set to  0.000000
10/21/2011	2:20:53 PM	BCl3 MFC set to  0.000000
10/21/2011	2:20:53 PM	PHl3 MFC set to  0.000000
10/21/2011	2:20:53 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:20:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:20:53 PM	Tube furnace set to 150
10/21/2011	2:21:23 PM	Helium valve closed
10/21/2011	2:21:23 PM	H2 valve closed
10/21/2011	2:21:23 PM	BCl3 valve closed
10/21/2011	2:21:23 PM	PH3 valve closed
10/21/2011	2:21:23 PM	SiCl4 pre valve closed
10/21/2011	2:21:23 PM	SiCl4 post valve closed
10/21/2011	2:21:23 PM	Bypass valve closed
10/21/2011	2:21:23 PM	Bubbler valve closed
10/21/2011	2:21:23 PM	Main Vac valve opened
10/21/2011	2:21:23 PM	Helium MFC set to  0.000000
10/21/2011	2:21:23 PM	H2 MFC set to  0.000000
10/21/2011	2:21:23 PM	BCl3 MFC set to  0.000000
10/21/2011	2:21:23 PM	PHl3 MFC set to  0.000000
10/21/2011	2:21:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:21:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:21:23 PM	Tube furnace set to 150
10/21/2011	2:21:53 PM	H2 valve closed
10/21/2011	2:21:53 PM	BCl3 valve closed
10/21/2011	2:21:53 PM	PH3 valve closed
10/21/2011	2:21:53 PM	SiCl4 pre valve closed
10/21/2011	2:21:53 PM	SiCl4 post valve closed
10/21/2011	2:21:53 PM	Bypass valve closed
10/21/2011	2:21:53 PM	Bubbler valve closed
10/21/2011	2:21:53 PM	Helium valve opened
10/21/2011	2:21:53 PM	Main Vac valve opened
10/21/2011	2:21:53 PM	Helium MFC set to  20.000000
10/21/2011	2:21:53 PM	H2 MFC set to  0.000000
10/21/2011	2:21:53 PM	BCl3 MFC set to  0.000000
10/21/2011	2:21:53 PM	PHl3 MFC set to  0.000000
10/21/2011	2:21:53 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:21:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:21:53 PM	Tube furnace set to 150
10/21/2011	2:22:23 PM	Helium valve closed
10/21/2011	2:22:23 PM	H2 valve closed
10/21/2011	2:22:23 PM	BCl3 valve closed
10/21/2011	2:22:23 PM	PH3 valve closed
10/21/2011	2:22:23 PM	SiCl4 pre valve closed
10/21/2011	2:22:23 PM	SiCl4 post valve closed
10/21/2011	2:22:23 PM	Bypass valve closed
10/21/2011	2:22:23 PM	Bubbler valve closed
10/21/2011	2:22:23 PM	Main Vac valve opened
10/21/2011	2:22:23 PM	Helium MFC set to  0.000000
10/21/2011	2:22:23 PM	H2 MFC set to  0.000000
10/21/2011	2:22:23 PM	BCl3 MFC set to  0.000000
10/21/2011	2:22:23 PM	PHl3 MFC set to  0.000000
10/21/2011	2:22:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:22:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:22:24 PM	Tube furnace set to 150
10/21/2011	2:22:54 PM	H2 valve closed
10/21/2011	2:22:54 PM	BCl3 valve closed
10/21/2011	2:22:54 PM	PH3 valve closed
10/21/2011	2:22:54 PM	SiCl4 pre valve closed
10/21/2011	2:22:54 PM	SiCl4 post valve closed
10/21/2011	2:22:54 PM	Bypass valve closed
10/21/2011	2:22:54 PM	Bubbler valve closed
10/21/2011	2:22:54 PM	Helium valve opened
10/21/2011	2:22:54 PM	Main Vac valve opened
10/21/2011	2:22:54 PM	Helium MFC set to  20.000000
10/21/2011	2:22:54 PM	H2 MFC set to  0.000000
10/21/2011	2:22:54 PM	BCl3 MFC set to  0.000000
10/21/2011	2:22:54 PM	PHl3 MFC set to  0.000000
10/21/2011	2:22:54 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:22:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:22:54 PM	Tube furnace set to 150
10/21/2011	2:23:24 PM	Helium valve closed
10/21/2011	2:23:24 PM	H2 valve closed
10/21/2011	2:23:24 PM	BCl3 valve closed
10/21/2011	2:23:24 PM	PH3 valve closed
10/21/2011	2:23:24 PM	SiCl4 pre valve closed
10/21/2011	2:23:24 PM	SiCl4 post valve closed
10/21/2011	2:23:24 PM	Bypass valve closed
10/21/2011	2:23:24 PM	Bubbler valve closed
10/21/2011	2:23:24 PM	Main Vac valve opened
10/21/2011	2:23:24 PM	Helium MFC set to  0.000000
10/21/2011	2:23:24 PM	H2 MFC set to  0.000000
10/21/2011	2:23:24 PM	BCl3 MFC set to  0.000000
10/21/2011	2:23:24 PM	PHl3 MFC set to  0.000000
10/21/2011	2:23:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:23:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:23:24 PM	Tube furnace set to 150
10/21/2011	2:23:54 PM	H2 valve closed
10/21/2011	2:23:54 PM	BCl3 valve closed
10/21/2011	2:23:54 PM	PH3 valve closed
10/21/2011	2:23:54 PM	SiCl4 pre valve closed
10/21/2011	2:23:54 PM	SiCl4 post valve closed
10/21/2011	2:23:54 PM	Bypass valve closed
10/21/2011	2:23:54 PM	Bubbler valve closed
10/21/2011	2:23:54 PM	Helium valve opened
10/21/2011	2:23:54 PM	Main Vac valve opened
10/21/2011	2:23:54 PM	Helium MFC set to  20.000000
10/21/2011	2:23:54 PM	H2 MFC set to  0.000000
10/21/2011	2:23:54 PM	BCl3 MFC set to  0.000000
10/21/2011	2:23:54 PM	PHl3 MFC set to  0.000000
10/21/2011	2:23:54 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:23:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:23:54 PM	Tube furnace set to 150
10/21/2011	2:24:24 PM	Helium valve closed
10/21/2011	2:24:24 PM	H2 valve closed
10/21/2011	2:24:24 PM	BCl3 valve closed
10/21/2011	2:24:24 PM	PH3 valve closed
10/21/2011	2:24:24 PM	SiCl4 pre valve closed
10/21/2011	2:24:24 PM	SiCl4 post valve closed
10/21/2011	2:24:24 PM	Bypass valve closed
10/21/2011	2:24:24 PM	Bubbler valve closed
10/21/2011	2:24:24 PM	Main Vac valve opened
10/21/2011	2:24:24 PM	Helium MFC set to  0.000000
10/21/2011	2:24:24 PM	H2 MFC set to  0.000000
10/21/2011	2:24:24 PM	BCl3 MFC set to  0.000000
10/21/2011	2:24:24 PM	PHl3 MFC set to  0.000000
10/21/2011	2:24:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	2:24:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	2:24:24 PM	Tube furnace set to 150
10/21/2011	2:24:25 PM	Run finished at 2:24 PM
10/21/2011	3:22:14 PM	Recipe started at 3:22 PM
10/21/2011	3:22:14 PM	Helium valve closed
10/21/2011	3:22:14 PM	H2 valve closed
10/21/2011	3:22:14 PM	BCl3 valve closed
10/21/2011	3:22:14 PM	PH3 valve closed
10/21/2011	3:22:14 PM	SiCl4 pre valve closed
10/21/2011	3:22:14 PM	SiCl4 post valve closed
10/21/2011	3:22:14 PM	Bypass valve closed
10/21/2011	3:22:14 PM	Bubbler valve closed
10/21/2011	3:22:14 PM	Main Vac valve opened
10/21/2011	3:22:14 PM	Helium MFC set to  0.000000
10/21/2011	3:22:14 PM	H2 MFC set to  0.000000
10/21/2011	3:22:14 PM	BCl3 MFC set to  0.000000
10/21/2011	3:22:14 PM	PHl3 MFC set to  0.000000
10/21/2011	3:22:14 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:22:14 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:22:14 PM	Tube furnace set to 150
10/21/2011	3:22:44 PM	H2 valve closed
10/21/2011	3:22:44 PM	BCl3 valve closed
10/21/2011	3:22:44 PM	PH3 valve closed
10/21/2011	3:22:44 PM	SiCl4 pre valve closed
10/21/2011	3:22:44 PM	SiCl4 post valve closed
10/21/2011	3:22:44 PM	Bypass valve closed
10/21/2011	3:22:44 PM	Bubbler valve closed
10/21/2011	3:22:44 PM	Helium valve opened
10/21/2011	3:22:44 PM	Main Vac valve opened
10/21/2011	3:22:44 PM	Helium MFC set to  20.000000
10/21/2011	3:22:44 PM	H2 MFC set to  0.000000
10/21/2011	3:22:44 PM	BCl3 MFC set to  0.000000
10/21/2011	3:22:44 PM	PHl3 MFC set to  0.000000
10/21/2011	3:22:44 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:22:44 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:22:44 PM	Tube furnace set to 150
10/21/2011	3:23:14 PM	Helium valve closed
10/21/2011	3:23:14 PM	H2 valve closed
10/21/2011	3:23:14 PM	BCl3 valve closed
10/21/2011	3:23:14 PM	PH3 valve closed
10/21/2011	3:23:14 PM	SiCl4 pre valve closed
10/21/2011	3:23:14 PM	SiCl4 post valve closed
10/21/2011	3:23:14 PM	Bypass valve closed
10/21/2011	3:23:14 PM	Bubbler valve closed
10/21/2011	3:23:14 PM	Main Vac valve opened
10/21/2011	3:23:14 PM	Helium MFC set to  0.000000
10/21/2011	3:23:14 PM	H2 MFC set to  0.000000
10/21/2011	3:23:14 PM	BCl3 MFC set to  0.000000
10/21/2011	3:23:14 PM	PHl3 MFC set to  0.000000
10/21/2011	3:23:14 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:23:14 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:23:14 PM	Tube furnace set to 150
10/21/2011	3:23:44 PM	H2 valve closed
10/21/2011	3:23:44 PM	BCl3 valve closed
10/21/2011	3:23:44 PM	PH3 valve closed
10/21/2011	3:23:44 PM	SiCl4 pre valve closed
10/21/2011	3:23:44 PM	SiCl4 post valve closed
10/21/2011	3:23:44 PM	Bypass valve closed
10/21/2011	3:23:44 PM	Bubbler valve closed
10/21/2011	3:23:44 PM	Helium valve opened
10/21/2011	3:23:44 PM	Main Vac valve opened
10/21/2011	3:23:44 PM	Helium MFC set to  20.000000
10/21/2011	3:23:44 PM	H2 MFC set to  0.000000
10/21/2011	3:23:44 PM	BCl3 MFC set to  0.000000
10/21/2011	3:23:44 PM	PHl3 MFC set to  0.000000
10/21/2011	3:23:44 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:23:44 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:23:44 PM	Tube furnace set to 150
10/21/2011	3:24:14 PM	Helium valve closed
10/21/2011	3:24:14 PM	H2 valve closed
10/21/2011	3:24:14 PM	BCl3 valve closed
10/21/2011	3:24:14 PM	PH3 valve closed
10/21/2011	3:24:14 PM	SiCl4 pre valve closed
10/21/2011	3:24:14 PM	SiCl4 post valve closed
10/21/2011	3:24:14 PM	Bypass valve closed
10/21/2011	3:24:14 PM	Bubbler valve closed
10/21/2011	3:24:14 PM	Main Vac valve opened
10/21/2011	3:24:14 PM	Helium MFC set to  0.000000
10/21/2011	3:24:14 PM	H2 MFC set to  0.000000
10/21/2011	3:24:14 PM	BCl3 MFC set to  0.000000
10/21/2011	3:24:14 PM	PHl3 MFC set to  0.000000
10/21/2011	3:24:14 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:24:14 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:24:14 PM	Tube furnace set to 150
10/21/2011	3:24:45 PM	H2 valve closed
10/21/2011	3:24:45 PM	BCl3 valve closed
10/21/2011	3:24:45 PM	PH3 valve closed
10/21/2011	3:24:45 PM	SiCl4 pre valve closed
10/21/2011	3:24:45 PM	SiCl4 post valve closed
10/21/2011	3:24:45 PM	Bypass valve closed
10/21/2011	3:24:45 PM	Bubbler valve closed
10/21/2011	3:24:45 PM	Helium valve opened
10/21/2011	3:24:45 PM	Main Vac valve opened
10/21/2011	3:24:45 PM	Helium MFC set to  20.000000
10/21/2011	3:24:45 PM	H2 MFC set to  0.000000
10/21/2011	3:24:45 PM	BCl3 MFC set to  0.000000
10/21/2011	3:24:45 PM	PHl3 MFC set to  0.000000
10/21/2011	3:24:45 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:24:45 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:24:45 PM	Tube furnace set to 150
10/21/2011	3:25:15 PM	Helium valve closed
10/21/2011	3:25:15 PM	H2 valve closed
10/21/2011	3:25:15 PM	BCl3 valve closed
10/21/2011	3:25:15 PM	PH3 valve closed
10/21/2011	3:25:15 PM	SiCl4 pre valve closed
10/21/2011	3:25:15 PM	SiCl4 post valve closed
10/21/2011	3:25:15 PM	Bypass valve closed
10/21/2011	3:25:15 PM	Bubbler valve closed
10/21/2011	3:25:15 PM	Main Vac valve opened
10/21/2011	3:25:15 PM	Helium MFC set to  0.000000
10/21/2011	3:25:15 PM	H2 MFC set to  0.000000
10/21/2011	3:25:15 PM	BCl3 MFC set to  0.000000
10/21/2011	3:25:15 PM	PHl3 MFC set to  0.000000
10/21/2011	3:25:15 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:25:15 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:25:15 PM	Tube furnace set to 150
10/21/2011	3:25:45 PM	H2 valve closed
10/21/2011	3:25:45 PM	BCl3 valve closed
10/21/2011	3:25:45 PM	PH3 valve closed
10/21/2011	3:25:45 PM	SiCl4 pre valve closed
10/21/2011	3:25:45 PM	SiCl4 post valve closed
10/21/2011	3:25:45 PM	Bypass valve closed
10/21/2011	3:25:45 PM	Bubbler valve closed
10/21/2011	3:25:45 PM	Helium valve opened
10/21/2011	3:25:45 PM	Main Vac valve opened
10/21/2011	3:25:45 PM	Helium MFC set to  20.000000
10/21/2011	3:25:45 PM	H2 MFC set to  0.000000
10/21/2011	3:25:45 PM	BCl3 MFC set to  0.000000
10/21/2011	3:25:45 PM	PHl3 MFC set to  0.000000
10/21/2011	3:25:45 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:25:45 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:25:45 PM	Tube furnace set to 150
10/21/2011	3:26:15 PM	Helium valve closed
10/21/2011	3:26:15 PM	H2 valve closed
10/21/2011	3:26:15 PM	BCl3 valve closed
10/21/2011	3:26:15 PM	PH3 valve closed
10/21/2011	3:26:15 PM	SiCl4 pre valve closed
10/21/2011	3:26:15 PM	SiCl4 post valve closed
10/21/2011	3:26:15 PM	Bypass valve closed
10/21/2011	3:26:15 PM	Bubbler valve closed
10/21/2011	3:26:15 PM	Main Vac valve opened
10/21/2011	3:26:15 PM	Helium MFC set to  0.000000
10/21/2011	3:26:15 PM	H2 MFC set to  0.000000
10/21/2011	3:26:15 PM	BCl3 MFC set to  0.000000
10/21/2011	3:26:15 PM	PHl3 MFC set to  0.000000
10/21/2011	3:26:15 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:26:15 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:26:15 PM	Tube furnace set to 150
10/21/2011	3:26:45 PM	H2 valve closed
10/21/2011	3:26:45 PM	BCl3 valve closed
10/21/2011	3:26:45 PM	PH3 valve closed
10/21/2011	3:26:45 PM	SiCl4 pre valve closed
10/21/2011	3:26:45 PM	SiCl4 post valve closed
10/21/2011	3:26:45 PM	Bypass valve closed
10/21/2011	3:26:45 PM	Bubbler valve closed
10/21/2011	3:26:45 PM	Helium valve opened
10/21/2011	3:26:45 PM	Main Vac valve opened
10/21/2011	3:26:45 PM	Helium MFC set to  20.000000
10/21/2011	3:26:45 PM	H2 MFC set to  0.000000
10/21/2011	3:26:45 PM	BCl3 MFC set to  0.000000
10/21/2011	3:26:45 PM	PHl3 MFC set to  0.000000
10/21/2011	3:26:45 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:26:45 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:26:45 PM	Tube furnace set to 150
10/21/2011	3:27:15 PM	Helium valve closed
10/21/2011	3:27:16 PM	H2 valve closed
10/21/2011	3:27:16 PM	BCl3 valve closed
10/21/2011	3:27:16 PM	PH3 valve closed
10/21/2011	3:27:16 PM	SiCl4 pre valve closed
10/21/2011	3:27:16 PM	SiCl4 post valve closed
10/21/2011	3:27:16 PM	Bypass valve closed
10/21/2011	3:27:16 PM	Bubbler valve closed
10/21/2011	3:27:16 PM	Main Vac valve opened
10/21/2011	3:27:16 PM	Helium MFC set to  0.000000
10/21/2011	3:27:16 PM	H2 MFC set to  0.000000
10/21/2011	3:27:16 PM	BCl3 MFC set to  0.000000
10/21/2011	3:27:16 PM	PHl3 MFC set to  0.000000
10/21/2011	3:27:16 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:27:16 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:27:16 PM	Tube furnace set to 150
10/21/2011	3:27:46 PM	H2 valve closed
10/21/2011	3:27:46 PM	BCl3 valve closed
10/21/2011	3:27:46 PM	PH3 valve closed
10/21/2011	3:27:46 PM	SiCl4 pre valve closed
10/21/2011	3:27:46 PM	SiCl4 post valve closed
10/21/2011	3:27:46 PM	Bypass valve closed
10/21/2011	3:27:46 PM	Bubbler valve closed
10/21/2011	3:27:46 PM	Helium valve opened
10/21/2011	3:27:46 PM	Main Vac valve opened
10/21/2011	3:27:46 PM	Helium MFC set to  20.000000
10/21/2011	3:27:46 PM	H2 MFC set to  0.000000
10/21/2011	3:27:46 PM	BCl3 MFC set to  0.000000
10/21/2011	3:27:46 PM	PHl3 MFC set to  0.000000
10/21/2011	3:27:46 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:27:46 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:27:46 PM	Tube furnace set to 150
10/21/2011	3:28:16 PM	Helium valve closed
10/21/2011	3:28:16 PM	H2 valve closed
10/21/2011	3:28:16 PM	BCl3 valve closed
10/21/2011	3:28:16 PM	PH3 valve closed
10/21/2011	3:28:16 PM	SiCl4 pre valve closed
10/21/2011	3:28:16 PM	SiCl4 post valve closed
10/21/2011	3:28:16 PM	Bypass valve closed
10/21/2011	3:28:16 PM	Bubbler valve closed
10/21/2011	3:28:16 PM	Main Vac valve opened
10/21/2011	3:28:16 PM	Helium MFC set to  0.000000
10/21/2011	3:28:16 PM	H2 MFC set to  0.000000
10/21/2011	3:28:16 PM	BCl3 MFC set to  0.000000
10/21/2011	3:28:16 PM	PHl3 MFC set to  0.000000
10/21/2011	3:28:16 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:28:16 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:28:16 PM	Tube furnace set to 150
10/21/2011	3:28:46 PM	H2 valve closed
10/21/2011	3:28:46 PM	BCl3 valve closed
10/21/2011	3:28:46 PM	PH3 valve closed
10/21/2011	3:28:46 PM	SiCl4 pre valve closed
10/21/2011	3:28:46 PM	SiCl4 post valve closed
10/21/2011	3:28:46 PM	Bypass valve closed
10/21/2011	3:28:46 PM	Bubbler valve closed
10/21/2011	3:28:46 PM	Helium valve opened
10/21/2011	3:28:46 PM	Main Vac valve opened
10/21/2011	3:28:46 PM	Helium MFC set to  20.000000
10/21/2011	3:28:46 PM	H2 MFC set to  0.000000
10/21/2011	3:28:46 PM	BCl3 MFC set to  0.000000
10/21/2011	3:28:46 PM	PHl3 MFC set to  0.000000
10/21/2011	3:28:46 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:28:46 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:28:46 PM	Tube furnace set to 150
10/21/2011	3:29:16 PM	Helium valve closed
10/21/2011	3:29:16 PM	H2 valve closed
10/21/2011	3:29:16 PM	BCl3 valve closed
10/21/2011	3:29:16 PM	PH3 valve closed
10/21/2011	3:29:16 PM	SiCl4 pre valve closed
10/21/2011	3:29:16 PM	SiCl4 post valve closed
10/21/2011	3:29:16 PM	Bypass valve closed
10/21/2011	3:29:16 PM	Bubbler valve closed
10/21/2011	3:29:16 PM	Main Vac valve opened
10/21/2011	3:29:16 PM	Helium MFC set to  0.000000
10/21/2011	3:29:16 PM	H2 MFC set to  0.000000
10/21/2011	3:29:16 PM	BCl3 MFC set to  0.000000
10/21/2011	3:29:16 PM	PHl3 MFC set to  0.000000
10/21/2011	3:29:16 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:29:16 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:29:16 PM	Tube furnace set to 150
10/21/2011	3:29:46 PM	H2 valve closed
10/21/2011	3:29:46 PM	BCl3 valve closed
10/21/2011	3:29:46 PM	PH3 valve closed
10/21/2011	3:29:46 PM	SiCl4 pre valve closed
10/21/2011	3:29:46 PM	SiCl4 post valve closed
10/21/2011	3:29:46 PM	Bypass valve closed
10/21/2011	3:29:46 PM	Bubbler valve closed
10/21/2011	3:29:46 PM	Helium valve opened
10/21/2011	3:29:47 PM	Main Vac valve opened
10/21/2011	3:29:47 PM	Helium MFC set to  20.000000
10/21/2011	3:29:47 PM	H2 MFC set to  0.000000
10/21/2011	3:29:47 PM	BCl3 MFC set to  0.000000
10/21/2011	3:29:47 PM	PHl3 MFC set to  0.000000
10/21/2011	3:29:47 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:29:47 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:29:47 PM	Tube furnace set to 150
10/21/2011	3:30:17 PM	Helium valve closed
10/21/2011	3:30:17 PM	H2 valve closed
10/21/2011	3:30:17 PM	BCl3 valve closed
10/21/2011	3:30:17 PM	PH3 valve closed
10/21/2011	3:30:17 PM	SiCl4 pre valve closed
10/21/2011	3:30:17 PM	SiCl4 post valve closed
10/21/2011	3:30:17 PM	Bypass valve closed
10/21/2011	3:30:17 PM	Bubbler valve closed
10/21/2011	3:30:17 PM	Main Vac valve opened
10/21/2011	3:30:17 PM	Helium MFC set to  0.000000
10/21/2011	3:30:17 PM	H2 MFC set to  0.000000
10/21/2011	3:30:17 PM	BCl3 MFC set to  0.000000
10/21/2011	3:30:17 PM	PHl3 MFC set to  0.000000
10/21/2011	3:30:17 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:30:17 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:30:17 PM	Tube furnace set to 150
10/21/2011	3:30:47 PM	H2 valve closed
10/21/2011	3:30:47 PM	BCl3 valve closed
10/21/2011	3:30:47 PM	PH3 valve closed
10/21/2011	3:30:47 PM	SiCl4 pre valve closed
10/21/2011	3:30:47 PM	SiCl4 post valve closed
10/21/2011	3:30:47 PM	Bypass valve closed
10/21/2011	3:30:47 PM	Bubbler valve closed
10/21/2011	3:30:47 PM	Helium valve opened
10/21/2011	3:30:47 PM	Main Vac valve opened
10/21/2011	3:30:47 PM	Helium MFC set to  20.000000
10/21/2011	3:30:47 PM	H2 MFC set to  0.000000
10/21/2011	3:30:47 PM	BCl3 MFC set to  0.000000
10/21/2011	3:30:47 PM	PHl3 MFC set to  0.000000
10/21/2011	3:30:47 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:30:47 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:30:47 PM	Tube furnace set to 150
10/21/2011	3:31:17 PM	Helium valve closed
10/21/2011	3:31:17 PM	H2 valve closed
10/21/2011	3:31:17 PM	BCl3 valve closed
10/21/2011	3:31:17 PM	PH3 valve closed
10/21/2011	3:31:17 PM	SiCl4 pre valve closed
10/21/2011	3:31:17 PM	SiCl4 post valve closed
10/21/2011	3:31:17 PM	Bypass valve closed
10/21/2011	3:31:17 PM	Bubbler valve closed
10/21/2011	3:31:17 PM	Main Vac valve opened
10/21/2011	3:31:17 PM	Helium MFC set to  0.000000
10/21/2011	3:31:17 PM	H2 MFC set to  0.000000
10/21/2011	3:31:17 PM	BCl3 MFC set to  0.000000
10/21/2011	3:31:17 PM	PHl3 MFC set to  0.000000
10/21/2011	3:31:17 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:31:17 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:31:17 PM	Tube furnace set to 150
10/21/2011	3:31:47 PM	H2 valve closed
10/21/2011	3:31:47 PM	BCl3 valve closed
10/21/2011	3:31:47 PM	PH3 valve closed
10/21/2011	3:31:47 PM	SiCl4 pre valve closed
10/21/2011	3:31:47 PM	SiCl4 post valve closed
10/21/2011	3:31:47 PM	Bypass valve closed
10/21/2011	3:31:47 PM	Bubbler valve closed
10/21/2011	3:31:47 PM	Helium valve opened
10/21/2011	3:31:47 PM	Main Vac valve opened
10/21/2011	3:31:47 PM	Helium MFC set to  20.000000
10/21/2011	3:31:47 PM	H2 MFC set to  0.000000
10/21/2011	3:31:47 PM	BCl3 MFC set to  0.000000
10/21/2011	3:31:47 PM	PHl3 MFC set to  0.000000
10/21/2011	3:31:47 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:31:47 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:31:47 PM	Tube furnace set to 150
10/21/2011	3:32:17 PM	Helium valve closed
10/21/2011	3:32:17 PM	H2 valve closed
10/21/2011	3:32:17 PM	BCl3 valve closed
10/21/2011	3:32:17 PM	PH3 valve closed
10/21/2011	3:32:17 PM	SiCl4 pre valve closed
10/21/2011	3:32:17 PM	SiCl4 post valve closed
10/21/2011	3:32:17 PM	Bypass valve closed
10/21/2011	3:32:17 PM	Bubbler valve closed
10/21/2011	3:32:17 PM	Main Vac valve opened
10/21/2011	3:32:17 PM	Helium MFC set to  0.000000
10/21/2011	3:32:17 PM	H2 MFC set to  0.000000
10/21/2011	3:32:17 PM	BCl3 MFC set to  0.000000
10/21/2011	3:32:17 PM	PHl3 MFC set to  0.000000
10/21/2011	3:32:17 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:32:17 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:32:18 PM	Tube furnace set to 150
10/21/2011	3:32:19 PM	Run finished at 3:32 PM
10/21/2011	3:34:05 PM	Main Vac valve closed
10/21/2011	3:34:16 PM	Main Vac valve opened
10/21/2011	3:35:46 PM	Recipe started at 3:35 PM
10/21/2011	3:35:46 PM	Helium valve closed
10/21/2011	3:35:46 PM	H2 valve closed
10/21/2011	3:35:46 PM	BCl3 valve closed
10/21/2011	3:35:46 PM	PH3 valve closed
10/21/2011	3:35:46 PM	SiCl4 pre valve closed
10/21/2011	3:35:46 PM	SiCl4 post valve closed
10/21/2011	3:35:46 PM	Main Vac valve closed
10/21/2011	3:35:46 PM	Bypass valve closed
10/21/2011	3:35:46 PM	Bubbler valve closed
10/21/2011	3:35:46 PM	Helium MFC set to  0.000000
10/21/2011	3:35:46 PM	H2 MFC set to  0.000000
10/21/2011	3:35:46 PM	BCl3 MFC set to  0.000000
10/21/2011	3:35:46 PM	PHl3 MFC set to  0.000000
10/21/2011	3:35:46 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:35:46 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:35:46 PM	Tube furnace set to 0
10/21/2011	3:35:49 PM	Helium valve closed
10/21/2011	3:35:49 PM	BCl3 valve closed
10/21/2011	3:35:49 PM	PH3 valve closed
10/21/2011	3:35:49 PM	SiCl4 pre valve closed
10/21/2011	3:35:49 PM	SiCl4 post valve closed
10/21/2011	3:35:49 PM	Main Vac valve closed
10/21/2011	3:35:49 PM	Bypass valve closed
10/21/2011	3:35:49 PM	Bubbler valve closed
10/21/2011	3:35:49 PM	H2 valve opened
10/21/2011	3:35:49 PM	Helium MFC set to  0.000000
10/21/2011	3:35:49 PM	H2 MFC set to  500.000000
10/21/2011	3:35:49 PM	BCl3 MFC set to  0.000000
10/21/2011	3:35:49 PM	PHl3 MFC set to  0.000000
10/21/2011	3:35:49 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:35:49 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:35:49 PM	Tube furnace set to 0
10/21/2011	3:36:25 PM	Run aborted at 3:36 PM
10/21/2011	3:36:25 PM	Helium valve closed
10/21/2011	3:36:25 PM	H2 valve closed
10/21/2011	3:36:25 PM	BCl3 valve closed
10/21/2011	3:36:25 PM	PH3 valve closed
10/21/2011	3:36:25 PM	SiCl4 pre valve closed
10/21/2011	3:36:25 PM	SiCl4 post valve closed
10/21/2011	3:36:25 PM	Bypass valve closed
10/21/2011	3:36:25 PM	Main Vac valve closed
10/21/2011	3:36:25 PM	Bubbler valve closed
10/21/2011	3:36:25 PM	Helium MFC set to  0.000000
10/21/2011	3:36:25 PM	H2 MFC set to  0.000000
10/21/2011	3:36:25 PM	BCl3 MFC set to  0.000000
10/21/2011	3:36:25 PM	PHl3 MFC set to  0.000000
10/21/2011	3:36:25 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:36:25 PM	Tube furnace set to 0
10/21/2011	3:36:47 PM	Recipe started at 3:36 PM
10/21/2011	3:36:47 PM	Helium valve closed
10/21/2011	3:36:47 PM	H2 valve closed
10/21/2011	3:36:47 PM	BCl3 valve closed
10/21/2011	3:36:47 PM	PH3 valve closed
10/21/2011	3:36:47 PM	SiCl4 pre valve closed
10/21/2011	3:36:47 PM	SiCl4 post valve closed
10/21/2011	3:36:47 PM	Main Vac valve closed
10/21/2011	3:36:47 PM	Bypass valve closed
10/21/2011	3:36:47 PM	Bubbler valve closed
10/21/2011	3:36:47 PM	Helium MFC set to  0.000000
10/21/2011	3:36:47 PM	H2 MFC set to  0.000000
10/21/2011	3:36:47 PM	BCl3 MFC set to  0.000000
10/21/2011	3:36:47 PM	PHl3 MFC set to  0.000000
10/21/2011	3:36:47 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:36:47 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:36:47 PM	Tube furnace set to 0
10/21/2011	3:36:50 PM	Helium valve closed
10/21/2011	3:36:50 PM	BCl3 valve closed
10/21/2011	3:36:50 PM	PH3 valve closed
10/21/2011	3:36:50 PM	SiCl4 pre valve closed
10/21/2011	3:36:50 PM	SiCl4 post valve closed
10/21/2011	3:36:50 PM	Main Vac valve closed
10/21/2011	3:36:50 PM	Bypass valve closed
10/21/2011	3:36:50 PM	Bubbler valve closed
10/21/2011	3:36:50 PM	H2 valve opened
10/21/2011	3:36:50 PM	Helium MFC set to  0.000000
10/21/2011	3:36:50 PM	H2 MFC set to  500.000000
10/21/2011	3:36:50 PM	BCl3 MFC set to  0.000000
10/21/2011	3:36:50 PM	PHl3 MFC set to  0.000000
10/21/2011	3:36:50 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:36:50 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:36:50 PM	Tube furnace set to 0
10/21/2011	3:37:19 PM	Helium valve closed
10/21/2011	3:37:19 PM	BCl3 valve closed
10/21/2011	3:37:19 PM	PH3 valve closed
10/21/2011	3:37:19 PM	SiCl4 pre valve closed
10/21/2011	3:37:19 PM	SiCl4 post valve closed
10/21/2011	3:37:19 PM	Main Vac valve closed
10/21/2011	3:37:19 PM	Bypass valve closed
10/21/2011	3:37:19 PM	H2 valve opened
10/21/2011	3:37:19 PM	Bubbler valve opened
10/21/2011	3:37:19 PM	Helium MFC set to  0.000000
10/21/2011	3:37:19 PM	H2 MFC set to  500.000000
10/21/2011	3:37:19 PM	BCl3 MFC set to  0.000000
10/21/2011	3:37:19 PM	PHl3 MFC set to  0.000000
10/21/2011	3:37:19 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:37:19 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:37:19 PM	Tube furnace set to 0
10/21/2011	3:37:20 PM	Helium valve closed
10/21/2011	3:37:20 PM	BCl3 valve closed
10/21/2011	3:37:20 PM	PH3 valve closed
10/21/2011	3:37:20 PM	SiCl4 pre valve closed
10/21/2011	3:37:20 PM	SiCl4 post valve closed
10/21/2011	3:37:20 PM	Main Vac valve closed
10/21/2011	3:37:20 PM	Bypass valve closed
10/21/2011	3:37:20 PM	H2 valve opened
10/21/2011	3:37:20 PM	Bubbler valve opened
10/21/2011	3:37:20 PM	Helium MFC set to  0.000000
10/21/2011	3:37:20 PM	H2 MFC set to  500.000000
10/21/2011	3:37:20 PM	BCl3 MFC set to  0.000000
10/21/2011	3:37:20 PM	PHl3 MFC set to  0.000000
10/21/2011	3:37:20 PM	SiCl4 MFC set to  0.000000
10/21/2011	3:37:20 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	3:37:20 PM	Tube furnace set to 1050
10/21/2011	4:17:20 PM	Helium valve closed
10/21/2011	4:17:20 PM	BCl3 valve closed
10/21/2011	4:17:20 PM	PH3 valve closed
10/21/2011	4:17:20 PM	Main Vac valve closed
10/21/2011	4:17:20 PM	Bypass valve closed
10/21/2011	4:17:20 PM	H2 valve opened
10/21/2011	4:17:20 PM	SiCl4 pre valve opened
10/21/2011	4:17:20 PM	SiCl4 post valve opened
10/21/2011	4:17:20 PM	Bubbler valve opened
10/21/2011	4:17:20 PM	Helium MFC set to  0.000000
10/21/2011	4:17:20 PM	H2 MFC set to  500.000000
10/21/2011	4:17:20 PM	BCl3 MFC set to  0.000000
10/21/2011	4:17:20 PM	PHl3 MFC set to  0.000000
10/21/2011	4:17:20 PM	SiCl4 MFC set to  50.000000
10/21/2011	4:17:20 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	4:17:21 PM	Tube furnace set to 1050
10/21/2011	4:27:21 PM	Helium valve closed
10/21/2011	4:27:21 PM	BCl3 valve closed
10/21/2011	4:27:21 PM	PH3 valve closed
10/21/2011	4:27:21 PM	SiCl4 pre valve closed
10/21/2011	4:27:21 PM	SiCl4 post valve closed
10/21/2011	4:27:21 PM	Main Vac valve closed
10/21/2011	4:27:21 PM	Bypass valve closed
10/21/2011	4:27:21 PM	H2 valve opened
10/21/2011	4:27:21 PM	Bubbler valve opened
10/21/2011	4:27:21 PM	Helium MFC set to  0.000000
10/21/2011	4:27:21 PM	H2 MFC set to  500.000000
10/21/2011	4:27:21 PM	BCl3 MFC set to  0.000000
10/21/2011	4:27:21 PM	PHl3 MFC set to  0.000000
10/21/2011	4:27:21 PM	SiCl4 MFC set to  0.000000
10/21/2011	4:27:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	4:27:21 PM	Tube furnace set to 750
10/21/2011	4:37:21 PM	H2 valve closed
10/21/2011	4:37:21 PM	BCl3 valve closed
10/21/2011	4:37:21 PM	PH3 valve closed
10/21/2011	4:37:21 PM	SiCl4 pre valve closed
10/21/2011	4:37:21 PM	SiCl4 post valve closed
10/21/2011	4:37:21 PM	Main Vac valve closed
10/21/2011	4:37:21 PM	Bypass valve closed
10/21/2011	4:37:21 PM	Helium valve opened
10/21/2011	4:37:21 PM	Bubbler valve opened
10/21/2011	4:37:21 PM	Helium MFC set to  500.000000
10/21/2011	4:37:21 PM	H2 MFC set to  0.000000
10/21/2011	4:37:21 PM	BCl3 MFC set to  0.000000
10/21/2011	4:37:21 PM	PHl3 MFC set to  0.000000
10/21/2011	4:37:21 PM	SiCl4 MFC set to  0.000000
10/21/2011	4:37:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	4:37:21 PM	Tube furnace set to 0
10/21/2011	4:53:55 PM	Helium valve closed
10/21/2011	4:53:55 PM	H2 valve closed
10/21/2011	4:53:55 PM	BCl3 valve closed
10/21/2011	4:53:55 PM	PH3 valve closed
10/21/2011	4:53:55 PM	SiCl4 pre valve closed
10/21/2011	4:53:55 PM	SiCl4 post valve closed
10/21/2011	4:53:55 PM	Main Vac valve closed
10/21/2011	4:53:55 PM	Bypass valve closed
10/21/2011	4:53:55 PM	Bubbler valve closed
10/21/2011	4:53:55 PM	Helium MFC set to  0.000000
10/21/2011	4:53:55 PM	H2 MFC set to  0.000000
10/21/2011	4:53:55 PM	BCl3 MFC set to  0.000000
10/21/2011	4:53:55 PM	PHl3 MFC set to  0.000000
10/21/2011	4:53:55 PM	SiCl4 MFC set to  0.000000
10/21/2011	4:53:55 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	4:53:55 PM	Tube furnace set to 0
10/21/2011	4:53:56 PM	Run finished at 4:53 PM
10/21/2011	4:54:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2011	4:54:03 PM	Recipe started at 4:54 PM
10/21/2011	4:54:03 PM	Helium valve closed
10/21/2011	4:54:03 PM	H2 valve closed
10/21/2011	4:54:03 PM	BCl3 valve closed
10/21/2011	4:54:03 PM	PH3 valve closed
10/21/2011	4:54:03 PM	SiCl4 pre valve closed
10/21/2011	4:54:03 PM	SiCl4 post valve closed
10/21/2011	4:54:03 PM	Main Vac valve closed
10/21/2011	4:54:03 PM	Bypass valve closed
10/21/2011	4:54:03 PM	Bubbler valve closed
10/21/2011	4:54:03 PM	Helium MFC set to  0.000000
10/21/2011	4:54:03 PM	H2 MFC set to  0.000000
10/21/2011	4:54:03 PM	BCl3 MFC set to  0.000000
10/21/2011	4:54:03 PM	PHl3 MFC set to  0.000000
10/21/2011	4:54:03 PM	SiCl4 MFC set to  0.000000
10/21/2011	4:54:03 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	4:54:03 PM	Tube furnace set to 0
10/21/2011	4:54:06 PM	H2 valve closed
10/21/2011	4:54:06 PM	BCl3 valve closed
10/21/2011	4:54:06 PM	PH3 valve closed
10/21/2011	4:54:06 PM	SiCl4 pre valve closed
10/21/2011	4:54:06 PM	SiCl4 post valve closed
10/21/2011	4:54:06 PM	Main Vac valve closed
10/21/2011	4:54:06 PM	Bypass valve closed
10/21/2011	4:54:06 PM	Bubbler valve closed
10/21/2011	4:54:06 PM	Helium valve opened
10/21/2011	4:54:06 PM	Helium MFC set to  500.000000
10/21/2011	4:54:06 PM	H2 MFC set to  0.000000
10/21/2011	4:54:06 PM	BCl3 MFC set to  0.000000
10/21/2011	4:54:06 PM	PHl3 MFC set to  0.000000
10/21/2011	4:54:06 PM	SiCl4 MFC set to  0.000000
10/21/2011	4:54:06 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	4:54:07 PM	Tube furnace set to 0
10/21/2011	4:54:07 PM	Helium valve closed
10/21/2011	4:54:07 PM	H2 valve closed
10/21/2011	4:54:07 PM	BCl3 valve closed
10/21/2011	4:54:07 PM	PH3 valve closed
10/21/2011	4:54:07 PM	SiCl4 pre valve closed
10/21/2011	4:54:07 PM	SiCl4 post valve closed
10/21/2011	4:54:07 PM	Main Vac valve closed
10/21/2011	4:54:07 PM	Bypass valve closed
10/21/2011	4:54:07 PM	Bubbler valve closed
10/21/2011	4:54:07 PM	Helium MFC set to  0.000000
10/21/2011	4:54:07 PM	H2 MFC set to  0.000000
10/21/2011	4:54:07 PM	BCl3 MFC set to  0.000000
10/21/2011	4:54:07 PM	PHl3 MFC set to  0.000000
10/21/2011	4:54:07 PM	SiCl4 MFC set to  0.000000
10/21/2011	4:54:07 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	4:54:07 PM	Tube furnace set to 0
10/21/2011	4:54:08 PM	Run finished at 4:54 PM
10/21/2011	4:54:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2011	5:03:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	5:03:06 PM	Recipe started at 5:03 PM
10/21/2011	5:03:06 PM	Helium valve closed
10/21/2011	5:03:06 PM	H2 valve closed
10/21/2011	5:03:06 PM	BCl3 valve closed
10/21/2011	5:03:06 PM	PH3 valve closed
10/21/2011	5:03:06 PM	SiCl4 pre valve closed
10/21/2011	5:03:06 PM	SiCl4 post valve closed
10/21/2011	5:03:06 PM	Main Vac valve closed
10/21/2011	5:03:06 PM	Bubbler valve closed
10/21/2011	5:03:06 PM	Bypass valve opened
10/21/2011	5:03:06 PM	Helium MFC set to  0.000000
10/21/2011	5:03:06 PM	H2 MFC set to  0.000000
10/21/2011	5:03:06 PM	BCl3 MFC set to  0.000000
10/21/2011	5:03:06 PM	PHl3 MFC set to  0.000000
10/21/2011	5:03:06 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:03:06 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:03:06 PM	Tube furnace set to 0
10/21/2011	5:04:12 PM	Helium valve closed
10/21/2011	5:04:12 PM	H2 valve closed
10/21/2011	5:04:12 PM	BCl3 valve closed
10/21/2011	5:04:13 PM	PH3 valve closed
10/21/2011	5:04:13 PM	SiCl4 pre valve closed
10/21/2011	5:04:13 PM	SiCl4 post valve closed
10/21/2011	5:04:13 PM	Main Vac valve closed
10/21/2011	5:04:13 PM	Bubbler valve closed
10/21/2011	5:04:13 PM	Bypass valve opened
10/21/2011	5:04:13 PM	Helium MFC set to  0.000000
10/21/2011	5:04:13 PM	H2 MFC set to  0.000000
10/21/2011	5:04:13 PM	BCl3 MFC set to  0.000000
10/21/2011	5:04:13 PM	PHl3 MFC set to  0.000000
10/21/2011	5:04:13 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:04:13 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:04:13 PM	Tube furnace set to 0
10/21/2011	5:05:13 PM	Helium valve closed
10/21/2011	5:05:13 PM	H2 valve closed
10/21/2011	5:05:13 PM	BCl3 valve closed
10/21/2011	5:05:13 PM	PH3 valve closed
10/21/2011	5:05:13 PM	SiCl4 pre valve closed
10/21/2011	5:05:13 PM	SiCl4 post valve closed
10/21/2011	5:05:13 PM	Bypass valve closed
10/21/2011	5:05:13 PM	Bubbler valve closed
10/21/2011	5:05:13 PM	Main Vac valve opened
10/21/2011	5:05:13 PM	Helium MFC set to  0.000000
10/21/2011	5:05:13 PM	H2 MFC set to  0.000000
10/21/2011	5:05:13 PM	BCl3 MFC set to  0.000000
10/21/2011	5:05:13 PM	PHl3 MFC set to  0.000000
10/21/2011	5:05:13 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:05:13 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:05:13 PM	Tube furnace set to 0
10/21/2011	5:05:14 PM	Run finished at 5:05 PM
10/21/2011	5:05:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	5:16:41 PM	Recipe started at 5:16 PM
10/21/2011	5:16:42 PM	Helium valve closed
10/21/2011	5:16:42 PM	H2 valve closed
10/21/2011	5:16:42 PM	BCl3 valve closed
10/21/2011	5:16:42 PM	PH3 valve closed
10/21/2011	5:16:42 PM	SiCl4 pre valve closed
10/21/2011	5:16:42 PM	SiCl4 post valve closed
10/21/2011	5:16:42 PM	Bypass valve closed
10/21/2011	5:16:42 PM	Bubbler valve closed
10/21/2011	5:16:42 PM	Main Vac valve opened
10/21/2011	5:16:42 PM	Helium MFC set to  0.000000
10/21/2011	5:16:42 PM	H2 MFC set to  0.000000
10/21/2011	5:16:42 PM	BCl3 MFC set to  0.000000
10/21/2011	5:16:42 PM	PHl3 MFC set to  0.000000
10/21/2011	5:16:42 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:16:42 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:16:42 PM	Tube furnace set to 150
10/21/2011	5:16:50 PM	H2 valve closed
10/21/2011	5:16:50 PM	BCl3 valve closed
10/21/2011	5:16:50 PM	PH3 valve closed
10/21/2011	5:16:50 PM	SiCl4 pre valve closed
10/21/2011	5:16:50 PM	SiCl4 post valve closed
10/21/2011	5:16:50 PM	Bypass valve closed
10/21/2011	5:16:50 PM	Bubbler valve closed
10/21/2011	5:16:50 PM	Helium valve opened
10/21/2011	5:16:50 PM	Main Vac valve opened
10/21/2011	5:16:50 PM	Helium MFC set to  20.000000
10/21/2011	5:16:50 PM	H2 MFC set to  0.000000
10/21/2011	5:16:50 PM	BCl3 MFC set to  0.000000
10/21/2011	5:16:50 PM	PHl3 MFC set to  0.000000
10/21/2011	5:16:50 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:16:50 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:16:50 PM	Tube furnace set to 150
10/21/2011	5:17:20 PM	Helium valve closed
10/21/2011	5:17:20 PM	H2 valve closed
10/21/2011	5:17:20 PM	BCl3 valve closed
10/21/2011	5:17:20 PM	PH3 valve closed
10/21/2011	5:17:20 PM	SiCl4 pre valve closed
10/21/2011	5:17:20 PM	SiCl4 post valve closed
10/21/2011	5:17:20 PM	Bypass valve closed
10/21/2011	5:17:20 PM	Bubbler valve closed
10/21/2011	5:17:20 PM	Main Vac valve opened
10/21/2011	5:17:20 PM	Helium MFC set to  0.000000
10/21/2011	5:17:20 PM	H2 MFC set to  0.000000
10/21/2011	5:17:20 PM	BCl3 MFC set to  0.000000
10/21/2011	5:17:20 PM	PHl3 MFC set to  0.000000
10/21/2011	5:17:20 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:17:20 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:17:20 PM	Tube furnace set to 150
10/21/2011	5:17:50 PM	H2 valve closed
10/21/2011	5:17:50 PM	BCl3 valve closed
10/21/2011	5:17:50 PM	PH3 valve closed
10/21/2011	5:17:50 PM	SiCl4 pre valve closed
10/21/2011	5:17:50 PM	SiCl4 post valve closed
10/21/2011	5:17:50 PM	Bypass valve closed
10/21/2011	5:17:50 PM	Bubbler valve closed
10/21/2011	5:17:50 PM	Helium valve opened
10/21/2011	5:17:50 PM	Main Vac valve opened
10/21/2011	5:17:50 PM	Helium MFC set to  20.000000
10/21/2011	5:17:50 PM	H2 MFC set to  0.000000
10/21/2011	5:17:50 PM	BCl3 MFC set to  0.000000
10/21/2011	5:17:50 PM	PHl3 MFC set to  0.000000
10/21/2011	5:17:50 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:17:50 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:17:51 PM	Tube furnace set to 150
10/21/2011	5:18:21 PM	Helium valve closed
10/21/2011	5:18:21 PM	H2 valve closed
10/21/2011	5:18:21 PM	BCl3 valve closed
10/21/2011	5:18:21 PM	PH3 valve closed
10/21/2011	5:18:21 PM	SiCl4 pre valve closed
10/21/2011	5:18:21 PM	SiCl4 post valve closed
10/21/2011	5:18:21 PM	Bypass valve closed
10/21/2011	5:18:21 PM	Bubbler valve closed
10/21/2011	5:18:21 PM	Main Vac valve opened
10/21/2011	5:18:21 PM	Helium MFC set to  0.000000
10/21/2011	5:18:21 PM	H2 MFC set to  0.000000
10/21/2011	5:18:21 PM	BCl3 MFC set to  0.000000
10/21/2011	5:18:21 PM	PHl3 MFC set to  0.000000
10/21/2011	5:18:21 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:18:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:18:21 PM	Tube furnace set to 150
10/21/2011	5:18:51 PM	H2 valve closed
10/21/2011	5:18:51 PM	BCl3 valve closed
10/21/2011	5:18:51 PM	PH3 valve closed
10/21/2011	5:18:51 PM	SiCl4 pre valve closed
10/21/2011	5:18:51 PM	SiCl4 post valve closed
10/21/2011	5:18:51 PM	Bypass valve closed
10/21/2011	5:18:51 PM	Bubbler valve closed
10/21/2011	5:18:51 PM	Helium valve opened
10/21/2011	5:18:51 PM	Main Vac valve opened
10/21/2011	5:18:51 PM	Helium MFC set to  20.000000
10/21/2011	5:18:51 PM	H2 MFC set to  0.000000
10/21/2011	5:18:51 PM	BCl3 MFC set to  0.000000
10/21/2011	5:18:51 PM	PHl3 MFC set to  0.000000
10/21/2011	5:18:51 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:18:51 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:18:51 PM	Tube furnace set to 150
10/21/2011	5:19:21 PM	Helium valve closed
10/21/2011	5:19:21 PM	H2 valve closed
10/21/2011	5:19:21 PM	BCl3 valve closed
10/21/2011	5:19:21 PM	PH3 valve closed
10/21/2011	5:19:21 PM	SiCl4 pre valve closed
10/21/2011	5:19:21 PM	SiCl4 post valve closed
10/21/2011	5:19:21 PM	Bypass valve closed
10/21/2011	5:19:21 PM	Bubbler valve closed
10/21/2011	5:19:21 PM	Main Vac valve opened
10/21/2011	5:19:21 PM	Helium MFC set to  0.000000
10/21/2011	5:19:21 PM	H2 MFC set to  0.000000
10/21/2011	5:19:21 PM	BCl3 MFC set to  0.000000
10/21/2011	5:19:21 PM	PHl3 MFC set to  0.000000
10/21/2011	5:19:21 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:19:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:19:21 PM	Tube furnace set to 150
10/21/2011	5:19:51 PM	H2 valve closed
10/21/2011	5:19:51 PM	BCl3 valve closed
10/21/2011	5:19:51 PM	PH3 valve closed
10/21/2011	5:19:51 PM	SiCl4 pre valve closed
10/21/2011	5:19:51 PM	SiCl4 post valve closed
10/21/2011	5:19:51 PM	Bypass valve closed
10/21/2011	5:19:51 PM	Bubbler valve closed
10/21/2011	5:19:51 PM	Helium valve opened
10/21/2011	5:19:51 PM	Main Vac valve opened
10/21/2011	5:19:51 PM	Helium MFC set to  20.000000
10/21/2011	5:19:51 PM	H2 MFC set to  0.000000
10/21/2011	5:19:51 PM	BCl3 MFC set to  0.000000
10/21/2011	5:19:51 PM	PHl3 MFC set to  0.000000
10/21/2011	5:19:51 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:19:51 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:19:51 PM	Tube furnace set to 150
10/21/2011	5:20:21 PM	Helium valve closed
10/21/2011	5:20:21 PM	H2 valve closed
10/21/2011	5:20:21 PM	BCl3 valve closed
10/21/2011	5:20:21 PM	PH3 valve closed
10/21/2011	5:20:21 PM	SiCl4 pre valve closed
10/21/2011	5:20:21 PM	SiCl4 post valve closed
10/21/2011	5:20:21 PM	Bypass valve closed
10/21/2011	5:20:21 PM	Bubbler valve closed
10/21/2011	5:20:21 PM	Main Vac valve opened
10/21/2011	5:20:21 PM	Helium MFC set to  0.000000
10/21/2011	5:20:21 PM	H2 MFC set to  0.000000
10/21/2011	5:20:21 PM	BCl3 MFC set to  0.000000
10/21/2011	5:20:21 PM	PHl3 MFC set to  0.000000
10/21/2011	5:20:21 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:20:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:20:22 PM	Tube furnace set to 150
10/21/2011	5:20:52 PM	H2 valve closed
10/21/2011	5:20:52 PM	BCl3 valve closed
10/21/2011	5:20:52 PM	PH3 valve closed
10/21/2011	5:20:52 PM	SiCl4 pre valve closed
10/21/2011	5:20:52 PM	SiCl4 post valve closed
10/21/2011	5:20:52 PM	Bypass valve closed
10/21/2011	5:20:52 PM	Bubbler valve closed
10/21/2011	5:20:52 PM	Helium valve opened
10/21/2011	5:20:52 PM	Main Vac valve opened
10/21/2011	5:20:52 PM	Helium MFC set to  20.000000
10/21/2011	5:20:52 PM	H2 MFC set to  0.000000
10/21/2011	5:20:52 PM	BCl3 MFC set to  0.000000
10/21/2011	5:20:52 PM	PHl3 MFC set to  0.000000
10/21/2011	5:20:52 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:20:52 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:20:52 PM	Tube furnace set to 150
10/21/2011	5:21:22 PM	Helium valve closed
10/21/2011	5:21:22 PM	H2 valve closed
10/21/2011	5:21:22 PM	BCl3 valve closed
10/21/2011	5:21:22 PM	PH3 valve closed
10/21/2011	5:21:22 PM	SiCl4 pre valve closed
10/21/2011	5:21:22 PM	SiCl4 post valve closed
10/21/2011	5:21:22 PM	Bypass valve closed
10/21/2011	5:21:22 PM	Bubbler valve closed
10/21/2011	5:21:22 PM	Main Vac valve opened
10/21/2011	5:21:22 PM	Helium MFC set to  0.000000
10/21/2011	5:21:22 PM	H2 MFC set to  0.000000
10/21/2011	5:21:22 PM	BCl3 MFC set to  0.000000
10/21/2011	5:21:22 PM	PHl3 MFC set to  0.000000
10/21/2011	5:21:22 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:21:22 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:21:22 PM	Tube furnace set to 150
10/21/2011	5:21:52 PM	H2 valve closed
10/21/2011	5:21:52 PM	BCl3 valve closed
10/21/2011	5:21:52 PM	PH3 valve closed
10/21/2011	5:21:52 PM	SiCl4 pre valve closed
10/21/2011	5:21:52 PM	SiCl4 post valve closed
10/21/2011	5:21:52 PM	Bypass valve closed
10/21/2011	5:21:52 PM	Bubbler valve closed
10/21/2011	5:21:52 PM	Helium valve opened
10/21/2011	5:21:52 PM	Main Vac valve opened
10/21/2011	5:21:52 PM	Helium MFC set to  20.000000
10/21/2011	5:21:52 PM	H2 MFC set to  0.000000
10/21/2011	5:21:52 PM	BCl3 MFC set to  0.000000
10/21/2011	5:21:52 PM	PHl3 MFC set to  0.000000
10/21/2011	5:21:52 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:21:52 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:21:52 PM	Tube furnace set to 150
10/21/2011	5:22:22 PM	Helium valve closed
10/21/2011	5:22:22 PM	H2 valve closed
10/21/2011	5:22:22 PM	BCl3 valve closed
10/21/2011	5:22:22 PM	PH3 valve closed
10/21/2011	5:22:22 PM	SiCl4 pre valve closed
10/21/2011	5:22:22 PM	SiCl4 post valve closed
10/21/2011	5:22:22 PM	Bypass valve closed
10/21/2011	5:22:22 PM	Bubbler valve closed
10/21/2011	5:22:22 PM	Main Vac valve opened
10/21/2011	5:22:22 PM	Helium MFC set to  0.000000
10/21/2011	5:22:22 PM	H2 MFC set to  0.000000
10/21/2011	5:22:22 PM	BCl3 MFC set to  0.000000
10/21/2011	5:22:22 PM	PHl3 MFC set to  0.000000
10/21/2011	5:22:22 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:22:22 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:22:22 PM	Tube furnace set to 150
10/21/2011	5:22:52 PM	H2 valve closed
10/21/2011	5:22:52 PM	BCl3 valve closed
10/21/2011	5:22:52 PM	PH3 valve closed
10/21/2011	5:22:52 PM	SiCl4 pre valve closed
10/21/2011	5:22:52 PM	SiCl4 post valve closed
10/21/2011	5:22:52 PM	Bypass valve closed
10/21/2011	5:22:52 PM	Bubbler valve closed
10/21/2011	5:22:52 PM	Helium valve opened
10/21/2011	5:22:52 PM	Main Vac valve opened
10/21/2011	5:22:52 PM	Helium MFC set to  20.000000
10/21/2011	5:22:52 PM	H2 MFC set to  0.000000
10/21/2011	5:22:52 PM	BCl3 MFC set to  0.000000
10/21/2011	5:22:52 PM	PHl3 MFC set to  0.000000
10/21/2011	5:22:52 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:22:52 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:22:52 PM	Tube furnace set to 150
10/21/2011	5:23:23 PM	Helium valve closed
10/21/2011	5:23:23 PM	H2 valve closed
10/21/2011	5:23:23 PM	BCl3 valve closed
10/21/2011	5:23:23 PM	PH3 valve closed
10/21/2011	5:23:23 PM	SiCl4 pre valve closed
10/21/2011	5:23:23 PM	SiCl4 post valve closed
10/21/2011	5:23:23 PM	Bypass valve closed
10/21/2011	5:23:23 PM	Bubbler valve closed
10/21/2011	5:23:23 PM	Main Vac valve opened
10/21/2011	5:23:23 PM	Helium MFC set to  0.000000
10/21/2011	5:23:23 PM	H2 MFC set to  0.000000
10/21/2011	5:23:23 PM	BCl3 MFC set to  0.000000
10/21/2011	5:23:23 PM	PHl3 MFC set to  0.000000
10/21/2011	5:23:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:23:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:23:23 PM	Tube furnace set to 150
10/21/2011	5:23:53 PM	H2 valve closed
10/21/2011	5:23:53 PM	BCl3 valve closed
10/21/2011	5:23:53 PM	PH3 valve closed
10/21/2011	5:23:53 PM	SiCl4 pre valve closed
10/21/2011	5:23:53 PM	SiCl4 post valve closed
10/21/2011	5:23:53 PM	Bypass valve closed
10/21/2011	5:23:53 PM	Bubbler valve closed
10/21/2011	5:23:53 PM	Helium valve opened
10/21/2011	5:23:53 PM	Main Vac valve opened
10/21/2011	5:23:53 PM	Helium MFC set to  20.000000
10/21/2011	5:23:53 PM	H2 MFC set to  0.000000
10/21/2011	5:23:53 PM	BCl3 MFC set to  0.000000
10/21/2011	5:23:53 PM	PHl3 MFC set to  0.000000
10/21/2011	5:23:53 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:23:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:23:53 PM	Tube furnace set to 150
10/21/2011	5:24:23 PM	Helium valve closed
10/21/2011	5:24:23 PM	H2 valve closed
10/21/2011	5:24:23 PM	BCl3 valve closed
10/21/2011	5:24:23 PM	PH3 valve closed
10/21/2011	5:24:23 PM	SiCl4 pre valve closed
10/21/2011	5:24:23 PM	SiCl4 post valve closed
10/21/2011	5:24:23 PM	Bypass valve closed
10/21/2011	5:24:23 PM	Bubbler valve closed
10/21/2011	5:24:23 PM	Main Vac valve opened
10/21/2011	5:24:23 PM	Helium MFC set to  0.000000
10/21/2011	5:24:23 PM	H2 MFC set to  0.000000
10/21/2011	5:24:23 PM	BCl3 MFC set to  0.000000
10/21/2011	5:24:23 PM	PHl3 MFC set to  0.000000
10/21/2011	5:24:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:24:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:24:23 PM	Tube furnace set to 150
10/21/2011	5:24:53 PM	H2 valve closed
10/21/2011	5:24:53 PM	BCl3 valve closed
10/21/2011	5:24:53 PM	PH3 valve closed
10/21/2011	5:24:53 PM	SiCl4 pre valve closed
10/21/2011	5:24:53 PM	SiCl4 post valve closed
10/21/2011	5:24:53 PM	Bypass valve closed
10/21/2011	5:24:53 PM	Bubbler valve closed
10/21/2011	5:24:53 PM	Helium valve opened
10/21/2011	5:24:53 PM	Main Vac valve opened
10/21/2011	5:24:53 PM	Helium MFC set to  20.000000
10/21/2011	5:24:53 PM	H2 MFC set to  0.000000
10/21/2011	5:24:53 PM	BCl3 MFC set to  0.000000
10/21/2011	5:24:53 PM	PHl3 MFC set to  0.000000
10/21/2011	5:24:53 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:24:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:24:53 PM	Tube furnace set to 150
10/21/2011	5:25:23 PM	Helium valve closed
10/21/2011	5:25:23 PM	H2 valve closed
10/21/2011	5:25:23 PM	BCl3 valve closed
10/21/2011	5:25:23 PM	PH3 valve closed
10/21/2011	5:25:23 PM	SiCl4 pre valve closed
10/21/2011	5:25:23 PM	SiCl4 post valve closed
10/21/2011	5:25:23 PM	Bypass valve closed
10/21/2011	5:25:23 PM	Bubbler valve closed
10/21/2011	5:25:23 PM	Main Vac valve opened
10/21/2011	5:25:23 PM	Helium MFC set to  0.000000
10/21/2011	5:25:23 PM	H2 MFC set to  0.000000
10/21/2011	5:25:23 PM	BCl3 MFC set to  0.000000
10/21/2011	5:25:23 PM	PHl3 MFC set to  0.000000
10/21/2011	5:25:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:25:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:25:23 PM	Tube furnace set to 150
10/21/2011	5:25:53 PM	H2 valve closed
10/21/2011	5:25:53 PM	BCl3 valve closed
10/21/2011	5:25:53 PM	PH3 valve closed
10/21/2011	5:25:53 PM	SiCl4 pre valve closed
10/21/2011	5:25:53 PM	SiCl4 post valve closed
10/21/2011	5:25:54 PM	Bypass valve closed
10/21/2011	5:25:54 PM	Bubbler valve closed
10/21/2011	5:25:54 PM	Helium valve opened
10/21/2011	5:25:54 PM	Main Vac valve opened
10/21/2011	5:25:54 PM	Helium MFC set to  20.000000
10/21/2011	5:25:54 PM	H2 MFC set to  0.000000
10/21/2011	5:25:54 PM	BCl3 MFC set to  0.000000
10/21/2011	5:25:54 PM	PHl3 MFC set to  0.000000
10/21/2011	5:25:54 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:25:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:25:54 PM	Tube furnace set to 150
10/21/2011	5:26:24 PM	Helium valve closed
10/21/2011	5:26:24 PM	H2 valve closed
10/21/2011	5:26:24 PM	BCl3 valve closed
10/21/2011	5:26:24 PM	PH3 valve closed
10/21/2011	5:26:24 PM	SiCl4 pre valve closed
10/21/2011	5:26:24 PM	SiCl4 post valve closed
10/21/2011	5:26:24 PM	Bypass valve closed
10/21/2011	5:26:24 PM	Bubbler valve closed
10/21/2011	5:26:24 PM	Main Vac valve opened
10/21/2011	5:26:24 PM	Helium MFC set to  0.000000
10/21/2011	5:26:24 PM	H2 MFC set to  0.000000
10/21/2011	5:26:24 PM	BCl3 MFC set to  0.000000
10/21/2011	5:26:24 PM	PHl3 MFC set to  0.000000
10/21/2011	5:26:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:26:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:26:24 PM	Tube furnace set to 150
10/21/2011	5:26:25 PM	Run finished at 5:26 PM
10/21/2011	5:36:14 PM	Recipe started at 5:36 PM
10/21/2011	5:36:14 PM	Helium valve closed
10/21/2011	5:36:14 PM	H2 valve closed
10/21/2011	5:36:14 PM	BCl3 valve closed
10/21/2011	5:36:14 PM	PH3 valve closed
10/21/2011	5:36:14 PM	SiCl4 pre valve closed
10/21/2011	5:36:14 PM	SiCl4 post valve closed
10/21/2011	5:36:14 PM	Bypass valve closed
10/21/2011	5:36:14 PM	Bubbler valve closed
10/21/2011	5:36:14 PM	Main Vac valve opened
10/21/2011	5:36:14 PM	Helium MFC set to  0.000000
10/21/2011	5:36:14 PM	H2 MFC set to  0.000000
10/21/2011	5:36:14 PM	BCl3 MFC set to  0.000000
10/21/2011	5:36:14 PM	PHl3 MFC set to  0.000000
10/21/2011	5:36:14 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:36:14 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:36:14 PM	Tube furnace set to 150
10/21/2011	5:36:44 PM	H2 valve closed
10/21/2011	5:36:44 PM	BCl3 valve closed
10/21/2011	5:36:44 PM	PH3 valve closed
10/21/2011	5:36:44 PM	SiCl4 pre valve closed
10/21/2011	5:36:44 PM	SiCl4 post valve closed
10/21/2011	5:36:44 PM	Bypass valve closed
10/21/2011	5:36:44 PM	Bubbler valve closed
10/21/2011	5:36:44 PM	Helium valve opened
10/21/2011	5:36:44 PM	Main Vac valve opened
10/21/2011	5:36:44 PM	Helium MFC set to  20.000000
10/21/2011	5:36:44 PM	H2 MFC set to  0.000000
10/21/2011	5:36:44 PM	BCl3 MFC set to  0.000000
10/21/2011	5:36:44 PM	PHl3 MFC set to  0.000000
10/21/2011	5:36:44 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:36:44 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:36:44 PM	Tube furnace set to 150
10/21/2011	5:37:14 PM	Helium valve closed
10/21/2011	5:37:14 PM	H2 valve closed
10/21/2011	5:37:14 PM	BCl3 valve closed
10/21/2011	5:37:14 PM	PH3 valve closed
10/21/2011	5:37:14 PM	SiCl4 pre valve closed
10/21/2011	5:37:14 PM	SiCl4 post valve closed
10/21/2011	5:37:14 PM	Bypass valve closed
10/21/2011	5:37:14 PM	Bubbler valve closed
10/21/2011	5:37:14 PM	Main Vac valve opened
10/21/2011	5:37:14 PM	Helium MFC set to  0.000000
10/21/2011	5:37:14 PM	H2 MFC set to  0.000000
10/21/2011	5:37:14 PM	BCl3 MFC set to  0.000000
10/21/2011	5:37:14 PM	PHl3 MFC set to  0.000000
10/21/2011	5:37:14 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:37:14 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:37:14 PM	Tube furnace set to 150
10/21/2011	5:37:44 PM	H2 valve closed
10/21/2011	5:37:44 PM	BCl3 valve closed
10/21/2011	5:37:44 PM	PH3 valve closed
10/21/2011	5:37:44 PM	SiCl4 pre valve closed
10/21/2011	5:37:44 PM	SiCl4 post valve closed
10/21/2011	5:37:44 PM	Bypass valve closed
10/21/2011	5:37:44 PM	Bubbler valve closed
10/21/2011	5:37:44 PM	Helium valve opened
10/21/2011	5:37:44 PM	Main Vac valve opened
10/21/2011	5:37:44 PM	Helium MFC set to  20.000000
10/21/2011	5:37:44 PM	H2 MFC set to  0.000000
10/21/2011	5:37:44 PM	BCl3 MFC set to  0.000000
10/21/2011	5:37:44 PM	PHl3 MFC set to  0.000000
10/21/2011	5:37:44 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:37:44 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:37:45 PM	Tube furnace set to 150
10/21/2011	5:38:15 PM	Helium valve closed
10/21/2011	5:38:15 PM	H2 valve closed
10/21/2011	5:38:15 PM	BCl3 valve closed
10/21/2011	5:38:15 PM	PH3 valve closed
10/21/2011	5:38:15 PM	SiCl4 pre valve closed
10/21/2011	5:38:15 PM	SiCl4 post valve closed
10/21/2011	5:38:15 PM	Bypass valve closed
10/21/2011	5:38:15 PM	Bubbler valve closed
10/21/2011	5:38:15 PM	Main Vac valve opened
10/21/2011	5:38:15 PM	Helium MFC set to  0.000000
10/21/2011	5:38:15 PM	H2 MFC set to  0.000000
10/21/2011	5:38:15 PM	BCl3 MFC set to  0.000000
10/21/2011	5:38:15 PM	PHl3 MFC set to  0.000000
10/21/2011	5:38:15 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:38:15 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:38:15 PM	Tube furnace set to 150
10/21/2011	5:38:45 PM	H2 valve closed
10/21/2011	5:38:45 PM	BCl3 valve closed
10/21/2011	5:38:45 PM	PH3 valve closed
10/21/2011	5:38:45 PM	SiCl4 pre valve closed
10/21/2011	5:38:45 PM	SiCl4 post valve closed
10/21/2011	5:38:45 PM	Bypass valve closed
10/21/2011	5:38:45 PM	Bubbler valve closed
10/21/2011	5:38:45 PM	Helium valve opened
10/21/2011	5:38:45 PM	Main Vac valve opened
10/21/2011	5:38:45 PM	Helium MFC set to  20.000000
10/21/2011	5:38:45 PM	H2 MFC set to  0.000000
10/21/2011	5:38:45 PM	BCl3 MFC set to  0.000000
10/21/2011	5:38:45 PM	PHl3 MFC set to  0.000000
10/21/2011	5:38:45 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:38:45 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:38:45 PM	Tube furnace set to 150
10/21/2011	5:39:15 PM	Helium valve closed
10/21/2011	5:39:15 PM	H2 valve closed
10/21/2011	5:39:15 PM	BCl3 valve closed
10/21/2011	5:39:15 PM	PH3 valve closed
10/21/2011	5:39:15 PM	SiCl4 pre valve closed
10/21/2011	5:39:15 PM	SiCl4 post valve closed
10/21/2011	5:39:15 PM	Bypass valve closed
10/21/2011	5:39:15 PM	Bubbler valve closed
10/21/2011	5:39:15 PM	Main Vac valve opened
10/21/2011	5:39:15 PM	Helium MFC set to  0.000000
10/21/2011	5:39:15 PM	H2 MFC set to  0.000000
10/21/2011	5:39:15 PM	BCl3 MFC set to  0.000000
10/21/2011	5:39:15 PM	PHl3 MFC set to  0.000000
10/21/2011	5:39:15 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:39:15 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:39:15 PM	Tube furnace set to 150
10/21/2011	5:39:45 PM	H2 valve closed
10/21/2011	5:39:45 PM	BCl3 valve closed
10/21/2011	5:39:45 PM	PH3 valve closed
10/21/2011	5:39:45 PM	SiCl4 pre valve closed
10/21/2011	5:39:45 PM	SiCl4 post valve closed
10/21/2011	5:39:45 PM	Bypass valve closed
10/21/2011	5:39:45 PM	Bubbler valve closed
10/21/2011	5:39:45 PM	Helium valve opened
10/21/2011	5:39:45 PM	Main Vac valve opened
10/21/2011	5:39:45 PM	Helium MFC set to  20.000000
10/21/2011	5:39:45 PM	H2 MFC set to  0.000000
10/21/2011	5:39:45 PM	BCl3 MFC set to  0.000000
10/21/2011	5:39:45 PM	PHl3 MFC set to  0.000000
10/21/2011	5:39:45 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:39:45 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:39:45 PM	Tube furnace set to 150
10/21/2011	5:40:15 PM	Helium valve closed
10/21/2011	5:40:15 PM	H2 valve closed
10/21/2011	5:40:15 PM	BCl3 valve closed
10/21/2011	5:40:15 PM	PH3 valve closed
10/21/2011	5:40:15 PM	SiCl4 pre valve closed
10/21/2011	5:40:15 PM	SiCl4 post valve closed
10/21/2011	5:40:15 PM	Bypass valve closed
10/21/2011	5:40:15 PM	Bubbler valve closed
10/21/2011	5:40:15 PM	Main Vac valve opened
10/21/2011	5:40:15 PM	Helium MFC set to  0.000000
10/21/2011	5:40:15 PM	H2 MFC set to  0.000000
10/21/2011	5:40:15 PM	BCl3 MFC set to  0.000000
10/21/2011	5:40:15 PM	PHl3 MFC set to  0.000000
10/21/2011	5:40:15 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:40:15 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:40:16 PM	Tube furnace set to 150
10/21/2011	5:40:46 PM	H2 valve closed
10/21/2011	5:40:46 PM	BCl3 valve closed
10/21/2011	5:40:46 PM	PH3 valve closed
10/21/2011	5:40:46 PM	SiCl4 pre valve closed
10/21/2011	5:40:46 PM	SiCl4 post valve closed
10/21/2011	5:40:46 PM	Bypass valve closed
10/21/2011	5:40:46 PM	Bubbler valve closed
10/21/2011	5:40:46 PM	Helium valve opened
10/21/2011	5:40:46 PM	Main Vac valve opened
10/21/2011	5:40:46 PM	Helium MFC set to  20.000000
10/21/2011	5:40:46 PM	H2 MFC set to  0.000000
10/21/2011	5:40:46 PM	BCl3 MFC set to  0.000000
10/21/2011	5:40:46 PM	PHl3 MFC set to  0.000000
10/21/2011	5:40:46 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:40:46 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:40:46 PM	Tube furnace set to 150
10/21/2011	5:41:16 PM	Helium valve closed
10/21/2011	5:41:16 PM	H2 valve closed
10/21/2011	5:41:16 PM	BCl3 valve closed
10/21/2011	5:41:16 PM	PH3 valve closed
10/21/2011	5:41:16 PM	SiCl4 pre valve closed
10/21/2011	5:41:16 PM	SiCl4 post valve closed
10/21/2011	5:41:16 PM	Bypass valve closed
10/21/2011	5:41:16 PM	Bubbler valve closed
10/21/2011	5:41:16 PM	Main Vac valve opened
10/21/2011	5:41:16 PM	Helium MFC set to  0.000000
10/21/2011	5:41:16 PM	H2 MFC set to  0.000000
10/21/2011	5:41:16 PM	BCl3 MFC set to  0.000000
10/21/2011	5:41:16 PM	PHl3 MFC set to  0.000000
10/21/2011	5:41:16 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:41:16 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:41:16 PM	Tube furnace set to 150
10/21/2011	5:41:46 PM	H2 valve closed
10/21/2011	5:41:46 PM	BCl3 valve closed
10/21/2011	5:41:46 PM	PH3 valve closed
10/21/2011	5:41:46 PM	SiCl4 pre valve closed
10/21/2011	5:41:46 PM	SiCl4 post valve closed
10/21/2011	5:41:46 PM	Bypass valve closed
10/21/2011	5:41:46 PM	Bubbler valve closed
10/21/2011	5:41:46 PM	Helium valve opened
10/21/2011	5:41:46 PM	Main Vac valve opened
10/21/2011	5:41:46 PM	Helium MFC set to  20.000000
10/21/2011	5:41:46 PM	H2 MFC set to  0.000000
10/21/2011	5:41:46 PM	BCl3 MFC set to  0.000000
10/21/2011	5:41:46 PM	PHl3 MFC set to  0.000000
10/21/2011	5:41:46 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:41:46 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:41:46 PM	Tube furnace set to 150
10/21/2011	5:42:16 PM	Helium valve closed
10/21/2011	5:42:16 PM	H2 valve closed
10/21/2011	5:42:16 PM	BCl3 valve closed
10/21/2011	5:42:16 PM	PH3 valve closed
10/21/2011	5:42:16 PM	SiCl4 pre valve closed
10/21/2011	5:42:16 PM	SiCl4 post valve closed
10/21/2011	5:42:16 PM	Bypass valve closed
10/21/2011	5:42:16 PM	Bubbler valve closed
10/21/2011	5:42:16 PM	Main Vac valve opened
10/21/2011	5:42:16 PM	Helium MFC set to  0.000000
10/21/2011	5:42:16 PM	H2 MFC set to  0.000000
10/21/2011	5:42:16 PM	BCl3 MFC set to  0.000000
10/21/2011	5:42:16 PM	PHl3 MFC set to  0.000000
10/21/2011	5:42:16 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:42:16 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:42:16 PM	Tube furnace set to 150
10/21/2011	5:42:46 PM	H2 valve closed
10/21/2011	5:42:46 PM	BCl3 valve closed
10/21/2011	5:42:46 PM	PH3 valve closed
10/21/2011	5:42:46 PM	SiCl4 pre valve closed
10/21/2011	5:42:46 PM	SiCl4 post valve closed
10/21/2011	5:42:46 PM	Bypass valve closed
10/21/2011	5:42:46 PM	Bubbler valve closed
10/21/2011	5:42:46 PM	Helium valve opened
10/21/2011	5:42:46 PM	Main Vac valve opened
10/21/2011	5:42:46 PM	Helium MFC set to  20.000000
10/21/2011	5:42:46 PM	H2 MFC set to  0.000000
10/21/2011	5:42:46 PM	BCl3 MFC set to  0.000000
10/21/2011	5:42:46 PM	PHl3 MFC set to  0.000000
10/21/2011	5:42:46 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:42:46 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:42:47 PM	Tube furnace set to 150
10/21/2011	5:43:17 PM	Helium valve closed
10/21/2011	5:43:17 PM	H2 valve closed
10/21/2011	5:43:17 PM	BCl3 valve closed
10/21/2011	5:43:17 PM	PH3 valve closed
10/21/2011	5:43:17 PM	SiCl4 pre valve closed
10/21/2011	5:43:17 PM	SiCl4 post valve closed
10/21/2011	5:43:17 PM	Bypass valve closed
10/21/2011	5:43:17 PM	Bubbler valve closed
10/21/2011	5:43:17 PM	Main Vac valve opened
10/21/2011	5:43:17 PM	Helium MFC set to  0.000000
10/21/2011	5:43:17 PM	H2 MFC set to  0.000000
10/21/2011	5:43:17 PM	BCl3 MFC set to  0.000000
10/21/2011	5:43:17 PM	PHl3 MFC set to  0.000000
10/21/2011	5:43:17 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:43:17 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:43:17 PM	Tube furnace set to 150
10/21/2011	5:43:47 PM	H2 valve closed
10/21/2011	5:43:47 PM	BCl3 valve closed
10/21/2011	5:43:47 PM	PH3 valve closed
10/21/2011	5:43:47 PM	SiCl4 pre valve closed
10/21/2011	5:43:47 PM	SiCl4 post valve closed
10/21/2011	5:43:47 PM	Bypass valve closed
10/21/2011	5:43:47 PM	Bubbler valve closed
10/21/2011	5:43:47 PM	Helium valve opened
10/21/2011	5:43:47 PM	Main Vac valve opened
10/21/2011	5:43:47 PM	Helium MFC set to  20.000000
10/21/2011	5:43:47 PM	H2 MFC set to  0.000000
10/21/2011	5:43:47 PM	BCl3 MFC set to  0.000000
10/21/2011	5:43:47 PM	PHl3 MFC set to  0.000000
10/21/2011	5:43:47 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:43:47 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:43:47 PM	Tube furnace set to 150
10/21/2011	5:44:17 PM	Helium valve closed
10/21/2011	5:44:17 PM	H2 valve closed
10/21/2011	5:44:17 PM	BCl3 valve closed
10/21/2011	5:44:17 PM	PH3 valve closed
10/21/2011	5:44:17 PM	SiCl4 pre valve closed
10/21/2011	5:44:17 PM	SiCl4 post valve closed
10/21/2011	5:44:17 PM	Bypass valve closed
10/21/2011	5:44:17 PM	Bubbler valve closed
10/21/2011	5:44:17 PM	Main Vac valve opened
10/21/2011	5:44:17 PM	Helium MFC set to  0.000000
10/21/2011	5:44:17 PM	H2 MFC set to  0.000000
10/21/2011	5:44:17 PM	BCl3 MFC set to  0.000000
10/21/2011	5:44:17 PM	PHl3 MFC set to  0.000000
10/21/2011	5:44:17 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:44:17 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:44:17 PM	Tube furnace set to 150
10/21/2011	5:44:47 PM	H2 valve closed
10/21/2011	5:44:47 PM	BCl3 valve closed
10/21/2011	5:44:47 PM	PH3 valve closed
10/21/2011	5:44:47 PM	SiCl4 pre valve closed
10/21/2011	5:44:47 PM	SiCl4 post valve closed
10/21/2011	5:44:47 PM	Bypass valve closed
10/21/2011	5:44:47 PM	Bubbler valve closed
10/21/2011	5:44:47 PM	Helium valve opened
10/21/2011	5:44:47 PM	Main Vac valve opened
10/21/2011	5:44:47 PM	Helium MFC set to  20.000000
10/21/2011	5:44:47 PM	H2 MFC set to  0.000000
10/21/2011	5:44:47 PM	BCl3 MFC set to  0.000000
10/21/2011	5:44:47 PM	PHl3 MFC set to  0.000000
10/21/2011	5:44:47 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:44:47 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:44:47 PM	Tube furnace set to 150
10/21/2011	5:45:17 PM	Helium valve closed
10/21/2011	5:45:17 PM	H2 valve closed
10/21/2011	5:45:17 PM	BCl3 valve closed
10/21/2011	5:45:17 PM	PH3 valve closed
10/21/2011	5:45:17 PM	SiCl4 pre valve closed
10/21/2011	5:45:17 PM	SiCl4 post valve closed
10/21/2011	5:45:17 PM	Bypass valve closed
10/21/2011	5:45:17 PM	Bubbler valve closed
10/21/2011	5:45:17 PM	Main Vac valve opened
10/21/2011	5:45:17 PM	Helium MFC set to  0.000000
10/21/2011	5:45:17 PM	H2 MFC set to  0.000000
10/21/2011	5:45:17 PM	BCl3 MFC set to  0.000000
10/21/2011	5:45:17 PM	PHl3 MFC set to  0.000000
10/21/2011	5:45:17 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:45:17 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:45:18 PM	Tube furnace set to 150
10/21/2011	5:45:48 PM	H2 valve closed
10/21/2011	5:45:48 PM	BCl3 valve closed
10/21/2011	5:45:48 PM	PH3 valve closed
10/21/2011	5:45:48 PM	SiCl4 pre valve closed
10/21/2011	5:45:48 PM	SiCl4 post valve closed
10/21/2011	5:45:48 PM	Bypass valve closed
10/21/2011	5:45:48 PM	Bubbler valve closed
10/21/2011	5:45:48 PM	Helium valve opened
10/21/2011	5:45:48 PM	Main Vac valve opened
10/21/2011	5:45:48 PM	Helium MFC set to  20.000000
10/21/2011	5:45:48 PM	H2 MFC set to  0.000000
10/21/2011	5:45:48 PM	BCl3 MFC set to  0.000000
10/21/2011	5:45:48 PM	PHl3 MFC set to  0.000000
10/21/2011	5:45:48 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:45:48 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:45:48 PM	Tube furnace set to 150
10/21/2011	5:46:18 PM	Helium valve closed
10/21/2011	5:46:18 PM	H2 valve closed
10/21/2011	5:46:18 PM	BCl3 valve closed
10/21/2011	5:46:18 PM	PH3 valve closed
10/21/2011	5:46:18 PM	SiCl4 pre valve closed
10/21/2011	5:46:18 PM	SiCl4 post valve closed
10/21/2011	5:46:18 PM	Bypass valve closed
10/21/2011	5:46:18 PM	Bubbler valve closed
10/21/2011	5:46:18 PM	Main Vac valve opened
10/21/2011	5:46:18 PM	Helium MFC set to  0.000000
10/21/2011	5:46:18 PM	H2 MFC set to  0.000000
10/21/2011	5:46:18 PM	BCl3 MFC set to  0.000000
10/21/2011	5:46:18 PM	PHl3 MFC set to  0.000000
10/21/2011	5:46:18 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:46:18 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:46:18 PM	Tube furnace set to 150
10/21/2011	5:46:19 PM	Run finished at 5:46 PM
10/21/2011	5:52:35 PM	Recipe started at 5:52 PM
10/21/2011	5:52:35 PM	Helium valve closed
10/21/2011	5:52:35 PM	H2 valve closed
10/21/2011	5:52:35 PM	BCl3 valve closed
10/21/2011	5:52:35 PM	PH3 valve closed
10/21/2011	5:52:35 PM	SiCl4 pre valve closed
10/21/2011	5:52:35 PM	SiCl4 post valve closed
10/21/2011	5:52:35 PM	Bypass valve closed
10/21/2011	5:52:35 PM	Bubbler valve closed
10/21/2011	5:52:35 PM	Main Vac valve opened
10/21/2011	5:52:35 PM	Helium MFC set to  0.000000
10/21/2011	5:52:35 PM	H2 MFC set to  0.000000
10/21/2011	5:52:35 PM	BCl3 MFC set to  0.000000
10/21/2011	5:52:35 PM	PHl3 MFC set to  0.000000
10/21/2011	5:52:35 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:52:35 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:52:35 PM	Tube furnace set to 150
10/21/2011	5:53:05 PM	H2 valve closed
10/21/2011	5:53:05 PM	BCl3 valve closed
10/21/2011	5:53:05 PM	PH3 valve closed
10/21/2011	5:53:05 PM	SiCl4 pre valve closed
10/21/2011	5:53:05 PM	SiCl4 post valve closed
10/21/2011	5:53:05 PM	Bypass valve closed
10/21/2011	5:53:05 PM	Bubbler valve closed
10/21/2011	5:53:05 PM	Helium valve opened
10/21/2011	5:53:05 PM	Main Vac valve opened
10/21/2011	5:53:05 PM	Helium MFC set to  20.000000
10/21/2011	5:53:05 PM	H2 MFC set to  0.000000
10/21/2011	5:53:05 PM	BCl3 MFC set to  0.000000
10/21/2011	5:53:05 PM	PHl3 MFC set to  0.000000
10/21/2011	5:53:05 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:53:05 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:53:06 PM	Tube furnace set to 150
10/21/2011	5:53:36 PM	Helium valve closed
10/21/2011	5:53:36 PM	H2 valve closed
10/21/2011	5:53:36 PM	BCl3 valve closed
10/21/2011	5:53:36 PM	PH3 valve closed
10/21/2011	5:53:36 PM	SiCl4 pre valve closed
10/21/2011	5:53:36 PM	SiCl4 post valve closed
10/21/2011	5:53:36 PM	Bypass valve closed
10/21/2011	5:53:36 PM	Bubbler valve closed
10/21/2011	5:53:36 PM	Main Vac valve opened
10/21/2011	5:53:36 PM	Helium MFC set to  0.000000
10/21/2011	5:53:36 PM	H2 MFC set to  0.000000
10/21/2011	5:53:36 PM	BCl3 MFC set to  0.000000
10/21/2011	5:53:36 PM	PHl3 MFC set to  0.000000
10/21/2011	5:53:36 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:53:36 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:53:36 PM	Tube furnace set to 150
10/21/2011	5:54:06 PM	H2 valve closed
10/21/2011	5:54:06 PM	BCl3 valve closed
10/21/2011	5:54:06 PM	PH3 valve closed
10/21/2011	5:54:06 PM	SiCl4 pre valve closed
10/21/2011	5:54:06 PM	SiCl4 post valve closed
10/21/2011	5:54:06 PM	Bypass valve closed
10/21/2011	5:54:06 PM	Bubbler valve closed
10/21/2011	5:54:06 PM	Helium valve opened
10/21/2011	5:54:06 PM	Main Vac valve opened
10/21/2011	5:54:06 PM	Helium MFC set to  20.000000
10/21/2011	5:54:06 PM	H2 MFC set to  0.000000
10/21/2011	5:54:06 PM	BCl3 MFC set to  0.000000
10/21/2011	5:54:06 PM	PHl3 MFC set to  0.000000
10/21/2011	5:54:06 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:54:06 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:54:06 PM	Tube furnace set to 150
10/21/2011	5:54:36 PM	Helium valve closed
10/21/2011	5:54:36 PM	H2 valve closed
10/21/2011	5:54:36 PM	BCl3 valve closed
10/21/2011	5:54:36 PM	PH3 valve closed
10/21/2011	5:54:36 PM	SiCl4 pre valve closed
10/21/2011	5:54:36 PM	SiCl4 post valve closed
10/21/2011	5:54:36 PM	Bypass valve closed
10/21/2011	5:54:36 PM	Bubbler valve closed
10/21/2011	5:54:36 PM	Main Vac valve opened
10/21/2011	5:54:36 PM	Helium MFC set to  0.000000
10/21/2011	5:54:36 PM	H2 MFC set to  0.000000
10/21/2011	5:54:36 PM	BCl3 MFC set to  0.000000
10/21/2011	5:54:36 PM	PHl3 MFC set to  0.000000
10/21/2011	5:54:36 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:54:36 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:54:36 PM	Tube furnace set to 150
10/21/2011	5:55:06 PM	H2 valve closed
10/21/2011	5:55:06 PM	BCl3 valve closed
10/21/2011	5:55:06 PM	PH3 valve closed
10/21/2011	5:55:06 PM	SiCl4 pre valve closed
10/21/2011	5:55:06 PM	SiCl4 post valve closed
10/21/2011	5:55:06 PM	Bypass valve closed
10/21/2011	5:55:06 PM	Bubbler valve closed
10/21/2011	5:55:06 PM	Helium valve opened
10/21/2011	5:55:06 PM	Main Vac valve opened
10/21/2011	5:55:06 PM	Helium MFC set to  20.000000
10/21/2011	5:55:06 PM	H2 MFC set to  0.000000
10/21/2011	5:55:06 PM	BCl3 MFC set to  0.000000
10/21/2011	5:55:06 PM	PHl3 MFC set to  0.000000
10/21/2011	5:55:06 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:55:06 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:55:06 PM	Tube furnace set to 150
10/21/2011	5:55:36 PM	Helium valve closed
10/21/2011	5:55:36 PM	H2 valve closed
10/21/2011	5:55:36 PM	BCl3 valve closed
10/21/2011	5:55:36 PM	PH3 valve closed
10/21/2011	5:55:36 PM	SiCl4 pre valve closed
10/21/2011	5:55:36 PM	SiCl4 post valve closed
10/21/2011	5:55:36 PM	Bypass valve closed
10/21/2011	5:55:36 PM	Bubbler valve closed
10/21/2011	5:55:36 PM	Main Vac valve opened
10/21/2011	5:55:36 PM	Helium MFC set to  0.000000
10/21/2011	5:55:36 PM	H2 MFC set to  0.000000
10/21/2011	5:55:36 PM	BCl3 MFC set to  0.000000
10/21/2011	5:55:36 PM	PHl3 MFC set to  0.000000
10/21/2011	5:55:36 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:55:36 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:55:37 PM	Tube furnace set to 150
10/21/2011	5:56:07 PM	H2 valve closed
10/21/2011	5:56:07 PM	BCl3 valve closed
10/21/2011	5:56:07 PM	PH3 valve closed
10/21/2011	5:56:07 PM	SiCl4 pre valve closed
10/21/2011	5:56:07 PM	SiCl4 post valve closed
10/21/2011	5:56:07 PM	Bypass valve closed
10/21/2011	5:56:07 PM	Bubbler valve closed
10/21/2011	5:56:07 PM	Helium valve opened
10/21/2011	5:56:07 PM	Main Vac valve opened
10/21/2011	5:56:07 PM	Helium MFC set to  20.000000
10/21/2011	5:56:07 PM	H2 MFC set to  0.000000
10/21/2011	5:56:07 PM	BCl3 MFC set to  0.000000
10/21/2011	5:56:07 PM	PHl3 MFC set to  0.000000
10/21/2011	5:56:07 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:56:07 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:56:07 PM	Tube furnace set to 150
10/21/2011	5:56:37 PM	Helium valve closed
10/21/2011	5:56:37 PM	H2 valve closed
10/21/2011	5:56:37 PM	BCl3 valve closed
10/21/2011	5:56:37 PM	PH3 valve closed
10/21/2011	5:56:37 PM	SiCl4 pre valve closed
10/21/2011	5:56:37 PM	SiCl4 post valve closed
10/21/2011	5:56:37 PM	Bypass valve closed
10/21/2011	5:56:37 PM	Bubbler valve closed
10/21/2011	5:56:37 PM	Main Vac valve opened
10/21/2011	5:56:37 PM	Helium MFC set to  0.000000
10/21/2011	5:56:37 PM	H2 MFC set to  0.000000
10/21/2011	5:56:37 PM	BCl3 MFC set to  0.000000
10/21/2011	5:56:37 PM	PHl3 MFC set to  0.000000
10/21/2011	5:56:37 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:56:37 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:56:37 PM	Tube furnace set to 150
10/21/2011	5:57:07 PM	H2 valve closed
10/21/2011	5:57:07 PM	BCl3 valve closed
10/21/2011	5:57:07 PM	PH3 valve closed
10/21/2011	5:57:07 PM	SiCl4 pre valve closed
10/21/2011	5:57:07 PM	SiCl4 post valve closed
10/21/2011	5:57:07 PM	Bypass valve closed
10/21/2011	5:57:07 PM	Bubbler valve closed
10/21/2011	5:57:07 PM	Helium valve opened
10/21/2011	5:57:07 PM	Main Vac valve opened
10/21/2011	5:57:07 PM	Helium MFC set to  20.000000
10/21/2011	5:57:07 PM	H2 MFC set to  0.000000
10/21/2011	5:57:07 PM	BCl3 MFC set to  0.000000
10/21/2011	5:57:07 PM	PHl3 MFC set to  0.000000
10/21/2011	5:57:07 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:57:07 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:57:07 PM	Tube furnace set to 150
10/21/2011	5:57:37 PM	Helium valve closed
10/21/2011	5:57:37 PM	H2 valve closed
10/21/2011	5:57:37 PM	BCl3 valve closed
10/21/2011	5:57:37 PM	PH3 valve closed
10/21/2011	5:57:37 PM	SiCl4 pre valve closed
10/21/2011	5:57:37 PM	SiCl4 post valve closed
10/21/2011	5:57:37 PM	Bypass valve closed
10/21/2011	5:57:37 PM	Bubbler valve closed
10/21/2011	5:57:37 PM	Main Vac valve opened
10/21/2011	5:57:37 PM	Helium MFC set to  0.000000
10/21/2011	5:57:37 PM	H2 MFC set to  0.000000
10/21/2011	5:57:37 PM	BCl3 MFC set to  0.000000
10/21/2011	5:57:37 PM	PHl3 MFC set to  0.000000
10/21/2011	5:57:37 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:57:37 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:57:37 PM	Tube furnace set to 150
10/21/2011	5:58:07 PM	H2 valve closed
10/21/2011	5:58:07 PM	BCl3 valve closed
10/21/2011	5:58:07 PM	PH3 valve closed
10/21/2011	5:58:07 PM	SiCl4 pre valve closed
10/21/2011	5:58:07 PM	SiCl4 post valve closed
10/21/2011	5:58:07 PM	Bypass valve closed
10/21/2011	5:58:07 PM	Bubbler valve closed
10/21/2011	5:58:07 PM	Helium valve opened
10/21/2011	5:58:07 PM	Main Vac valve opened
10/21/2011	5:58:07 PM	Helium MFC set to  20.000000
10/21/2011	5:58:07 PM	H2 MFC set to  0.000000
10/21/2011	5:58:07 PM	BCl3 MFC set to  0.000000
10/21/2011	5:58:07 PM	PHl3 MFC set to  0.000000
10/21/2011	5:58:07 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:58:07 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:58:08 PM	Tube furnace set to 150
10/21/2011	5:58:38 PM	Helium valve closed
10/21/2011	5:58:38 PM	H2 valve closed
10/21/2011	5:58:38 PM	BCl3 valve closed
10/21/2011	5:58:38 PM	PH3 valve closed
10/21/2011	5:58:38 PM	SiCl4 pre valve closed
10/21/2011	5:58:38 PM	SiCl4 post valve closed
10/21/2011	5:58:38 PM	Bypass valve closed
10/21/2011	5:58:38 PM	Bubbler valve closed
10/21/2011	5:58:38 PM	Main Vac valve opened
10/21/2011	5:58:38 PM	Helium MFC set to  0.000000
10/21/2011	5:58:38 PM	H2 MFC set to  0.000000
10/21/2011	5:58:38 PM	BCl3 MFC set to  0.000000
10/21/2011	5:58:38 PM	PHl3 MFC set to  0.000000
10/21/2011	5:58:38 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:58:38 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:58:38 PM	Tube furnace set to 150
10/21/2011	5:59:08 PM	H2 valve closed
10/21/2011	5:59:08 PM	BCl3 valve closed
10/21/2011	5:59:08 PM	PH3 valve closed
10/21/2011	5:59:08 PM	SiCl4 pre valve closed
10/21/2011	5:59:08 PM	SiCl4 post valve closed
10/21/2011	5:59:08 PM	Bypass valve closed
10/21/2011	5:59:08 PM	Bubbler valve closed
10/21/2011	5:59:08 PM	Helium valve opened
10/21/2011	5:59:08 PM	Main Vac valve opened
10/21/2011	5:59:08 PM	Helium MFC set to  20.000000
10/21/2011	5:59:08 PM	H2 MFC set to  0.000000
10/21/2011	5:59:08 PM	BCl3 MFC set to  0.000000
10/21/2011	5:59:08 PM	PHl3 MFC set to  0.000000
10/21/2011	5:59:08 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:59:08 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:59:08 PM	Tube furnace set to 150
10/21/2011	5:59:38 PM	Helium valve closed
10/21/2011	5:59:38 PM	H2 valve closed
10/21/2011	5:59:38 PM	BCl3 valve closed
10/21/2011	5:59:38 PM	PH3 valve closed
10/21/2011	5:59:38 PM	SiCl4 pre valve closed
10/21/2011	5:59:38 PM	SiCl4 post valve closed
10/21/2011	5:59:38 PM	Bypass valve closed
10/21/2011	5:59:38 PM	Bubbler valve closed
10/21/2011	5:59:38 PM	Main Vac valve opened
10/21/2011	5:59:38 PM	Helium MFC set to  0.000000
10/21/2011	5:59:38 PM	H2 MFC set to  0.000000
10/21/2011	5:59:38 PM	BCl3 MFC set to  0.000000
10/21/2011	5:59:38 PM	PHl3 MFC set to  0.000000
10/21/2011	5:59:38 PM	SiCl4 MFC set to  0.000000
10/21/2011	5:59:38 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	5:59:38 PM	Tube furnace set to 150
10/21/2011	6:00:08 PM	H2 valve closed
10/21/2011	6:00:08 PM	BCl3 valve closed
10/21/2011	6:00:08 PM	PH3 valve closed
10/21/2011	6:00:08 PM	SiCl4 pre valve closed
10/21/2011	6:00:08 PM	SiCl4 post valve closed
10/21/2011	6:00:08 PM	Bypass valve closed
10/21/2011	6:00:08 PM	Bubbler valve closed
10/21/2011	6:00:08 PM	Helium valve opened
10/21/2011	6:00:08 PM	Main Vac valve opened
10/21/2011	6:00:08 PM	Helium MFC set to  20.000000
10/21/2011	6:00:08 PM	H2 MFC set to  0.000000
10/21/2011	6:00:08 PM	BCl3 MFC set to  0.000000
10/21/2011	6:00:08 PM	PHl3 MFC set to  0.000000
10/21/2011	6:00:08 PM	SiCl4 MFC set to  0.000000
10/21/2011	6:00:08 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	6:00:08 PM	Tube furnace set to 150
10/21/2011	6:00:38 PM	Helium valve closed
10/21/2011	6:00:38 PM	H2 valve closed
10/21/2011	6:00:38 PM	BCl3 valve closed
10/21/2011	6:00:38 PM	PH3 valve closed
10/21/2011	6:00:38 PM	SiCl4 pre valve closed
10/21/2011	6:00:38 PM	SiCl4 post valve closed
10/21/2011	6:00:38 PM	Bypass valve closed
10/21/2011	6:00:38 PM	Bubbler valve closed
10/21/2011	6:00:38 PM	Main Vac valve opened
10/21/2011	6:00:38 PM	Helium MFC set to  0.000000
10/21/2011	6:00:38 PM	H2 MFC set to  0.000000
10/21/2011	6:00:38 PM	BCl3 MFC set to  0.000000
10/21/2011	6:00:38 PM	PHl3 MFC set to  0.000000
10/21/2011	6:00:38 PM	SiCl4 MFC set to  0.000000
10/21/2011	6:00:38 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	6:00:39 PM	Tube furnace set to 150
10/21/2011	6:01:09 PM	H2 valve closed
10/21/2011	6:01:09 PM	BCl3 valve closed
10/21/2011	6:01:09 PM	PH3 valve closed
10/21/2011	6:01:09 PM	SiCl4 pre valve closed
10/21/2011	6:01:09 PM	SiCl4 post valve closed
10/21/2011	6:01:09 PM	Bypass valve closed
10/21/2011	6:01:09 PM	Bubbler valve closed
10/21/2011	6:01:09 PM	Helium valve opened
10/21/2011	6:01:09 PM	Main Vac valve opened
10/21/2011	6:01:09 PM	Helium MFC set to  20.000000
10/21/2011	6:01:09 PM	H2 MFC set to  0.000000
10/21/2011	6:01:09 PM	BCl3 MFC set to  0.000000
10/21/2011	6:01:09 PM	PHl3 MFC set to  0.000000
10/21/2011	6:01:09 PM	SiCl4 MFC set to  0.000000
10/21/2011	6:01:09 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	6:01:09 PM	Tube furnace set to 150
10/21/2011	6:01:39 PM	Helium valve closed
10/21/2011	6:01:39 PM	H2 valve closed
10/21/2011	6:01:39 PM	BCl3 valve closed
10/21/2011	6:01:39 PM	PH3 valve closed
10/21/2011	6:01:39 PM	SiCl4 pre valve closed
10/21/2011	6:01:39 PM	SiCl4 post valve closed
10/21/2011	6:01:39 PM	Bypass valve closed
10/21/2011	6:01:39 PM	Bubbler valve closed
10/21/2011	6:01:39 PM	Main Vac valve opened
10/21/2011	6:01:39 PM	Helium MFC set to  0.000000
10/21/2011	6:01:39 PM	H2 MFC set to  0.000000
10/21/2011	6:01:39 PM	BCl3 MFC set to  0.000000
10/21/2011	6:01:39 PM	PHl3 MFC set to  0.000000
10/21/2011	6:01:39 PM	SiCl4 MFC set to  0.000000
10/21/2011	6:01:39 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	6:01:39 PM	Tube furnace set to 150
10/21/2011	6:02:09 PM	H2 valve closed
10/21/2011	6:02:09 PM	BCl3 valve closed
10/21/2011	6:02:09 PM	PH3 valve closed
10/21/2011	6:02:09 PM	SiCl4 pre valve closed
10/21/2011	6:02:09 PM	SiCl4 post valve closed
10/21/2011	6:02:09 PM	Bypass valve closed
10/21/2011	6:02:09 PM	Bubbler valve closed
10/21/2011	6:02:09 PM	Helium valve opened
10/21/2011	6:02:09 PM	Main Vac valve opened
10/21/2011	6:02:09 PM	Helium MFC set to  20.000000
10/21/2011	6:02:09 PM	H2 MFC set to  0.000000
10/21/2011	6:02:09 PM	BCl3 MFC set to  0.000000
10/21/2011	6:02:09 PM	PHl3 MFC set to  0.000000
10/21/2011	6:02:09 PM	SiCl4 MFC set to  0.000000
10/21/2011	6:02:09 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	6:02:09 PM	Tube furnace set to 150
10/21/2011	6:02:39 PM	Helium valve closed
10/21/2011	6:02:39 PM	H2 valve closed
10/21/2011	6:02:39 PM	BCl3 valve closed
10/21/2011	6:02:39 PM	PH3 valve closed
10/21/2011	6:02:39 PM	SiCl4 pre valve closed
10/21/2011	6:02:39 PM	SiCl4 post valve closed
10/21/2011	6:02:39 PM	Bypass valve closed
10/21/2011	6:02:39 PM	Bubbler valve closed
10/21/2011	6:02:39 PM	Main Vac valve opened
10/21/2011	6:02:39 PM	Helium MFC set to  0.000000
10/21/2011	6:02:39 PM	H2 MFC set to  0.000000
10/21/2011	6:02:39 PM	BCl3 MFC set to  0.000000
10/21/2011	6:02:39 PM	PHl3 MFC set to  0.000000
10/21/2011	6:02:39 PM	SiCl4 MFC set to  0.000000
10/21/2011	6:02:39 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	6:02:39 PM	Tube furnace set to 150
10/21/2011	6:02:40 PM	Run finished at 6:02 PM
10/21/2011	6:03:22 PM	Main Vac valve closed
10/21/2011	6:03:34 PM	Main Vac valve opened
10/21/2011	6:04:38 PM	Recipe started at 6:04 PM
10/21/2011	6:04:38 PM	Helium valve closed
10/21/2011	6:04:38 PM	H2 valve closed
10/21/2011	6:04:38 PM	BCl3 valve closed
10/21/2011	6:04:38 PM	PH3 valve closed
10/21/2011	6:04:38 PM	SiCl4 pre valve closed
10/21/2011	6:04:38 PM	SiCl4 post valve closed
10/21/2011	6:04:38 PM	Main Vac valve closed
10/21/2011	6:04:38 PM	Bypass valve closed
10/21/2011	6:04:38 PM	Bubbler valve closed
10/21/2011	6:04:38 PM	Helium MFC set to  0.000000
10/21/2011	6:04:38 PM	H2 MFC set to  0.000000
10/21/2011	6:04:38 PM	BCl3 MFC set to  0.000000
10/21/2011	6:04:38 PM	PHl3 MFC set to  0.000000
10/21/2011	6:04:38 PM	SiCl4 MFC set to  0.000000
10/21/2011	6:04:38 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	6:04:38 PM	Tube furnace set to 0
10/21/2011	6:04:41 PM	Helium valve closed
10/21/2011	6:04:41 PM	BCl3 valve closed
10/21/2011	6:04:41 PM	PH3 valve closed
10/21/2011	6:04:41 PM	SiCl4 pre valve closed
10/21/2011	6:04:41 PM	SiCl4 post valve closed
10/21/2011	6:04:41 PM	Main Vac valve closed
10/21/2011	6:04:41 PM	Bypass valve closed
10/21/2011	6:04:41 PM	Bubbler valve closed
10/21/2011	6:04:41 PM	H2 valve opened
10/21/2011	6:04:41 PM	Helium MFC set to  0.000000
10/21/2011	6:04:41 PM	H2 MFC set to  500.000000
10/21/2011	6:04:41 PM	BCl3 MFC set to  0.000000
10/21/2011	6:04:41 PM	PHl3 MFC set to  0.000000
10/21/2011	6:04:41 PM	SiCl4 MFC set to  0.000000
10/21/2011	6:04:41 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	6:04:42 PM	Tube furnace set to 0
10/21/2011	6:05:45 PM	Helium valve closed
10/21/2011	6:05:45 PM	BCl3 valve closed
10/21/2011	6:05:45 PM	PH3 valve closed
10/21/2011	6:05:45 PM	SiCl4 pre valve closed
10/21/2011	6:05:45 PM	SiCl4 post valve closed
10/21/2011	6:05:45 PM	Main Vac valve closed
10/21/2011	6:05:45 PM	Bypass valve closed
10/21/2011	6:05:45 PM	H2 valve opened
10/21/2011	6:05:45 PM	Bubbler valve opened
10/21/2011	6:05:45 PM	Helium MFC set to  0.000000
10/21/2011	6:05:45 PM	H2 MFC set to  500.000000
10/21/2011	6:05:45 PM	BCl3 MFC set to  0.000000
10/21/2011	6:05:45 PM	PHl3 MFC set to  0.000000
10/21/2011	6:05:45 PM	SiCl4 MFC set to  0.000000
10/21/2011	6:05:45 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	6:05:46 PM	Tube furnace set to 0
10/21/2011	6:05:47 PM	Helium valve closed
10/21/2011	6:05:47 PM	BCl3 valve closed
10/21/2011	6:05:47 PM	PH3 valve closed
10/21/2011	6:05:47 PM	SiCl4 pre valve closed
10/21/2011	6:05:47 PM	SiCl4 post valve closed
10/21/2011	6:05:47 PM	Main Vac valve closed
10/21/2011	6:05:47 PM	Bypass valve closed
10/21/2011	6:05:47 PM	H2 valve opened
10/21/2011	6:05:47 PM	Bubbler valve opened
10/21/2011	6:05:47 PM	Helium MFC set to  0.000000
10/21/2011	6:05:47 PM	H2 MFC set to  500.000000
10/21/2011	6:05:47 PM	BCl3 MFC set to  0.000000
10/21/2011	6:05:47 PM	PHl3 MFC set to  0.000000
10/21/2011	6:05:47 PM	SiCl4 MFC set to  0.000000
10/21/2011	6:05:47 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	6:05:47 PM	Tube furnace set to 1050
10/21/2011	6:45:47 PM	Helium valve closed
10/21/2011	6:45:47 PM	BCl3 valve closed
10/21/2011	6:45:47 PM	PH3 valve closed
10/21/2011	6:45:47 PM	Main Vac valve closed
10/21/2011	6:45:47 PM	Bypass valve closed
10/21/2011	6:45:47 PM	H2 valve opened
10/21/2011	6:45:47 PM	SiCl4 pre valve opened
10/21/2011	6:45:47 PM	SiCl4 post valve opened
10/21/2011	6:45:47 PM	Bubbler valve opened
10/21/2011	6:45:47 PM	Helium MFC set to  0.000000
10/21/2011	6:45:47 PM	H2 MFC set to  500.000000
10/21/2011	6:45:47 PM	BCl3 MFC set to  0.000000
10/21/2011	6:45:47 PM	PHl3 MFC set to  0.000000
10/21/2011	6:45:47 PM	SiCl4 MFC set to  45.000000
10/21/2011	6:45:47 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	6:45:47 PM	Tube furnace set to 1050
10/21/2011	6:55:47 PM	Helium valve closed
10/21/2011	6:55:47 PM	BCl3 valve closed
10/21/2011	6:55:47 PM	PH3 valve closed
10/21/2011	6:55:47 PM	SiCl4 pre valve closed
10/21/2011	6:55:47 PM	SiCl4 post valve closed
10/21/2011	6:55:47 PM	Main Vac valve closed
10/21/2011	6:55:47 PM	Bypass valve closed
10/21/2011	6:55:47 PM	H2 valve opened
10/21/2011	6:55:47 PM	Bubbler valve opened
10/21/2011	6:55:47 PM	Helium MFC set to  0.000000
10/21/2011	6:55:47 PM	H2 MFC set to  500.000000
10/21/2011	6:55:47 PM	BCl3 MFC set to  0.000000
10/21/2011	6:55:47 PM	PHl3 MFC set to  0.000000
10/21/2011	6:55:47 PM	SiCl4 MFC set to  0.000000
10/21/2011	6:55:47 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	6:55:47 PM	Tube furnace set to 750
10/21/2011	7:05:47 PM	H2 valve closed
10/21/2011	7:05:47 PM	BCl3 valve closed
10/21/2011	7:05:47 PM	PH3 valve closed
10/21/2011	7:05:47 PM	SiCl4 pre valve closed
10/21/2011	7:05:47 PM	SiCl4 post valve closed
10/21/2011	7:05:47 PM	Main Vac valve closed
10/21/2011	7:05:47 PM	Bypass valve closed
10/21/2011	7:05:47 PM	Helium valve opened
10/21/2011	7:05:47 PM	Bubbler valve opened
10/21/2011	7:05:47 PM	Helium MFC set to  500.000000
10/21/2011	7:05:47 PM	H2 MFC set to  0.000000
10/21/2011	7:05:47 PM	BCl3 MFC set to  0.000000
10/21/2011	7:05:47 PM	PHl3 MFC set to  0.000000
10/21/2011	7:05:47 PM	SiCl4 MFC set to  0.000000
10/21/2011	7:05:47 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	7:05:47 PM	Tube furnace set to 0
10/21/2011	7:25:47 PM	Helium valve closed
10/21/2011	7:25:47 PM	H2 valve closed
10/21/2011	7:25:47 PM	BCl3 valve closed
10/21/2011	7:25:47 PM	PH3 valve closed
10/21/2011	7:25:47 PM	SiCl4 pre valve closed
10/21/2011	7:25:47 PM	SiCl4 post valve closed
10/21/2011	7:25:47 PM	Main Vac valve closed
10/21/2011	7:25:47 PM	Bypass valve closed
10/21/2011	7:25:47 PM	Bubbler valve closed
10/21/2011	7:25:47 PM	Helium MFC set to  0.000000
10/21/2011	7:25:47 PM	H2 MFC set to  0.000000
10/21/2011	7:25:47 PM	BCl3 MFC set to  0.000000
10/21/2011	7:25:47 PM	PHl3 MFC set to  0.000000
10/21/2011	7:25:47 PM	SiCl4 MFC set to  0.000000
10/21/2011	7:25:47 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	7:25:48 PM	Tube furnace set to 0
10/21/2011	7:25:49 PM	Run finished at 7:25 PM
10/21/2011	7:55:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2011	7:55:20 PM	Recipe started at 7:55 PM
10/21/2011	7:55:20 PM	Helium valve closed
10/21/2011	7:55:20 PM	H2 valve closed
10/21/2011	7:55:20 PM	BCl3 valve closed
10/21/2011	7:55:20 PM	PH3 valve closed
10/21/2011	7:55:20 PM	SiCl4 pre valve closed
10/21/2011	7:55:20 PM	SiCl4 post valve closed
10/21/2011	7:55:20 PM	Main Vac valve closed
10/21/2011	7:55:20 PM	Bypass valve closed
10/21/2011	7:55:20 PM	Bubbler valve closed
10/21/2011	7:55:20 PM	Helium MFC set to  0.000000
10/21/2011	7:55:20 PM	H2 MFC set to  0.000000
10/21/2011	7:55:20 PM	BCl3 MFC set to  0.000000
10/21/2011	7:55:20 PM	PHl3 MFC set to  0.000000
10/21/2011	7:55:20 PM	SiCl4 MFC set to  0.000000
10/21/2011	7:55:20 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	7:55:21 PM	Tube furnace set to 0
10/21/2011	7:55:24 PM	H2 valve closed
10/21/2011	7:55:24 PM	BCl3 valve closed
10/21/2011	7:55:24 PM	PH3 valve closed
10/21/2011	7:55:24 PM	SiCl4 pre valve closed
10/21/2011	7:55:24 PM	SiCl4 post valve closed
10/21/2011	7:55:24 PM	Main Vac valve closed
10/21/2011	7:55:24 PM	Bypass valve closed
10/21/2011	7:55:24 PM	Bubbler valve closed
10/21/2011	7:55:24 PM	Helium valve opened
10/21/2011	7:55:24 PM	Helium MFC set to  500.000000
10/21/2011	7:55:24 PM	H2 MFC set to  0.000000
10/21/2011	7:55:24 PM	BCl3 MFC set to  0.000000
10/21/2011	7:55:24 PM	PHl3 MFC set to  0.000000
10/21/2011	7:55:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	7:55:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	7:55:24 PM	Tube furnace set to 0
10/21/2011	7:55:25 PM	Helium valve closed
10/21/2011	7:55:25 PM	H2 valve closed
10/21/2011	7:55:25 PM	BCl3 valve closed
10/21/2011	7:55:25 PM	PH3 valve closed
10/21/2011	7:55:25 PM	SiCl4 pre valve closed
10/21/2011	7:55:25 PM	SiCl4 post valve closed
10/21/2011	7:55:25 PM	Main Vac valve closed
10/21/2011	7:55:25 PM	Bypass valve closed
10/21/2011	7:55:25 PM	Bubbler valve closed
10/21/2011	7:55:25 PM	Helium MFC set to  0.000000
10/21/2011	7:55:25 PM	H2 MFC set to  0.000000
10/21/2011	7:55:25 PM	BCl3 MFC set to  0.000000
10/21/2011	7:55:25 PM	PHl3 MFC set to  0.000000
10/21/2011	7:55:25 PM	SiCl4 MFC set to  0.000000
10/21/2011	7:55:25 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	7:55:25 PM	Tube furnace set to 0
10/21/2011	7:55:26 PM	Run finished at 7:55 PM
10/21/2011	7:55:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2011	8:04:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	8:04:02 PM	Recipe started at 8:04 PM
10/21/2011	8:04:02 PM	Helium valve closed
10/21/2011	8:04:02 PM	H2 valve closed
10/21/2011	8:04:02 PM	BCl3 valve closed
10/21/2011	8:04:02 PM	PH3 valve closed
10/21/2011	8:04:02 PM	SiCl4 pre valve closed
10/21/2011	8:04:02 PM	SiCl4 post valve closed
10/21/2011	8:04:02 PM	Main Vac valve closed
10/21/2011	8:04:02 PM	Bubbler valve closed
10/21/2011	8:04:02 PM	Bypass valve opened
10/21/2011	8:04:02 PM	Helium MFC set to  0.000000
10/21/2011	8:04:02 PM	H2 MFC set to  0.000000
10/21/2011	8:04:02 PM	BCl3 MFC set to  0.000000
10/21/2011	8:04:02 PM	PHl3 MFC set to  0.000000
10/21/2011	8:04:02 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:04:02 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:04:02 PM	Tube furnace set to 0
10/21/2011	8:05:09 PM	Helium valve closed
10/21/2011	8:05:09 PM	H2 valve closed
10/21/2011	8:05:09 PM	BCl3 valve closed
10/21/2011	8:05:09 PM	PH3 valve closed
10/21/2011	8:05:09 PM	SiCl4 pre valve closed
10/21/2011	8:05:09 PM	SiCl4 post valve closed
10/21/2011	8:05:09 PM	Main Vac valve closed
10/21/2011	8:05:09 PM	Bubbler valve closed
10/21/2011	8:05:09 PM	Bypass valve opened
10/21/2011	8:05:09 PM	Helium MFC set to  0.000000
10/21/2011	8:05:09 PM	H2 MFC set to  0.000000
10/21/2011	8:05:09 PM	BCl3 MFC set to  0.000000
10/21/2011	8:05:09 PM	PHl3 MFC set to  0.000000
10/21/2011	8:05:09 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:05:09 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:05:09 PM	Tube furnace set to 0
10/21/2011	8:06:09 PM	Helium valve closed
10/21/2011	8:06:09 PM	H2 valve closed
10/21/2011	8:06:09 PM	BCl3 valve closed
10/21/2011	8:06:09 PM	PH3 valve closed
10/21/2011	8:06:09 PM	SiCl4 pre valve closed
10/21/2011	8:06:09 PM	SiCl4 post valve closed
10/21/2011	8:06:09 PM	Bypass valve closed
10/21/2011	8:06:09 PM	Bubbler valve closed
10/21/2011	8:06:09 PM	Main Vac valve opened
10/21/2011	8:06:09 PM	Helium MFC set to  0.000000
10/21/2011	8:06:09 PM	H2 MFC set to  0.000000
10/21/2011	8:06:09 PM	BCl3 MFC set to  0.000000
10/21/2011	8:06:09 PM	PHl3 MFC set to  0.000000
10/21/2011	8:06:09 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:06:09 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:06:09 PM	Tube furnace set to 0
10/21/2011	8:06:10 PM	Run finished at 8:06 PM
10/21/2011	8:06:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	8:14:30 PM	Recipe started at 8:14 PM
10/21/2011	8:14:30 PM	Helium valve closed
10/21/2011	8:14:30 PM	H2 valve closed
10/21/2011	8:14:30 PM	BCl3 valve closed
10/21/2011	8:14:30 PM	PH3 valve closed
10/21/2011	8:14:30 PM	SiCl4 pre valve closed
10/21/2011	8:14:30 PM	SiCl4 post valve closed
10/21/2011	8:14:30 PM	Bypass valve closed
10/21/2011	8:14:30 PM	Bubbler valve closed
10/21/2011	8:14:30 PM	Main Vac valve opened
10/21/2011	8:14:30 PM	Helium MFC set to  0.000000
10/21/2011	8:14:30 PM	H2 MFC set to  0.000000
10/21/2011	8:14:30 PM	BCl3 MFC set to  0.000000
10/21/2011	8:14:30 PM	PHl3 MFC set to  0.000000
10/21/2011	8:14:30 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:14:30 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:14:30 PM	Tube furnace set to 150
10/21/2011	8:15:00 PM	H2 valve closed
10/21/2011	8:15:00 PM	BCl3 valve closed
10/21/2011	8:15:00 PM	PH3 valve closed
10/21/2011	8:15:00 PM	SiCl4 pre valve closed
10/21/2011	8:15:00 PM	SiCl4 post valve closed
10/21/2011	8:15:00 PM	Bypass valve closed
10/21/2011	8:15:00 PM	Bubbler valve closed
10/21/2011	8:15:00 PM	Helium valve opened
10/21/2011	8:15:00 PM	Main Vac valve opened
10/21/2011	8:15:00 PM	Helium MFC set to  20.000000
10/21/2011	8:15:00 PM	H2 MFC set to  0.000000
10/21/2011	8:15:00 PM	BCl3 MFC set to  0.000000
10/21/2011	8:15:00 PM	PHl3 MFC set to  0.000000
10/21/2011	8:15:00 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:15:00 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:15:00 PM	Tube furnace set to 150
10/21/2011	8:15:30 PM	Helium valve closed
10/21/2011	8:15:30 PM	H2 valve closed
10/21/2011	8:15:30 PM	BCl3 valve closed
10/21/2011	8:15:30 PM	PH3 valve closed
10/21/2011	8:15:30 PM	SiCl4 pre valve closed
10/21/2011	8:15:30 PM	SiCl4 post valve closed
10/21/2011	8:15:30 PM	Bypass valve closed
10/21/2011	8:15:30 PM	Bubbler valve closed
10/21/2011	8:15:30 PM	Main Vac valve opened
10/21/2011	8:15:30 PM	Helium MFC set to  0.000000
10/21/2011	8:15:30 PM	H2 MFC set to  0.000000
10/21/2011	8:15:30 PM	BCl3 MFC set to  0.000000
10/21/2011	8:15:30 PM	PHl3 MFC set to  0.000000
10/21/2011	8:15:30 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:15:30 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:15:30 PM	Tube furnace set to 150
10/21/2011	8:16:00 PM	H2 valve closed
10/21/2011	8:16:00 PM	BCl3 valve closed
10/21/2011	8:16:00 PM	PH3 valve closed
10/21/2011	8:16:00 PM	SiCl4 pre valve closed
10/21/2011	8:16:00 PM	SiCl4 post valve closed
10/21/2011	8:16:00 PM	Bypass valve closed
10/21/2011	8:16:00 PM	Bubbler valve closed
10/21/2011	8:16:00 PM	Helium valve opened
10/21/2011	8:16:00 PM	Main Vac valve opened
10/21/2011	8:16:00 PM	Helium MFC set to  20.000000
10/21/2011	8:16:00 PM	H2 MFC set to  0.000000
10/21/2011	8:16:00 PM	BCl3 MFC set to  0.000000
10/21/2011	8:16:00 PM	PHl3 MFC set to  0.000000
10/21/2011	8:16:00 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:16:00 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:16:00 PM	Tube furnace set to 150
10/21/2011	8:16:30 PM	Helium valve closed
10/21/2011	8:16:30 PM	H2 valve closed
10/21/2011	8:16:30 PM	BCl3 valve closed
10/21/2011	8:16:30 PM	PH3 valve closed
10/21/2011	8:16:30 PM	SiCl4 pre valve closed
10/21/2011	8:16:30 PM	SiCl4 post valve closed
10/21/2011	8:16:30 PM	Bypass valve closed
10/21/2011	8:16:30 PM	Bubbler valve closed
10/21/2011	8:16:30 PM	Main Vac valve opened
10/21/2011	8:16:30 PM	Helium MFC set to  0.000000
10/21/2011	8:16:30 PM	H2 MFC set to  0.000000
10/21/2011	8:16:30 PM	BCl3 MFC set to  0.000000
10/21/2011	8:16:30 PM	PHl3 MFC set to  0.000000
10/21/2011	8:16:30 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:16:30 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:16:31 PM	Tube furnace set to 150
10/21/2011	8:17:01 PM	H2 valve closed
10/21/2011	8:17:01 PM	BCl3 valve closed
10/21/2011	8:17:01 PM	PH3 valve closed
10/21/2011	8:17:01 PM	SiCl4 pre valve closed
10/21/2011	8:17:01 PM	SiCl4 post valve closed
10/21/2011	8:17:01 PM	Bypass valve closed
10/21/2011	8:17:01 PM	Bubbler valve closed
10/21/2011	8:17:01 PM	Helium valve opened
10/21/2011	8:17:01 PM	Main Vac valve opened
10/21/2011	8:17:01 PM	Helium MFC set to  20.000000
10/21/2011	8:17:01 PM	H2 MFC set to  0.000000
10/21/2011	8:17:01 PM	BCl3 MFC set to  0.000000
10/21/2011	8:17:01 PM	PHl3 MFC set to  0.000000
10/21/2011	8:17:01 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:17:01 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:17:01 PM	Tube furnace set to 150
10/21/2011	8:17:31 PM	Helium valve closed
10/21/2011	8:17:31 PM	H2 valve closed
10/21/2011	8:17:31 PM	BCl3 valve closed
10/21/2011	8:17:31 PM	PH3 valve closed
10/21/2011	8:17:31 PM	SiCl4 pre valve closed
10/21/2011	8:17:31 PM	SiCl4 post valve closed
10/21/2011	8:17:31 PM	Bypass valve closed
10/21/2011	8:17:31 PM	Bubbler valve closed
10/21/2011	8:17:31 PM	Main Vac valve opened
10/21/2011	8:17:31 PM	Helium MFC set to  0.000000
10/21/2011	8:17:31 PM	H2 MFC set to  0.000000
10/21/2011	8:17:31 PM	BCl3 MFC set to  0.000000
10/21/2011	8:17:31 PM	PHl3 MFC set to  0.000000
10/21/2011	8:17:31 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:17:31 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:17:31 PM	Tube furnace set to 150
10/21/2011	8:18:01 PM	H2 valve closed
10/21/2011	8:18:01 PM	BCl3 valve closed
10/21/2011	8:18:01 PM	PH3 valve closed
10/21/2011	8:18:01 PM	SiCl4 pre valve closed
10/21/2011	8:18:01 PM	SiCl4 post valve closed
10/21/2011	8:18:01 PM	Bypass valve closed
10/21/2011	8:18:01 PM	Bubbler valve closed
10/21/2011	8:18:01 PM	Helium valve opened
10/21/2011	8:18:01 PM	Main Vac valve opened
10/21/2011	8:18:01 PM	Helium MFC set to  20.000000
10/21/2011	8:18:01 PM	H2 MFC set to  0.000000
10/21/2011	8:18:01 PM	BCl3 MFC set to  0.000000
10/21/2011	8:18:01 PM	PHl3 MFC set to  0.000000
10/21/2011	8:18:01 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:18:01 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:18:01 PM	Tube furnace set to 150
10/21/2011	8:18:31 PM	Helium valve closed
10/21/2011	8:18:31 PM	H2 valve closed
10/21/2011	8:18:31 PM	BCl3 valve closed
10/21/2011	8:18:31 PM	PH3 valve closed
10/21/2011	8:18:31 PM	SiCl4 pre valve closed
10/21/2011	8:18:31 PM	SiCl4 post valve closed
10/21/2011	8:18:31 PM	Bypass valve closed
10/21/2011	8:18:31 PM	Bubbler valve closed
10/21/2011	8:18:31 PM	Main Vac valve opened
10/21/2011	8:18:31 PM	Helium MFC set to  0.000000
10/21/2011	8:18:31 PM	H2 MFC set to  0.000000
10/21/2011	8:18:31 PM	BCl3 MFC set to  0.000000
10/21/2011	8:18:31 PM	PHl3 MFC set to  0.000000
10/21/2011	8:18:31 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:18:31 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:18:31 PM	Tube furnace set to 150
10/21/2011	8:19:01 PM	H2 valve closed
10/21/2011	8:19:01 PM	BCl3 valve closed
10/21/2011	8:19:01 PM	PH3 valve closed
10/21/2011	8:19:01 PM	SiCl4 pre valve closed
10/21/2011	8:19:01 PM	SiCl4 post valve closed
10/21/2011	8:19:01 PM	Bypass valve closed
10/21/2011	8:19:01 PM	Bubbler valve closed
10/21/2011	8:19:01 PM	Helium valve opened
10/21/2011	8:19:01 PM	Main Vac valve opened
10/21/2011	8:19:01 PM	Helium MFC set to  20.000000
10/21/2011	8:19:01 PM	H2 MFC set to  0.000000
10/21/2011	8:19:01 PM	BCl3 MFC set to  0.000000
10/21/2011	8:19:01 PM	PHl3 MFC set to  0.000000
10/21/2011	8:19:01 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:19:01 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:19:02 PM	Tube furnace set to 150
10/21/2011	8:19:32 PM	Helium valve closed
10/21/2011	8:19:32 PM	H2 valve closed
10/21/2011	8:19:32 PM	BCl3 valve closed
10/21/2011	8:19:32 PM	PH3 valve closed
10/21/2011	8:19:32 PM	SiCl4 pre valve closed
10/21/2011	8:19:32 PM	SiCl4 post valve closed
10/21/2011	8:19:32 PM	Bypass valve closed
10/21/2011	8:19:32 PM	Bubbler valve closed
10/21/2011	8:19:32 PM	Main Vac valve opened
10/21/2011	8:19:32 PM	Helium MFC set to  0.000000
10/21/2011	8:19:32 PM	H2 MFC set to  0.000000
10/21/2011	8:19:32 PM	BCl3 MFC set to  0.000000
10/21/2011	8:19:32 PM	PHl3 MFC set to  0.000000
10/21/2011	8:19:32 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:19:32 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:19:32 PM	Tube furnace set to 150
10/21/2011	8:20:02 PM	H2 valve closed
10/21/2011	8:20:02 PM	BCl3 valve closed
10/21/2011	8:20:02 PM	PH3 valve closed
10/21/2011	8:20:02 PM	SiCl4 pre valve closed
10/21/2011	8:20:02 PM	SiCl4 post valve closed
10/21/2011	8:20:02 PM	Bypass valve closed
10/21/2011	8:20:02 PM	Bubbler valve closed
10/21/2011	8:20:02 PM	Helium valve opened
10/21/2011	8:20:02 PM	Main Vac valve opened
10/21/2011	8:20:02 PM	Helium MFC set to  20.000000
10/21/2011	8:20:02 PM	H2 MFC set to  0.000000
10/21/2011	8:20:02 PM	BCl3 MFC set to  0.000000
10/21/2011	8:20:02 PM	PHl3 MFC set to  0.000000
10/21/2011	8:20:02 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:20:02 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:20:02 PM	Tube furnace set to 150
10/21/2011	8:20:32 PM	Helium valve closed
10/21/2011	8:20:32 PM	H2 valve closed
10/21/2011	8:20:32 PM	BCl3 valve closed
10/21/2011	8:20:32 PM	PH3 valve closed
10/21/2011	8:20:32 PM	SiCl4 pre valve closed
10/21/2011	8:20:32 PM	SiCl4 post valve closed
10/21/2011	8:20:32 PM	Bypass valve closed
10/21/2011	8:20:32 PM	Bubbler valve closed
10/21/2011	8:20:32 PM	Main Vac valve opened
10/21/2011	8:20:32 PM	Helium MFC set to  0.000000
10/21/2011	8:20:32 PM	H2 MFC set to  0.000000
10/21/2011	8:20:32 PM	BCl3 MFC set to  0.000000
10/21/2011	8:20:32 PM	PHl3 MFC set to  0.000000
10/21/2011	8:20:32 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:20:32 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:20:32 PM	Tube furnace set to 150
10/21/2011	8:21:02 PM	H2 valve closed
10/21/2011	8:21:02 PM	BCl3 valve closed
10/21/2011	8:21:02 PM	PH3 valve closed
10/21/2011	8:21:02 PM	SiCl4 pre valve closed
10/21/2011	8:21:02 PM	SiCl4 post valve closed
10/21/2011	8:21:02 PM	Bypass valve closed
10/21/2011	8:21:02 PM	Bubbler valve closed
10/21/2011	8:21:02 PM	Helium valve opened
10/21/2011	8:21:02 PM	Main Vac valve opened
10/21/2011	8:21:02 PM	Helium MFC set to  20.000000
10/21/2011	8:21:02 PM	H2 MFC set to  0.000000
10/21/2011	8:21:02 PM	BCl3 MFC set to  0.000000
10/21/2011	8:21:02 PM	PHl3 MFC set to  0.000000
10/21/2011	8:21:02 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:21:02 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:21:02 PM	Tube furnace set to 150
10/21/2011	8:21:32 PM	Helium valve closed
10/21/2011	8:21:32 PM	H2 valve closed
10/21/2011	8:21:32 PM	BCl3 valve closed
10/21/2011	8:21:32 PM	PH3 valve closed
10/21/2011	8:21:32 PM	SiCl4 pre valve closed
10/21/2011	8:21:32 PM	SiCl4 post valve closed
10/21/2011	8:21:32 PM	Bypass valve closed
10/21/2011	8:21:32 PM	Bubbler valve closed
10/21/2011	8:21:32 PM	Main Vac valve opened
10/21/2011	8:21:32 PM	Helium MFC set to  0.000000
10/21/2011	8:21:32 PM	H2 MFC set to  0.000000
10/21/2011	8:21:32 PM	BCl3 MFC set to  0.000000
10/21/2011	8:21:32 PM	PHl3 MFC set to  0.000000
10/21/2011	8:21:32 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:21:32 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:21:33 PM	Tube furnace set to 150
10/21/2011	8:22:03 PM	H2 valve closed
10/21/2011	8:22:03 PM	BCl3 valve closed
10/21/2011	8:22:03 PM	PH3 valve closed
10/21/2011	8:22:03 PM	SiCl4 pre valve closed
10/21/2011	8:22:03 PM	SiCl4 post valve closed
10/21/2011	8:22:03 PM	Bypass valve closed
10/21/2011	8:22:03 PM	Bubbler valve closed
10/21/2011	8:22:03 PM	Helium valve opened
10/21/2011	8:22:03 PM	Main Vac valve opened
10/21/2011	8:22:03 PM	Helium MFC set to  20.000000
10/21/2011	8:22:03 PM	H2 MFC set to  0.000000
10/21/2011	8:22:03 PM	BCl3 MFC set to  0.000000
10/21/2011	8:22:03 PM	PHl3 MFC set to  0.000000
10/21/2011	8:22:03 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:22:03 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:22:03 PM	Tube furnace set to 150
10/21/2011	8:22:33 PM	Helium valve closed
10/21/2011	8:22:33 PM	H2 valve closed
10/21/2011	8:22:33 PM	BCl3 valve closed
10/21/2011	8:22:33 PM	PH3 valve closed
10/21/2011	8:22:33 PM	SiCl4 pre valve closed
10/21/2011	8:22:33 PM	SiCl4 post valve closed
10/21/2011	8:22:33 PM	Bypass valve closed
10/21/2011	8:22:33 PM	Bubbler valve closed
10/21/2011	8:22:33 PM	Main Vac valve opened
10/21/2011	8:22:33 PM	Helium MFC set to  0.000000
10/21/2011	8:22:33 PM	H2 MFC set to  0.000000
10/21/2011	8:22:33 PM	BCl3 MFC set to  0.000000
10/21/2011	8:22:33 PM	PHl3 MFC set to  0.000000
10/21/2011	8:22:33 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:22:33 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:22:33 PM	Tube furnace set to 150
10/21/2011	8:23:03 PM	H2 valve closed
10/21/2011	8:23:03 PM	BCl3 valve closed
10/21/2011	8:23:03 PM	PH3 valve closed
10/21/2011	8:23:03 PM	SiCl4 pre valve closed
10/21/2011	8:23:03 PM	SiCl4 post valve closed
10/21/2011	8:23:03 PM	Bypass valve closed
10/21/2011	8:23:03 PM	Bubbler valve closed
10/21/2011	8:23:03 PM	Helium valve opened
10/21/2011	8:23:03 PM	Main Vac valve opened
10/21/2011	8:23:03 PM	Helium MFC set to  20.000000
10/21/2011	8:23:03 PM	H2 MFC set to  0.000000
10/21/2011	8:23:03 PM	BCl3 MFC set to  0.000000
10/21/2011	8:23:03 PM	PHl3 MFC set to  0.000000
10/21/2011	8:23:03 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:23:03 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:23:03 PM	Tube furnace set to 150
10/21/2011	8:23:33 PM	Helium valve closed
10/21/2011	8:23:33 PM	H2 valve closed
10/21/2011	8:23:33 PM	BCl3 valve closed
10/21/2011	8:23:33 PM	PH3 valve closed
10/21/2011	8:23:33 PM	SiCl4 pre valve closed
10/21/2011	8:23:33 PM	SiCl4 post valve closed
10/21/2011	8:23:33 PM	Bypass valve closed
10/21/2011	8:23:33 PM	Bubbler valve closed
10/21/2011	8:23:33 PM	Main Vac valve opened
10/21/2011	8:23:33 PM	Helium MFC set to  0.000000
10/21/2011	8:23:33 PM	H2 MFC set to  0.000000
10/21/2011	8:23:33 PM	BCl3 MFC set to  0.000000
10/21/2011	8:23:33 PM	PHl3 MFC set to  0.000000
10/21/2011	8:23:33 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:23:33 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:23:33 PM	Tube furnace set to 150
10/21/2011	8:24:03 PM	H2 valve closed
10/21/2011	8:24:03 PM	BCl3 valve closed
10/21/2011	8:24:03 PM	PH3 valve closed
10/21/2011	8:24:03 PM	SiCl4 pre valve closed
10/21/2011	8:24:03 PM	SiCl4 post valve closed
10/21/2011	8:24:03 PM	Bypass valve closed
10/21/2011	8:24:03 PM	Bubbler valve closed
10/21/2011	8:24:03 PM	Helium valve opened
10/21/2011	8:24:03 PM	Main Vac valve opened
10/21/2011	8:24:03 PM	Helium MFC set to  20.000000
10/21/2011	8:24:03 PM	H2 MFC set to  0.000000
10/21/2011	8:24:03 PM	BCl3 MFC set to  0.000000
10/21/2011	8:24:03 PM	PHl3 MFC set to  0.000000
10/21/2011	8:24:03 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:24:03 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:24:04 PM	Tube furnace set to 150
10/21/2011	8:24:34 PM	Helium valve closed
10/21/2011	8:24:34 PM	H2 valve closed
10/21/2011	8:24:34 PM	BCl3 valve closed
10/21/2011	8:24:34 PM	PH3 valve closed
10/21/2011	8:24:34 PM	SiCl4 pre valve closed
10/21/2011	8:24:34 PM	SiCl4 post valve closed
10/21/2011	8:24:34 PM	Bypass valve closed
10/21/2011	8:24:34 PM	Bubbler valve closed
10/21/2011	8:24:34 PM	Main Vac valve opened
10/21/2011	8:24:34 PM	Helium MFC set to  0.000000
10/21/2011	8:24:34 PM	H2 MFC set to  0.000000
10/21/2011	8:24:34 PM	BCl3 MFC set to  0.000000
10/21/2011	8:24:34 PM	PHl3 MFC set to  0.000000
10/21/2011	8:24:34 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:24:34 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:24:34 PM	Tube furnace set to 150
10/21/2011	8:24:35 PM	Run finished at 8:24 PM
10/21/2011	8:32:53 PM	Recipe started at 8:32 PM
10/21/2011	8:32:53 PM	Helium valve closed
10/21/2011	8:32:53 PM	H2 valve closed
10/21/2011	8:32:53 PM	BCl3 valve closed
10/21/2011	8:32:53 PM	PH3 valve closed
10/21/2011	8:32:53 PM	SiCl4 pre valve closed
10/21/2011	8:32:53 PM	SiCl4 post valve closed
10/21/2011	8:32:53 PM	Bypass valve closed
10/21/2011	8:32:53 PM	Bubbler valve closed
10/21/2011	8:32:53 PM	Main Vac valve opened
10/21/2011	8:32:53 PM	Helium MFC set to  0.000000
10/21/2011	8:32:53 PM	H2 MFC set to  0.000000
10/21/2011	8:32:53 PM	BCl3 MFC set to  0.000000
10/21/2011	8:32:53 PM	PHl3 MFC set to  0.000000
10/21/2011	8:32:53 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:32:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:32:53 PM	Tube furnace set to 150
10/21/2011	8:33:23 PM	H2 valve closed
10/21/2011	8:33:23 PM	BCl3 valve closed
10/21/2011	8:33:23 PM	PH3 valve closed
10/21/2011	8:33:23 PM	SiCl4 pre valve closed
10/21/2011	8:33:23 PM	SiCl4 post valve closed
10/21/2011	8:33:23 PM	Bypass valve closed
10/21/2011	8:33:23 PM	Bubbler valve closed
10/21/2011	8:33:23 PM	Helium valve opened
10/21/2011	8:33:23 PM	Main Vac valve opened
10/21/2011	8:33:23 PM	Helium MFC set to  20.000000
10/21/2011	8:33:23 PM	H2 MFC set to  0.000000
10/21/2011	8:33:23 PM	BCl3 MFC set to  0.000000
10/21/2011	8:33:23 PM	PHl3 MFC set to  0.000000
10/21/2011	8:33:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:33:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:33:23 PM	Tube furnace set to 150
10/21/2011	8:33:53 PM	Helium valve closed
10/21/2011	8:33:53 PM	H2 valve closed
10/21/2011	8:33:53 PM	BCl3 valve closed
10/21/2011	8:33:53 PM	PH3 valve closed
10/21/2011	8:33:53 PM	SiCl4 pre valve closed
10/21/2011	8:33:53 PM	SiCl4 post valve closed
10/21/2011	8:33:53 PM	Bypass valve closed
10/21/2011	8:33:54 PM	Bubbler valve closed
10/21/2011	8:33:54 PM	Main Vac valve opened
10/21/2011	8:33:54 PM	Helium MFC set to  0.000000
10/21/2011	8:33:54 PM	H2 MFC set to  0.000000
10/21/2011	8:33:54 PM	BCl3 MFC set to  0.000000
10/21/2011	8:33:54 PM	PHl3 MFC set to  0.000000
10/21/2011	8:33:54 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:33:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:33:54 PM	Tube furnace set to 150
10/21/2011	8:34:24 PM	H2 valve closed
10/21/2011	8:34:24 PM	BCl3 valve closed
10/21/2011	8:34:24 PM	PH3 valve closed
10/21/2011	8:34:24 PM	SiCl4 pre valve closed
10/21/2011	8:34:24 PM	SiCl4 post valve closed
10/21/2011	8:34:24 PM	Bypass valve closed
10/21/2011	8:34:24 PM	Bubbler valve closed
10/21/2011	8:34:24 PM	Helium valve opened
10/21/2011	8:34:24 PM	Main Vac valve opened
10/21/2011	8:34:24 PM	Helium MFC set to  20.000000
10/21/2011	8:34:24 PM	H2 MFC set to  0.000000
10/21/2011	8:34:24 PM	BCl3 MFC set to  0.000000
10/21/2011	8:34:24 PM	PHl3 MFC set to  0.000000
10/21/2011	8:34:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:34:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:34:24 PM	Tube furnace set to 150
10/21/2011	8:34:54 PM	Helium valve closed
10/21/2011	8:34:54 PM	H2 valve closed
10/21/2011	8:34:54 PM	BCl3 valve closed
10/21/2011	8:34:54 PM	PH3 valve closed
10/21/2011	8:34:54 PM	SiCl4 pre valve closed
10/21/2011	8:34:54 PM	SiCl4 post valve closed
10/21/2011	8:34:54 PM	Bypass valve closed
10/21/2011	8:34:54 PM	Bubbler valve closed
10/21/2011	8:34:54 PM	Main Vac valve opened
10/21/2011	8:34:54 PM	Helium MFC set to  0.000000
10/21/2011	8:34:54 PM	H2 MFC set to  0.000000
10/21/2011	8:34:54 PM	BCl3 MFC set to  0.000000
10/21/2011	8:34:54 PM	PHl3 MFC set to  0.000000
10/21/2011	8:34:54 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:34:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:34:54 PM	Tube furnace set to 150
10/21/2011	8:35:24 PM	H2 valve closed
10/21/2011	8:35:24 PM	BCl3 valve closed
10/21/2011	8:35:24 PM	PH3 valve closed
10/21/2011	8:35:24 PM	SiCl4 pre valve closed
10/21/2011	8:35:24 PM	SiCl4 post valve closed
10/21/2011	8:35:24 PM	Bypass valve closed
10/21/2011	8:35:24 PM	Bubbler valve closed
10/21/2011	8:35:24 PM	Helium valve opened
10/21/2011	8:35:24 PM	Main Vac valve opened
10/21/2011	8:35:24 PM	Helium MFC set to  20.000000
10/21/2011	8:35:24 PM	H2 MFC set to  0.000000
10/21/2011	8:35:24 PM	BCl3 MFC set to  0.000000
10/21/2011	8:35:24 PM	PHl3 MFC set to  0.000000
10/21/2011	8:35:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:35:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:35:24 PM	Tube furnace set to 150
10/21/2011	8:35:54 PM	Helium valve closed
10/21/2011	8:35:54 PM	H2 valve closed
10/21/2011	8:35:54 PM	BCl3 valve closed
10/21/2011	8:35:54 PM	PH3 valve closed
10/21/2011	8:35:54 PM	SiCl4 pre valve closed
10/21/2011	8:35:54 PM	SiCl4 post valve closed
10/21/2011	8:35:54 PM	Bypass valve closed
10/21/2011	8:35:54 PM	Bubbler valve closed
10/21/2011	8:35:54 PM	Main Vac valve opened
10/21/2011	8:35:54 PM	Helium MFC set to  0.000000
10/21/2011	8:35:54 PM	H2 MFC set to  0.000000
10/21/2011	8:35:54 PM	BCl3 MFC set to  0.000000
10/21/2011	8:35:54 PM	PHl3 MFC set to  0.000000
10/21/2011	8:35:54 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:35:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:35:54 PM	Tube furnace set to 150
10/21/2011	8:36:24 PM	H2 valve closed
10/21/2011	8:36:24 PM	BCl3 valve closed
10/21/2011	8:36:24 PM	PH3 valve closed
10/21/2011	8:36:24 PM	SiCl4 pre valve closed
10/21/2011	8:36:24 PM	SiCl4 post valve closed
10/21/2011	8:36:24 PM	Bypass valve closed
10/21/2011	8:36:24 PM	Bubbler valve closed
10/21/2011	8:36:24 PM	Helium valve opened
10/21/2011	8:36:24 PM	Main Vac valve opened
10/21/2011	8:36:24 PM	Helium MFC set to  20.000000
10/21/2011	8:36:24 PM	H2 MFC set to  0.000000
10/21/2011	8:36:24 PM	BCl3 MFC set to  0.000000
10/21/2011	8:36:24 PM	PHl3 MFC set to  0.000000
10/21/2011	8:36:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:36:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:36:25 PM	Tube furnace set to 150
10/21/2011	8:36:55 PM	Helium valve closed
10/21/2011	8:36:55 PM	H2 valve closed
10/21/2011	8:36:55 PM	BCl3 valve closed
10/21/2011	8:36:55 PM	PH3 valve closed
10/21/2011	8:36:55 PM	SiCl4 pre valve closed
10/21/2011	8:36:55 PM	SiCl4 post valve closed
10/21/2011	8:36:55 PM	Bypass valve closed
10/21/2011	8:36:55 PM	Bubbler valve closed
10/21/2011	8:36:55 PM	Main Vac valve opened
10/21/2011	8:36:55 PM	Helium MFC set to  0.000000
10/21/2011	8:36:55 PM	H2 MFC set to  0.000000
10/21/2011	8:36:55 PM	BCl3 MFC set to  0.000000
10/21/2011	8:36:55 PM	PHl3 MFC set to  0.000000
10/21/2011	8:36:55 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:36:55 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:36:55 PM	Tube furnace set to 150
10/21/2011	8:37:25 PM	H2 valve closed
10/21/2011	8:37:25 PM	BCl3 valve closed
10/21/2011	8:37:25 PM	PH3 valve closed
10/21/2011	8:37:25 PM	SiCl4 pre valve closed
10/21/2011	8:37:25 PM	SiCl4 post valve closed
10/21/2011	8:37:25 PM	Bypass valve closed
10/21/2011	8:37:25 PM	Bubbler valve closed
10/21/2011	8:37:25 PM	Helium valve opened
10/21/2011	8:37:25 PM	Main Vac valve opened
10/21/2011	8:37:25 PM	Helium MFC set to  20.000000
10/21/2011	8:37:25 PM	H2 MFC set to  0.000000
10/21/2011	8:37:25 PM	BCl3 MFC set to  0.000000
10/21/2011	8:37:25 PM	PHl3 MFC set to  0.000000
10/21/2011	8:37:25 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:37:25 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:37:25 PM	Tube furnace set to 150
10/21/2011	8:37:55 PM	Helium valve closed
10/21/2011	8:37:55 PM	H2 valve closed
10/21/2011	8:37:55 PM	BCl3 valve closed
10/21/2011	8:37:55 PM	PH3 valve closed
10/21/2011	8:37:55 PM	SiCl4 pre valve closed
10/21/2011	8:37:55 PM	SiCl4 post valve closed
10/21/2011	8:37:55 PM	Bypass valve closed
10/21/2011	8:37:55 PM	Bubbler valve closed
10/21/2011	8:37:55 PM	Main Vac valve opened
10/21/2011	8:37:55 PM	Helium MFC set to  0.000000
10/21/2011	8:37:55 PM	H2 MFC set to  0.000000
10/21/2011	8:37:55 PM	BCl3 MFC set to  0.000000
10/21/2011	8:37:55 PM	PHl3 MFC set to  0.000000
10/21/2011	8:37:55 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:37:55 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:37:55 PM	Tube furnace set to 150
10/21/2011	8:38:25 PM	H2 valve closed
10/21/2011	8:38:25 PM	BCl3 valve closed
10/21/2011	8:38:25 PM	PH3 valve closed
10/21/2011	8:38:25 PM	SiCl4 pre valve closed
10/21/2011	8:38:25 PM	SiCl4 post valve closed
10/21/2011	8:38:25 PM	Bypass valve closed
10/21/2011	8:38:25 PM	Bubbler valve closed
10/21/2011	8:38:25 PM	Helium valve opened
10/21/2011	8:38:25 PM	Main Vac valve opened
10/21/2011	8:38:25 PM	Helium MFC set to  20.000000
10/21/2011	8:38:25 PM	H2 MFC set to  0.000000
10/21/2011	8:38:25 PM	BCl3 MFC set to  0.000000
10/21/2011	8:38:25 PM	PHl3 MFC set to  0.000000
10/21/2011	8:38:25 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:38:25 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:38:25 PM	Tube furnace set to 150
10/21/2011	8:38:55 PM	Helium valve closed
10/21/2011	8:38:56 PM	H2 valve closed
10/21/2011	8:38:56 PM	BCl3 valve closed
10/21/2011	8:38:56 PM	PH3 valve closed
10/21/2011	8:38:56 PM	SiCl4 pre valve closed
10/21/2011	8:38:56 PM	SiCl4 post valve closed
10/21/2011	8:38:56 PM	Bypass valve closed
10/21/2011	8:38:56 PM	Bubbler valve closed
10/21/2011	8:38:56 PM	Main Vac valve opened
10/21/2011	8:38:56 PM	Helium MFC set to  0.000000
10/21/2011	8:38:56 PM	H2 MFC set to  0.000000
10/21/2011	8:38:56 PM	BCl3 MFC set to  0.000000
10/21/2011	8:38:56 PM	PHl3 MFC set to  0.000000
10/21/2011	8:38:56 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:38:56 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:38:56 PM	Tube furnace set to 150
10/21/2011	8:39:26 PM	H2 valve closed
10/21/2011	8:39:26 PM	BCl3 valve closed
10/21/2011	8:39:26 PM	PH3 valve closed
10/21/2011	8:39:26 PM	SiCl4 pre valve closed
10/21/2011	8:39:26 PM	SiCl4 post valve closed
10/21/2011	8:39:26 PM	Bypass valve closed
10/21/2011	8:39:26 PM	Bubbler valve closed
10/21/2011	8:39:26 PM	Helium valve opened
10/21/2011	8:39:26 PM	Main Vac valve opened
10/21/2011	8:39:26 PM	Helium MFC set to  20.000000
10/21/2011	8:39:26 PM	H2 MFC set to  0.000000
10/21/2011	8:39:26 PM	BCl3 MFC set to  0.000000
10/21/2011	8:39:26 PM	PHl3 MFC set to  0.000000
10/21/2011	8:39:26 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:39:26 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:39:26 PM	Tube furnace set to 150
10/21/2011	8:39:56 PM	Helium valve closed
10/21/2011	8:39:56 PM	H2 valve closed
10/21/2011	8:39:56 PM	BCl3 valve closed
10/21/2011	8:39:56 PM	PH3 valve closed
10/21/2011	8:39:56 PM	SiCl4 pre valve closed
10/21/2011	8:39:56 PM	SiCl4 post valve closed
10/21/2011	8:39:56 PM	Bypass valve closed
10/21/2011	8:39:56 PM	Bubbler valve closed
10/21/2011	8:39:56 PM	Main Vac valve opened
10/21/2011	8:39:56 PM	Helium MFC set to  0.000000
10/21/2011	8:39:56 PM	H2 MFC set to  0.000000
10/21/2011	8:39:56 PM	BCl3 MFC set to  0.000000
10/21/2011	8:39:56 PM	PHl3 MFC set to  0.000000
10/21/2011	8:39:56 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:39:56 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:39:56 PM	Tube furnace set to 150
10/21/2011	8:40:26 PM	H2 valve closed
10/21/2011	8:40:26 PM	BCl3 valve closed
10/21/2011	8:40:26 PM	PH3 valve closed
10/21/2011	8:40:26 PM	SiCl4 pre valve closed
10/21/2011	8:40:26 PM	SiCl4 post valve closed
10/21/2011	8:40:26 PM	Bypass valve closed
10/21/2011	8:40:26 PM	Bubbler valve closed
10/21/2011	8:40:26 PM	Helium valve opened
10/21/2011	8:40:26 PM	Main Vac valve opened
10/21/2011	8:40:26 PM	Helium MFC set to  20.000000
10/21/2011	8:40:26 PM	H2 MFC set to  0.000000
10/21/2011	8:40:26 PM	BCl3 MFC set to  0.000000
10/21/2011	8:40:26 PM	PHl3 MFC set to  0.000000
10/21/2011	8:40:26 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:40:26 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:40:26 PM	Tube furnace set to 150
10/21/2011	8:40:56 PM	Helium valve closed
10/21/2011	8:40:56 PM	H2 valve closed
10/21/2011	8:40:56 PM	BCl3 valve closed
10/21/2011	8:40:56 PM	PH3 valve closed
10/21/2011	8:40:56 PM	SiCl4 pre valve closed
10/21/2011	8:40:56 PM	SiCl4 post valve closed
10/21/2011	8:40:56 PM	Bypass valve closed
10/21/2011	8:40:56 PM	Bubbler valve closed
10/21/2011	8:40:56 PM	Main Vac valve opened
10/21/2011	8:40:56 PM	Helium MFC set to  0.000000
10/21/2011	8:40:56 PM	H2 MFC set to  0.000000
10/21/2011	8:40:56 PM	BCl3 MFC set to  0.000000
10/21/2011	8:40:56 PM	PHl3 MFC set to  0.000000
10/21/2011	8:40:56 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:40:56 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:40:57 PM	Tube furnace set to 150
10/21/2011	8:41:27 PM	H2 valve closed
10/21/2011	8:41:27 PM	BCl3 valve closed
10/21/2011	8:41:27 PM	PH3 valve closed
10/21/2011	8:41:27 PM	SiCl4 pre valve closed
10/21/2011	8:41:27 PM	SiCl4 post valve closed
10/21/2011	8:41:27 PM	Bypass valve closed
10/21/2011	8:41:27 PM	Bubbler valve closed
10/21/2011	8:41:27 PM	Helium valve opened
10/21/2011	8:41:27 PM	Main Vac valve opened
10/21/2011	8:41:27 PM	Helium MFC set to  20.000000
10/21/2011	8:41:27 PM	H2 MFC set to  0.000000
10/21/2011	8:41:27 PM	BCl3 MFC set to  0.000000
10/21/2011	8:41:27 PM	PHl3 MFC set to  0.000000
10/21/2011	8:41:27 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:41:27 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:41:27 PM	Tube furnace set to 150
10/21/2011	8:41:57 PM	Helium valve closed
10/21/2011	8:41:57 PM	H2 valve closed
10/21/2011	8:41:57 PM	BCl3 valve closed
10/21/2011	8:41:57 PM	PH3 valve closed
10/21/2011	8:41:57 PM	SiCl4 pre valve closed
10/21/2011	8:41:57 PM	SiCl4 post valve closed
10/21/2011	8:41:57 PM	Bypass valve closed
10/21/2011	8:41:57 PM	Bubbler valve closed
10/21/2011	8:41:57 PM	Main Vac valve opened
10/21/2011	8:41:57 PM	Helium MFC set to  0.000000
10/21/2011	8:41:57 PM	H2 MFC set to  0.000000
10/21/2011	8:41:57 PM	BCl3 MFC set to  0.000000
10/21/2011	8:41:57 PM	PHl3 MFC set to  0.000000
10/21/2011	8:41:57 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:41:57 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:41:57 PM	Tube furnace set to 150
10/21/2011	8:42:27 PM	H2 valve closed
10/21/2011	8:42:27 PM	BCl3 valve closed
10/21/2011	8:42:27 PM	PH3 valve closed
10/21/2011	8:42:27 PM	SiCl4 pre valve closed
10/21/2011	8:42:27 PM	SiCl4 post valve closed
10/21/2011	8:42:27 PM	Bypass valve closed
10/21/2011	8:42:27 PM	Bubbler valve closed
10/21/2011	8:42:27 PM	Helium valve opened
10/21/2011	8:42:27 PM	Main Vac valve opened
10/21/2011	8:42:27 PM	Helium MFC set to  20.000000
10/21/2011	8:42:27 PM	H2 MFC set to  0.000000
10/21/2011	8:42:27 PM	BCl3 MFC set to  0.000000
10/21/2011	8:42:27 PM	PHl3 MFC set to  0.000000
10/21/2011	8:42:27 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:42:27 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:42:27 PM	Tube furnace set to 150
10/21/2011	8:42:57 PM	Helium valve closed
10/21/2011	8:42:57 PM	H2 valve closed
10/21/2011	8:42:57 PM	BCl3 valve closed
10/21/2011	8:42:57 PM	PH3 valve closed
10/21/2011	8:42:57 PM	SiCl4 pre valve closed
10/21/2011	8:42:57 PM	SiCl4 post valve closed
10/21/2011	8:42:57 PM	Bypass valve closed
10/21/2011	8:42:57 PM	Bubbler valve closed
10/21/2011	8:42:57 PM	Main Vac valve opened
10/21/2011	8:42:57 PM	Helium MFC set to  0.000000
10/21/2011	8:42:57 PM	H2 MFC set to  0.000000
10/21/2011	8:42:57 PM	BCl3 MFC set to  0.000000
10/21/2011	8:42:57 PM	PHl3 MFC set to  0.000000
10/21/2011	8:42:57 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:42:57 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:42:57 PM	Tube furnace set to 150
10/21/2011	8:42:58 PM	Run finished at 8:42 PM
10/21/2011	8:51:30 PM	Recipe started at 8:51 PM
10/21/2011	8:51:30 PM	Helium valve closed
10/21/2011	8:51:30 PM	H2 valve closed
10/21/2011	8:51:30 PM	BCl3 valve closed
10/21/2011	8:51:30 PM	PH3 valve closed
10/21/2011	8:51:30 PM	SiCl4 pre valve closed
10/21/2011	8:51:30 PM	SiCl4 post valve closed
10/21/2011	8:51:30 PM	Bypass valve closed
10/21/2011	8:51:30 PM	Bubbler valve closed
10/21/2011	8:51:30 PM	Main Vac valve opened
10/21/2011	8:51:30 PM	Helium MFC set to  0.000000
10/21/2011	8:51:30 PM	H2 MFC set to  0.000000
10/21/2011	8:51:30 PM	BCl3 MFC set to  0.000000
10/21/2011	8:51:30 PM	PHl3 MFC set to  0.000000
10/21/2011	8:51:30 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:51:30 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:51:31 PM	Tube furnace set to 150
10/21/2011	8:51:38 PM	H2 valve closed
10/21/2011	8:51:38 PM	BCl3 valve closed
10/21/2011	8:51:38 PM	PH3 valve closed
10/21/2011	8:51:38 PM	SiCl4 pre valve closed
10/21/2011	8:51:38 PM	SiCl4 post valve closed
10/21/2011	8:51:38 PM	Bypass valve closed
10/21/2011	8:51:38 PM	Bubbler valve closed
10/21/2011	8:51:38 PM	Helium valve opened
10/21/2011	8:51:38 PM	Main Vac valve opened
10/21/2011	8:51:38 PM	Helium MFC set to  20.000000
10/21/2011	8:51:38 PM	H2 MFC set to  0.000000
10/21/2011	8:51:38 PM	BCl3 MFC set to  0.000000
10/21/2011	8:51:38 PM	PHl3 MFC set to  0.000000
10/21/2011	8:51:38 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:51:38 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:51:38 PM	Tube furnace set to 150
10/21/2011	8:52:08 PM	Helium valve closed
10/21/2011	8:52:08 PM	H2 valve closed
10/21/2011	8:52:08 PM	BCl3 valve closed
10/21/2011	8:52:08 PM	PH3 valve closed
10/21/2011	8:52:08 PM	SiCl4 pre valve closed
10/21/2011	8:52:08 PM	SiCl4 post valve closed
10/21/2011	8:52:08 PM	Bypass valve closed
10/21/2011	8:52:08 PM	Bubbler valve closed
10/21/2011	8:52:08 PM	Main Vac valve opened
10/21/2011	8:52:08 PM	Helium MFC set to  0.000000
10/21/2011	8:52:08 PM	H2 MFC set to  0.000000
10/21/2011	8:52:08 PM	BCl3 MFC set to  0.000000
10/21/2011	8:52:08 PM	PHl3 MFC set to  0.000000
10/21/2011	8:52:08 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:52:08 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:52:08 PM	Tube furnace set to 150
10/21/2011	8:52:38 PM	H2 valve closed
10/21/2011	8:52:38 PM	BCl3 valve closed
10/21/2011	8:52:38 PM	PH3 valve closed
10/21/2011	8:52:38 PM	SiCl4 pre valve closed
10/21/2011	8:52:38 PM	SiCl4 post valve closed
10/21/2011	8:52:38 PM	Bypass valve closed
10/21/2011	8:52:38 PM	Bubbler valve closed
10/21/2011	8:52:38 PM	Helium valve opened
10/21/2011	8:52:38 PM	Main Vac valve opened
10/21/2011	8:52:38 PM	Helium MFC set to  20.000000
10/21/2011	8:52:38 PM	H2 MFC set to  0.000000
10/21/2011	8:52:38 PM	BCl3 MFC set to  0.000000
10/21/2011	8:52:38 PM	PHl3 MFC set to  0.000000
10/21/2011	8:52:38 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:52:38 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:52:38 PM	Tube furnace set to 150
10/21/2011	8:53:08 PM	Helium valve closed
10/21/2011	8:53:08 PM	H2 valve closed
10/21/2011	8:53:08 PM	BCl3 valve closed
10/21/2011	8:53:08 PM	PH3 valve closed
10/21/2011	8:53:08 PM	SiCl4 pre valve closed
10/21/2011	8:53:08 PM	SiCl4 post valve closed
10/21/2011	8:53:08 PM	Bypass valve closed
10/21/2011	8:53:08 PM	Bubbler valve closed
10/21/2011	8:53:08 PM	Main Vac valve opened
10/21/2011	8:53:08 PM	Helium MFC set to  0.000000
10/21/2011	8:53:08 PM	H2 MFC set to  0.000000
10/21/2011	8:53:08 PM	BCl3 MFC set to  0.000000
10/21/2011	8:53:08 PM	PHl3 MFC set to  0.000000
10/21/2011	8:53:08 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:53:08 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:53:08 PM	Tube furnace set to 150
10/21/2011	8:53:38 PM	H2 valve closed
10/21/2011	8:53:38 PM	BCl3 valve closed
10/21/2011	8:53:38 PM	PH3 valve closed
10/21/2011	8:53:38 PM	SiCl4 pre valve closed
10/21/2011	8:53:38 PM	SiCl4 post valve closed
10/21/2011	8:53:38 PM	Bypass valve closed
10/21/2011	8:53:38 PM	Bubbler valve closed
10/21/2011	8:53:38 PM	Helium valve opened
10/21/2011	8:53:38 PM	Main Vac valve opened
10/21/2011	8:53:38 PM	Helium MFC set to  20.000000
10/21/2011	8:53:38 PM	H2 MFC set to  0.000000
10/21/2011	8:53:38 PM	BCl3 MFC set to  0.000000
10/21/2011	8:53:38 PM	PHl3 MFC set to  0.000000
10/21/2011	8:53:38 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:53:38 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:53:39 PM	Tube furnace set to 150
10/21/2011	8:54:09 PM	Helium valve closed
10/21/2011	8:54:09 PM	H2 valve closed
10/21/2011	8:54:09 PM	BCl3 valve closed
10/21/2011	8:54:09 PM	PH3 valve closed
10/21/2011	8:54:09 PM	SiCl4 pre valve closed
10/21/2011	8:54:09 PM	SiCl4 post valve closed
10/21/2011	8:54:09 PM	Bypass valve closed
10/21/2011	8:54:09 PM	Bubbler valve closed
10/21/2011	8:54:09 PM	Main Vac valve opened
10/21/2011	8:54:09 PM	Helium MFC set to  0.000000
10/21/2011	8:54:09 PM	H2 MFC set to  0.000000
10/21/2011	8:54:09 PM	BCl3 MFC set to  0.000000
10/21/2011	8:54:09 PM	PHl3 MFC set to  0.000000
10/21/2011	8:54:09 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:54:09 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:54:09 PM	Tube furnace set to 150
10/21/2011	8:54:39 PM	H2 valve closed
10/21/2011	8:54:39 PM	BCl3 valve closed
10/21/2011	8:54:39 PM	PH3 valve closed
10/21/2011	8:54:39 PM	SiCl4 pre valve closed
10/21/2011	8:54:39 PM	SiCl4 post valve closed
10/21/2011	8:54:39 PM	Bypass valve closed
10/21/2011	8:54:39 PM	Bubbler valve closed
10/21/2011	8:54:39 PM	Helium valve opened
10/21/2011	8:54:39 PM	Main Vac valve opened
10/21/2011	8:54:39 PM	Helium MFC set to  20.000000
10/21/2011	8:54:39 PM	H2 MFC set to  0.000000
10/21/2011	8:54:39 PM	BCl3 MFC set to  0.000000
10/21/2011	8:54:39 PM	PHl3 MFC set to  0.000000
10/21/2011	8:54:39 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:54:39 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:54:39 PM	Tube furnace set to 150
10/21/2011	8:55:09 PM	Helium valve closed
10/21/2011	8:55:09 PM	H2 valve closed
10/21/2011	8:55:09 PM	BCl3 valve closed
10/21/2011	8:55:09 PM	PH3 valve closed
10/21/2011	8:55:09 PM	SiCl4 pre valve closed
10/21/2011	8:55:09 PM	SiCl4 post valve closed
10/21/2011	8:55:09 PM	Bypass valve closed
10/21/2011	8:55:09 PM	Bubbler valve closed
10/21/2011	8:55:09 PM	Main Vac valve opened
10/21/2011	8:55:09 PM	Helium MFC set to  0.000000
10/21/2011	8:55:09 PM	H2 MFC set to  0.000000
10/21/2011	8:55:09 PM	BCl3 MFC set to  0.000000
10/21/2011	8:55:09 PM	PHl3 MFC set to  0.000000
10/21/2011	8:55:09 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:55:09 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:55:09 PM	Tube furnace set to 150
10/21/2011	8:55:39 PM	H2 valve closed
10/21/2011	8:55:39 PM	BCl3 valve closed
10/21/2011	8:55:39 PM	PH3 valve closed
10/21/2011	8:55:39 PM	SiCl4 pre valve closed
10/21/2011	8:55:39 PM	SiCl4 post valve closed
10/21/2011	8:55:39 PM	Bypass valve closed
10/21/2011	8:55:39 PM	Bubbler valve closed
10/21/2011	8:55:39 PM	Helium valve opened
10/21/2011	8:55:39 PM	Main Vac valve opened
10/21/2011	8:55:39 PM	Helium MFC set to  20.000000
10/21/2011	8:55:39 PM	H2 MFC set to  0.000000
10/21/2011	8:55:39 PM	BCl3 MFC set to  0.000000
10/21/2011	8:55:39 PM	PHl3 MFC set to  0.000000
10/21/2011	8:55:39 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:55:39 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:55:39 PM	Tube furnace set to 150
10/21/2011	8:56:09 PM	Helium valve closed
10/21/2011	8:56:09 PM	H2 valve closed
10/21/2011	8:56:09 PM	BCl3 valve closed
10/21/2011	8:56:09 PM	PH3 valve closed
10/21/2011	8:56:09 PM	SiCl4 pre valve closed
10/21/2011	8:56:09 PM	SiCl4 post valve closed
10/21/2011	8:56:09 PM	Bypass valve closed
10/21/2011	8:56:09 PM	Bubbler valve closed
10/21/2011	8:56:09 PM	Main Vac valve opened
10/21/2011	8:56:09 PM	Helium MFC set to  0.000000
10/21/2011	8:56:09 PM	H2 MFC set to  0.000000
10/21/2011	8:56:09 PM	BCl3 MFC set to  0.000000
10/21/2011	8:56:09 PM	PHl3 MFC set to  0.000000
10/21/2011	8:56:09 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:56:09 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:56:10 PM	Tube furnace set to 150
10/21/2011	8:56:40 PM	H2 valve closed
10/21/2011	8:56:40 PM	BCl3 valve closed
10/21/2011	8:56:40 PM	PH3 valve closed
10/21/2011	8:56:40 PM	SiCl4 pre valve closed
10/21/2011	8:56:40 PM	SiCl4 post valve closed
10/21/2011	8:56:40 PM	Bypass valve closed
10/21/2011	8:56:40 PM	Bubbler valve closed
10/21/2011	8:56:40 PM	Helium valve opened
10/21/2011	8:56:40 PM	Main Vac valve opened
10/21/2011	8:56:40 PM	Helium MFC set to  20.000000
10/21/2011	8:56:40 PM	H2 MFC set to  0.000000
10/21/2011	8:56:40 PM	BCl3 MFC set to  0.000000
10/21/2011	8:56:40 PM	PHl3 MFC set to  0.000000
10/21/2011	8:56:40 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:56:40 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:56:40 PM	Tube furnace set to 150
10/21/2011	8:57:10 PM	Helium valve closed
10/21/2011	8:57:10 PM	H2 valve closed
10/21/2011	8:57:10 PM	BCl3 valve closed
10/21/2011	8:57:10 PM	PH3 valve closed
10/21/2011	8:57:10 PM	SiCl4 pre valve closed
10/21/2011	8:57:10 PM	SiCl4 post valve closed
10/21/2011	8:57:10 PM	Bypass valve closed
10/21/2011	8:57:10 PM	Bubbler valve closed
10/21/2011	8:57:10 PM	Main Vac valve opened
10/21/2011	8:57:10 PM	Helium MFC set to  0.000000
10/21/2011	8:57:10 PM	H2 MFC set to  0.000000
10/21/2011	8:57:10 PM	BCl3 MFC set to  0.000000
10/21/2011	8:57:10 PM	PHl3 MFC set to  0.000000
10/21/2011	8:57:10 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:57:10 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:57:10 PM	Tube furnace set to 150
10/21/2011	8:57:40 PM	H2 valve closed
10/21/2011	8:57:40 PM	BCl3 valve closed
10/21/2011	8:57:40 PM	PH3 valve closed
10/21/2011	8:57:40 PM	SiCl4 pre valve closed
10/21/2011	8:57:40 PM	SiCl4 post valve closed
10/21/2011	8:57:40 PM	Bypass valve closed
10/21/2011	8:57:40 PM	Bubbler valve closed
10/21/2011	8:57:40 PM	Helium valve opened
10/21/2011	8:57:40 PM	Main Vac valve opened
10/21/2011	8:57:40 PM	Helium MFC set to  20.000000
10/21/2011	8:57:40 PM	H2 MFC set to  0.000000
10/21/2011	8:57:40 PM	BCl3 MFC set to  0.000000
10/21/2011	8:57:40 PM	PHl3 MFC set to  0.000000
10/21/2011	8:57:40 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:57:40 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:57:40 PM	Tube furnace set to 150
10/21/2011	8:58:10 PM	Helium valve closed
10/21/2011	8:58:10 PM	H2 valve closed
10/21/2011	8:58:10 PM	BCl3 valve closed
10/21/2011	8:58:10 PM	PH3 valve closed
10/21/2011	8:58:10 PM	SiCl4 pre valve closed
10/21/2011	8:58:10 PM	SiCl4 post valve closed
10/21/2011	8:58:10 PM	Bypass valve closed
10/21/2011	8:58:10 PM	Bubbler valve closed
10/21/2011	8:58:10 PM	Main Vac valve opened
10/21/2011	8:58:10 PM	Helium MFC set to  0.000000
10/21/2011	8:58:10 PM	H2 MFC set to  0.000000
10/21/2011	8:58:10 PM	BCl3 MFC set to  0.000000
10/21/2011	8:58:10 PM	PHl3 MFC set to  0.000000
10/21/2011	8:58:10 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:58:10 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:58:10 PM	Tube furnace set to 150
10/21/2011	8:58:40 PM	H2 valve closed
10/21/2011	8:58:40 PM	BCl3 valve closed
10/21/2011	8:58:40 PM	PH3 valve closed
10/21/2011	8:58:40 PM	SiCl4 pre valve closed
10/21/2011	8:58:40 PM	SiCl4 post valve closed
10/21/2011	8:58:40 PM	Bypass valve closed
10/21/2011	8:58:40 PM	Bubbler valve closed
10/21/2011	8:58:40 PM	Helium valve opened
10/21/2011	8:58:40 PM	Main Vac valve opened
10/21/2011	8:58:40 PM	Helium MFC set to  20.000000
10/21/2011	8:58:40 PM	H2 MFC set to  0.000000
10/21/2011	8:58:40 PM	BCl3 MFC set to  0.000000
10/21/2011	8:58:40 PM	PHl3 MFC set to  0.000000
10/21/2011	8:58:40 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:58:40 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:58:41 PM	Tube furnace set to 150
10/21/2011	8:59:11 PM	Helium valve closed
10/21/2011	8:59:11 PM	H2 valve closed
10/21/2011	8:59:11 PM	BCl3 valve closed
10/21/2011	8:59:11 PM	PH3 valve closed
10/21/2011	8:59:11 PM	SiCl4 pre valve closed
10/21/2011	8:59:11 PM	SiCl4 post valve closed
10/21/2011	8:59:11 PM	Bypass valve closed
10/21/2011	8:59:11 PM	Bubbler valve closed
10/21/2011	8:59:11 PM	Main Vac valve opened
10/21/2011	8:59:11 PM	Helium MFC set to  0.000000
10/21/2011	8:59:11 PM	H2 MFC set to  0.000000
10/21/2011	8:59:11 PM	BCl3 MFC set to  0.000000
10/21/2011	8:59:11 PM	PHl3 MFC set to  0.000000
10/21/2011	8:59:11 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:59:11 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:59:11 PM	Tube furnace set to 150
10/21/2011	8:59:41 PM	H2 valve closed
10/21/2011	8:59:41 PM	BCl3 valve closed
10/21/2011	8:59:41 PM	PH3 valve closed
10/21/2011	8:59:41 PM	SiCl4 pre valve closed
10/21/2011	8:59:41 PM	SiCl4 post valve closed
10/21/2011	8:59:41 PM	Bypass valve closed
10/21/2011	8:59:41 PM	Bubbler valve closed
10/21/2011	8:59:41 PM	Helium valve opened
10/21/2011	8:59:41 PM	Main Vac valve opened
10/21/2011	8:59:41 PM	Helium MFC set to  20.000000
10/21/2011	8:59:41 PM	H2 MFC set to  0.000000
10/21/2011	8:59:41 PM	BCl3 MFC set to  0.000000
10/21/2011	8:59:41 PM	PHl3 MFC set to  0.000000
10/21/2011	8:59:41 PM	SiCl4 MFC set to  0.000000
10/21/2011	8:59:41 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	8:59:41 PM	Tube furnace set to 150
10/21/2011	9:00:11 PM	Helium valve closed
10/21/2011	9:00:11 PM	H2 valve closed
10/21/2011	9:00:11 PM	BCl3 valve closed
10/21/2011	9:00:11 PM	PH3 valve closed
10/21/2011	9:00:11 PM	SiCl4 pre valve closed
10/21/2011	9:00:11 PM	SiCl4 post valve closed
10/21/2011	9:00:11 PM	Bypass valve closed
10/21/2011	9:00:11 PM	Bubbler valve closed
10/21/2011	9:00:11 PM	Main Vac valve opened
10/21/2011	9:00:11 PM	Helium MFC set to  0.000000
10/21/2011	9:00:11 PM	H2 MFC set to  0.000000
10/21/2011	9:00:11 PM	BCl3 MFC set to  0.000000
10/21/2011	9:00:11 PM	PHl3 MFC set to  0.000000
10/21/2011	9:00:11 PM	SiCl4 MFC set to  0.000000
10/21/2011	9:00:11 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:00:11 PM	Tube furnace set to 150
10/21/2011	9:00:41 PM	H2 valve closed
10/21/2011	9:00:41 PM	BCl3 valve closed
10/21/2011	9:00:41 PM	PH3 valve closed
10/21/2011	9:00:41 PM	SiCl4 pre valve closed
10/21/2011	9:00:41 PM	SiCl4 post valve closed
10/21/2011	9:00:41 PM	Bypass valve closed
10/21/2011	9:00:41 PM	Bubbler valve closed
10/21/2011	9:00:41 PM	Helium valve opened
10/21/2011	9:00:41 PM	Main Vac valve opened
10/21/2011	9:00:41 PM	Helium MFC set to  20.000000
10/21/2011	9:00:41 PM	H2 MFC set to  0.000000
10/21/2011	9:00:41 PM	BCl3 MFC set to  0.000000
10/21/2011	9:00:41 PM	PHl3 MFC set to  0.000000
10/21/2011	9:00:41 PM	SiCl4 MFC set to  0.000000
10/21/2011	9:00:41 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:00:41 PM	Tube furnace set to 150
10/21/2011	9:01:11 PM	Helium valve closed
10/21/2011	9:01:11 PM	H2 valve closed
10/21/2011	9:01:11 PM	BCl3 valve closed
10/21/2011	9:01:11 PM	PH3 valve closed
10/21/2011	9:01:11 PM	SiCl4 pre valve closed
10/21/2011	9:01:11 PM	SiCl4 post valve closed
10/21/2011	9:01:11 PM	Bypass valve closed
10/21/2011	9:01:11 PM	Bubbler valve closed
10/21/2011	9:01:11 PM	Main Vac valve opened
10/21/2011	9:01:11 PM	Helium MFC set to  0.000000
10/21/2011	9:01:11 PM	H2 MFC set to  0.000000
10/21/2011	9:01:11 PM	BCl3 MFC set to  0.000000
10/21/2011	9:01:11 PM	PHl3 MFC set to  0.000000
10/21/2011	9:01:11 PM	SiCl4 MFC set to  0.000000
10/21/2011	9:01:11 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:01:12 PM	Tube furnace set to 150
10/21/2011	9:01:13 PM	Run finished at 9:01 PM
10/21/2011	9:06:07 PM	Recipe started at 9:06 PM
10/21/2011	9:06:07 PM	Helium valve closed
10/21/2011	9:06:07 PM	H2 valve closed
10/21/2011	9:06:07 PM	BCl3 valve closed
10/21/2011	9:06:07 PM	PH3 valve closed
10/21/2011	9:06:07 PM	SiCl4 pre valve closed
10/21/2011	9:06:07 PM	SiCl4 post valve closed
10/21/2011	9:06:07 PM	Main Vac valve closed
10/21/2011	9:06:07 PM	Bypass valve closed
10/21/2011	9:06:07 PM	Bubbler valve closed
10/21/2011	9:06:07 PM	Helium MFC set to  0.000000
10/21/2011	9:06:07 PM	H2 MFC set to  0.000000
10/21/2011	9:06:07 PM	BCl3 MFC set to  0.000000
10/21/2011	9:06:07 PM	PHl3 MFC set to  0.000000
10/21/2011	9:06:07 PM	SiCl4 MFC set to  0.000000
10/21/2011	9:06:07 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:06:07 PM	Tube furnace set to 0
10/21/2011	9:06:10 PM	Helium valve closed
10/21/2011	9:06:10 PM	BCl3 valve closed
10/21/2011	9:06:10 PM	PH3 valve closed
10/21/2011	9:06:10 PM	SiCl4 pre valve closed
10/21/2011	9:06:10 PM	SiCl4 post valve closed
10/21/2011	9:06:10 PM	Main Vac valve closed
10/21/2011	9:06:10 PM	Bypass valve closed
10/21/2011	9:06:10 PM	Bubbler valve closed
10/21/2011	9:06:10 PM	H2 valve opened
10/21/2011	9:06:10 PM	Helium MFC set to  0.000000
10/21/2011	9:06:10 PM	H2 MFC set to  500.000000
10/21/2011	9:06:10 PM	BCl3 MFC set to  0.000000
10/21/2011	9:06:10 PM	PHl3 MFC set to  0.000000
10/21/2011	9:06:10 PM	SiCl4 MFC set to  0.000000
10/21/2011	9:06:10 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:06:10 PM	Tube furnace set to 0
10/21/2011	9:07:14 PM	Helium valve closed
10/21/2011	9:07:14 PM	BCl3 valve closed
10/21/2011	9:07:14 PM	PH3 valve closed
10/21/2011	9:07:14 PM	SiCl4 pre valve closed
10/21/2011	9:07:14 PM	SiCl4 post valve closed
10/21/2011	9:07:14 PM	Main Vac valve closed
10/21/2011	9:07:14 PM	Bypass valve closed
10/21/2011	9:07:14 PM	H2 valve opened
10/21/2011	9:07:14 PM	Bubbler valve opened
10/21/2011	9:07:14 PM	Helium MFC set to  0.000000
10/21/2011	9:07:14 PM	H2 MFC set to  500.000000
10/21/2011	9:07:14 PM	BCl3 MFC set to  0.000000
10/21/2011	9:07:14 PM	PHl3 MFC set to  0.000000
10/21/2011	9:07:14 PM	SiCl4 MFC set to  0.000000
10/21/2011	9:07:14 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:07:14 PM	Tube furnace set to 0
10/21/2011	9:07:15 PM	Helium valve closed
10/21/2011	9:07:15 PM	BCl3 valve closed
10/21/2011	9:07:15 PM	PH3 valve closed
10/21/2011	9:07:15 PM	SiCl4 pre valve closed
10/21/2011	9:07:15 PM	SiCl4 post valve closed
10/21/2011	9:07:15 PM	Main Vac valve closed
10/21/2011	9:07:15 PM	Bypass valve closed
10/21/2011	9:07:15 PM	H2 valve opened
10/21/2011	9:07:15 PM	Bubbler valve opened
10/21/2011	9:07:15 PM	Helium MFC set to  0.000000
10/21/2011	9:07:15 PM	H2 MFC set to  500.000000
10/21/2011	9:07:15 PM	BCl3 MFC set to  0.000000
10/21/2011	9:07:15 PM	PHl3 MFC set to  0.000000
10/21/2011	9:07:15 PM	SiCl4 MFC set to  0.000000
10/21/2011	9:07:15 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:07:16 PM	Tube furnace set to 1040
10/21/2011	9:47:16 PM	Helium valve closed
10/21/2011	9:47:16 PM	BCl3 valve closed
10/21/2011	9:47:16 PM	PH3 valve closed
10/21/2011	9:47:16 PM	Main Vac valve closed
10/21/2011	9:47:16 PM	Bypass valve closed
10/21/2011	9:47:16 PM	H2 valve opened
10/21/2011	9:47:16 PM	SiCl4 pre valve opened
10/21/2011	9:47:16 PM	SiCl4 post valve opened
10/21/2011	9:47:16 PM	Bubbler valve opened
10/21/2011	9:47:16 PM	Helium MFC set to  0.000000
10/21/2011	9:47:16 PM	H2 MFC set to  500.000000
10/21/2011	9:47:16 PM	BCl3 MFC set to  0.000000
10/21/2011	9:47:16 PM	PHl3 MFC set to  0.000000
10/21/2011	9:47:16 PM	SiCl4 MFC set to  50.000000
10/21/2011	9:47:16 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:47:16 PM	Tube furnace set to 1040
10/21/2011	9:57:16 PM	Helium valve closed
10/21/2011	9:57:16 PM	BCl3 valve closed
10/21/2011	9:57:16 PM	PH3 valve closed
10/21/2011	9:57:16 PM	SiCl4 pre valve closed
10/21/2011	9:57:16 PM	SiCl4 post valve closed
10/21/2011	9:57:16 PM	Main Vac valve closed
10/21/2011	9:57:16 PM	Bypass valve closed
10/21/2011	9:57:16 PM	H2 valve opened
10/21/2011	9:57:16 PM	Bubbler valve opened
10/21/2011	9:57:16 PM	Helium MFC set to  0.000000
10/21/2011	9:57:16 PM	H2 MFC set to  500.000000
10/21/2011	9:57:16 PM	BCl3 MFC set to  0.000000
10/21/2011	9:57:16 PM	PHl3 MFC set to  0.000000
10/21/2011	9:57:16 PM	SiCl4 MFC set to  0.000000
10/21/2011	9:57:16 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	9:57:16 PM	Tube furnace set to 750
10/21/2011	10:07:16 PM	H2 valve closed
10/21/2011	10:07:16 PM	BCl3 valve closed
10/21/2011	10:07:16 PM	PH3 valve closed
10/21/2011	10:07:16 PM	SiCl4 pre valve closed
10/21/2011	10:07:16 PM	SiCl4 post valve closed
10/21/2011	10:07:16 PM	Main Vac valve closed
10/21/2011	10:07:16 PM	Bypass valve closed
10/21/2011	10:07:16 PM	Helium valve opened
10/21/2011	10:07:16 PM	Bubbler valve opened
10/21/2011	10:07:16 PM	Helium MFC set to  500.000000
10/21/2011	10:07:16 PM	H2 MFC set to  0.000000
10/21/2011	10:07:16 PM	BCl3 MFC set to  0.000000
10/21/2011	10:07:16 PM	PHl3 MFC set to  0.000000
10/21/2011	10:07:16 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:07:16 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:07:16 PM	Tube furnace set to 0
10/21/2011	10:18:40 PM	Helium valve closed
10/21/2011	10:18:40 PM	H2 valve closed
10/21/2011	10:18:40 PM	BCl3 valve closed
10/21/2011	10:18:40 PM	PH3 valve closed
10/21/2011	10:18:40 PM	SiCl4 pre valve closed
10/21/2011	10:18:40 PM	SiCl4 post valve closed
10/21/2011	10:18:40 PM	Main Vac valve closed
10/21/2011	10:18:40 PM	Bypass valve closed
10/21/2011	10:18:40 PM	Bubbler valve closed
10/21/2011	10:18:40 PM	Helium MFC set to  0.000000
10/21/2011	10:18:40 PM	H2 MFC set to  0.000000
10/21/2011	10:18:40 PM	BCl3 MFC set to  0.000000
10/21/2011	10:18:40 PM	PHl3 MFC set to  0.000000
10/21/2011	10:18:40 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:18:40 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:18:40 PM	Tube furnace set to 0
10/21/2011	10:18:41 PM	Run finished at 10:18 PM
10/21/2011	10:18:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2011	10:18:44 PM	Recipe started at 10:18 PM
10/21/2011	10:18:44 PM	Helium valve closed
10/21/2011	10:18:44 PM	H2 valve closed
10/21/2011	10:18:44 PM	BCl3 valve closed
10/21/2011	10:18:44 PM	PH3 valve closed
10/21/2011	10:18:44 PM	SiCl4 pre valve closed
10/21/2011	10:18:44 PM	SiCl4 post valve closed
10/21/2011	10:18:44 PM	Main Vac valve closed
10/21/2011	10:18:44 PM	Bypass valve closed
10/21/2011	10:18:44 PM	Bubbler valve closed
10/21/2011	10:18:44 PM	Helium MFC set to  0.000000
10/21/2011	10:18:44 PM	H2 MFC set to  0.000000
10/21/2011	10:18:44 PM	BCl3 MFC set to  0.000000
10/21/2011	10:18:44 PM	PHl3 MFC set to  0.000000
10/21/2011	10:18:44 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:18:44 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:18:44 PM	Tube furnace set to 0
10/21/2011	10:18:47 PM	H2 valve closed
10/21/2011	10:18:47 PM	BCl3 valve closed
10/21/2011	10:18:47 PM	PH3 valve closed
10/21/2011	10:18:47 PM	SiCl4 pre valve closed
10/21/2011	10:18:47 PM	SiCl4 post valve closed
10/21/2011	10:18:47 PM	Main Vac valve closed
10/21/2011	10:18:47 PM	Bypass valve closed
10/21/2011	10:18:47 PM	Bubbler valve closed
10/21/2011	10:18:47 PM	Helium valve opened
10/21/2011	10:18:47 PM	Helium MFC set to  500.000000
10/21/2011	10:18:47 PM	H2 MFC set to  0.000000
10/21/2011	10:18:47 PM	BCl3 MFC set to  0.000000
10/21/2011	10:18:47 PM	PHl3 MFC set to  0.000000
10/21/2011	10:18:47 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:18:47 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:18:47 PM	Tube furnace set to 0
10/21/2011	10:18:48 PM	Helium valve closed
10/21/2011	10:18:48 PM	H2 valve closed
10/21/2011	10:18:48 PM	BCl3 valve closed
10/21/2011	10:18:48 PM	PH3 valve closed
10/21/2011	10:18:48 PM	SiCl4 pre valve closed
10/21/2011	10:18:48 PM	SiCl4 post valve closed
10/21/2011	10:18:48 PM	Main Vac valve closed
10/21/2011	10:18:48 PM	Bypass valve closed
10/21/2011	10:18:48 PM	Bubbler valve closed
10/21/2011	10:18:48 PM	Helium MFC set to  0.000000
10/21/2011	10:18:48 PM	H2 MFC set to  0.000000
10/21/2011	10:18:48 PM	BCl3 MFC set to  0.000000
10/21/2011	10:18:48 PM	PHl3 MFC set to  0.000000
10/21/2011	10:18:48 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:18:48 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:18:48 PM	Tube furnace set to 0
10/21/2011	10:18:49 PM	Run finished at 10:18 PM
10/21/2011	10:18:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2011	10:30:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	10:30:27 PM	Recipe started at 10:30 PM
10/21/2011	10:30:27 PM	Helium valve closed
10/21/2011	10:30:27 PM	H2 valve closed
10/21/2011	10:30:27 PM	BCl3 valve closed
10/21/2011	10:30:27 PM	PH3 valve closed
10/21/2011	10:30:27 PM	SiCl4 pre valve closed
10/21/2011	10:30:27 PM	SiCl4 post valve closed
10/21/2011	10:30:27 PM	Main Vac valve closed
10/21/2011	10:30:27 PM	Bubbler valve closed
10/21/2011	10:30:27 PM	Bypass valve opened
10/21/2011	10:30:27 PM	Helium MFC set to  0.000000
10/21/2011	10:30:27 PM	H2 MFC set to  0.000000
10/21/2011	10:30:27 PM	BCl3 MFC set to  0.000000
10/21/2011	10:30:27 PM	PHl3 MFC set to  0.000000
10/21/2011	10:30:27 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:30:27 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:30:27 PM	Tube furnace set to 0
10/21/2011	10:31:36 PM	Helium valve closed
10/21/2011	10:31:36 PM	H2 valve closed
10/21/2011	10:31:36 PM	BCl3 valve closed
10/21/2011	10:31:36 PM	PH3 valve closed
10/21/2011	10:31:36 PM	SiCl4 pre valve closed
10/21/2011	10:31:36 PM	SiCl4 post valve closed
10/21/2011	10:31:36 PM	Main Vac valve closed
10/21/2011	10:31:36 PM	Bubbler valve closed
10/21/2011	10:31:36 PM	Bypass valve opened
10/21/2011	10:31:36 PM	Helium MFC set to  0.000000
10/21/2011	10:31:36 PM	H2 MFC set to  0.000000
10/21/2011	10:31:36 PM	BCl3 MFC set to  0.000000
10/21/2011	10:31:36 PM	PHl3 MFC set to  0.000000
10/21/2011	10:31:36 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:31:36 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:31:36 PM	Tube furnace set to 0
10/21/2011	10:32:36 PM	Helium valve closed
10/21/2011	10:32:36 PM	H2 valve closed
10/21/2011	10:32:36 PM	BCl3 valve closed
10/21/2011	10:32:36 PM	PH3 valve closed
10/21/2011	10:32:36 PM	SiCl4 pre valve closed
10/21/2011	10:32:36 PM	SiCl4 post valve closed
10/21/2011	10:32:36 PM	Bypass valve closed
10/21/2011	10:32:36 PM	Bubbler valve closed
10/21/2011	10:32:36 PM	Main Vac valve opened
10/21/2011	10:32:36 PM	Helium MFC set to  0.000000
10/21/2011	10:32:36 PM	H2 MFC set to  0.000000
10/21/2011	10:32:36 PM	BCl3 MFC set to  0.000000
10/21/2011	10:32:36 PM	PHl3 MFC set to  0.000000
10/21/2011	10:32:36 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:32:36 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:32:36 PM	Tube furnace set to 0
10/21/2011	10:32:37 PM	Run finished at 10:32 PM
10/21/2011	10:32:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2011	10:39:38 PM	Recipe started at 10:39 PM
10/21/2011	10:39:38 PM	Helium valve closed
10/21/2011	10:39:38 PM	H2 valve closed
10/21/2011	10:39:38 PM	BCl3 valve closed
10/21/2011	10:39:38 PM	PH3 valve closed
10/21/2011	10:39:38 PM	SiCl4 pre valve closed
10/21/2011	10:39:38 PM	SiCl4 post valve closed
10/21/2011	10:39:38 PM	Bypass valve closed
10/21/2011	10:39:38 PM	Bubbler valve closed
10/21/2011	10:39:38 PM	Main Vac valve opened
10/21/2011	10:39:38 PM	Helium MFC set to  0.000000
10/21/2011	10:39:38 PM	H2 MFC set to  0.000000
10/21/2011	10:39:38 PM	BCl3 MFC set to  0.000000
10/21/2011	10:39:38 PM	PHl3 MFC set to  0.000000
10/21/2011	10:39:38 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:39:38 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:39:38 PM	Tube furnace set to 150
10/21/2011	10:39:43 PM	H2 valve closed
10/21/2011	10:39:43 PM	BCl3 valve closed
10/21/2011	10:39:43 PM	PH3 valve closed
10/21/2011	10:39:43 PM	SiCl4 pre valve closed
10/21/2011	10:39:43 PM	SiCl4 post valve closed
10/21/2011	10:39:43 PM	Bypass valve closed
10/21/2011	10:39:43 PM	Bubbler valve closed
10/21/2011	10:39:43 PM	Helium valve opened
10/21/2011	10:39:43 PM	Main Vac valve opened
10/21/2011	10:39:43 PM	Helium MFC set to  20.000000
10/21/2011	10:39:43 PM	H2 MFC set to  0.000000
10/21/2011	10:39:43 PM	BCl3 MFC set to  0.000000
10/21/2011	10:39:43 PM	PHl3 MFC set to  0.000000
10/21/2011	10:39:43 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:39:43 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:39:43 PM	Tube furnace set to 150
10/21/2011	10:40:13 PM	Helium valve closed
10/21/2011	10:40:13 PM	H2 valve closed
10/21/2011	10:40:13 PM	BCl3 valve closed
10/21/2011	10:40:13 PM	PH3 valve closed
10/21/2011	10:40:13 PM	SiCl4 pre valve closed
10/21/2011	10:40:13 PM	SiCl4 post valve closed
10/21/2011	10:40:13 PM	Bypass valve closed
10/21/2011	10:40:13 PM	Bubbler valve closed
10/21/2011	10:40:13 PM	Main Vac valve opened
10/21/2011	10:40:13 PM	Helium MFC set to  0.000000
10/21/2011	10:40:13 PM	H2 MFC set to  0.000000
10/21/2011	10:40:13 PM	BCl3 MFC set to  0.000000
10/21/2011	10:40:13 PM	PHl3 MFC set to  0.000000
10/21/2011	10:40:13 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:40:13 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:40:13 PM	Tube furnace set to 150
10/21/2011	10:40:43 PM	H2 valve closed
10/21/2011	10:40:43 PM	BCl3 valve closed
10/21/2011	10:40:43 PM	PH3 valve closed
10/21/2011	10:40:43 PM	SiCl4 pre valve closed
10/21/2011	10:40:43 PM	SiCl4 post valve closed
10/21/2011	10:40:43 PM	Bypass valve closed
10/21/2011	10:40:43 PM	Bubbler valve closed
10/21/2011	10:40:43 PM	Helium valve opened
10/21/2011	10:40:43 PM	Main Vac valve opened
10/21/2011	10:40:43 PM	Helium MFC set to  20.000000
10/21/2011	10:40:43 PM	H2 MFC set to  0.000000
10/21/2011	10:40:43 PM	BCl3 MFC set to  0.000000
10/21/2011	10:40:43 PM	PHl3 MFC set to  0.000000
10/21/2011	10:40:43 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:40:43 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:40:44 PM	Tube furnace set to 150
10/21/2011	10:41:14 PM	Helium valve closed
10/21/2011	10:41:14 PM	H2 valve closed
10/21/2011	10:41:14 PM	BCl3 valve closed
10/21/2011	10:41:14 PM	PH3 valve closed
10/21/2011	10:41:14 PM	SiCl4 pre valve closed
10/21/2011	10:41:14 PM	SiCl4 post valve closed
10/21/2011	10:41:14 PM	Bypass valve closed
10/21/2011	10:41:14 PM	Bubbler valve closed
10/21/2011	10:41:14 PM	Main Vac valve opened
10/21/2011	10:41:14 PM	Helium MFC set to  0.000000
10/21/2011	10:41:14 PM	H2 MFC set to  0.000000
10/21/2011	10:41:14 PM	BCl3 MFC set to  0.000000
10/21/2011	10:41:14 PM	PHl3 MFC set to  0.000000
10/21/2011	10:41:14 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:41:14 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:41:14 PM	Tube furnace set to 150
10/21/2011	10:41:44 PM	H2 valve closed
10/21/2011	10:41:44 PM	BCl3 valve closed
10/21/2011	10:41:44 PM	PH3 valve closed
10/21/2011	10:41:44 PM	SiCl4 pre valve closed
10/21/2011	10:41:44 PM	SiCl4 post valve closed
10/21/2011	10:41:44 PM	Bypass valve closed
10/21/2011	10:41:44 PM	Bubbler valve closed
10/21/2011	10:41:44 PM	Helium valve opened
10/21/2011	10:41:44 PM	Main Vac valve opened
10/21/2011	10:41:44 PM	Helium MFC set to  20.000000
10/21/2011	10:41:44 PM	H2 MFC set to  0.000000
10/21/2011	10:41:44 PM	BCl3 MFC set to  0.000000
10/21/2011	10:41:44 PM	PHl3 MFC set to  0.000000
10/21/2011	10:41:44 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:41:44 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:41:44 PM	Tube furnace set to 150
10/21/2011	10:42:14 PM	Helium valve closed
10/21/2011	10:42:14 PM	H2 valve closed
10/21/2011	10:42:14 PM	BCl3 valve closed
10/21/2011	10:42:14 PM	PH3 valve closed
10/21/2011	10:42:14 PM	SiCl4 pre valve closed
10/21/2011	10:42:14 PM	SiCl4 post valve closed
10/21/2011	10:42:14 PM	Bypass valve closed
10/21/2011	10:42:14 PM	Bubbler valve closed
10/21/2011	10:42:14 PM	Main Vac valve opened
10/21/2011	10:42:14 PM	Helium MFC set to  0.000000
10/21/2011	10:42:14 PM	H2 MFC set to  0.000000
10/21/2011	10:42:14 PM	BCl3 MFC set to  0.000000
10/21/2011	10:42:14 PM	PHl3 MFC set to  0.000000
10/21/2011	10:42:14 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:42:14 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:42:14 PM	Tube furnace set to 150
10/21/2011	10:42:44 PM	H2 valve closed
10/21/2011	10:42:44 PM	BCl3 valve closed
10/21/2011	10:42:44 PM	PH3 valve closed
10/21/2011	10:42:44 PM	SiCl4 pre valve closed
10/21/2011	10:42:44 PM	SiCl4 post valve closed
10/21/2011	10:42:44 PM	Bypass valve closed
10/21/2011	10:42:44 PM	Bubbler valve closed
10/21/2011	10:42:44 PM	Helium valve opened
10/21/2011	10:42:44 PM	Main Vac valve opened
10/21/2011	10:42:44 PM	Helium MFC set to  20.000000
10/21/2011	10:42:44 PM	H2 MFC set to  0.000000
10/21/2011	10:42:44 PM	BCl3 MFC set to  0.000000
10/21/2011	10:42:44 PM	PHl3 MFC set to  0.000000
10/21/2011	10:42:44 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:42:44 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:42:44 PM	Tube furnace set to 150
10/21/2011	10:43:14 PM	Helium valve closed
10/21/2011	10:43:14 PM	H2 valve closed
10/21/2011	10:43:14 PM	BCl3 valve closed
10/21/2011	10:43:14 PM	PH3 valve closed
10/21/2011	10:43:14 PM	SiCl4 pre valve closed
10/21/2011	10:43:14 PM	SiCl4 post valve closed
10/21/2011	10:43:14 PM	Bypass valve closed
10/21/2011	10:43:14 PM	Bubbler valve closed
10/21/2011	10:43:14 PM	Main Vac valve opened
10/21/2011	10:43:14 PM	Helium MFC set to  0.000000
10/21/2011	10:43:14 PM	H2 MFC set to  0.000000
10/21/2011	10:43:14 PM	BCl3 MFC set to  0.000000
10/21/2011	10:43:14 PM	PHl3 MFC set to  0.000000
10/21/2011	10:43:14 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:43:14 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:43:15 PM	Tube furnace set to 150
10/21/2011	10:43:45 PM	H2 valve closed
10/21/2011	10:43:45 PM	BCl3 valve closed
10/21/2011	10:43:45 PM	PH3 valve closed
10/21/2011	10:43:45 PM	SiCl4 pre valve closed
10/21/2011	10:43:45 PM	SiCl4 post valve closed
10/21/2011	10:43:45 PM	Bypass valve closed
10/21/2011	10:43:45 PM	Bubbler valve closed
10/21/2011	10:43:45 PM	Helium valve opened
10/21/2011	10:43:45 PM	Main Vac valve opened
10/21/2011	10:43:45 PM	Helium MFC set to  20.000000
10/21/2011	10:43:45 PM	H2 MFC set to  0.000000
10/21/2011	10:43:45 PM	BCl3 MFC set to  0.000000
10/21/2011	10:43:45 PM	PHl3 MFC set to  0.000000
10/21/2011	10:43:45 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:43:45 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:43:45 PM	Tube furnace set to 150
10/21/2011	10:44:15 PM	Helium valve closed
10/21/2011	10:44:15 PM	H2 valve closed
10/21/2011	10:44:15 PM	BCl3 valve closed
10/21/2011	10:44:15 PM	PH3 valve closed
10/21/2011	10:44:15 PM	SiCl4 pre valve closed
10/21/2011	10:44:15 PM	SiCl4 post valve closed
10/21/2011	10:44:15 PM	Bypass valve closed
10/21/2011	10:44:15 PM	Bubbler valve closed
10/21/2011	10:44:15 PM	Main Vac valve opened
10/21/2011	10:44:15 PM	Helium MFC set to  0.000000
10/21/2011	10:44:15 PM	H2 MFC set to  0.000000
10/21/2011	10:44:15 PM	BCl3 MFC set to  0.000000
10/21/2011	10:44:15 PM	PHl3 MFC set to  0.000000
10/21/2011	10:44:15 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:44:15 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:44:15 PM	Tube furnace set to 150
10/21/2011	10:44:45 PM	H2 valve closed
10/21/2011	10:44:45 PM	BCl3 valve closed
10/21/2011	10:44:45 PM	PH3 valve closed
10/21/2011	10:44:45 PM	SiCl4 pre valve closed
10/21/2011	10:44:45 PM	SiCl4 post valve closed
10/21/2011	10:44:45 PM	Bypass valve closed
10/21/2011	10:44:45 PM	Bubbler valve closed
10/21/2011	10:44:45 PM	Helium valve opened
10/21/2011	10:44:45 PM	Main Vac valve opened
10/21/2011	10:44:45 PM	Helium MFC set to  20.000000
10/21/2011	10:44:45 PM	H2 MFC set to  0.000000
10/21/2011	10:44:45 PM	BCl3 MFC set to  0.000000
10/21/2011	10:44:45 PM	PHl3 MFC set to  0.000000
10/21/2011	10:44:45 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:44:45 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:44:45 PM	Tube furnace set to 150
10/21/2011	10:45:15 PM	Helium valve closed
10/21/2011	10:45:15 PM	H2 valve closed
10/21/2011	10:45:15 PM	BCl3 valve closed
10/21/2011	10:45:15 PM	PH3 valve closed
10/21/2011	10:45:15 PM	SiCl4 pre valve closed
10/21/2011	10:45:15 PM	SiCl4 post valve closed
10/21/2011	10:45:15 PM	Bypass valve closed
10/21/2011	10:45:15 PM	Bubbler valve closed
10/21/2011	10:45:15 PM	Main Vac valve opened
10/21/2011	10:45:15 PM	Helium MFC set to  0.000000
10/21/2011	10:45:15 PM	H2 MFC set to  0.000000
10/21/2011	10:45:15 PM	BCl3 MFC set to  0.000000
10/21/2011	10:45:15 PM	PHl3 MFC set to  0.000000
10/21/2011	10:45:15 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:45:15 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:45:15 PM	Tube furnace set to 150
10/21/2011	10:45:45 PM	H2 valve closed
10/21/2011	10:45:45 PM	BCl3 valve closed
10/21/2011	10:45:45 PM	PH3 valve closed
10/21/2011	10:45:45 PM	SiCl4 pre valve closed
10/21/2011	10:45:45 PM	SiCl4 post valve closed
10/21/2011	10:45:45 PM	Bypass valve closed
10/21/2011	10:45:45 PM	Bubbler valve closed
10/21/2011	10:45:45 PM	Helium valve opened
10/21/2011	10:45:45 PM	Main Vac valve opened
10/21/2011	10:45:45 PM	Helium MFC set to  20.000000
10/21/2011	10:45:45 PM	H2 MFC set to  0.000000
10/21/2011	10:45:45 PM	BCl3 MFC set to  0.000000
10/21/2011	10:45:45 PM	PHl3 MFC set to  0.000000
10/21/2011	10:45:45 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:45:45 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:45:46 PM	Tube furnace set to 150
10/21/2011	10:46:16 PM	Helium valve closed
10/21/2011	10:46:16 PM	H2 valve closed
10/21/2011	10:46:16 PM	BCl3 valve closed
10/21/2011	10:46:16 PM	PH3 valve closed
10/21/2011	10:46:16 PM	SiCl4 pre valve closed
10/21/2011	10:46:16 PM	SiCl4 post valve closed
10/21/2011	10:46:16 PM	Bypass valve closed
10/21/2011	10:46:16 PM	Bubbler valve closed
10/21/2011	10:46:16 PM	Main Vac valve opened
10/21/2011	10:46:16 PM	Helium MFC set to  0.000000
10/21/2011	10:46:16 PM	H2 MFC set to  0.000000
10/21/2011	10:46:16 PM	BCl3 MFC set to  0.000000
10/21/2011	10:46:16 PM	PHl3 MFC set to  0.000000
10/21/2011	10:46:16 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:46:16 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:46:16 PM	Tube furnace set to 150
10/21/2011	10:46:46 PM	H2 valve closed
10/21/2011	10:46:46 PM	BCl3 valve closed
10/21/2011	10:46:46 PM	PH3 valve closed
10/21/2011	10:46:46 PM	SiCl4 pre valve closed
10/21/2011	10:46:46 PM	SiCl4 post valve closed
10/21/2011	10:46:46 PM	Bypass valve closed
10/21/2011	10:46:46 PM	Bubbler valve closed
10/21/2011	10:46:46 PM	Helium valve opened
10/21/2011	10:46:46 PM	Main Vac valve opened
10/21/2011	10:46:46 PM	Helium MFC set to  20.000000
10/21/2011	10:46:46 PM	H2 MFC set to  0.000000
10/21/2011	10:46:46 PM	BCl3 MFC set to  0.000000
10/21/2011	10:46:46 PM	PHl3 MFC set to  0.000000
10/21/2011	10:46:46 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:46:46 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:46:46 PM	Tube furnace set to 150
10/21/2011	10:47:16 PM	Helium valve closed
10/21/2011	10:47:16 PM	H2 valve closed
10/21/2011	10:47:16 PM	BCl3 valve closed
10/21/2011	10:47:16 PM	PH3 valve closed
10/21/2011	10:47:16 PM	SiCl4 pre valve closed
10/21/2011	10:47:16 PM	SiCl4 post valve closed
10/21/2011	10:47:16 PM	Bypass valve closed
10/21/2011	10:47:16 PM	Bubbler valve closed
10/21/2011	10:47:16 PM	Main Vac valve opened
10/21/2011	10:47:16 PM	Helium MFC set to  0.000000
10/21/2011	10:47:16 PM	H2 MFC set to  0.000000
10/21/2011	10:47:16 PM	BCl3 MFC set to  0.000000
10/21/2011	10:47:16 PM	PHl3 MFC set to  0.000000
10/21/2011	10:47:16 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:47:16 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:47:16 PM	Tube furnace set to 150
10/21/2011	10:47:46 PM	H2 valve closed
10/21/2011	10:47:46 PM	BCl3 valve closed
10/21/2011	10:47:46 PM	PH3 valve closed
10/21/2011	10:47:46 PM	SiCl4 pre valve closed
10/21/2011	10:47:46 PM	SiCl4 post valve closed
10/21/2011	10:47:46 PM	Bypass valve closed
10/21/2011	10:47:46 PM	Bubbler valve closed
10/21/2011	10:47:46 PM	Helium valve opened
10/21/2011	10:47:46 PM	Main Vac valve opened
10/21/2011	10:47:46 PM	Helium MFC set to  20.000000
10/21/2011	10:47:46 PM	H2 MFC set to  0.000000
10/21/2011	10:47:46 PM	BCl3 MFC set to  0.000000
10/21/2011	10:47:46 PM	PHl3 MFC set to  0.000000
10/21/2011	10:47:46 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:47:46 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:47:47 PM	Tube furnace set to 150
10/21/2011	10:48:17 PM	Helium valve closed
10/21/2011	10:48:17 PM	H2 valve closed
10/21/2011	10:48:17 PM	BCl3 valve closed
10/21/2011	10:48:17 PM	PH3 valve closed
10/21/2011	10:48:17 PM	SiCl4 pre valve closed
10/21/2011	10:48:17 PM	SiCl4 post valve closed
10/21/2011	10:48:17 PM	Bypass valve closed
10/21/2011	10:48:17 PM	Bubbler valve closed
10/21/2011	10:48:17 PM	Main Vac valve opened
10/21/2011	10:48:17 PM	Helium MFC set to  0.000000
10/21/2011	10:48:17 PM	H2 MFC set to  0.000000
10/21/2011	10:48:17 PM	BCl3 MFC set to  0.000000
10/21/2011	10:48:17 PM	PHl3 MFC set to  0.000000
10/21/2011	10:48:17 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:48:17 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:48:17 PM	Tube furnace set to 150
10/21/2011	10:48:47 PM	H2 valve closed
10/21/2011	10:48:47 PM	BCl3 valve closed
10/21/2011	10:48:47 PM	PH3 valve closed
10/21/2011	10:48:47 PM	SiCl4 pre valve closed
10/21/2011	10:48:47 PM	SiCl4 post valve closed
10/21/2011	10:48:47 PM	Bypass valve closed
10/21/2011	10:48:47 PM	Bubbler valve closed
10/21/2011	10:48:47 PM	Helium valve opened
10/21/2011	10:48:47 PM	Main Vac valve opened
10/21/2011	10:48:47 PM	Helium MFC set to  20.000000
10/21/2011	10:48:47 PM	H2 MFC set to  0.000000
10/21/2011	10:48:47 PM	BCl3 MFC set to  0.000000
10/21/2011	10:48:47 PM	PHl3 MFC set to  0.000000
10/21/2011	10:48:47 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:48:47 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:48:47 PM	Tube furnace set to 150
10/21/2011	10:49:17 PM	Helium valve closed
10/21/2011	10:49:17 PM	H2 valve closed
10/21/2011	10:49:17 PM	BCl3 valve closed
10/21/2011	10:49:17 PM	PH3 valve closed
10/21/2011	10:49:17 PM	SiCl4 pre valve closed
10/21/2011	10:49:17 PM	SiCl4 post valve closed
10/21/2011	10:49:17 PM	Bypass valve closed
10/21/2011	10:49:17 PM	Bubbler valve closed
10/21/2011	10:49:17 PM	Main Vac valve opened
10/21/2011	10:49:17 PM	Helium MFC set to  0.000000
10/21/2011	10:49:17 PM	H2 MFC set to  0.000000
10/21/2011	10:49:17 PM	BCl3 MFC set to  0.000000
10/21/2011	10:49:17 PM	PHl3 MFC set to  0.000000
10/21/2011	10:49:17 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:49:17 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:49:17 PM	Tube furnace set to 150
10/21/2011	10:49:18 PM	Run finished at 10:49 PM
10/21/2011	10:52:20 PM	Recipe started at 10:52 PM
10/21/2011	10:52:20 PM	Helium valve closed
10/21/2011	10:52:20 PM	H2 valve closed
10/21/2011	10:52:20 PM	BCl3 valve closed
10/21/2011	10:52:20 PM	PH3 valve closed
10/21/2011	10:52:20 PM	SiCl4 pre valve closed
10/21/2011	10:52:20 PM	SiCl4 post valve closed
10/21/2011	10:52:20 PM	Bypass valve closed
10/21/2011	10:52:20 PM	Bubbler valve closed
10/21/2011	10:52:20 PM	Main Vac valve opened
10/21/2011	10:52:20 PM	Helium MFC set to  0.000000
10/21/2011	10:52:20 PM	H2 MFC set to  0.000000
10/21/2011	10:52:20 PM	BCl3 MFC set to  0.000000
10/21/2011	10:52:20 PM	PHl3 MFC set to  0.000000
10/21/2011	10:52:20 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:52:20 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:52:20 PM	Tube furnace set to 150
10/21/2011	10:52:50 PM	H2 valve closed
10/21/2011	10:52:50 PM	BCl3 valve closed
10/21/2011	10:52:50 PM	PH3 valve closed
10/21/2011	10:52:50 PM	SiCl4 pre valve closed
10/21/2011	10:52:50 PM	SiCl4 post valve closed
10/21/2011	10:52:50 PM	Bypass valve closed
10/21/2011	10:52:50 PM	Bubbler valve closed
10/21/2011	10:52:50 PM	Helium valve opened
10/21/2011	10:52:50 PM	Main Vac valve opened
10/21/2011	10:52:50 PM	Helium MFC set to  20.000000
10/21/2011	10:52:50 PM	H2 MFC set to  0.000000
10/21/2011	10:52:50 PM	BCl3 MFC set to  0.000000
10/21/2011	10:52:50 PM	PHl3 MFC set to  0.000000
10/21/2011	10:52:50 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:52:50 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:52:50 PM	Tube furnace set to 150
10/21/2011	10:53:20 PM	Helium valve closed
10/21/2011	10:53:20 PM	H2 valve closed
10/21/2011	10:53:20 PM	BCl3 valve closed
10/21/2011	10:53:20 PM	PH3 valve closed
10/21/2011	10:53:20 PM	SiCl4 pre valve closed
10/21/2011	10:53:20 PM	SiCl4 post valve closed
10/21/2011	10:53:20 PM	Bypass valve closed
10/21/2011	10:53:20 PM	Bubbler valve closed
10/21/2011	10:53:20 PM	Main Vac valve opened
10/21/2011	10:53:20 PM	Helium MFC set to  0.000000
10/21/2011	10:53:20 PM	H2 MFC set to  0.000000
10/21/2011	10:53:20 PM	BCl3 MFC set to  0.000000
10/21/2011	10:53:20 PM	PHl3 MFC set to  0.000000
10/21/2011	10:53:20 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:53:20 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:53:21 PM	Tube furnace set to 150
10/21/2011	10:53:51 PM	H2 valve closed
10/21/2011	10:53:51 PM	BCl3 valve closed
10/21/2011	10:53:51 PM	PH3 valve closed
10/21/2011	10:53:51 PM	SiCl4 pre valve closed
10/21/2011	10:53:51 PM	SiCl4 post valve closed
10/21/2011	10:53:51 PM	Bypass valve closed
10/21/2011	10:53:51 PM	Bubbler valve closed
10/21/2011	10:53:51 PM	Helium valve opened
10/21/2011	10:53:51 PM	Main Vac valve opened
10/21/2011	10:53:51 PM	Helium MFC set to  20.000000
10/21/2011	10:53:51 PM	H2 MFC set to  0.000000
10/21/2011	10:53:51 PM	BCl3 MFC set to  0.000000
10/21/2011	10:53:51 PM	PHl3 MFC set to  0.000000
10/21/2011	10:53:51 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:53:51 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:53:51 PM	Tube furnace set to 150
10/21/2011	10:54:21 PM	Helium valve closed
10/21/2011	10:54:21 PM	H2 valve closed
10/21/2011	10:54:21 PM	BCl3 valve closed
10/21/2011	10:54:21 PM	PH3 valve closed
10/21/2011	10:54:21 PM	SiCl4 pre valve closed
10/21/2011	10:54:21 PM	SiCl4 post valve closed
10/21/2011	10:54:21 PM	Bypass valve closed
10/21/2011	10:54:21 PM	Bubbler valve closed
10/21/2011	10:54:21 PM	Main Vac valve opened
10/21/2011	10:54:21 PM	Helium MFC set to  0.000000
10/21/2011	10:54:21 PM	H2 MFC set to  0.000000
10/21/2011	10:54:21 PM	BCl3 MFC set to  0.000000
10/21/2011	10:54:21 PM	PHl3 MFC set to  0.000000
10/21/2011	10:54:21 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:54:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:54:21 PM	Tube furnace set to 150
10/21/2011	10:54:51 PM	H2 valve closed
10/21/2011	10:54:51 PM	BCl3 valve closed
10/21/2011	10:54:51 PM	PH3 valve closed
10/21/2011	10:54:51 PM	SiCl4 pre valve closed
10/21/2011	10:54:51 PM	SiCl4 post valve closed
10/21/2011	10:54:51 PM	Bypass valve closed
10/21/2011	10:54:51 PM	Bubbler valve closed
10/21/2011	10:54:51 PM	Helium valve opened
10/21/2011	10:54:51 PM	Main Vac valve opened
10/21/2011	10:54:51 PM	Helium MFC set to  20.000000
10/21/2011	10:54:51 PM	H2 MFC set to  0.000000
10/21/2011	10:54:51 PM	BCl3 MFC set to  0.000000
10/21/2011	10:54:51 PM	PHl3 MFC set to  0.000000
10/21/2011	10:54:51 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:54:51 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:54:51 PM	Tube furnace set to 150
10/21/2011	10:55:21 PM	Helium valve closed
10/21/2011	10:55:21 PM	H2 valve closed
10/21/2011	10:55:21 PM	BCl3 valve closed
10/21/2011	10:55:21 PM	PH3 valve closed
10/21/2011	10:55:21 PM	SiCl4 pre valve closed
10/21/2011	10:55:21 PM	SiCl4 post valve closed
10/21/2011	10:55:21 PM	Bypass valve closed
10/21/2011	10:55:21 PM	Bubbler valve closed
10/21/2011	10:55:21 PM	Main Vac valve opened
10/21/2011	10:55:21 PM	Helium MFC set to  0.000000
10/21/2011	10:55:21 PM	H2 MFC set to  0.000000
10/21/2011	10:55:21 PM	BCl3 MFC set to  0.000000
10/21/2011	10:55:21 PM	PHl3 MFC set to  0.000000
10/21/2011	10:55:21 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:55:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:55:21 PM	Tube furnace set to 150
10/21/2011	10:55:51 PM	H2 valve closed
10/21/2011	10:55:51 PM	BCl3 valve closed
10/21/2011	10:55:51 PM	PH3 valve closed
10/21/2011	10:55:51 PM	SiCl4 pre valve closed
10/21/2011	10:55:51 PM	SiCl4 post valve closed
10/21/2011	10:55:51 PM	Bypass valve closed
10/21/2011	10:55:51 PM	Bubbler valve closed
10/21/2011	10:55:51 PM	Helium valve opened
10/21/2011	10:55:51 PM	Main Vac valve opened
10/21/2011	10:55:51 PM	Helium MFC set to  20.000000
10/21/2011	10:55:51 PM	H2 MFC set to  0.000000
10/21/2011	10:55:51 PM	BCl3 MFC set to  0.000000
10/21/2011	10:55:51 PM	PHl3 MFC set to  0.000000
10/21/2011	10:55:51 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:55:51 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:55:52 PM	Tube furnace set to 150
10/21/2011	10:56:22 PM	Helium valve closed
10/21/2011	10:56:22 PM	H2 valve closed
10/21/2011	10:56:22 PM	BCl3 valve closed
10/21/2011	10:56:22 PM	PH3 valve closed
10/21/2011	10:56:22 PM	SiCl4 pre valve closed
10/21/2011	10:56:22 PM	SiCl4 post valve closed
10/21/2011	10:56:22 PM	Bypass valve closed
10/21/2011	10:56:22 PM	Bubbler valve closed
10/21/2011	10:56:22 PM	Main Vac valve opened
10/21/2011	10:56:22 PM	Helium MFC set to  0.000000
10/21/2011	10:56:22 PM	H2 MFC set to  0.000000
10/21/2011	10:56:22 PM	BCl3 MFC set to  0.000000
10/21/2011	10:56:22 PM	PHl3 MFC set to  0.000000
10/21/2011	10:56:22 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:56:22 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:56:22 PM	Tube furnace set to 150
10/21/2011	10:56:52 PM	H2 valve closed
10/21/2011	10:56:52 PM	BCl3 valve closed
10/21/2011	10:56:52 PM	PH3 valve closed
10/21/2011	10:56:52 PM	SiCl4 pre valve closed
10/21/2011	10:56:52 PM	SiCl4 post valve closed
10/21/2011	10:56:52 PM	Bypass valve closed
10/21/2011	10:56:52 PM	Bubbler valve closed
10/21/2011	10:56:52 PM	Helium valve opened
10/21/2011	10:56:52 PM	Main Vac valve opened
10/21/2011	10:56:52 PM	Helium MFC set to  20.000000
10/21/2011	10:56:52 PM	H2 MFC set to  0.000000
10/21/2011	10:56:52 PM	BCl3 MFC set to  0.000000
10/21/2011	10:56:52 PM	PHl3 MFC set to  0.000000
10/21/2011	10:56:52 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:56:52 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:56:52 PM	Tube furnace set to 150
10/21/2011	10:57:22 PM	Helium valve closed
10/21/2011	10:57:22 PM	H2 valve closed
10/21/2011	10:57:22 PM	BCl3 valve closed
10/21/2011	10:57:22 PM	PH3 valve closed
10/21/2011	10:57:22 PM	SiCl4 pre valve closed
10/21/2011	10:57:22 PM	SiCl4 post valve closed
10/21/2011	10:57:22 PM	Bypass valve closed
10/21/2011	10:57:22 PM	Bubbler valve closed
10/21/2011	10:57:22 PM	Main Vac valve opened
10/21/2011	10:57:22 PM	Helium MFC set to  0.000000
10/21/2011	10:57:22 PM	H2 MFC set to  0.000000
10/21/2011	10:57:22 PM	BCl3 MFC set to  0.000000
10/21/2011	10:57:22 PM	PHl3 MFC set to  0.000000
10/21/2011	10:57:22 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:57:22 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:57:22 PM	Tube furnace set to 150
10/21/2011	10:57:52 PM	H2 valve closed
10/21/2011	10:57:52 PM	BCl3 valve closed
10/21/2011	10:57:52 PM	PH3 valve closed
10/21/2011	10:57:52 PM	SiCl4 pre valve closed
10/21/2011	10:57:52 PM	SiCl4 post valve closed
10/21/2011	10:57:52 PM	Bypass valve closed
10/21/2011	10:57:52 PM	Bubbler valve closed
10/21/2011	10:57:52 PM	Helium valve opened
10/21/2011	10:57:52 PM	Main Vac valve opened
10/21/2011	10:57:52 PM	Helium MFC set to  20.000000
10/21/2011	10:57:52 PM	H2 MFC set to  0.000000
10/21/2011	10:57:52 PM	BCl3 MFC set to  0.000000
10/21/2011	10:57:52 PM	PHl3 MFC set to  0.000000
10/21/2011	10:57:52 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:57:52 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:57:52 PM	Tube furnace set to 150
10/21/2011	10:58:22 PM	Helium valve closed
10/21/2011	10:58:22 PM	H2 valve closed
10/21/2011	10:58:22 PM	BCl3 valve closed
10/21/2011	10:58:22 PM	PH3 valve closed
10/21/2011	10:58:22 PM	SiCl4 pre valve closed
10/21/2011	10:58:22 PM	SiCl4 post valve closed
10/21/2011	10:58:22 PM	Bypass valve closed
10/21/2011	10:58:22 PM	Bubbler valve closed
10/21/2011	10:58:22 PM	Main Vac valve opened
10/21/2011	10:58:22 PM	Helium MFC set to  0.000000
10/21/2011	10:58:22 PM	H2 MFC set to  0.000000
10/21/2011	10:58:22 PM	BCl3 MFC set to  0.000000
10/21/2011	10:58:22 PM	PHl3 MFC set to  0.000000
10/21/2011	10:58:22 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:58:22 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:58:23 PM	Tube furnace set to 150
10/21/2011	10:58:53 PM	H2 valve closed
10/21/2011	10:58:53 PM	BCl3 valve closed
10/21/2011	10:58:53 PM	PH3 valve closed
10/21/2011	10:58:53 PM	SiCl4 pre valve closed
10/21/2011	10:58:53 PM	SiCl4 post valve closed
10/21/2011	10:58:53 PM	Bypass valve closed
10/21/2011	10:58:53 PM	Bubbler valve closed
10/21/2011	10:58:53 PM	Helium valve opened
10/21/2011	10:58:53 PM	Main Vac valve opened
10/21/2011	10:58:53 PM	Helium MFC set to  20.000000
10/21/2011	10:58:53 PM	H2 MFC set to  0.000000
10/21/2011	10:58:53 PM	BCl3 MFC set to  0.000000
10/21/2011	10:58:53 PM	PHl3 MFC set to  0.000000
10/21/2011	10:58:53 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:58:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:58:53 PM	Tube furnace set to 150
10/21/2011	10:59:23 PM	Helium valve closed
10/21/2011	10:59:23 PM	H2 valve closed
10/21/2011	10:59:23 PM	BCl3 valve closed
10/21/2011	10:59:23 PM	PH3 valve closed
10/21/2011	10:59:23 PM	SiCl4 pre valve closed
10/21/2011	10:59:23 PM	SiCl4 post valve closed
10/21/2011	10:59:23 PM	Bypass valve closed
10/21/2011	10:59:23 PM	Bubbler valve closed
10/21/2011	10:59:23 PM	Main Vac valve opened
10/21/2011	10:59:23 PM	Helium MFC set to  0.000000
10/21/2011	10:59:23 PM	H2 MFC set to  0.000000
10/21/2011	10:59:23 PM	BCl3 MFC set to  0.000000
10/21/2011	10:59:23 PM	PHl3 MFC set to  0.000000
10/21/2011	10:59:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:59:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:59:23 PM	Tube furnace set to 150
10/21/2011	10:59:53 PM	H2 valve closed
10/21/2011	10:59:53 PM	BCl3 valve closed
10/21/2011	10:59:53 PM	PH3 valve closed
10/21/2011	10:59:53 PM	SiCl4 pre valve closed
10/21/2011	10:59:53 PM	SiCl4 post valve closed
10/21/2011	10:59:53 PM	Bypass valve closed
10/21/2011	10:59:53 PM	Bubbler valve closed
10/21/2011	10:59:53 PM	Helium valve opened
10/21/2011	10:59:53 PM	Main Vac valve opened
10/21/2011	10:59:53 PM	Helium MFC set to  20.000000
10/21/2011	10:59:53 PM	H2 MFC set to  0.000000
10/21/2011	10:59:53 PM	BCl3 MFC set to  0.000000
10/21/2011	10:59:53 PM	PHl3 MFC set to  0.000000
10/21/2011	10:59:53 PM	SiCl4 MFC set to  0.000000
10/21/2011	10:59:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	10:59:53 PM	Tube furnace set to 150
10/21/2011	11:00:23 PM	Helium valve closed
10/21/2011	11:00:23 PM	H2 valve closed
10/21/2011	11:00:23 PM	BCl3 valve closed
10/21/2011	11:00:23 PM	PH3 valve closed
10/21/2011	11:00:23 PM	SiCl4 pre valve closed
10/21/2011	11:00:23 PM	SiCl4 post valve closed
10/21/2011	11:00:23 PM	Bypass valve closed
10/21/2011	11:00:23 PM	Bubbler valve closed
10/21/2011	11:00:23 PM	Main Vac valve opened
10/21/2011	11:00:23 PM	Helium MFC set to  0.000000
10/21/2011	11:00:23 PM	H2 MFC set to  0.000000
10/21/2011	11:00:23 PM	BCl3 MFC set to  0.000000
10/21/2011	11:00:23 PM	PHl3 MFC set to  0.000000
10/21/2011	11:00:23 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:00:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:00:23 PM	Tube furnace set to 150
10/21/2011	11:00:53 PM	H2 valve closed
10/21/2011	11:00:53 PM	BCl3 valve closed
10/21/2011	11:00:53 PM	PH3 valve closed
10/21/2011	11:00:53 PM	SiCl4 pre valve closed
10/21/2011	11:00:53 PM	SiCl4 post valve closed
10/21/2011	11:00:53 PM	Bypass valve closed
10/21/2011	11:00:53 PM	Bubbler valve closed
10/21/2011	11:00:53 PM	Helium valve opened
10/21/2011	11:00:53 PM	Main Vac valve opened
10/21/2011	11:00:53 PM	Helium MFC set to  20.000000
10/21/2011	11:00:53 PM	H2 MFC set to  0.000000
10/21/2011	11:00:53 PM	BCl3 MFC set to  0.000000
10/21/2011	11:00:53 PM	PHl3 MFC set to  0.000000
10/21/2011	11:00:53 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:00:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:00:54 PM	Tube furnace set to 150
10/21/2011	11:01:24 PM	Helium valve closed
10/21/2011	11:01:24 PM	H2 valve closed
10/21/2011	11:01:24 PM	BCl3 valve closed
10/21/2011	11:01:24 PM	PH3 valve closed
10/21/2011	11:01:24 PM	SiCl4 pre valve closed
10/21/2011	11:01:24 PM	SiCl4 post valve closed
10/21/2011	11:01:24 PM	Bypass valve closed
10/21/2011	11:01:24 PM	Bubbler valve closed
10/21/2011	11:01:24 PM	Main Vac valve opened
10/21/2011	11:01:24 PM	Helium MFC set to  0.000000
10/21/2011	11:01:24 PM	H2 MFC set to  0.000000
10/21/2011	11:01:24 PM	BCl3 MFC set to  0.000000
10/21/2011	11:01:24 PM	PHl3 MFC set to  0.000000
10/21/2011	11:01:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:01:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:01:24 PM	Tube furnace set to 150
10/21/2011	11:01:54 PM	H2 valve closed
10/21/2011	11:01:54 PM	BCl3 valve closed
10/21/2011	11:01:54 PM	PH3 valve closed
10/21/2011	11:01:54 PM	SiCl4 pre valve closed
10/21/2011	11:01:54 PM	SiCl4 post valve closed
10/21/2011	11:01:54 PM	Bypass valve closed
10/21/2011	11:01:54 PM	Bubbler valve closed
10/21/2011	11:01:54 PM	Helium valve opened
10/21/2011	11:01:54 PM	Main Vac valve opened
10/21/2011	11:01:54 PM	Helium MFC set to  20.000000
10/21/2011	11:01:54 PM	H2 MFC set to  0.000000
10/21/2011	11:01:54 PM	BCl3 MFC set to  0.000000
10/21/2011	11:01:54 PM	PHl3 MFC set to  0.000000
10/21/2011	11:01:54 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:01:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:01:54 PM	Tube furnace set to 150
10/21/2011	11:02:24 PM	Helium valve closed
10/21/2011	11:02:24 PM	H2 valve closed
10/21/2011	11:02:24 PM	BCl3 valve closed
10/21/2011	11:02:24 PM	PH3 valve closed
10/21/2011	11:02:24 PM	SiCl4 pre valve closed
10/21/2011	11:02:24 PM	SiCl4 post valve closed
10/21/2011	11:02:24 PM	Bypass valve closed
10/21/2011	11:02:24 PM	Bubbler valve closed
10/21/2011	11:02:24 PM	Main Vac valve opened
10/21/2011	11:02:24 PM	Helium MFC set to  0.000000
10/21/2011	11:02:24 PM	H2 MFC set to  0.000000
10/21/2011	11:02:24 PM	BCl3 MFC set to  0.000000
10/21/2011	11:02:24 PM	PHl3 MFC set to  0.000000
10/21/2011	11:02:24 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:02:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:02:24 PM	Tube furnace set to 150
10/21/2011	11:02:25 PM	Run finished at 11:02 PM
10/21/2011	11:04:39 PM	Recipe started at 11:04 PM
10/21/2011	11:04:39 PM	Helium valve closed
10/21/2011	11:04:39 PM	H2 valve closed
10/21/2011	11:04:39 PM	BCl3 valve closed
10/21/2011	11:04:39 PM	PH3 valve closed
10/21/2011	11:04:39 PM	SiCl4 pre valve closed
10/21/2011	11:04:39 PM	SiCl4 post valve closed
10/21/2011	11:04:39 PM	Bypass valve closed
10/21/2011	11:04:39 PM	Bubbler valve closed
10/21/2011	11:04:39 PM	Main Vac valve opened
10/21/2011	11:04:39 PM	Helium MFC set to  0.000000
10/21/2011	11:04:39 PM	H2 MFC set to  0.000000
10/21/2011	11:04:39 PM	BCl3 MFC set to  0.000000
10/21/2011	11:04:39 PM	PHl3 MFC set to  0.000000
10/21/2011	11:04:39 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:04:39 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:04:39 PM	Tube furnace set to 150
10/21/2011	11:05:09 PM	H2 valve closed
10/21/2011	11:05:09 PM	BCl3 valve closed
10/21/2011	11:05:09 PM	PH3 valve closed
10/21/2011	11:05:09 PM	SiCl4 pre valve closed
10/21/2011	11:05:09 PM	SiCl4 post valve closed
10/21/2011	11:05:09 PM	Bypass valve closed
10/21/2011	11:05:09 PM	Bubbler valve closed
10/21/2011	11:05:09 PM	Helium valve opened
10/21/2011	11:05:09 PM	Main Vac valve opened
10/21/2011	11:05:09 PM	Helium MFC set to  20.000000
10/21/2011	11:05:09 PM	H2 MFC set to  0.000000
10/21/2011	11:05:09 PM	BCl3 MFC set to  0.000000
10/21/2011	11:05:09 PM	PHl3 MFC set to  0.000000
10/21/2011	11:05:09 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:05:09 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:05:09 PM	Tube furnace set to 150
10/21/2011	11:05:39 PM	Helium valve closed
10/21/2011	11:05:39 PM	H2 valve closed
10/21/2011	11:05:39 PM	BCl3 valve closed
10/21/2011	11:05:39 PM	PH3 valve closed
10/21/2011	11:05:39 PM	SiCl4 pre valve closed
10/21/2011	11:05:39 PM	SiCl4 post valve closed
10/21/2011	11:05:39 PM	Bypass valve closed
10/21/2011	11:05:39 PM	Bubbler valve closed
10/21/2011	11:05:39 PM	Main Vac valve opened
10/21/2011	11:05:39 PM	Helium MFC set to  0.000000
10/21/2011	11:05:39 PM	H2 MFC set to  0.000000
10/21/2011	11:05:39 PM	BCl3 MFC set to  0.000000
10/21/2011	11:05:39 PM	PHl3 MFC set to  0.000000
10/21/2011	11:05:39 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:05:39 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:05:40 PM	Tube furnace set to 150
10/21/2011	11:06:10 PM	H2 valve closed
10/21/2011	11:06:10 PM	BCl3 valve closed
10/21/2011	11:06:10 PM	PH3 valve closed
10/21/2011	11:06:10 PM	SiCl4 pre valve closed
10/21/2011	11:06:10 PM	SiCl4 post valve closed
10/21/2011	11:06:10 PM	Bypass valve closed
10/21/2011	11:06:10 PM	Bubbler valve closed
10/21/2011	11:06:10 PM	Helium valve opened
10/21/2011	11:06:10 PM	Main Vac valve opened
10/21/2011	11:06:10 PM	Helium MFC set to  20.000000
10/21/2011	11:06:10 PM	H2 MFC set to  0.000000
10/21/2011	11:06:10 PM	BCl3 MFC set to  0.000000
10/21/2011	11:06:10 PM	PHl3 MFC set to  0.000000
10/21/2011	11:06:10 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:06:10 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:06:10 PM	Tube furnace set to 150
10/21/2011	11:06:40 PM	Helium valve closed
10/21/2011	11:06:40 PM	H2 valve closed
10/21/2011	11:06:40 PM	BCl3 valve closed
10/21/2011	11:06:40 PM	PH3 valve closed
10/21/2011	11:06:40 PM	SiCl4 pre valve closed
10/21/2011	11:06:40 PM	SiCl4 post valve closed
10/21/2011	11:06:40 PM	Bypass valve closed
10/21/2011	11:06:40 PM	Bubbler valve closed
10/21/2011	11:06:40 PM	Main Vac valve opened
10/21/2011	11:06:40 PM	Helium MFC set to  0.000000
10/21/2011	11:06:40 PM	H2 MFC set to  0.000000
10/21/2011	11:06:40 PM	BCl3 MFC set to  0.000000
10/21/2011	11:06:40 PM	PHl3 MFC set to  0.000000
10/21/2011	11:06:40 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:06:40 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:06:40 PM	Tube furnace set to 150
10/21/2011	11:07:10 PM	H2 valve closed
10/21/2011	11:07:10 PM	BCl3 valve closed
10/21/2011	11:07:10 PM	PH3 valve closed
10/21/2011	11:07:10 PM	SiCl4 pre valve closed
10/21/2011	11:07:10 PM	SiCl4 post valve closed
10/21/2011	11:07:10 PM	Bypass valve closed
10/21/2011	11:07:10 PM	Bubbler valve closed
10/21/2011	11:07:10 PM	Helium valve opened
10/21/2011	11:07:10 PM	Main Vac valve opened
10/21/2011	11:07:10 PM	Helium MFC set to  20.000000
10/21/2011	11:07:10 PM	H2 MFC set to  0.000000
10/21/2011	11:07:10 PM	BCl3 MFC set to  0.000000
10/21/2011	11:07:10 PM	PHl3 MFC set to  0.000000
10/21/2011	11:07:10 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:07:10 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:07:10 PM	Tube furnace set to 150
10/21/2011	11:07:40 PM	Helium valve closed
10/21/2011	11:07:40 PM	H2 valve closed
10/21/2011	11:07:40 PM	BCl3 valve closed
10/21/2011	11:07:40 PM	PH3 valve closed
10/21/2011	11:07:40 PM	SiCl4 pre valve closed
10/21/2011	11:07:40 PM	SiCl4 post valve closed
10/21/2011	11:07:40 PM	Bypass valve closed
10/21/2011	11:07:40 PM	Bubbler valve closed
10/21/2011	11:07:40 PM	Main Vac valve opened
10/21/2011	11:07:40 PM	Helium MFC set to  0.000000
10/21/2011	11:07:40 PM	H2 MFC set to  0.000000
10/21/2011	11:07:40 PM	BCl3 MFC set to  0.000000
10/21/2011	11:07:40 PM	PHl3 MFC set to  0.000000
10/21/2011	11:07:40 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:07:40 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:07:40 PM	Tube furnace set to 150
10/21/2011	11:08:10 PM	H2 valve closed
10/21/2011	11:08:10 PM	BCl3 valve closed
10/21/2011	11:08:10 PM	PH3 valve closed
10/21/2011	11:08:10 PM	SiCl4 pre valve closed
10/21/2011	11:08:10 PM	SiCl4 post valve closed
10/21/2011	11:08:10 PM	Bypass valve closed
10/21/2011	11:08:10 PM	Bubbler valve closed
10/21/2011	11:08:10 PM	Helium valve opened
10/21/2011	11:08:10 PM	Main Vac valve opened
10/21/2011	11:08:10 PM	Helium MFC set to  20.000000
10/21/2011	11:08:10 PM	H2 MFC set to  0.000000
10/21/2011	11:08:10 PM	BCl3 MFC set to  0.000000
10/21/2011	11:08:10 PM	PHl3 MFC set to  0.000000
10/21/2011	11:08:10 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:08:10 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:08:11 PM	Tube furnace set to 150
10/21/2011	11:08:41 PM	Helium valve closed
10/21/2011	11:08:41 PM	H2 valve closed
10/21/2011	11:08:41 PM	BCl3 valve closed
10/21/2011	11:08:41 PM	PH3 valve closed
10/21/2011	11:08:41 PM	SiCl4 pre valve closed
10/21/2011	11:08:41 PM	SiCl4 post valve closed
10/21/2011	11:08:41 PM	Bypass valve closed
10/21/2011	11:08:41 PM	Bubbler valve closed
10/21/2011	11:08:41 PM	Main Vac valve opened
10/21/2011	11:08:41 PM	Helium MFC set to  0.000000
10/21/2011	11:08:41 PM	H2 MFC set to  0.000000
10/21/2011	11:08:41 PM	BCl3 MFC set to  0.000000
10/21/2011	11:08:41 PM	PHl3 MFC set to  0.000000
10/21/2011	11:08:41 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:08:41 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:08:41 PM	Tube furnace set to 150
10/21/2011	11:09:11 PM	H2 valve closed
10/21/2011	11:09:11 PM	BCl3 valve closed
10/21/2011	11:09:11 PM	PH3 valve closed
10/21/2011	11:09:11 PM	SiCl4 pre valve closed
10/21/2011	11:09:11 PM	SiCl4 post valve closed
10/21/2011	11:09:11 PM	Bypass valve closed
10/21/2011	11:09:11 PM	Bubbler valve closed
10/21/2011	11:09:11 PM	Helium valve opened
10/21/2011	11:09:11 PM	Main Vac valve opened
10/21/2011	11:09:11 PM	Helium MFC set to  20.000000
10/21/2011	11:09:11 PM	H2 MFC set to  0.000000
10/21/2011	11:09:11 PM	BCl3 MFC set to  0.000000
10/21/2011	11:09:11 PM	PHl3 MFC set to  0.000000
10/21/2011	11:09:11 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:09:11 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:09:11 PM	Tube furnace set to 150
10/21/2011	11:09:41 PM	Helium valve closed
10/21/2011	11:09:41 PM	H2 valve closed
10/21/2011	11:09:41 PM	BCl3 valve closed
10/21/2011	11:09:41 PM	PH3 valve closed
10/21/2011	11:09:41 PM	SiCl4 pre valve closed
10/21/2011	11:09:41 PM	SiCl4 post valve closed
10/21/2011	11:09:41 PM	Bypass valve closed
10/21/2011	11:09:41 PM	Bubbler valve closed
10/21/2011	11:09:41 PM	Main Vac valve opened
10/21/2011	11:09:41 PM	Helium MFC set to  0.000000
10/21/2011	11:09:41 PM	H2 MFC set to  0.000000
10/21/2011	11:09:41 PM	BCl3 MFC set to  0.000000
10/21/2011	11:09:41 PM	PHl3 MFC set to  0.000000
10/21/2011	11:09:41 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:09:41 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:09:41 PM	Tube furnace set to 150
10/21/2011	11:10:11 PM	H2 valve closed
10/21/2011	11:10:11 PM	BCl3 valve closed
10/21/2011	11:10:11 PM	PH3 valve closed
10/21/2011	11:10:11 PM	SiCl4 pre valve closed
10/21/2011	11:10:11 PM	SiCl4 post valve closed
10/21/2011	11:10:11 PM	Bypass valve closed
10/21/2011	11:10:11 PM	Bubbler valve closed
10/21/2011	11:10:11 PM	Helium valve opened
10/21/2011	11:10:11 PM	Main Vac valve opened
10/21/2011	11:10:11 PM	Helium MFC set to  20.000000
10/21/2011	11:10:11 PM	H2 MFC set to  0.000000
10/21/2011	11:10:11 PM	BCl3 MFC set to  0.000000
10/21/2011	11:10:11 PM	PHl3 MFC set to  0.000000
10/21/2011	11:10:11 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:10:11 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:10:11 PM	Tube furnace set to 150
10/21/2011	11:10:41 PM	Helium valve closed
10/21/2011	11:10:41 PM	H2 valve closed
10/21/2011	11:10:41 PM	BCl3 valve closed
10/21/2011	11:10:41 PM	PH3 valve closed
10/21/2011	11:10:41 PM	SiCl4 pre valve closed
10/21/2011	11:10:41 PM	SiCl4 post valve closed
10/21/2011	11:10:41 PM	Bypass valve closed
10/21/2011	11:10:41 PM	Bubbler valve closed
10/21/2011	11:10:41 PM	Main Vac valve opened
10/21/2011	11:10:41 PM	Helium MFC set to  0.000000
10/21/2011	11:10:41 PM	H2 MFC set to  0.000000
10/21/2011	11:10:41 PM	BCl3 MFC set to  0.000000
10/21/2011	11:10:41 PM	PHl3 MFC set to  0.000000
10/21/2011	11:10:41 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:10:41 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:10:42 PM	Tube furnace set to 150
10/21/2011	11:11:12 PM	H2 valve closed
10/21/2011	11:11:12 PM	BCl3 valve closed
10/21/2011	11:11:12 PM	PH3 valve closed
10/21/2011	11:11:12 PM	SiCl4 pre valve closed
10/21/2011	11:11:12 PM	SiCl4 post valve closed
10/21/2011	11:11:12 PM	Bypass valve closed
10/21/2011	11:11:12 PM	Bubbler valve closed
10/21/2011	11:11:12 PM	Helium valve opened
10/21/2011	11:11:12 PM	Main Vac valve opened
10/21/2011	11:11:12 PM	Helium MFC set to  20.000000
10/21/2011	11:11:12 PM	H2 MFC set to  0.000000
10/21/2011	11:11:12 PM	BCl3 MFC set to  0.000000
10/21/2011	11:11:12 PM	PHl3 MFC set to  0.000000
10/21/2011	11:11:12 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:11:12 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:11:12 PM	Tube furnace set to 150
10/21/2011	11:11:42 PM	Helium valve closed
10/21/2011	11:11:42 PM	H2 valve closed
10/21/2011	11:11:42 PM	BCl3 valve closed
10/21/2011	11:11:42 PM	PH3 valve closed
10/21/2011	11:11:42 PM	SiCl4 pre valve closed
10/21/2011	11:11:42 PM	SiCl4 post valve closed
10/21/2011	11:11:42 PM	Bypass valve closed
10/21/2011	11:11:42 PM	Bubbler valve closed
10/21/2011	11:11:42 PM	Main Vac valve opened
10/21/2011	11:11:42 PM	Helium MFC set to  0.000000
10/21/2011	11:11:42 PM	H2 MFC set to  0.000000
10/21/2011	11:11:42 PM	BCl3 MFC set to  0.000000
10/21/2011	11:11:42 PM	PHl3 MFC set to  0.000000
10/21/2011	11:11:42 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:11:42 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:11:42 PM	Tube furnace set to 150
10/21/2011	11:12:12 PM	H2 valve closed
10/21/2011	11:12:12 PM	BCl3 valve closed
10/21/2011	11:12:12 PM	PH3 valve closed
10/21/2011	11:12:12 PM	SiCl4 pre valve closed
10/21/2011	11:12:12 PM	SiCl4 post valve closed
10/21/2011	11:12:12 PM	Bypass valve closed
10/21/2011	11:12:12 PM	Bubbler valve closed
10/21/2011	11:12:12 PM	Helium valve opened
10/21/2011	11:12:12 PM	Main Vac valve opened
10/21/2011	11:12:12 PM	Helium MFC set to  20.000000
10/21/2011	11:12:12 PM	H2 MFC set to  0.000000
10/21/2011	11:12:12 PM	BCl3 MFC set to  0.000000
10/21/2011	11:12:12 PM	PHl3 MFC set to  0.000000
10/21/2011	11:12:12 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:12:12 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:12:12 PM	Tube furnace set to 150
10/21/2011	11:12:42 PM	Helium valve closed
10/21/2011	11:12:42 PM	H2 valve closed
10/21/2011	11:12:42 PM	BCl3 valve closed
10/21/2011	11:12:42 PM	PH3 valve closed
10/21/2011	11:12:42 PM	SiCl4 pre valve closed
10/21/2011	11:12:42 PM	SiCl4 post valve closed
10/21/2011	11:12:42 PM	Bypass valve closed
10/21/2011	11:12:42 PM	Bubbler valve closed
10/21/2011	11:12:42 PM	Main Vac valve opened
10/21/2011	11:12:42 PM	Helium MFC set to  0.000000
10/21/2011	11:12:42 PM	H2 MFC set to  0.000000
10/21/2011	11:12:42 PM	BCl3 MFC set to  0.000000
10/21/2011	11:12:42 PM	PHl3 MFC set to  0.000000
10/21/2011	11:12:42 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:12:42 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:12:42 PM	Tube furnace set to 150
10/21/2011	11:13:12 PM	H2 valve closed
10/21/2011	11:13:12 PM	BCl3 valve closed
10/21/2011	11:13:12 PM	PH3 valve closed
10/21/2011	11:13:12 PM	SiCl4 pre valve closed
10/21/2011	11:13:12 PM	SiCl4 post valve closed
10/21/2011	11:13:12 PM	Bypass valve closed
10/21/2011	11:13:12 PM	Bubbler valve closed
10/21/2011	11:13:12 PM	Helium valve opened
10/21/2011	11:13:12 PM	Main Vac valve opened
10/21/2011	11:13:12 PM	Helium MFC set to  20.000000
10/21/2011	11:13:12 PM	H2 MFC set to  0.000000
10/21/2011	11:13:12 PM	BCl3 MFC set to  0.000000
10/21/2011	11:13:12 PM	PHl3 MFC set to  0.000000
10/21/2011	11:13:12 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:13:12 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:13:13 PM	Tube furnace set to 150
10/21/2011	11:13:43 PM	Helium valve closed
10/21/2011	11:13:43 PM	H2 valve closed
10/21/2011	11:13:43 PM	BCl3 valve closed
10/21/2011	11:13:43 PM	PH3 valve closed
10/21/2011	11:13:43 PM	SiCl4 pre valve closed
10/21/2011	11:13:43 PM	SiCl4 post valve closed
10/21/2011	11:13:43 PM	Bypass valve closed
10/21/2011	11:13:43 PM	Bubbler valve closed
10/21/2011	11:13:43 PM	Main Vac valve opened
10/21/2011	11:13:43 PM	Helium MFC set to  0.000000
10/21/2011	11:13:43 PM	H2 MFC set to  0.000000
10/21/2011	11:13:43 PM	BCl3 MFC set to  0.000000
10/21/2011	11:13:43 PM	PHl3 MFC set to  0.000000
10/21/2011	11:13:43 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:13:43 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:13:43 PM	Tube furnace set to 150
10/21/2011	11:14:13 PM	H2 valve closed
10/21/2011	11:14:13 PM	BCl3 valve closed
10/21/2011	11:14:13 PM	PH3 valve closed
10/21/2011	11:14:13 PM	SiCl4 pre valve closed
10/21/2011	11:14:13 PM	SiCl4 post valve closed
10/21/2011	11:14:13 PM	Bypass valve closed
10/21/2011	11:14:13 PM	Bubbler valve closed
10/21/2011	11:14:13 PM	Helium valve opened
10/21/2011	11:14:13 PM	Main Vac valve opened
10/21/2011	11:14:13 PM	Helium MFC set to  20.000000
10/21/2011	11:14:13 PM	H2 MFC set to  0.000000
10/21/2011	11:14:13 PM	BCl3 MFC set to  0.000000
10/21/2011	11:14:13 PM	PHl3 MFC set to  0.000000
10/21/2011	11:14:13 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:14:13 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:14:13 PM	Tube furnace set to 150
10/21/2011	11:14:43 PM	Helium valve closed
10/21/2011	11:14:43 PM	H2 valve closed
10/21/2011	11:14:43 PM	BCl3 valve closed
10/21/2011	11:14:43 PM	PH3 valve closed
10/21/2011	11:14:43 PM	SiCl4 pre valve closed
10/21/2011	11:14:43 PM	SiCl4 post valve closed
10/21/2011	11:14:43 PM	Bypass valve closed
10/21/2011	11:14:43 PM	Bubbler valve closed
10/21/2011	11:14:43 PM	Main Vac valve opened
10/21/2011	11:14:43 PM	Helium MFC set to  0.000000
10/21/2011	11:14:43 PM	H2 MFC set to  0.000000
10/21/2011	11:14:43 PM	BCl3 MFC set to  0.000000
10/21/2011	11:14:43 PM	PHl3 MFC set to  0.000000
10/21/2011	11:14:43 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:14:43 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:14:43 PM	Tube furnace set to 150
10/21/2011	11:14:44 PM	Run finished at 11:14 PM
10/21/2011	11:19:59 PM	Recipe started at 11:19 PM
10/21/2011	11:19:59 PM	Helium valve closed
10/21/2011	11:19:59 PM	H2 valve closed
10/21/2011	11:19:59 PM	BCl3 valve closed
10/21/2011	11:19:59 PM	PH3 valve closed
10/21/2011	11:19:59 PM	SiCl4 pre valve closed
10/21/2011	11:19:59 PM	SiCl4 post valve closed
10/21/2011	11:19:59 PM	Bypass valve closed
10/21/2011	11:19:59 PM	Bubbler valve closed
10/21/2011	11:19:59 PM	Main Vac valve opened
10/21/2011	11:19:59 PM	Helium MFC set to  0.000000
10/21/2011	11:19:59 PM	H2 MFC set to  0.000000
10/21/2011	11:19:59 PM	BCl3 MFC set to  0.000000
10/21/2011	11:19:59 PM	PHl3 MFC set to  0.000000
10/21/2011	11:19:59 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:19:59 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:20:00 PM	Tube furnace set to 150
10/21/2011	11:20:30 PM	H2 valve closed
10/21/2011	11:20:30 PM	BCl3 valve closed
10/21/2011	11:20:30 PM	PH3 valve closed
10/21/2011	11:20:30 PM	SiCl4 pre valve closed
10/21/2011	11:20:30 PM	SiCl4 post valve closed
10/21/2011	11:20:30 PM	Bypass valve closed
10/21/2011	11:20:30 PM	Bubbler valve closed
10/21/2011	11:20:30 PM	Helium valve opened
10/21/2011	11:20:30 PM	Main Vac valve opened
10/21/2011	11:20:30 PM	Helium MFC set to  20.000000
10/21/2011	11:20:30 PM	H2 MFC set to  0.000000
10/21/2011	11:20:30 PM	BCl3 MFC set to  0.000000
10/21/2011	11:20:30 PM	PHl3 MFC set to  0.000000
10/21/2011	11:20:30 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:20:30 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:20:30 PM	Tube furnace set to 150
10/21/2011	11:21:00 PM	Helium valve closed
10/21/2011	11:21:00 PM	H2 valve closed
10/21/2011	11:21:00 PM	BCl3 valve closed
10/21/2011	11:21:00 PM	PH3 valve closed
10/21/2011	11:21:00 PM	SiCl4 pre valve closed
10/21/2011	11:21:00 PM	SiCl4 post valve closed
10/21/2011	11:21:00 PM	Bypass valve closed
10/21/2011	11:21:00 PM	Bubbler valve closed
10/21/2011	11:21:00 PM	Main Vac valve opened
10/21/2011	11:21:00 PM	Helium MFC set to  0.000000
10/21/2011	11:21:00 PM	H2 MFC set to  0.000000
10/21/2011	11:21:00 PM	BCl3 MFC set to  0.000000
10/21/2011	11:21:00 PM	PHl3 MFC set to  0.000000
10/21/2011	11:21:00 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:21:00 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:21:00 PM	Tube furnace set to 150
10/21/2011	11:21:30 PM	H2 valve closed
10/21/2011	11:21:30 PM	BCl3 valve closed
10/21/2011	11:21:30 PM	PH3 valve closed
10/21/2011	11:21:30 PM	SiCl4 pre valve closed
10/21/2011	11:21:30 PM	SiCl4 post valve closed
10/21/2011	11:21:30 PM	Bypass valve closed
10/21/2011	11:21:30 PM	Bubbler valve closed
10/21/2011	11:21:30 PM	Helium valve opened
10/21/2011	11:21:30 PM	Main Vac valve opened
10/21/2011	11:21:30 PM	Helium MFC set to  20.000000
10/21/2011	11:21:30 PM	H2 MFC set to  0.000000
10/21/2011	11:21:30 PM	BCl3 MFC set to  0.000000
10/21/2011	11:21:30 PM	PHl3 MFC set to  0.000000
10/21/2011	11:21:30 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:21:30 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:21:30 PM	Tube furnace set to 150
10/21/2011	11:22:00 PM	Helium valve closed
10/21/2011	11:22:00 PM	H2 valve closed
10/21/2011	11:22:00 PM	BCl3 valve closed
10/21/2011	11:22:00 PM	PH3 valve closed
10/21/2011	11:22:00 PM	SiCl4 pre valve closed
10/21/2011	11:22:00 PM	SiCl4 post valve closed
10/21/2011	11:22:00 PM	Bypass valve closed
10/21/2011	11:22:00 PM	Bubbler valve closed
10/21/2011	11:22:00 PM	Main Vac valve opened
10/21/2011	11:22:00 PM	Helium MFC set to  0.000000
10/21/2011	11:22:00 PM	H2 MFC set to  0.000000
10/21/2011	11:22:00 PM	BCl3 MFC set to  0.000000
10/21/2011	11:22:00 PM	PHl3 MFC set to  0.000000
10/21/2011	11:22:00 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:22:00 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:22:00 PM	Tube furnace set to 150
10/21/2011	11:22:30 PM	H2 valve closed
10/21/2011	11:22:30 PM	BCl3 valve closed
10/21/2011	11:22:30 PM	PH3 valve closed
10/21/2011	11:22:30 PM	SiCl4 pre valve closed
10/21/2011	11:22:30 PM	SiCl4 post valve closed
10/21/2011	11:22:30 PM	Bypass valve closed
10/21/2011	11:22:30 PM	Bubbler valve closed
10/21/2011	11:22:30 PM	Helium valve opened
10/21/2011	11:22:30 PM	Main Vac valve opened
10/21/2011	11:22:30 PM	Helium MFC set to  20.000000
10/21/2011	11:22:30 PM	H2 MFC set to  0.000000
10/21/2011	11:22:30 PM	BCl3 MFC set to  0.000000
10/21/2011	11:22:30 PM	PHl3 MFC set to  0.000000
10/21/2011	11:22:30 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:22:30 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:22:31 PM	Tube furnace set to 150
10/21/2011	11:23:01 PM	Helium valve closed
10/21/2011	11:23:01 PM	H2 valve closed
10/21/2011	11:23:01 PM	BCl3 valve closed
10/21/2011	11:23:01 PM	PH3 valve closed
10/21/2011	11:23:01 PM	SiCl4 pre valve closed
10/21/2011	11:23:01 PM	SiCl4 post valve closed
10/21/2011	11:23:01 PM	Bypass valve closed
10/21/2011	11:23:01 PM	Bubbler valve closed
10/21/2011	11:23:01 PM	Main Vac valve opened
10/21/2011	11:23:01 PM	Helium MFC set to  0.000000
10/21/2011	11:23:01 PM	H2 MFC set to  0.000000
10/21/2011	11:23:01 PM	BCl3 MFC set to  0.000000
10/21/2011	11:23:01 PM	PHl3 MFC set to  0.000000
10/21/2011	11:23:01 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:23:01 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:23:01 PM	Tube furnace set to 150
10/21/2011	11:23:31 PM	H2 valve closed
10/21/2011	11:23:31 PM	BCl3 valve closed
10/21/2011	11:23:31 PM	PH3 valve closed
10/21/2011	11:23:31 PM	SiCl4 pre valve closed
10/21/2011	11:23:31 PM	SiCl4 post valve closed
10/21/2011	11:23:31 PM	Bypass valve closed
10/21/2011	11:23:31 PM	Bubbler valve closed
10/21/2011	11:23:31 PM	Helium valve opened
10/21/2011	11:23:31 PM	Main Vac valve opened
10/21/2011	11:23:31 PM	Helium MFC set to  20.000000
10/21/2011	11:23:31 PM	H2 MFC set to  0.000000
10/21/2011	11:23:31 PM	BCl3 MFC set to  0.000000
10/21/2011	11:23:31 PM	PHl3 MFC set to  0.000000
10/21/2011	11:23:31 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:23:31 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:23:31 PM	Tube furnace set to 150
10/21/2011	11:24:01 PM	Helium valve closed
10/21/2011	11:24:01 PM	H2 valve closed
10/21/2011	11:24:01 PM	BCl3 valve closed
10/21/2011	11:24:01 PM	PH3 valve closed
10/21/2011	11:24:01 PM	SiCl4 pre valve closed
10/21/2011	11:24:01 PM	SiCl4 post valve closed
10/21/2011	11:24:01 PM	Bypass valve closed
10/21/2011	11:24:01 PM	Bubbler valve closed
10/21/2011	11:24:01 PM	Main Vac valve opened
10/21/2011	11:24:01 PM	Helium MFC set to  0.000000
10/21/2011	11:24:01 PM	H2 MFC set to  0.000000
10/21/2011	11:24:01 PM	BCl3 MFC set to  0.000000
10/21/2011	11:24:01 PM	PHl3 MFC set to  0.000000
10/21/2011	11:24:01 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:24:01 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:24:01 PM	Tube furnace set to 150
10/21/2011	11:24:31 PM	H2 valve closed
10/21/2011	11:24:31 PM	BCl3 valve closed
10/21/2011	11:24:31 PM	PH3 valve closed
10/21/2011	11:24:31 PM	SiCl4 pre valve closed
10/21/2011	11:24:31 PM	SiCl4 post valve closed
10/21/2011	11:24:31 PM	Bypass valve closed
10/21/2011	11:24:31 PM	Bubbler valve closed
10/21/2011	11:24:31 PM	Helium valve opened
10/21/2011	11:24:31 PM	Main Vac valve opened
10/21/2011	11:24:31 PM	Helium MFC set to  20.000000
10/21/2011	11:24:31 PM	H2 MFC set to  0.000000
10/21/2011	11:24:31 PM	BCl3 MFC set to  0.000000
10/21/2011	11:24:31 PM	PHl3 MFC set to  0.000000
10/21/2011	11:24:31 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:24:31 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:24:31 PM	Tube furnace set to 150
10/21/2011	11:25:01 PM	Helium valve closed
10/21/2011	11:25:01 PM	H2 valve closed
10/21/2011	11:25:01 PM	BCl3 valve closed
10/21/2011	11:25:01 PM	PH3 valve closed
10/21/2011	11:25:01 PM	SiCl4 pre valve closed
10/21/2011	11:25:01 PM	SiCl4 post valve closed
10/21/2011	11:25:01 PM	Bypass valve closed
10/21/2011	11:25:01 PM	Bubbler valve closed
10/21/2011	11:25:01 PM	Main Vac valve opened
10/21/2011	11:25:01 PM	Helium MFC set to  0.000000
10/21/2011	11:25:01 PM	H2 MFC set to  0.000000
10/21/2011	11:25:01 PM	BCl3 MFC set to  0.000000
10/21/2011	11:25:01 PM	PHl3 MFC set to  0.000000
10/21/2011	11:25:01 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:25:01 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:25:02 PM	Tube furnace set to 150
10/21/2011	11:25:32 PM	H2 valve closed
10/21/2011	11:25:32 PM	BCl3 valve closed
10/21/2011	11:25:32 PM	PH3 valve closed
10/21/2011	11:25:32 PM	SiCl4 pre valve closed
10/21/2011	11:25:32 PM	SiCl4 post valve closed
10/21/2011	11:25:32 PM	Bypass valve closed
10/21/2011	11:25:32 PM	Bubbler valve closed
10/21/2011	11:25:32 PM	Helium valve opened
10/21/2011	11:25:32 PM	Main Vac valve opened
10/21/2011	11:25:32 PM	Helium MFC set to  20.000000
10/21/2011	11:25:32 PM	H2 MFC set to  0.000000
10/21/2011	11:25:32 PM	BCl3 MFC set to  0.000000
10/21/2011	11:25:32 PM	PHl3 MFC set to  0.000000
10/21/2011	11:25:32 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:25:32 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:25:32 PM	Tube furnace set to 150
10/21/2011	11:26:02 PM	Helium valve closed
10/21/2011	11:26:02 PM	H2 valve closed
10/21/2011	11:26:02 PM	BCl3 valve closed
10/21/2011	11:26:02 PM	PH3 valve closed
10/21/2011	11:26:02 PM	SiCl4 pre valve closed
10/21/2011	11:26:02 PM	SiCl4 post valve closed
10/21/2011	11:26:02 PM	Bypass valve closed
10/21/2011	11:26:02 PM	Bubbler valve closed
10/21/2011	11:26:02 PM	Main Vac valve opened
10/21/2011	11:26:02 PM	Helium MFC set to  0.000000
10/21/2011	11:26:02 PM	H2 MFC set to  0.000000
10/21/2011	11:26:02 PM	BCl3 MFC set to  0.000000
10/21/2011	11:26:02 PM	PHl3 MFC set to  0.000000
10/21/2011	11:26:02 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:26:02 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:26:02 PM	Tube furnace set to 150
10/21/2011	11:26:32 PM	H2 valve closed
10/21/2011	11:26:32 PM	BCl3 valve closed
10/21/2011	11:26:32 PM	PH3 valve closed
10/21/2011	11:26:32 PM	SiCl4 pre valve closed
10/21/2011	11:26:32 PM	SiCl4 post valve closed
10/21/2011	11:26:32 PM	Bypass valve closed
10/21/2011	11:26:32 PM	Bubbler valve closed
10/21/2011	11:26:32 PM	Helium valve opened
10/21/2011	11:26:32 PM	Main Vac valve opened
10/21/2011	11:26:32 PM	Helium MFC set to  20.000000
10/21/2011	11:26:32 PM	H2 MFC set to  0.000000
10/21/2011	11:26:32 PM	BCl3 MFC set to  0.000000
10/21/2011	11:26:32 PM	PHl3 MFC set to  0.000000
10/21/2011	11:26:32 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:26:32 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:26:32 PM	Tube furnace set to 150
10/21/2011	11:27:02 PM	Helium valve closed
10/21/2011	11:27:02 PM	H2 valve closed
10/21/2011	11:27:02 PM	BCl3 valve closed
10/21/2011	11:27:02 PM	PH3 valve closed
10/21/2011	11:27:02 PM	SiCl4 pre valve closed
10/21/2011	11:27:02 PM	SiCl4 post valve closed
10/21/2011	11:27:02 PM	Bypass valve closed
10/21/2011	11:27:02 PM	Bubbler valve closed
10/21/2011	11:27:02 PM	Main Vac valve opened
10/21/2011	11:27:02 PM	Helium MFC set to  0.000000
10/21/2011	11:27:02 PM	H2 MFC set to  0.000000
10/21/2011	11:27:02 PM	BCl3 MFC set to  0.000000
10/21/2011	11:27:02 PM	PHl3 MFC set to  0.000000
10/21/2011	11:27:02 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:27:02 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:27:02 PM	Tube furnace set to 150
10/21/2011	11:27:32 PM	H2 valve closed
10/21/2011	11:27:32 PM	BCl3 valve closed
10/21/2011	11:27:32 PM	PH3 valve closed
10/21/2011	11:27:32 PM	SiCl4 pre valve closed
10/21/2011	11:27:32 PM	SiCl4 post valve closed
10/21/2011	11:27:32 PM	Bypass valve closed
10/21/2011	11:27:32 PM	Bubbler valve closed
10/21/2011	11:27:32 PM	Helium valve opened
10/21/2011	11:27:32 PM	Main Vac valve opened
10/21/2011	11:27:32 PM	Helium MFC set to  20.000000
10/21/2011	11:27:32 PM	H2 MFC set to  0.000000
10/21/2011	11:27:32 PM	BCl3 MFC set to  0.000000
10/21/2011	11:27:32 PM	PHl3 MFC set to  0.000000
10/21/2011	11:27:32 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:27:32 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:27:33 PM	Tube furnace set to 150
10/21/2011	11:28:03 PM	Helium valve closed
10/21/2011	11:28:03 PM	H2 valve closed
10/21/2011	11:28:03 PM	BCl3 valve closed
10/21/2011	11:28:03 PM	PH3 valve closed
10/21/2011	11:28:03 PM	SiCl4 pre valve closed
10/21/2011	11:28:03 PM	SiCl4 post valve closed
10/21/2011	11:28:03 PM	Bypass valve closed
10/21/2011	11:28:03 PM	Bubbler valve closed
10/21/2011	11:28:03 PM	Main Vac valve opened
10/21/2011	11:28:03 PM	Helium MFC set to  0.000000
10/21/2011	11:28:03 PM	H2 MFC set to  0.000000
10/21/2011	11:28:03 PM	BCl3 MFC set to  0.000000
10/21/2011	11:28:03 PM	PHl3 MFC set to  0.000000
10/21/2011	11:28:03 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:28:03 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:28:03 PM	Tube furnace set to 150
10/21/2011	11:28:33 PM	H2 valve closed
10/21/2011	11:28:33 PM	BCl3 valve closed
10/21/2011	11:28:33 PM	PH3 valve closed
10/21/2011	11:28:33 PM	SiCl4 pre valve closed
10/21/2011	11:28:33 PM	SiCl4 post valve closed
10/21/2011	11:28:33 PM	Bypass valve closed
10/21/2011	11:28:33 PM	Bubbler valve closed
10/21/2011	11:28:33 PM	Helium valve opened
10/21/2011	11:28:33 PM	Main Vac valve opened
10/21/2011	11:28:33 PM	Helium MFC set to  20.000000
10/21/2011	11:28:33 PM	H2 MFC set to  0.000000
10/21/2011	11:28:33 PM	BCl3 MFC set to  0.000000
10/21/2011	11:28:33 PM	PHl3 MFC set to  0.000000
10/21/2011	11:28:33 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:28:33 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:28:33 PM	Tube furnace set to 150
10/21/2011	11:29:03 PM	Helium valve closed
10/21/2011	11:29:03 PM	H2 valve closed
10/21/2011	11:29:03 PM	BCl3 valve closed
10/21/2011	11:29:03 PM	PH3 valve closed
10/21/2011	11:29:03 PM	SiCl4 pre valve closed
10/21/2011	11:29:03 PM	SiCl4 post valve closed
10/21/2011	11:29:03 PM	Bypass valve closed
10/21/2011	11:29:03 PM	Bubbler valve closed
10/21/2011	11:29:03 PM	Main Vac valve opened
10/21/2011	11:29:03 PM	Helium MFC set to  0.000000
10/21/2011	11:29:03 PM	H2 MFC set to  0.000000
10/21/2011	11:29:03 PM	BCl3 MFC set to  0.000000
10/21/2011	11:29:03 PM	PHl3 MFC set to  0.000000
10/21/2011	11:29:03 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:29:03 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:29:03 PM	Tube furnace set to 150
10/21/2011	11:29:33 PM	H2 valve closed
10/21/2011	11:29:33 PM	BCl3 valve closed
10/21/2011	11:29:33 PM	PH3 valve closed
10/21/2011	11:29:33 PM	SiCl4 pre valve closed
10/21/2011	11:29:33 PM	SiCl4 post valve closed
10/21/2011	11:29:33 PM	Bypass valve closed
10/21/2011	11:29:33 PM	Bubbler valve closed
10/21/2011	11:29:33 PM	Helium valve opened
10/21/2011	11:29:33 PM	Main Vac valve opened
10/21/2011	11:29:33 PM	Helium MFC set to  20.000000
10/21/2011	11:29:33 PM	H2 MFC set to  0.000000
10/21/2011	11:29:33 PM	BCl3 MFC set to  0.000000
10/21/2011	11:29:33 PM	PHl3 MFC set to  0.000000
10/21/2011	11:29:33 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:29:33 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:29:33 PM	Tube furnace set to 150
10/21/2011	11:30:03 PM	Helium valve closed
10/21/2011	11:30:03 PM	H2 valve closed
10/21/2011	11:30:03 PM	BCl3 valve closed
10/21/2011	11:30:03 PM	PH3 valve closed
10/21/2011	11:30:03 PM	SiCl4 pre valve closed
10/21/2011	11:30:03 PM	SiCl4 post valve closed
10/21/2011	11:30:03 PM	Bypass valve closed
10/21/2011	11:30:03 PM	Bubbler valve closed
10/21/2011	11:30:03 PM	Main Vac valve opened
10/21/2011	11:30:03 PM	Helium MFC set to  0.000000
10/21/2011	11:30:03 PM	H2 MFC set to  0.000000
10/21/2011	11:30:03 PM	BCl3 MFC set to  0.000000
10/21/2011	11:30:03 PM	PHl3 MFC set to  0.000000
10/21/2011	11:30:03 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:30:03 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:30:04 PM	Tube furnace set to 150
10/21/2011	11:30:05 PM	Run finished at 11:30 PM
10/21/2011	11:37:53 PM	Main Vac valve closed
10/21/2011	11:38:04 PM	Main Vac valve opened
10/21/2011	11:39:34 PM	Recipe started at 11:39 PM
10/21/2011	11:39:34 PM	Helium valve closed
10/21/2011	11:39:34 PM	H2 valve closed
10/21/2011	11:39:34 PM	BCl3 valve closed
10/21/2011	11:39:34 PM	PH3 valve closed
10/21/2011	11:39:34 PM	SiCl4 pre valve closed
10/21/2011	11:39:34 PM	SiCl4 post valve closed
10/21/2011	11:39:34 PM	Main Vac valve closed
10/21/2011	11:39:34 PM	Bypass valve closed
10/21/2011	11:39:34 PM	Bubbler valve closed
10/21/2011	11:39:34 PM	Helium MFC set to  0.000000
10/21/2011	11:39:34 PM	H2 MFC set to  0.000000
10/21/2011	11:39:34 PM	BCl3 MFC set to  0.000000
10/21/2011	11:39:34 PM	PHl3 MFC set to  0.000000
10/21/2011	11:39:34 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:39:34 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:39:35 PM	Tube furnace set to 0
10/21/2011	11:39:38 PM	Helium valve closed
10/21/2011	11:39:38 PM	BCl3 valve closed
10/21/2011	11:39:38 PM	PH3 valve closed
10/21/2011	11:39:38 PM	SiCl4 pre valve closed
10/21/2011	11:39:38 PM	SiCl4 post valve closed
10/21/2011	11:39:38 PM	Main Vac valve closed
10/21/2011	11:39:38 PM	Bypass valve closed
10/21/2011	11:39:38 PM	Bubbler valve closed
10/21/2011	11:39:38 PM	H2 valve opened
10/21/2011	11:39:38 PM	Helium MFC set to  0.000000
10/21/2011	11:39:38 PM	H2 MFC set to  500.000000
10/21/2011	11:39:38 PM	BCl3 MFC set to  0.000000
10/21/2011	11:39:38 PM	PHl3 MFC set to  0.000000
10/21/2011	11:39:38 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:39:38 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:39:38 PM	Tube furnace set to 0
10/21/2011	11:40:42 PM	Helium valve closed
10/21/2011	11:40:42 PM	BCl3 valve closed
10/21/2011	11:40:42 PM	PH3 valve closed
10/21/2011	11:40:42 PM	SiCl4 pre valve closed
10/21/2011	11:40:42 PM	SiCl4 post valve closed
10/21/2011	11:40:42 PM	Main Vac valve closed
10/21/2011	11:40:42 PM	Bypass valve closed
10/21/2011	11:40:42 PM	H2 valve opened
10/21/2011	11:40:42 PM	Bubbler valve opened
10/21/2011	11:40:42 PM	Helium MFC set to  0.000000
10/21/2011	11:40:42 PM	H2 MFC set to  500.000000
10/21/2011	11:40:42 PM	BCl3 MFC set to  0.000000
10/21/2011	11:40:42 PM	PHl3 MFC set to  0.000000
10/21/2011	11:40:42 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:40:42 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:40:42 PM	Tube furnace set to 0
10/21/2011	11:40:43 PM	Helium valve closed
10/21/2011	11:40:43 PM	BCl3 valve closed
10/21/2011	11:40:43 PM	PH3 valve closed
10/21/2011	11:40:43 PM	SiCl4 pre valve closed
10/21/2011	11:40:43 PM	SiCl4 post valve closed
10/21/2011	11:40:43 PM	Main Vac valve closed
10/21/2011	11:40:43 PM	Bypass valve closed
10/21/2011	11:40:43 PM	H2 valve opened
10/21/2011	11:40:43 PM	Bubbler valve opened
10/21/2011	11:40:43 PM	Helium MFC set to  0.000000
10/21/2011	11:40:43 PM	H2 MFC set to  500.000000
10/21/2011	11:40:43 PM	BCl3 MFC set to  0.000000
10/21/2011	11:40:43 PM	PHl3 MFC set to  0.000000
10/21/2011	11:40:43 PM	SiCl4 MFC set to  0.000000
10/21/2011	11:40:43 PM	Bypass solenoid MFC set to  0.000000
10/21/2011	11:40:43 PM	Tube furnace set to 1060
